KR100705313B1 - Align Apparatus - Google Patents

Abstract

The present invention relates to an alignment device that facilitates alignment of a mask and a substrate.

An alignment apparatus according to the present invention comprises: a mask apparatus for aligning a mask to a mother substrate having an alignment mark, the alignment apparatus comprising: a light source for irradiating alignment light for aligning the mask with the mother substrate; A mask hole having a mask hole corresponding to a pattern to be formed on the mother substrate, and a light hole through which the alignment light passes; A mask frame for supporting the mask; An optical fiber attached to the mask frame and providing an optical path for guiding the align light from the light source to the light hole; A chamber providing a sealed atmosphere to the mother substrate and the mask; One side of the chamber is provided with a camera for taking the alignment marker and the alignment light.

Description

Align Device {Align Apparatus}             

1 shows a conventional EL display device;

2 shows an alignment apparatus of the present invention.

Figure 3 is a view showing in more detail the optical fiber installed in the lower frame.

4 is a simplified diagram illustrating a method of matching alignment by the alignment apparatus of the present invention.

5 is a diagram showing an example in which an alignment mark and a light hole are photographed by the CCD camera 1;

Fig. 6 is a diagram briefly showing an EL display device.

FIG. 7 is a diagram showing a driving device for driving the EL display device of FIG.

<Explanation of symbols for the main parts of the drawings>

1: CCD camera 2: chamber

4: mosquito board 6: mask

8: mask frame 10: optical fiber

12: light source 14: alignment mark

16: light hole 18: alignment hole

20: light inlet 21: light outlet

22 substrate 23 anode electrode

24 cathode electrode 31 hole injection layer

32: hole transport layer 33: light emitting layer

34: electron transport layer 35: electron injection layer

42: data driver 44: scan driver

46: timing control unit 48: DC / DC converter

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing an electroluminescent display device, and more particularly, to an alignment device for easily aligning a mask and a substrate.

Recently, various flat panel displays have been developed to reduce weight and volume, which are disadvantages of cathode ray tubes (CRTs). Such flat panel displays include Liquid Crystal Display (LCd), Field Emission Display (FED), Plasma Display Panel (PDP) and Electro Luminescence (“EL”). And display devices. Such flat panel display devices have been gradually improved in performance through research for improving display quality and enabling large screens.

Among them, PDP is attracting attention as the most advantageous display device for large screen because of its simple structure and simple and light manufacturing process. However, PDP has low luminous efficiency, low luminance and high power consumption and vibration. On the other hand, an active matrix liquid crystal display device in which a thin film transistor (TFT) is applied as a switching element has a large screen, which is difficult to use. However, as the display devices such as notebook computers, various small display products, mobile communication terminals, etc., the demand is increasing greatly. Also, due to the recent development of manufacturing processes, liquid crystal displays having screen sizes of about 40 inches have been generated. However, since the liquid crystal display is manufactured by a semiconductor process as described above, the cost and effort for large screens are enormous, and power consumption is large due to a backlight unit providing background light. In addition, since the efficiency of using the background light is extremely low, a method of improving the light efficiency of the entire liquid crystal display device must be developed. In addition, due to optical elements such as polarizing filters, prism sheets, and diffusion plates, which are currently used to increase light efficiency, there are disadvantages of high light loss and a narrow viewing angle.

On the other hand, the EL display device is a self-luminous device which emits light by itself, and has an advantage of fast response speed, high luminous efficiency, brightness and viewing angle, and is classified into an inorganic EL and an organic EL according to the material of the light emitting layer. The EL display device is attracting attention as a next-generation display element because it can display an image with a high luminance of tens of thousands of candelas (cd / m ² ) with a voltage around 10 [V].

1 is a diagram showing a conventional EL display device.

Referring to Fig. 1, the EL display device includes a substrate 102, a light emitting portion 106 and a packaging plate 108 formed on the back surface of the substrate. In addition, a driving unit 104 for supplying a driving signal to electrodes formed on the light emitting unit 106 is formed outside the packaging plate 108, and is connected between the light emitting unit 106 and the driving unit 104. A plurality of wirings 110 are formed for this purpose.

The substrate 102 serves to protect the light emitting portion 106 therein along with the packaging plate 108, and allows light from the light emitting portion 106 to be emitted through the entire surface of the EL display device.

The light emitting unit 106 includes an anode electrode formed of a transparent electrode, an organic compound layer and a cathode electrode layer in which a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer are sequentially formed. The light emitting unit 106 generates light by driving signals supplied to the anode electrode and the cathode electrode to display an image.

