KR100692853B1 - Apparatus and method for fabricating flat display divice - Google Patents

Abstract

The present invention relates to a manufacturing apparatus and a manufacturing method of a flat panel display device capable of improving the yield.

According to an aspect of the present invention, there is provided a substrate on which a plurality of display elements are formed, and a scribing table on which the substrate is mounted to perform a separation process of the plurality of display elements, wherein the scribing table is configured to supply heat on the substrate. At least one heater disposed in the form of stripes at equal intervals in the scribing table; And at least one temperature sensor formed at a position adjacent to the heater and sensing a temperature of the scribing table due to heat supplied from the heater.

Description

Manufacturing apparatus and method of manufacturing a flat panel display device {APPARATUS AND METHOD FOR FABRICATING FLAT DISPLAY DIVICE}

1 is a view schematically showing a conventional organic electroluminescent display device.

FIG. 2 is a schematic view illustrating bonding of a cap and a substrate on which a conventional organic electroluminescent array is formed. FIG.

3 is a view schematically showing a scribing table on which a substrate of a conventional curved organic electroluminescent display device is mounted.

4 is a schematic view of an apparatus for manufacturing an organic electroluminescent display device according to an exemplary embodiment of the present invention.

FIG. 5 shows a partial view of the scribing table shown in FIG. 4. FIG.

6 is a view for explaining the principle of spreading the curved substrate seated on the scribing table of the present invention.

7 is a cross-sectional view showing in detail the heater shown in FIG.

<Brief description of symbols for the main parts of the drawings>

1, 51: substrate 2: anode electrode

3: insulating film 4: hole related layer

5: light emitting layer 6: electron related layer

7 cathode electrode 8 getter

9: cap 10: sealant

11: semi-permeable membrane 15: organic EL array

16, 66: organic EL display element 18: cap tray

19: pushing device 20, 70: scribing table

22: Shield 24: Curing Mask

26: mask holder 72: heater

74: temperature sensor 76: electricity supply controller

78: conduction line 80: temperature data transmission line

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display device, and more particularly, to an apparatus and a manufacturing method of a flat panel display device capable of improving yield.

Recently, various flat panel displays have been developed to reduce weight and volume, which are disadvantages of cathode ray tubes. Such flat panel displays include liquid crystal displays (hereinafter referred to as "LCDs"), field emission displays (FEDs), plasma display panels (hereinafter referred to as PDPs), and organic electric fields. Electro-luminescence (hereinafter, referred to as "EL") display element.

Among them, PDP is attracting attention as a display device which is light and small and is most advantageous for large screen because of its simple structure and manufacturing process. However, PDP has low luminous efficiency, low luminance and high power consumption. On the other hand, an active matrix LCD having a thin film transistor (hereinafter referred to as a TFT) as a switching element has a disadvantage in that it is difficult to large screen due to the semiconductor process and consumes a lot of power due to the backlight unit. , Optical prism sheet, diffusion plate, etc. are characterized by high optical loss and narrow viewing angle.

In contrast, the EL display device is classified into an inorganic EL display device and an organic EL display device according to the material of the light emitting layer. The EL display device is a self-luminous device that emits light by itself. In comparison with the organic EL display device, the inorganic EL display device has higher power consumption and cannot obtain high luminance, and cannot emit various colors of R (Red), G (Green), and B (Blue). On the other hand, the organic EL display device is driven at a low DC voltage of several tens of volts, has a fast response speed, obtains high luminance, and emits various colors of R, G, and B, which is suitable for next-generation flat panel display devices. .

1 is a view schematically showing a conventional organic EL display element.

Referring to FIG. 1, a conventional organic EL display device 16 includes an anode electrode 2 formed on a substrate 1, an insulating film 3 formed on a substrate 1 on which an anode electrode 2 is formed, and a hole related layer. (4), an emitting layer (EMI) 5, and an electron related layer 6 are laminated. On the electron-related layer 6, a cathode electrode 7 is formed as a metal electrode.

