KR100518060B1 - 마이크로믹서 - Google Patents
마이크로믹서 Download PDFInfo
- Publication number
- KR100518060B1 KR100518060B1 KR10-2000-7004186A KR20007004186A KR100518060B1 KR 100518060 B1 KR100518060 B1 KR 100518060B1 KR 20007004186 A KR20007004186 A KR 20007004186A KR 100518060 B1 KR100518060 B1 KR 100518060B1
- Authority
- KR
- South Korea
- Prior art keywords
- micromixer
- passage
- grooves
- housing
- mixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/432—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction with means for dividing the material flow into separate sub-flows and for repositioning and recombining these sub-flows; Cross-mixing, e.g. conducting the outer layer of the material nearer to the axis of the tube or vice-versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/47—Mixing liquids with liquids; Emulsifying involving high-viscosity liquids, e.g. asphalt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00824—Ceramic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00831—Glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00833—Plastic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00873—Heat exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00889—Mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00891—Feeding or evacuation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Organic Chemistry (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19746583.8 | 1997-10-22 | ||
| DE19746583A DE19746583A1 (de) | 1997-10-22 | 1997-10-22 | Mikromischer |
| PCT/EP1998/006462 WO1999020379A1 (de) | 1997-10-22 | 1998-10-12 | Mikromischer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20010024538A KR20010024538A (ko) | 2001-03-26 |
| KR100518060B1 true KR100518060B1 (ko) | 2005-09-28 |
Family
ID=7846245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2000-7004186A Expired - Fee Related KR100518060B1 (ko) | 1997-10-22 | 1998-10-12 | 마이크로믹서 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6457854B1 (enExample) |
| EP (1) | EP1047489B1 (enExample) |
| JP (1) | JP2001520112A (enExample) |
| KR (1) | KR100518060B1 (enExample) |
| DE (2) | DE19746583A1 (enExample) |
| WO (1) | WO1999020379A1 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100898065B1 (ko) | 2007-10-19 | 2009-05-15 | 송상섭 | 마이크로 리액터 |
| KR101176175B1 (ko) | 2010-07-30 | 2013-05-09 | 광주과학기술원 | 마이크로 믹서 및 이의 제조 방법 |
| TWI705850B (zh) * | 2018-06-21 | 2020-10-01 | 大陸商中微半導體設備(上海)股份有限公司 | 耐腐蝕的氣體混合裝置及等離子處理設備 |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6105880A (en) * | 1998-01-16 | 2000-08-22 | The Sherwin-Williams Company | Mixing block for mixing multi-component reactive material coating systems and an apparatus using same |
| DE29903296U1 (de) * | 1999-02-24 | 2000-08-03 | CPC Cellular Process Chemistry GmbH, 60386 Frankfurt | Mikroreaktor |
| DE19911776A1 (de) | 1999-03-17 | 2000-09-21 | Merck Patent Gmbh | Verpackungssysteme für kosmetische Formulierungen |
| DE19911777A1 (de) * | 1999-03-17 | 2000-09-21 | Merck Patent Gmbh | Verfahren zur Herstellung von kosmetischen Formulierungen |
| GB2355543A (en) * | 1999-10-20 | 2001-04-25 | Univ Sheffield | Fluidic flow control and fluidic device |
