KR100625762B1 - 플라즈마 처리 장치 및 매칭 박스 - Google Patents

플라즈마 처리 장치 및 매칭 박스 Download PDF

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Publication number
KR100625762B1
KR100625762B1 KR1020047009011A KR20047009011A KR100625762B1 KR 100625762 B1 KR100625762 B1 KR 100625762B1 KR 1020047009011 A KR1020047009011 A KR 1020047009011A KR 20047009011 A KR20047009011 A KR 20047009011A KR 100625762 B1 KR100625762 B1 KR 100625762B1
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KR
South Korea
Prior art keywords
high frequency
frequency power
matching
contactor
feed rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020047009011A
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English (en)
Korean (ko)
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KR20040065248A (ko
Inventor
히가시우라츠토무
Original Assignee
동경 엘렉트론 주식회사
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Application filed by 동경 엘렉트론 주식회사 filed Critical 동경 엘렉트론 주식회사
Publication of KR20040065248A publication Critical patent/KR20040065248A/ko
Application granted granted Critical
Publication of KR100625762B1 publication Critical patent/KR100625762B1/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020047009011A 2001-12-13 2002-12-13 플라즈마 처리 장치 및 매칭 박스 Expired - Fee Related KR100625762B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2001-00380183 2001-12-13
JP2001380183A JP4488662B2 (ja) 2001-12-13 2001-12-13 プラズマ処理装置、マッチングボックス
PCT/JP2002/013094 WO2003054940A1 (fr) 2001-12-13 2002-12-13 Appareil de traitement au plasma, boitier d'adaptation, adaptateur d'impedance et coupleur

Publications (2)

Publication Number Publication Date
KR20040065248A KR20040065248A (ko) 2004-07-21
KR100625762B1 true KR100625762B1 (ko) 2006-09-21

Family

ID=19187109

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047009011A Expired - Fee Related KR100625762B1 (ko) 2001-12-13 2002-12-13 플라즈마 처리 장치 및 매칭 박스

Country Status (6)

Country Link
US (1) US7025857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP4488662B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100625762B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU (1) AU2002354234A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (2) TW200735727A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO2003054940A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101605722B1 (ko) * 2014-08-29 2016-03-23 세메스 주식회사 피더 및 기판 처리 장치

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6939434B2 (en) * 2000-08-11 2005-09-06 Applied Materials, Inc. Externally excited torroidal plasma source with magnetic control of ion distribution
KR100470224B1 (ko) * 2002-02-05 2005-02-05 주성엔지니어링(주) 매칭박스 고정장치를 가지는 척
JP2006339144A (ja) * 2005-05-31 2006-12-14 Ngk Insulators Ltd プラズマ処理装置
JP2007191792A (ja) * 2006-01-19 2007-08-02 Atto Co Ltd ガス分離型シャワーヘッド
US8920597B2 (en) 2010-08-20 2014-12-30 Applied Materials, Inc. Symmetric VHF source for a plasma reactor
US9032012B2 (en) * 2011-06-27 2015-05-12 International Business Machines Corporation Configurable pacing for messaging systems
JP2013098177A (ja) * 2011-10-31 2013-05-20 Semes Co Ltd 基板処理装置及びインピーダンスマッチング方法
US9132436B2 (en) * 2012-09-21 2015-09-15 Applied Materials, Inc. Chemical control features in wafer process equipment
KR101864821B1 (ko) * 2017-11-16 2018-06-05 전북대학교산학협력단 태양전지 보호 기판 코팅용 플라즈마 표면처리 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3122618B2 (ja) * 1996-08-23 2001-01-09 東京エレクトロン株式会社 プラズマ処理装置
JPH11330058A (ja) * 1998-05-19 1999-11-30 Tokyo Electron Ltd プラズマ処理装置
JP2001262355A (ja) * 2000-03-16 2001-09-26 Applied Materials Inc プラズマｃｖｄ装置およびその異常検出方法
TW529085B (en) * 2000-09-22 2003-04-21 Alps Electric Co Ltd Method for evaluating performance of plasma treatment apparatus or performance confirming system of plasma treatment system
JP3559760B2 (ja) * 2000-09-26 2004-09-02 株式会社日立製作所 プラズマ処理装置及びそのメンテナンス方法
JP4798834B2 (ja) * 2000-10-25 2011-10-19 アプライド マテリアルズ インコーポレイテッド ドライエッチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101605722B1 (ko) * 2014-08-29 2016-03-23 세메스 주식회사 피더 및 기판 처리 장치

Also Published As

Publication number Publication date
TWI301039B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2008-09-11
KR20040065248A (ko) 2004-07-21
TW200304764A (en) 2003-10-01
AU2002354234A1 (en) 2003-07-09
TWI290811B (en) 2007-12-01
US20050011450A1 (en) 2005-01-20
US7025857B2 (en) 2006-04-11
JP2003178988A (ja) 2003-06-27
WO2003054940A1 (fr) 2003-07-03
TW200735727A (en) 2007-09-16
JP4488662B2 (ja) 2010-06-23

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