The anode electrode 2 and the insulating film 3 are sequentially formed by applying a transparent electrode material and an insulating material on the substrate 1 and then by photolithgraphy. In the hole related layer 4, a hole injection layer (HIL) and a hole transport layer (HTL) are sequentially formed on the anode electrode 2.

The light emitting layer 5 mainly functions to emit light, but most of them also carry a function of transporting electrons or holes.

In the electron related layer 6, an electron transport layer (ETL) and an electron injection layer (EIL) are sequentially stacked on the light emitting layer 5. The hole related layer 4, the light emitting layer 5, and the electron related layer 6 are formed by vacuum deposition in the case of a low molecular weight compound, and are formed by spin coating or inkjet printing in the case of a polymer compound. .

The cathode electrode 7 is formed on the electron related layer 6. The cathode 7 may be made of Al, Ag, etc. having high reflectance, but in many cases, a metal such as aluminum (Al) is used.

In the organic EL display device 16, when a driving voltage and a current are applied to the anode electrode 2 and the cathode electrode 7, holes in the hole injection layer and electrons in the electron injection layer proceed toward the light emitting layer 5, respectively. 5) Excite the fluorescent material in. In this way, the visible light generated from the light emitting layer 5 displays an image or an image on the principle that the light exits through the transparent anode electrode 2.

On the other hand, the organic EL array 15 has a property of being easily deteriorated by moisture and oxygen.

In order to solve such a problem, an encapsulation process or an encapsulation process is performed, so that the substrate 1 and the cap 9 on which the organic EL array 15 such as the anode electrode 2 is formed are sealed with an epoxy resin sealant ( 10) is cemented through. The cap 9 is filled with a getter (Getter 8) for absorbing moisture and oxygen in the central portion of the back thereof, and the semipermeable membrane 11 is attached to fix the getter 8 and to enter the moisture and oxygen. do.

Fig. 2 is a view schematically showing the bonding between a cap and a substrate on which a conventional organic EL array is formed.

Referring to FIG. 2, a cap tray 18 on which a cap 9 having a sealant 10 coated thereon is seated under a substrate 1 on which a plurality of organic EL arrays 15 are formed. ) Is positioned, and a pushing device 19 for pushing the cap 9 is positioned below the cap tray 18 so that the cap 9 may be in close contact with the substrate 1.

A curing mask 24 having a shield 22 formed on the substrate 1 to correspond to the organic EL array 15 formed on the substrate 1 is fixed by the mask holder 26. To be located. The shield 22 of the mask 24 prevents the organic EL array 15 from being exposed to ultraviolet rays (UV) irradiated to the substrate 1 when the substrate 1 and the cap 9 are bonded together, thereby preventing the organic EL array 15 from being exposed. ) To prevent damage to organic materials.

After the mask 24 and the cap tray 18 are positioned above and below the substrate 1, the mask 24 and the substrate 1 are aligned and brought into close contact with each other, and the cap 9 is pressed by the pushing device 19. As a result, the cap 9 is bonded to the substrate 1 through the sealant 10. At this time, the sealant 10 is cured by ultraviolet (UV) light transmitted through a predetermined region of the mask 24, so that the cap 9 and the substrate 1 are bonded to each other.

Thereafter, the organic EL display element 16 is completed by scribing a plurality of organic EL arrays 15 formed on the substrate 1 bonded to the cap 9 through a scribing process.

Referring to FIG. 3, in the scribing of the organic EL display device, a substrate 1 on which a plurality of organic EL display devices 16 having an encapsulation process is formed is seated on the scribing table 20 and scribed. An ice wheel (not shown) is performed by scribing a crack having a predetermined depth on the substrate 1 so that the organic EL display element 16 is separated.

However, such a substrate 1 exhibits a phenomenon in which an outer portion of the substrate 1 is bent by heat from ultraviolet rays (UV) irradiated during curing of the sealant 10 in the process. Accordingly, the substrate 1 seated on the scribing table 20 is seated on the sieve scribing table 20 whose outer portion is bent as shown in FIG.

The substrate 1 on which the plurality of organic EL display elements 16 are formed is not properly seated on the scribing table 20 because the substrate 1 is seated on the scribing table 20 with its outer portion bent. The scribing of the display device is performed without the outer portion of the substrate 2 aligned correctly.