| DE10001317A1 (de) * | 2000-01-14 | 2001-07-19 | Merck Patent Gmbh | Reaktion von Carbonylverbindungen mit metallorganischen Reagenzien |
| US7905653B2 (en) * | 2001-07-31 | 2011-03-15 | Mega Fluid Systems, Inc. | Method and apparatus for blending process materials |
| DE10159985B4 (de) * | 2001-12-06 | 2008-02-28 | Schwesinger, Norbert, Prof.Dr.-Ing. | Mikroemulgator |
| DE10218280C1 (de) * | 2002-04-19 | 2003-11-20 | Fraunhofer Ges Forschung | Integriertes Misch- und Schaltsystem für die Mikroreaktionstechnik |
| AU2003249301A1 (en) * | 2002-07-16 | 2004-02-02 | Mixtek System, Llc | Aerosol mixing system with columns |
| KR100472058B1 (ko) * | 2002-11-02 | 2005-03-11 | 한국전자통신연구원 | 미소유체 혼합을 위한 미소 유체제어 소자 |
| DE10254534A1 (de) * | 2002-11-22 | 2004-06-09 | Henkel Kgaa | Vorrichtung zum Vermischen von wenigstens zwei Flüssigkeiten |
| US7094354B2 (en) | 2002-12-19 | 2006-08-22 | Bayer Healthcare Llc | Method and apparatus for separation of particles in a microfluidic device |
| US7125711B2 (en) | 2002-12-19 | 2006-10-24 | Bayer Healthcare Llc | Method and apparatus for splitting of specimens into multiple channels of a microfluidic device |
| US7485671B2 (en) * | 2003-05-16 | 2009-02-03 | Velocys, Inc. | Process for forming an emulsion using microchannel process technology |
| EP1633463B1 (en) * | 2003-05-16 | 2007-10-24 | Velocys Inc. | Process for forming an emulsion using microchannel process technology |
| US7435381B2 (en) | 2003-05-29 | 2008-10-14 | Siemens Healthcare Diagnostics Inc. | Packaging of microfluidic devices |
| US20040265171A1 (en) * | 2003-06-27 | 2004-12-30 | Pugia Michael J. | Method for uniform application of fluid into a reactive reagent area |
| DE10333924B3 (de) | 2003-07-25 | 2004-10-07 | Wella Ag | Mehrkomponentenverpackung, Mischverfahren und Verwendung von statischen Mikromischern |
| US7347617B2 (en) | 2003-08-19 | 2008-03-25 | Siemens Healthcare Diagnostics Inc. | Mixing in microfluidic devices |
| JP4581380B2 (ja) * | 2003-11-17 | 2010-11-17 | パナソニック株式会社 | 核酸増幅反応容器およびその製造方法 |
| TWI230683B (en) * | 2004-04-19 | 2005-04-11 | Jing-Tang Yang | The micromixer with overlapping-crisscross entrance |
| KR100658361B1 (ko) * | 2005-09-12 | 2006-12-15 | 주식회사 스펙 | 마이크로 채널 리액터 |
| DE102005012415B4 (de) * | 2005-03-17 | 2006-12-28 | Syntics Gmbh | Verfahrenstechnisches Funktionselement aus einem Folienstapel |
| US7314060B2 (en) * | 2005-04-23 | 2008-01-01 | Industrial Technology Research Institute | Fluid flow conducting module |
| US20060280029A1 (en) * | 2005-06-13 | 2006-12-14 | President And Fellows Of Harvard College | Microfluidic mixer |
| US20060285433A1 (en) * | 2005-06-20 | 2006-12-21 | Jing-Tang Yang | Fluidic mixer of serpentine channel incorporated with staggered sudden-expansion and convergent cross sections |
| US20070047388A1 (en) * | 2005-08-25 | 2007-03-01 | Rockwell Scientific Licensing, Llc | Fluidic mixing structure, method for fabricating same, and mixing method |
| DE102005060280B4 (de) * | 2005-12-16 | 2018-12-27 | Ehrfeld Mikrotechnik Bts Gmbh | Integrierbarer Mikromischer sowie dessen Verwendung |
| JP4931065B2 (ja) * | 2007-03-29 | 2012-05-16 | 財団法人 岡山県産業振興財団 | 衝突型マイクロミキサー |
