KR100603462B1 - Apparatus for fabricating organic electro luminescence display device - Google Patents

Abstract

The present invention relates to an apparatus for manufacturing an organic electroluminescent display device capable of improving the alignment accuracy of the organic electroluminescent display device.

An apparatus for manufacturing an organic electroluminescent display device of the present invention includes a substrate on which an organic electroluminescent array is formed; A cap tray supporting a cap for sealing the organic electroluminescent array; The substrate and the cap tray may be aligned with each other through an alignment unit in which an alignment mark is movable.

The present invention provides an apparatus for manufacturing an organic electroluminescent display device comprising: a substrate on which an organic electroluminescent array is formed; A cap tray supporting a cap for sealing the organic electroluminescent array; The substrate and the cap tray may be aligned with each other through a detachable alignment unit.

Description

Device for manufacturing organic electroluminescent display device {APPARATUS FOR FABRICATING ORGANIC ELECTRO LUMINESCENCE DISPLAY DEVICE}             

1 is a view schematically showing a conventional organic electroluminescent display device.

2 is a view showing the bonding of the cap and the substrate on which a conventional organic electroluminescent array is formed.

FIG. 3 is a perspective view schematically showing the cap tray shown in FIG. 2 and the alignment mark formed on the cap tray.

4 is a view showing the bonding of the cap and the substrate on which the organic electroluminescent array is formed according to an embodiment of the present invention.

FIG. 5 is a perspective view schematically illustrating an alignment unit in which a cap tray and an alignment mark illustrated in FIG. 4 are formed.

6 is a plan view and a cross-sectional view illustrating the alignment unit illustrated in FIG. 5.

<Explanation of symbols for the main parts of the drawings>

1, 101: substrate 9, 109: cap

18, 118: Cap Tray 30, 130: Hall

136: insertion section 140: key

32, 132: alignment mark 34, 134: alignment unit

141: mark member 142: frame

143: elastic member 144: fixing member

The present invention relates to an organic electroluminescent display device, and more particularly, to an apparatus for manufacturing an organic electroluminescent display device capable of improving the alignment accuracy of the organic electroluminescent display device during the encapsulation process.

Recently, various flat panel displays have been developed to reduce weight and volume, which are disadvantages of cathode ray tubes. Such flat panel displays include liquid crystal displays (hereinafter referred to as "LCDs"), field emission displays (FEDs), plasma display panels (hereinafter referred to as PDPs), and organic electric fields. There are light emitting (Electro-luminescence) display elements, etc. Researches are being actively conducted to improve the display quality of such a flat panel display device and to attempt to make a large screen.

Among them, PDP is attracting attention as the most advantageous display device for light and small size and large screen because of its simple structure and manufacturing process, but it has the disadvantages of low luminous efficiency, low luminance and high power consumption. On the other hand, an active matrix LCD having a thin film transistor (TFT) as a switching element has a disadvantage in that it is difficult to make a large screen due to the semiconductor process and consumes a lot of power due to the backlight unit. , Optical prism sheet, diffusion plate, etc. are characterized by high optical loss and narrow viewing angle.

In contrast, the EL display device is classified into an inorganic EL display device and an organic EL display device according to the material of the light emitting layer. The EL display device is a self-luminous device that emits light by itself. In comparison with the organic EL display device, the inorganic EL display device has higher power consumption and cannot obtain high luminance, and cannot emit various colors of R (Red), G (Green), and B (Blue). On the other hand, the organic EL display device is driven at a low DC voltage of several tens of volts, has a fast response speed, obtains high luminance, and emits various colors of R, G, and B, which is suitable for next-generation flat panel display devices. .

1 is a view schematically showing a conventional organic electroluminescent display device.

The organic EL display device shown in FIG. 1 includes an anode electrode 2 formed on the substrate 1, an insulating film 3 formed on the substrate 1 on which the anode electrode 2 is formed, a hole related layer 4, and a light emitting layer. (Emitting Layer: EMI, 5), the electron related layer 6 is laminated. On the electron-related layer 6, a cathode electrode 7 is formed as a metal electrode.