If the outer portion is scribed to the substrate 2 which is not aligned correctly, the organic EL display elements 16 formed at the outer portion of the substrate 2 are not scribed correctly. By scribing, the organic EL display element 16 is determined to be defective.

As described above, when the organic EL display element 16 is judged to be defective due to incorrect scribing, the manufacturing of the organic EL display element has a problem that the yield is reduced.

Accordingly, an object of the present invention is to provide an apparatus and method for manufacturing a flat panel display device which can improve yield through accurate scribing.

In order to achieve the above object, an apparatus for manufacturing a flat panel display device according to an embodiment of the present invention is a scribing table in which a plurality of display devices are formed and the substrate is seated to perform a separation process of the plurality of display devices. And a scribing table comprising: at least one heater disposed in an equally spaced stripe form in the scribing table to supply heat to the substrate; And at least one temperature sensor formed at a position adjacent to the heater and sensing a temperature of the scribing table due to heat supplied from the heater.

The apparatus for manufacturing the flat panel display device may further include an electricity supply controller that supplies electricity to the heater and cuts off the outside of the scribing table and is connected to the temperature sensor.
The heater has a conductive line formed of a conductive material including nichrome wire therein, and receives electricity from the electricity supply controller through the conductive line.

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The material of the heater includes stainless steel.

The temperature sensor includes a thermocouple.

A method of manufacturing a flat panel display device according to an embodiment of the present invention includes the steps of mounting a substrate on which a plurality of display devices are formed on a scribing table; Supplying electricity from the outside to at least one heater arranged in the form of equally spaced stripes in the scribing table to supply heat on the substrate; Transferring predetermined heat generated from the heater and supplied to the scribing table to the substrate seated on the scribing table; Sensing a temperature of the scribing table; Blocking heat supplied to the scribing table from the outside when the temperature of the scribing table becomes higher than a predetermined temperature; Separating the plurality of display elements formed on the substrate.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 4 to 7.

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FIG. 4 is a diagram schematically illustrating an apparatus for manufacturing an organic EL display device according to an exemplary embodiment of the present invention, and FIG. 5 is a diagram partially showing a scribing table shown in FIG. 4.

4 and 5, an apparatus for manufacturing an organic EL display device according to an exemplary embodiment of the present invention includes a substrate 51 having a plurality of organic EL display elements 66 bonded to a cap 59, and a substrate ( The scribing table 70 on which the 51 is seated, the heater 72 formed in the scribing table 70 to supply heat to the substrate 51, and the scribing table 70 are formed in the scribing table 70. And a temperature sensor 74 for sensing the temperature of the scribing table 70 and an electricity supply controller 76 for supplying electricity to the heater 72.

In the scribing table 70, a substrate 51 having a plurality of organic EL display elements 66 formed thereon is mounted thereon, and a plurality of heaters 72 and scribes disposed in a stripe shape therein. It is provided with a temperature sensor 74 for sensing the temperature of the ice table 70.

The heater 72 is located inside the scribing table 70 and is connected to the electricity supply controller 76 located outside the scribing table 70 through the conductive line 78. Through the conductive line 78, the heater 72 receives electric heat from the electricity supply controller 76 and converts the electric heat into physical heat to supply the scribing table 70.

The conductive line 78 is formed of a conductive material including nichrome wire to receive electrical heat from the electricity supply controller 76, and the heater 72 scribes electrical heat from the conductive wire 78. It is formed of a metal material including stainless steel to transfer the physical heat to the table 70.

The temperature sensor 74 is located inside the scribing table 70 and senses the temperature of the scribing table 70. At this time, the temperature sensor 74 is electrically connected to the electricity supply controller 76 located outside the scribing table 70 through the temperature data transmission line 80. The temperature sensor 78 transmits the temperature of the scribing table 70 to the electricity supply controller 76 through the temperature data transmission line 80 to increase the temperature of the scribing table 70 by 30 to 40 ° C. To be maintained. The temperature sensor 74 is formed of a thermocouple. As such, the temperature of the scribing table 70 is transferred from the temperature sensor 74 to the electricity supply controller 76, so that the electricity supply controller 76 is heated according to the temperature of the scribing table 70. The temperature of the scribing table 70 is maintained at a predetermined temperature by supplying and cutting off electricity to

Hereinafter, a process of unfolding the curved substrate seated on the scribing table will be described with reference to FIGS. 6 and 7.