The packaging plate 108 protects the light emitting unit 106 together with the substrate 102. In the light emitting unit 106 of the organic EL display device, the cathode electrode and the organic compound layer are damaged by moisture and oxygen in the air, and the life of the light emitting unit 106 is severely affected. To prevent this, a packaging plate formed of a material such as metal or glass to isolate external moisture and oxygen from the light emitting unit 106 is combined with the substrate 102 by an encapsulation process.

In such an EL display device, a plurality of EL arrays are formed on a mother substrate. To this end, an array of EL display devices is formed on the mother substrate through a mask process in a manufacturing device that provides a closed atmosphere such as a chamber. An array of EL display devices formed by this process includes anode and cathode electrodes and light emitting portions therebetween.

The mask used in the mask process is different depending on the number of mask processes, and the parts to be formed are different for each mask. When the deposition is performed by a mask process, an etching or cleaning process is subsequently performed as necessary.

In the mask process, as described above, the mother substrate on which the EL array is to be formed is transferred into the chamber. In this case, a mask fixed to the mask frame is positioned below the substrate, and when the mother substrate is transferred into the chamber, the mask and the mask frame move toward the mother substrate. When the mask frame and the parent substrate coincide, the deposition gas is filled in the chamber. At this time, a part of the mother substrate is exposed by the pattern formed on the mask. Deposition gas is deposited on this portion to form a desired array.

However, in order to proceed with the mask process, an alignment process is required. This alignment process is a necessary procedure for forming an EL array at a designated position on the parent substrate.

An alignment mark is formed on the mother substrate for alignment, and an alignment identification means corresponding to the alignment mark is provided on the mask. When the mother substrate and the mask are aligned, the alignment mark and alignment of the alignment identification means of the mask may be checked by a CD (Chage Coupled Device) camera located outside the chamber.

In general, as the alignment identifying means formed in the mask, a method of forming a small groove having a predetermined size in the mask, drilling a hole in the mask, and installing a small device having a marker formed under the hole is mainly used. However, when the CCD camera on the outside of the chamber checks the holes formed in the markers or masks, there is a problem that only the black dots are illuminated or not accurately determined. Therefore, the conventional alignment device has a problem that the alignment of the mask and the mother substrate is not easy.

Accordingly, it is an object of the present invention to provide an alignment device that facilitates alignment of a mask and a substrate.

In order to solve the above object, an alignment device according to the present invention includes a mask device for aligning a mask on a mother substrate having an alignment mark, the alignment device comprising: a light source for irradiating alignment light for aligning the mask with the mother substrate; A mask hole having a mask hole corresponding to a pattern to be formed on the mother substrate, and a light hole through which the alignment light passes; A mask frame for supporting the mask; An optical fiber attached to the mask frame and providing an optical path for guiding the align light from the light source to the light hole; A chamber providing a sealed atmosphere to the mother substrate and the mask; One side of the chamber is provided with a camera for taking the alignment marker and the alignment light.

The light source is a light emitting diode.

The light source is a laser.

The light source is installed in the chamber.

delete

The camera is a CCD camera.

Other objects and features of the present invention in addition to the above object will be revealed through the description of the embodiments with reference to the accompanying drawings.

Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS. 2 to 7.

2 is a view showing the alignment device of the present invention.

Referring to FIG. 2, the alignment device of the present invention includes a CCD camera 1, a chamber 2, a mother substrate 4, a mask frame 8, a mask 6, an optical fiber 10, and a light source 12. It is provided.

The CCD camera 1 checks the alignment state of the mother substrate 4 and the mask 6. To this end, the CCD camera 1 is installed in a part of the interior or exterior of the chamber 2, and on the vertical line connecting the alignment mark 4 of the mother substrate 4 and the light emitting opening of the optical fiber 10. Located. The CCD camera 1 determines the point where light from the optical fiber 10 is emitted and the point where the alignment mark 14 of the mother substrate 4 is located to check the alignment state. The alignment of the mask 6 is determined. In addition, the CCD camera 1 may further include a control unit or a calculation unit that determines the alignment state by using the photographed alignment mark and light.

The chamber 2 provides a closed atmosphere to form an array of mother substrates 4. To this end, the chamber 2 is filled with a deposition gas for vacuum or deposition, and has an inlet and an exhaust port for intake and exhaust of the deposition gas. In addition, the CCD camera 1 is located outside or inside a part of the chamber 2.