The anode electrode 2 and the insulating film 3 are sequentially formed on the substrate 1 by a material such as ITO, IZO, ITZO, or the like by photolithgraphy. In the hole related layer 4, a hole injection layer (HIL) and a hole transport layer (HTL) are sequentially formed on the anode electrode 2.

The light emitting layer 5 functions to emit light, but mostly also serves to transport electrons or holes.

In the electron related layer 6, an electron transport layer (ETL) and an electron injection layer (EIL) are sequentially stacked on the light emitting layer 5. The hole related layer 4, the light emitting layer 5, and the electron related layer 6 are formed by vacuum deposition in the case of a low molecular weight compound, and are formed by spin coating or inkjet printing in the case of a polymer compound. .

The cathode electrode 7 is formed on the electron related layer 6. The cathode 7 may be made of Al, Ag, etc. having high reflectance, but in many cases, a metal such as aluminum (Al) is used.

In the organic EL display device, when a driving voltage and a current are applied to the anode electrode 2 and the cathode electrode 7, the holes in the hole injection layer and the electrons in the electron injection layer proceed toward the light emitting layer 5, respectively. The fluorescent material is excited. In this way, the visible light generated from the light emitting layer 5 displays an image or an image on the principle that the light exits through the transparent anode electrode 2.

On the other hand, the organic EL array 15 has a property of being easily deteriorated by moisture and oxygen. In order to solve this problem, an encapsulation process is performed to bond the substrate 1 and the cap 9 on which the organic EL array 15, such as the anode electrode 2, is formed, through the sealant 10 such as an epoxy resin. do. The cap 9 is filled with a getter (Getter 8) for absorbing moisture and oxygen in the center of the rear surface thereof, and the semipermeable membrane 11 is attached to fix the getter 8 and to enter the moisture and oxygen. do.

Fig. 2 is a view showing the bonding between a cap and a substrate on which a conventional organic EL array is formed.

Referring to FIG. 2, a cap tray 18 on which a cap 9 having a sealant 10 coated thereon is seated under a substrate 1 on which a plurality of organic EL arrays 15 are formed. ) Is positioned, the pushing device 20 for pushing the cap 9 so that the cap 18 is in close contact with the substrate 1 is located below the cap tray (18).

A curing mask 24 having a shield 22 formed on the substrate 1 to correspond to the organic EL array 15 formed on the substrate 1 is fixed by the mask holder 26. To be located. The shield 22 of the mask 24 prevents the organic EL array 15 from being exposed to ultraviolet rays (UV) irradiated to the substrate 1 when the substrate 1 and the cap 9 are bonded together, thereby preventing the organic EL array 15 from being exposed. ) To prevent damage to organic materials and the like.

After the mask 24 and the cap tray 18 are positioned above and below the substrate 1, the mask 24 and the substrate 1 are aligned and adhered to each other, and the cap 9 is pressed by the pushing device 20. As a result, the cap 9 is bonded to the substrate 1 through the sealant 10. At this time, the sealant 10 is cured by ultraviolet (UV) light transmitted through a predetermined region of the mask 24, so that the cap 9 and the substrate 1 are bonded to each other.

Thereafter, the pushing device 20 and the cap tray 18 are lowered to separate the mask 24 and the substrate 1, thereby forming an organic EL display element in which the cap 9 is bonded.

FIG. 3 is a perspective view schematically showing the cap tray shown in FIG. 2 and the alignment mark formed on the cap tray.

Referring to FIG. 3, the conventional cap tray 18 includes holes 30 through which the cap 9 is inserted, and the organic EL array 15 and the cap 9 on the substrate 1 during the encapsulation process. And an alignment mark 32 for phosphorus.

The alignment mark 32 forms an intaglio pattern on at least two corners of the cap tray 18 and then deposits molybdenum (Mo) on the formed pattern, and an organic EL array using a laser on the deposited molybdenum (Mo). It is formed in the same pattern as the alignment mark of the board | substrate 1 in which 15 was formed.

