KR100557514B1 - 플라즈마 처리시스템의 청정방법 - Google Patents
플라즈마 처리시스템의 청정방법 Download PDFInfo
- Publication number
- KR100557514B1 KR100557514B1 KR1020057022084A KR20057022084A KR100557514B1 KR 100557514 B1 KR100557514 B1 KR 100557514B1 KR 1020057022084 A KR1020057022084 A KR 1020057022084A KR 20057022084 A KR20057022084 A KR 20057022084A KR 100557514 B1 KR100557514 B1 KR 100557514B1
- Authority
- KR
- South Korea
- Prior art keywords
- wall
- plasma
- processing chamber
- cleaning
- chamber
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/905—Cleaning of reaction chamber
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optics & Photonics (AREA)
- Epidemiology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Cleaning In General (AREA)
Abstract
Description
Claims (4)
- 처리챔버의 내벽에 결합된 바이어스 쉴드 및 가열기 엘리먼트를 포함하는 처리챔버를 가지는 플라즈마 처리시스템을 청정하는 방법으로서,상기 내벽에 맥동(pulsating) 음 DC 바이어스를 발생하기 위하여 상기 바이어스 쉴드에 대하여 바이어스전압을 인가하는 단계와;상기 가열기 엘리먼트를 사용하여 상기 처리챔버의 내벽을 가열하는 단계와;상기 처리챔버내로 청정가스를 분사하는 단계; 및복수의 내부표면 중 가장 큰 것에서 시작하여, 점차 크기가 작은 표면을 청정하여 상기 복수의 내부표면 중 마지막 표면이 청정될 때까지 상기 복수의 내부표면 각각을 청정하는 단계;를 포함하여 구성되는 것을 특징으로 하는 플라즈마 처리시스템의 청정방법.
- 제 1 항에 있어서, 상기 청정단계 후에 상기 처리챔버의 청정도를 측정하는 단계를 더 포함하는 것을 특징으로 하는 플라즈마 처리시스템의 청정방법.
- 제 2 항에 있어서, 상기 측정단계에서 상기 처리챔버가 충분히 청정되지 않았다고 판단되면, 새로운 기판이 도입되기 전에 상기 처리챔버를 더욱 청정하기 위하여 적어도 하나의 부가적인 시간에 청정 단계를 반복하는 단계를 더 포함하여 구성되는 것을 특징으로 하는 플라즈마 처리시스템의 청정방법.
- 제 1 항에 있어서, 상기 바이어스 전압의 인가 및 내벽을 가열하는 단계가 , 벽의 증착을 제어하는 처리공정 동안 결합하여 실행되는 것을 특징으로 하는 플라즈마 처리시스템의 청정방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US6579497P | 1997-11-14 | 1997-11-14 | |
US60/065,794 | 1997-11-14 | ||
KR1020007005217A KR100557515B1 (ko) | 1997-11-14 | 1998-11-13 | 플라즈마 처리시스템 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020007005217A Division KR100557515B1 (ko) | 1997-11-14 | 1998-11-13 | 플라즈마 처리시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050112136A KR20050112136A (ko) | 2005-11-29 |
KR100557514B1 true KR100557514B1 (ko) | 2006-03-03 |
Family
ID=22065164
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057022084A KR100557514B1 (ko) | 1997-11-14 | 1998-11-13 | 플라즈마 처리시스템의 청정방법 |
KR1020007005217A KR100557515B1 (ko) | 1997-11-14 | 1998-11-13 | 플라즈마 처리시스템 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020007005217A KR100557515B1 (ko) | 1997-11-14 | 1998-11-13 | 플라즈마 처리시스템 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6425953B1 (ko) |
EP (1) | EP1030745A4 (ko) |
JP (1) | JP2001523887A (ko) |
KR (2) | KR100557514B1 (ko) |
CN (1) | CN1097491C (ko) |
WO (1) | WO1999025494A1 (ko) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1097491C (zh) * | 1997-11-14 | 2003-01-01 | 东京电子株式会社 | 一种等离子体处理系统及清洁等离子体处理系统的方法 |
TW518686B (en) * | 1999-12-29 | 2003-01-21 | Tokyo Electron Ltd | System for automatic control of the wall bombardment to control wall deposition |
TW584905B (en) | 2000-02-25 | 2004-04-21 | Tokyo Electron Ltd | Method and apparatus for depositing films |
AU2001241947A1 (en) * | 2000-03-02 | 2001-09-12 | Tokyo Electron Limited | Esrf source for ion plating epitaxial deposition |
US6564810B1 (en) * | 2000-03-28 | 2003-05-20 | Asm America | Cleaning of semiconductor processing chambers |
JP2002280365A (ja) * | 2001-03-19 | 2002-09-27 | Applied Materials Inc | 静電チャックのクリーニング方法 |
JP2002299315A (ja) * | 2001-03-29 | 2002-10-11 | Toshiba Corp | 半導体装置の製造方法 |
US6652711B2 (en) | 2001-06-06 | 2003-11-25 | Tokyo Electron Limited | Inductively-coupled plasma processing system |
WO2003012567A1 (en) * | 2001-07-30 | 2003-02-13 | Tokyo Electron Limited | Plasma chamber wall segment temperature control |
US6946054B2 (en) | 2002-02-22 | 2005-09-20 | Tokyo Electron Limited | Modified transfer function deposition baffles and high density plasma ignition therewith in semiconductor processing |
DE10216786C5 (de) * | 2002-04-15 | 2009-10-15 | Ers Electronic Gmbh | Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden |
