KR100572039B1 - 모델예측제어를 사용하는 반도체 제조에서 개별부품들의 제조를 제어하는 시스템 및 방법 - Google Patents

모델예측제어를 사용하는 반도체 제조에서 개별부품들의 제조를 제어하는 시스템 및 방법 Download PDF

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KR100572039B1
KR100572039B1 KR1020007014811A KR20007014811A KR100572039B1 KR 100572039 B1 KR100572039 B1 KR 100572039B1 KR 1020007014811 A KR1020007014811 A KR 1020007014811A KR 20007014811 A KR20007014811 A KR 20007014811A KR 100572039 B1 KR100572039 B1 KR 100572039B1
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tool
run
polishing
input
output
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KR20010053210A (ko
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캠벨윌리암제이.
물린스제임스에이.
토프락앤소니제이.
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어드밴스드 마이크로 디바이시즈, 인코포레이티드
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • General Factory Administration (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020007014811A 1998-06-26 1998-12-18 모델예측제어를 사용하는 반도체 제조에서 개별부품들의 제조를 제어하는 시스템 및 방법 Expired - Lifetime KR100572039B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/105,979 US6230069B1 (en) 1998-06-26 1998-06-26 System and method for controlling the manufacture of discrete parts in semiconductor fabrication using model predictive control
US09/105,979 1998-06-26

Publications (2)

Publication Number Publication Date
KR20010053210A KR20010053210A (ko) 2001-06-25
KR100572039B1 true KR100572039B1 (ko) 2006-04-18

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KR1020007014811A Expired - Lifetime KR100572039B1 (ko) 1998-06-26 1998-12-18 모델예측제어를 사용하는 반도체 제조에서 개별부품들의 제조를 제어하는 시스템 및 방법

Country Status (6)

Country Link
US (1) US6230069B1 (https=)
EP (1) EP1090335B1 (https=)
JP (2) JP4297614B2 (https=)
KR (1) KR100572039B1 (https=)
DE (1) DE69811742T2 (https=)
WO (1) WO2000000874A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210017431A (ko) * 2019-08-08 2021-02-17 연세대학교 산학협력단 공정 제어정보 생성 장치, 방법 및 이를 포함하는 공정 제어장치

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Also Published As

Publication number Publication date
KR20010053210A (ko) 2001-06-25
DE69811742T2 (de) 2003-12-04
JP2002519779A (ja) 2002-07-02
WO2000000874A1 (en) 2000-01-06
JP4297614B2 (ja) 2009-07-15
DE69811742D1 (de) 2003-04-03
US6230069B1 (en) 2001-05-08
JP2007281460A (ja) 2007-10-25
EP1090335A1 (en) 2001-04-11
JP4880512B2 (ja) 2012-02-22
EP1090335B1 (en) 2003-02-26

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