The mask frame 8 fixes and supports the mask 6, and an optical fiber 10 is installed. This mask frame 8 fixes the edge of the mask 6. The optical fiber 10 which provides an optical path of the light irradiated from the light source 12 is installed in the lower part.

In the mask 6, a plurality of holes 18 are formed in the mother substrate 4 for forming a pattern for manufacturing the EL display device. In addition, a light hole 16 is formed at one side of the mask 6 to allow the CCD camera 1 to capture light emitted from the optical fiber 10.

The optical fiber 10 provides an optical path to light as a light receiving portion for light emitted from the light source 12. For this purpose, the optical fiber 10 is installed along the lower part of the mask frame 8 from a portion directly below the light hole 16 formed in the mask 6. When light is irradiated from the light source 12, it is emitted in the direction of the CCD camera 1 below the light hole 16 through the light path provided by the optical fiber 10. The light emitted from the optical fiber 10 is captured by the CCD camera 1 through the light hole 16.

The light source 12 provides light for allowing the CCD camera 1 to check the alignment of the mother substrate 4 and the mask 6. For this purpose, the light source 12 is preferably a monochromatic light source such as an LED (Light Emitting Diode: "LED"), it is also possible to use a laser (Laser). Here, while LEDs are advantageous for increasing the output of light, it is preferable that light is scattered so that a means for concentrating the light is desired, and lasers have difficulty in increasing light output while having a good concentration of light. Therefore, it is preferable to use a light generating device suitable for the device among LEDs and lasers. It is also possible to use other light sources that emit white light.

3 is a view showing in more detail the optical fiber installed in the lower frame.

As shown in FIG. 3, an optical fiber 10 is installed below the mask frame 8. The optical fiber 10 is a light in which light from the light source 12 enters the optical fiber 10, and light traveled along the optical fiber 10 from the light inlet 20 is irradiated to the light hole 16. It has an outlet 21.

The light outlet 21 is provided directly under the light hole 16, and the light outlet 21 is preferably provided to face the direction in which the CCD camera 1 and the alignment mark 14 are located. In addition, the optical fiber 10 installed below the mask frame 8 may be formed of an optical fiber bundle, and a cover for protecting the optical fiber 10 may be further provided.

4 is a view schematically showing a method of matching alignment by the alignment apparatus of the present invention, and FIG. 5 is a view showing an example of aligning marks and light holes in the CCD camera 1.

When the mother substrate 4 and the mask 6 are aligned as shown in FIG. 4, alignment light for irradiating an alignment state from the light source 12 is irradiated. This align light travels along the optical fiber 10 and is emitted to the light hole 16.

The emitted light passes through the light hole 16 and is irradiated in the mask direction, and the CCD camera 1 photographs and confirms it. In addition, the CCD camera 1 checks the alignment mark 14 formed in the mother substrate 6 so as to correspond to the light hole 16.

As illustrated in FIG. 5, the alignment of the mother substrate 4, the light holes 16, and the alignment light are arranged in concentric circles. This is a view showing an example in which the alignment mark 14 is formed in a circular shape. If the alignment is not performed, the central axis of the concentric circles is shifted so that the CCD camera 1 judges the alignment state by the axes of the concentric circles and the concentric circles.

As such, the present invention installs the light source 12 in the chamber 2 and guides it to the light hole 16 of the mask 6 through the optical fiber 10. This allows the CCD camera to more easily determine the alignment state of the mother substrate 4 and the mask 6 by providing the dimming device on the mask frame 8 that is difficult to install the light source 12. In the related art, an alignment marker having a groove is positioned at a position where the light hole 16 is formed. In order to identify the marker by the CCD camera 1, a separate light source is required, and even when a separate light source is used, it is difficult to distinguish the grooves. However, the present invention does not require a separate light source for identifying the marker of the mask frame by using light to replace this groove, and because the CCD camera recognizes the light from the optical fiber 10 directly, The recognition rate of the CCD camera 1 can be increased.

6 is a diagram briefly showing an EL display device.

Referring to FIG. 6, patterns for manufacturing a plurality of EL display devices are formed on the mother substrate 4 by the mask 6. The anode 22 is formed on the substrate 22 defined by these patterns with a transparent electrode pattern, and the organic compound layers 31 to 35 are formed thereon. The cathode electrode 24 is formed of a metal electrode on the organic compound layers 31 to 35. The anode 23 is etched on the substrate 22 using indium tin oxide (ITO), indium zinc oxide (IZO), indium tin zinc oxide (Indium Tin Zinc Oxide), or the like. It is formed by photolithography. In addition, when the anode electrode 23 is formed of such a transparent electrode, a metal bus electrode is formed on one side of the anode electrode 23 to compensate for the high resistance value of the transparent electrode. This anode electrode 23 is used as a data electrode.

