KR100686893B1 - 가열장치 - Google Patents

가열장치 Download PDF

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Publication number
KR100686893B1
KR100686893B1 KR1020030013583A KR20030013583A KR100686893B1 KR 100686893 B1 KR100686893 B1 KR 100686893B1 KR 1020030013583 A KR1020030013583 A KR 1020030013583A KR 20030013583 A KR20030013583 A KR 20030013583A KR 100686893 B1 KR100686893 B1 KR 100686893B1
Authority
KR
South Korea
Prior art keywords
heat
gas
air
heater
substrate
Prior art date
Application number
KR1020030013583A
Other languages
English (en)
Korean (ko)
Other versions
KR20030093090A (ko
Inventor
다나카히데키
Original Assignee
에스펙 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스펙 가부시키가이샤 filed Critical 에스펙 가부시키가이샤
Publication of KR20030093090A publication Critical patent/KR20030093090A/ko
Application granted granted Critical
Publication of KR100686893B1 publication Critical patent/KR100686893B1/ko

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Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08G—TRAFFIC CONTROL SYSTEMS
    • G08G1/00—Traffic control systems for road vehicles
    • G08G1/005—Traffic control systems for road vehicles including pedestrian guidance indicator
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/08—Devices or methods enabling eye-patients to replace direct visual perception by another kind of perception

Landscapes

  • Health & Medical Sciences (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Vascular Medicine (AREA)
  • General Physics & Mathematics (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
KR1020030013583A 2002-05-29 2003-03-05 가열장치 KR100686893B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00155659 2002-05-29
JP2002155659A JP4048242B2 (ja) 2002-05-29 2002-05-29 熱処理装置

Publications (2)

Publication Number Publication Date
KR20030093090A KR20030093090A (ko) 2003-12-06
KR100686893B1 true KR100686893B1 (ko) 2007-02-27

Family

ID=29772133

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020030013583A KR100686893B1 (ko) 2002-05-29 2003-03-05 가열장치

Country Status (3)

Country Link
JP (1) JP4048242B2 (zh)
KR (1) KR100686893B1 (zh)
CN (1) CN1311294C (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100858462B1 (ko) 2007-05-15 2008-09-12 (주) 세라트론 세라믹히터

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4619854B2 (ja) * 2005-04-18 2011-01-26 東京エレクトロン株式会社 ロードロック装置及び処理方法
KR101153631B1 (ko) * 2010-01-14 2012-06-18 삼성전기주식회사 세라믹 제품용 소성로 및 이를 이용한 소성방법
CN104685312B (zh) * 2012-10-03 2016-12-28 夏普株式会社 基板烧成装置
JP5927355B2 (ja) 2014-06-06 2016-06-01 日鉄住金テックスエンジ株式会社 熱間プレス用鋼板の遠赤外線式加熱炉
JP5990338B2 (ja) * 2014-06-06 2016-09-14 日鉄住金テックスエンジ株式会社 熱間プレス用鋼板の遠赤外線式多段型加熱炉
KR102559562B1 (ko) * 2021-03-11 2023-07-27 주식회사 한국제이텍트써모시스템 열처리 오븐의 배기 덕트 일체형 히터 유닛
KR102551053B1 (ko) * 2021-05-12 2023-07-05 주식회사 한국제이텍트써모시스템 열처리 오븐의 히터 유닛

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183794A (ja) * 1989-01-11 1990-07-18 Fujitsu Ltd 多層セラミック基板の焼成方法及びその装置
JPH1032380A (ja) * 1996-07-16 1998-02-03 Hitachi Techno Eng Co Ltd 基板加熱方法及び基板加熱炉
US5884009A (en) 1997-08-07 1999-03-16 Tokyo Electron Limited Substrate treatment system
JP2001133149A (ja) 1999-11-10 2001-05-18 Nippon Telegr & Teleph Corp <Ntt> 乾燥装置
JP2002195755A (ja) 2000-10-16 2002-07-10 Matsushita Electric Ind Co Ltd 熱処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0362489A (ja) * 1989-07-28 1991-03-18 Nippon Pillar Packing Co Ltd 遠赤外線加熱装置
JPH1041360A (ja) * 1996-07-26 1998-02-13 Haibetsuku:Kk 被加熱対象物の選択的脱着方法
JP2974619B2 (ja) * 1996-09-05 1999-11-10 株式会社ノリタケカンパニーリミテド 大型基板の乾燥方法および乾燥装置
JPH11354487A (ja) * 1998-06-03 1999-12-24 Dainippon Screen Mfg Co Ltd 基板乾燥装置および基板乾燥方法
CN2433649Y (zh) * 2000-08-09 2001-06-06 李武明 全自动ps版烘版机
CN1210587C (zh) * 2001-11-11 2005-07-13 华为技术有限公司 制备铌酸锂光波导的钛扩散方法及装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183794A (ja) * 1989-01-11 1990-07-18 Fujitsu Ltd 多層セラミック基板の焼成方法及びその装置
JPH1032380A (ja) * 1996-07-16 1998-02-03 Hitachi Techno Eng Co Ltd 基板加熱方法及び基板加熱炉
US5884009A (en) 1997-08-07 1999-03-16 Tokyo Electron Limited Substrate treatment system
KR19990023451A (ko) * 1997-08-07 1999-03-25 히가시 데쓰로 기판처리장치
JP2001133149A (ja) 1999-11-10 2001-05-18 Nippon Telegr & Teleph Corp <Ntt> 乾燥装置
JP2002195755A (ja) 2000-10-16 2002-07-10 Matsushita Electric Ind Co Ltd 熱処理装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
02183794 *
10032380 *
1019990023451 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100858462B1 (ko) 2007-05-15 2008-09-12 (주) 세라트론 세라믹히터

Also Published As

Publication number Publication date
CN1311294C (zh) 2007-04-18
CN1461970A (zh) 2003-12-17
JP4048242B2 (ja) 2008-02-20
KR20030093090A (ko) 2003-12-06
JP2003343982A (ja) 2003-12-03

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