6 is a view for explaining the principle of spreading the curved substrate seated on the scribing table of the present invention.

Referring to FIG. 6, on the scribing table 70, a substrate 51 that is bent by ultraviolet (UV) irradiation in an encapsulation process is seated. At this time, the scribing table 70 has a temperature of about 30 to 40 ° C. by the heat supplied from the heater 72, and supplies heat to the seated substrate 51. Accordingly, the curved substrate 51 is unfolded by the heat supplied from the scribing table 70 and correctly seated on the scribing table 70 to enable accurate scribing. At this time, the heater 72 has a conductive line 78 formed as a nichrome wire therein, as shown in Figure 7, the electrical supply controller 76 to the heater 72 through the conductive line 78. Supply electrical heat. In addition, the outside of the heater 72 is formed of stainless steel to convert the electrical heat supplied from the conductive line 78 to the physical heat is supplied to the scribing table 70.

The temperature sensor 74 located inside the scribing table 70 senses the temperature of the scribing table 70 and transmits it to the electricity supply controller 76 to control the electricity supplied to the heater 72. The scribing table 70 is prevented from rising above a predetermined temperature. In addition, the temperature sensor 74 prevents the scribing table 70 from falling below a predetermined temperature in order to maintain the temperature of the scribing table 70 for spreading the curved substrate 51.

Through such a configuration, an apparatus and a manufacturing method of an organic EL display device according to an exemplary embodiment of the present invention include a heater having a heater 72 inside the substrate 51 bent by ultraviolet (UV) in an encapsulation process. By supplying a predetermined heat through the scribing table 70, the curved substrate 51 is unfolded, and as a result of scribing the conventional curved substrate 51 as it is, accurate alignment is not achieved, thereby reducing defects that occur. As a result, the yield of the organic EL display device is improved.

As described above, the manufacturing apparatus and manufacturing method of the organic EL display device according to an embodiment of the present invention is a predetermined heat through a scribing table having a heater therein in a substrate bent by ultraviolet rays in the encapsulation process The curved substrate can be unfolded by supplying Therefore, as a result of scribing a substrate having a curved outer portion as it is, accurate defects are not achieved, thereby reducing defects. Accordingly, the yield of the organic EL display device is improved.

 Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (9)

A substrate having a plurality of display elements formed thereon and a scribing table on which the substrate is mounted so that the plurality of display elements can be separated The scribing table, At least one heater disposed in the form of an equally spaced stripe in the scribing table to supply heat on the substrate; And at least one temperature sensing sensor formed at a position adjacent to the heater and sensing a temperature of the scribing table due to heat supplied from the heater. delete The method of claim 1, And an electricity supply controller connected to the temperature sensing sensor while supplying and cutting off electricity to the heater from the outside of the scribing table. delete The method of claim 1, The heater has a conductive wire formed of a conductive material including nichrome wire therein, Apparatus for manufacturing a flat panel display device characterized in that electricity is supplied from the electricity supply controller through the conductive line. The method of claim 1, The heater is a material of the flat panel display device characterized in that it comprises a stainless steel. The method of claim 1, The temperature sensor includes a thermocouple (Thermal Couple) manufacturing apparatus of the flat panel display element. Mounting a substrate on which a plurality of display elements are formed, on a scribing table; Supplying electricity from the outside to at least one heater arranged in the form of equally spaced stripes in the scribing table to supply heat on the substrate; Transferring predetermined heat generated from the heater and supplied to the scribing table to the substrate seated on the scribing table; Sensing a temperature of the scribing table; Cutting off electricity supplied to the scribing table from the outside when the temperature of the scribing table is higher than a predetermined temperature; And separating the plurality of display elements formed on the substrate. delete

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