In the organic compound layers 31 to 35, the hole injection layer 31 and the hole transport layer 32 are sequentially formed on the anode electrode 23. On the hole transport layer 32, a light emitting layer 33 that functions to generate light is formed. The electron transport layer 34 and the electron injection layer 35 are sequentially formed on the light emitting layer 33.

On the organic compound layer 18, a cathode electrode 24 such as aluminum having a high reflectance is formed. This cathode electrode 24 is used as a scan electrode.

In the organic EL display device, when a driving voltage and a current are applied to the anode electrode 23 and the cathode electrode 24, holes in the hole injection layer 31 and electrons in the electron injection layer 35 are transferred to the respective transport layers 32 and 34. By advancing toward the light emitting layer 33, the fluorescent material in the light emitting layer 33 is excited. The visible light generated from the light emitting layer 33 displays an image or an image on the principle of being emitted out through the transparent anode electrode 23.

FIG. 7 is a diagram showing a driving device for driving the EL display device of FIG.

7 shows a panel (or display panel) 22 having an EL cell 51, a scan driver 44 for driving a scan line SL of the panel 22, and a display panel 22. A data driver 42 for driving the data line DL and a timing controller 46 for controlling each of the scan driver 44 and the data driver 42 are provided.

The display panel 22 includes EL cells 51 that are arranged at intersections of the scan line SL and the data line DL and are equivalently represented by diodes. Here, the data line DL is connected to the anode electrode 23 of the EL cell 51, and the anode electrode 23 and the data line DL are the same. Each of these EL cells 51 is a pixel signal data, i.e., a current signal having a positive data voltage Vdd which is selected when a scan pulse is supplied to the scan line SL and is supplied to the data line DL, which is an anode. Will generate the corresponding light. That is, each of the EL cells 51 is supplied with a negative scan pulse to the scan line SL and a positive current applied to the data line DL according to the pixel signal Data to apply a forward voltage to the scan line SL. The EL cells 51 of the SL emit light. In this case, the reverse voltage is applied to the EL cells 51 included in the unselected scan lines SL so as not to emit light.

The scan driver 44 sequentially supplies negative scan pulses to each of the EL cell 51 lines to the plurality of scan lines SL, which are cathodes, to select the scan lines SL to display data. Here, the scan line SL and the cathode electrode 24 of the EL cell are the same, and the cathode electrode 24 is limited to a narrower meaning.

The data driver 42 supplies a constant current signal synchronized with the scan pulse to each of the data lines DL using a constant current source (not shown).

The timing controller 46 supplies a scan control signal to the scan driver 44 and a data control signal together with the pixel data R, G, and B to the data driver 42.

The DC-DC converter section 48 receives power from a power supply section (not shown) to generate voltages and currents required for driving the EL display device. For example, the DC-DC converter 48 converts an input voltage Vbat having a relatively low voltage level supplied from the power supply unit into a base voltage Vcc having a relatively high voltage level.

As described above, the alignment device according to the present invention provides a light source installed in a chamber and an optical fiber installed under the mask frame. As a result, the alignment apparatus of the present invention can increase the recognition rate of alignment display of the CCD camera by using light instead of alignment display.

In addition, the alignment apparatus of the present invention enables the alignment marker to be installed at low cost by installing the light source in the chamber and the optical fiber providing the path of the light irradiated from the light source in the mask frame.

Therefore, the alignment device of the present invention has an advantage that the manufacturing process of the EL display device is easier due to the easier sorting of the alignment display, and the manufacturing cost of the EL display device is reduced by configuring the alignment display at a lower cost. have.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (6)

A mask device for aligning a mask with a parent substrate having an alignment mark, A light source for irradiating alignment light for aligning the mother substrate and the mask; A mask hole having a mask hole corresponding to a pattern to be formed on the mother substrate, and a light hole through which the alignment light passes; A mask frame for supporting the mask; An optical fiber attached to the mask frame and providing an optical path for guiding the align light from the light source to the light hole; A chamber providing a sealed atmosphere to the mother substrate and the mask; And a camera for photographing the alignment marker and the alignment light at one side of the chamber. The method of claim 1, The light source is An alignment device, characterized in that the light emitting diode. The method of claim 1, The light source is Alignment apparatus characterized by the laser. delete The method of claim 1, And the light source is installed in the chamber. The method of claim 1, The camera is an alignment device, characterized in that the CD (CCD) camera.

Images