US7163603B2 (en) * | 2002-06-24 | 2007-01-16 | Tokyo Electron Limited | Plasma source assembly and method of manufacture |
JP4884180B2 (ja) * | 2006-11-21 | 2012-02-29 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
CN101612622B (zh) * | 2008-06-23 | 2011-07-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 用于减少腔室颗粒沉积的方法、系统及半导体处理设备 |
KR100926778B1 (ko) * | 2008-09-10 | 2009-11-17 | 주명호 | 호제 조성물의 제조방법 |
CN101872733B (zh) * | 2009-04-24 | 2012-06-27 | 中微半导体设备(上海)有限公司 | 感测和移除被加工半导体工艺件的残余电荷的系统和方法 |
JP2011100865A (ja) * | 2009-11-06 | 2011-05-19 | Hitachi High-Technologies Corp | プラズマ処理方法 |
US8642974B2 (en) | 2009-12-30 | 2014-02-04 | Fei Company | Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation |
US8987678B2 (en) | 2009-12-30 | 2015-03-24 | Fei Company | Encapsulation of electrodes in solid media |
EP2341525B1 (en) | 2009-12-30 | 2013-10-23 | FEI Company | Plasma source for charged particle beam system |
US20130098871A1 (en) | 2011-10-19 | 2013-04-25 | Fei Company | Internal Split Faraday Shield for an Inductively Coupled Plasma Source |
US9447205B2 (en) | 2012-11-19 | 2016-09-20 | Ut-Battelle, Llc | Atmospheric pressure plasma processing of polymeric materials utilizing close proximity indirect exposure |
JP6832171B2 (ja) | 2017-01-24 | 2021-02-24 | 東京エレクトロン株式会社 | プラズマ処理装置のチャンバ本体の内部のクリーニングを含むプラズマ処理方法 |
CN113130285B (zh) * | 2019-12-31 | 2022-04-15 | 江苏鲁汶仪器有限公司 | 一种陶瓷进气接射频清洗装置 |
TWI825711B (zh) * | 2021-06-25 | 2023-12-11 | 美商得昇科技股份有限公司 | 電漿處理設備 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US61857A (en) | 1867-02-05 | Improvement in top-drivers or spinners | ||
US61856A (en) | 1867-02-05 | Enos s | ||
JPS5742131A (en) | 1980-08-27 | 1982-03-09 | Mitsubishi Electric Corp | Parallel flat board type dry etching device |
JPS6110239A (ja) | 1984-06-25 | 1986-01-17 | Nec Kansai Ltd | 半導体製造装置 |
US4786352A (en) | 1986-09-12 | 1988-11-22 | Benzing Technologies, Inc. | Apparatus for in-situ chamber cleaning |
US4918031A (en) * | 1988-12-28 | 1990-04-17 | American Telephone And Telegraph Company,At&T Bell Laboratories | Processes depending on plasma generation using a helical resonator |
JPH0562936A (ja) | 1991-09-03 | 1993-03-12 | Mitsubishi Electric Corp | プラズマ処理装置およびプラズマクリーニング方法 |
US5234529A (en) | 1991-10-10 | 1993-08-10 | Johnson Wayne L | Plasma generating apparatus employing capacitive shielding and process for using such apparatus |
EP0849766A3 (en) | 1992-01-24 | 1998-10-14 | Applied Materials, Inc. | Etch process |
US5514246A (en) * | 1994-06-02 | 1996-05-07 | Micron Technology, Inc. | Plasma reactors and method of cleaning a plasma reactor |
US5523261A (en) * | 1995-02-28 | 1996-06-04 | Micron Technology, Inc. | Method of cleaning high density inductively coupled plasma chamber using capacitive coupling |
CN1097491C (zh) * | 1997-11-14 | 2003-01-01 | 东京电子株式会社 | 一种等离子体处理系统及清洁等离子体处理系统的方法 |
-
1998
- 1998-11-13 CN CN98811137A patent/CN1097491C/zh not_active Expired - Fee Related
- 1998-11-13 EP EP98957489A patent/EP1030745A4/en not_active Withdrawn
- 1998-11-13 KR KR1020057022084A patent/KR100557514B1/ko not_active IP Right Cessation
- 1998-11-13 US US09/530,946 patent/US6425953B1/en not_active Expired - Lifetime
- 1998-11-13 KR KR1020007005217A patent/KR100557515B1/ko not_active IP Right Cessation
- 1998-11-13 WO PCT/US1998/023248 patent/WO1999025494A1/en active IP Right Grant
- 1998-11-13 JP JP2000520917A patent/JP2001523887A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2001523887A (ja) | 2001-11-27 |
KR20050112136A (ko) | 2005-11-29 |
KR20010032091A (ko) | 2001-04-16 |
EP1030745A4 (en) | 2006-12-13 |
EP1030745A1 (en) | 2000-08-30 |
KR100557515B1 (ko) | 2006-03-03 |
CN1278750A (zh) | 2001-01-03 |
WO1999025494A1 (en) | 1999-05-27 |
US6425953B1 (en) | 2002-07-30 |
CN1097491C (zh) | 2003-01-01 |
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