However, the alignment mark 32 formed by using such a laser may not be accurately formed by the process deviation, for example, the laser error and the deviation.

In this case, the alignment mark 32 formed on the cap tray 18 lowers the exact alignment of the substrate 1 and the cap tray 18. In addition, when the alignment mark 32 formed on the cap tray 18 is out of a range that allows for an error in the process, the cap tray 18 may be discarded, which is one alignment mark 32. Even if the bay is formed incorrectly, there is a disadvantage in that the entire cap tray 18 must be discarded.

Accordingly, it is an object of the present invention to provide an apparatus for manufacturing an organic EL display element which can improve the alignment accuracy of the organic EL display element.                         

Another object of the present invention is to provide an apparatus for manufacturing an organic EL display element which can improve the productivity of the organic EL display element.

An apparatus for manufacturing an organic electroluminescent display device according to an embodiment of the present invention includes a substrate on which an organic electroluminescent array is formed; A cap tray supporting a cap for sealing the organic electroluminescent array; The substrate and the cap tray may be aligned with each other through an alignment unit in which an alignment mark is movable.

The alignment unit includes a mark member having the alignment mark formed thereon; A frame supporting the mark member; An elastic member installed between the mark member and the frame; It is provided with a fixing member for penetrating the frame to move the mark member formed inside the frame and to fix the mark member.

The cap tray may include a first groove into which the frame may be inserted, and the first groove may fix the frame in the vertical direction.

The frame has a key inserted into one side of the protrusion-shaped first groove.

The fixing member may include a first fixing member for moving the alignment mark in a first direction; And a second fixing member for moving the alignment mark in a second direction.

A substrate on which an organic electroluminescent array is formed; A cap tray supporting a cap for sealing the organic electroluminescent array; The substrate and the cap tray may be aligned with each other through a detachable alignment unit.

The cap tray has at least one inserting portion provided on one side thereof, and the alignment unit is inserted into the inserting portion.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 4 to 6.

4 is a view showing the bonding of the cap and the substrate formed with an organic EL array according to an embodiment of the present invention.

Referring to FIG. 4, a cap tray 118 on which a cap 109 on which a sealant 110 is applied is seated on a lower portion of the substrate 101 on which a plurality of organic EL arrays 115 are formed, is bonded to the substrate 101. ) Is located. The pushing device 120 for pushing the cap 109 is positioned under the cap tray 118 so that the cap 109 may be in close contact with the substrate 101.

The curing mask 124 having the shield 122 formed to correspond to the organic EL array 115 formed on the substrate 101 is fixedly positioned by the mask holder 126 on the substrate 101. The shield 126 of the mask 124 prevents the organic EL array 115 from being exposed to ultraviolet rays (UV) irradiated onto the substrate 101 when the substrate 101 and the cap 109 are bonded to each other. ) To prevent damage to organic materials and the like.

After the mask 124 and the cap tray 118 are positioned above and below the substrate 101, the mask 124 and the substrate 101 are aligned and adhered to each other, and the cap 109 is pressed by the pushing device 120. As a result, the cap 109 is bonded to the substrate 101 through the sealant 110. At this time, the sealant 110 is cured by ultraviolet (UV) light transmitted through a predetermined area of the mask 124, so that the cap 109 and the substrate 101 are bonded to each other.

Thereafter, the pushing device 120 and the cap tray 118 are lowered to separate the mask 124 and the substrate 101, thereby forming an organic EL display element in which the cap 109 is bonded.

5 is a perspective view schematically illustrating the cap tray illustrated in FIG. 4 and the alignment unit in which the alignment marks of the cap tray are formed, and FIG. 6 is a plan view and a cross-sectional view illustrating the alignment unit illustrated in FIG. 5.

5 and 6, the cap tray 118 includes a hole 130 into which the cap 109 is inserted, and grooves 138 formed in the inserting portion 136 and the inserting portion 136 at each corner thereof. It is provided.

In addition, an alignment unit including an alignment mark 132 for aligning the organic EL array 115 and the cap 109 on the substrate 101 during the encapsulation process and detachable from the cap tray 118 ( 134).

The alignment unit 134 is provided between the mark member 141 for forming the align mark 132, the frame 142 supporting the mark member 141, and the mark member 141 and the frame 142. First and second fixing members 144a and 144b for fixing the elastic member 143 and the mark member 141 are provided. In addition, the alignment unit 134 includes a key 140 inserted into the groove 138 of the insertion unit 136 of the cap tray 118 on one side.

The key 140 of the alignment unit 134 not only serves to insert the alignment unit 134 into the insertion unit 136 of the cap tray 118, but also moves the alignment unit 134 in the vertical direction. Serves to prevent this from happening. Here, the cap tray 118 may further include a drop preventing member (not shown) for preventing the alignment unit 134 from falling off from the insertion unit 136.

On the mark member 141 of the alignment unit 134, an alignment mark 132 for aligning the organic EL array 115 on the substrate 101 and the cap 109 on the cap tray 118 in a negative pattern is provided. Is formed.

The elastic member 143 is formed of a rubber material having a spring or elastic force.

The first and second fixing members 144a and 144b hold the mark member 141 and adjust the first and second fixing members 144a and 144b to align the marks 132 formed on the mark member 141. Move the position of).

Two first and second fixing members 144a and 144b are respectively formed in directions facing each other. Here, the first or second fixing member 144a or 144b formed on the surface on which the key 140 is formed may be formed to replace the role of the key 140.

The first fixing member 144a moves the mark member 141 in the vertical direction (in the drawing), and the second fixing member 144b moves the mark member 141 in the horizontal direction (in the drawing).

The first and second fixing members 144a and 144b pass through the frame 142 to support the mark member 141. The first and second fixing members 144a and 144b have the adjusting portion 146 in the recess 145 inside the frame 142, and the width A of the recess 145 of the frame 142. It has an adjustment range.

Through this, the alignment mark 132 formed on the alignment unit 134 may improve accurate alignment of the substrate 101 and the cap tray 118. In addition, when the alignment mark 132 is out of the range capable of considering the process error, only the alignment unit 134 having the alignment mark 132 out of the range capable of considering the process error may be discarded. You can save money.

As described above, the manufacturing apparatus of the organic EL display element according to the present invention can improve the accuracy of the alignment by providing the alignment unit that can correct the alignment mark.

In addition, when a specific alignment mark is out of a range in which process errors can be considered, only the alignment unit on which the alignment mark is formed may be discarded, thereby improving productivity of the organic EL display device.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (7)

A substrate on which an organic electroluminescent array is formed; A cap tray supporting a cap for sealing the organic electroluminescent array; And the substrate and the cap tray are aligned with each other through an alignment unit in which an alignment mark is movable. The method of claim 1, The alignment unit, A mark member having the alignment mark formed thereon; A frame supporting the mark member; An elastic member installed between the mark member and the frame; And a fixing member for moving the mark member formed in the frame and fixing the mark member through the frame. The method of claim 2, The cap tray, The frame has a first groove that can be inserted, The first groove is fixed to the frame in the vertical direction, characterized in that the organic electroluminescent display device manufacturing apparatus. The method of claim 3, wherein The frame, An apparatus for manufacturing an organic light emitting display device, characterized in that it comprises a key inserted into the first groove of the projection form on one side. The method of claim 2, The fixing member, A first fixing member for moving the alignment mark in a first direction; And a second fixing member for moving the alignment mark in a second direction. A substrate on which an organic electroluminescent array is formed; A cap tray supporting a cap for sealing the organic electroluminescent array; And the substrate and the cap tray are aligned with each other through a detachable alignment unit. The method of claim 6, The cap tray has at least one insertion portion provided on one side thereof, And the alignment unit is inserted into the insertion unit.

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