| KR101113727B1 (ko) * | 2008-02-18 | 2012-02-27 | 주식회사 올메디쿠스 | 수직 적층식 마이크로 믹서 및 그 제조방법 |
| JP4683066B2 (ja) * | 2008-04-14 | 2011-05-11 | コニカミノルタホールディングス株式会社 | 液体混合機構 |
| EP2172260A1 (en) * | 2008-09-29 | 2010-04-07 | Corning Incorporated | Multiple flow path microfluidic devices |
| KR101005676B1 (ko) * | 2008-11-27 | 2011-01-05 | 인하대학교 산학협력단 | 수동형 미세혼합기 |
| CN102355942B (zh) | 2009-03-06 | 2014-09-24 | 埃尔费尔德微技术Bts有限责任公司 | 同轴紧凑静态混合器以及它的用途 |
| JP2011050936A (ja) * | 2009-09-04 | 2011-03-17 | Nisso Engineering Co Ltd | 流通式管型反応装置 |
| EP2516059B1 (en) * | 2009-12-23 | 2016-07-27 | Agency For Science, Technology And Research | Microfluidic mixing apparatus and method |
| US9079140B2 (en) * | 2011-04-13 | 2015-07-14 | Microfluidics International Corporation | Compact interaction chamber with multiple cross micro impinging jets |
| JP5963410B2 (ja) * | 2011-08-11 | 2016-08-03 | キヤノン株式会社 | 流路デバイスおよび流体の混合方法 |
| JP5781414B2 (ja) * | 2011-10-11 | 2015-09-24 | 株式会社日立ハイテクノロジーズ | 流体混合器及び流体混合方法 |
| CN102401760B (zh) * | 2011-11-04 | 2014-05-07 | 华中科技大学 | 十字型三维水力聚焦微混合装置 |
| CN102513011B (zh) * | 2011-11-24 | 2013-10-30 | 华中科技大学 | 一种基于三维水力聚焦的微混合装置 |
| KR101666425B1 (ko) | 2013-11-25 | 2016-10-14 | 주식회사 엘지화학 | 미세 유로 반응기 |
| WO2015184302A1 (en) * | 2014-05-30 | 2015-12-03 | Microfluidics Corporation | Interaction chambers with reduced cavitation |
| EP3031518B1 (en) * | 2014-12-08 | 2021-01-20 | Lonza Ltd | Fluid mixing structure, continuous reaction unit, continuous reaction reactor and method of using the same |
| WO2016138175A1 (en) * | 2015-02-24 | 2016-09-01 | The University Of British Columbia | Continuous flow microfluidic system |
| US10035113B2 (en) * | 2015-02-26 | 2018-07-31 | Tokyo Electron Limited | Method and system for a spiral mixer |
| JP2018525209A (ja) * | 2015-04-28 | 2018-09-06 | ザ・ユニバーシティ・オブ・ブリティッシュ・コロンビア | 使い捨てマイクロ流体カートリッジ |
| CN105056821B (zh) * | 2015-08-17 | 2017-05-03 | 江苏大学 | 一种对称椭圆弧挡板的十字微混合器 |
| US10076730B2 (en) | 2016-01-06 | 2018-09-18 | The University Of British Columbia | Bifurcating mixers and methods of their use and manufacture |
| KR101736797B1 (ko) * | 2016-01-29 | 2017-05-17 | 인하대학교 산학협력단 | 미세 유체 혼합기 |
| CN105771765B (zh) * | 2016-03-30 | 2018-02-27 | 江苏大学 | 一种内置周期性阻块和挡板的被动式微混合器 |
| CN106268471B (zh) * | 2016-08-05 | 2019-02-05 | 江苏大学 | 一种渐缩弯管串联式微混合器 |
| US10603647B2 (en) * | 2016-12-01 | 2020-03-31 | Imagine Tf, Llc | Microstructure flow mixing devices |
| KR102371209B1 (ko) * | 2017-03-24 | 2022-03-07 | (주)아모레퍼시픽 | 순간 유화 화장품 제조 장치 및 제조 방법 |
| CN109092225B (zh) * | 2018-11-02 | 2024-06-07 | 南京正源搪瓷设备制造有限公司 | 红心k型微反应器 |
| CN109647307A (zh) * | 2019-01-28 | 2019-04-19 | 北京理工大学 | Y型组合式微通道结构 |
| GB202200902D0 (en) * | 2022-01-25 | 2022-03-09 | Triple Line Tech Limited | Apparatus and method for generating a microfoam |
| GB202303464D0 (en) * | 2023-03-09 | 2023-04-26 | Univ Dublin | A microfluidic chip for synthesis of nanoparticles |
| EP4559568A1 (en) * | 2023-11-24 | 2025-05-28 | Sartorius BIA Separations d.o.o. | Mixing unit, a mixing system comprising two or more mixing units , a method for mixing two or more fluids and a lysis system |
| CN117899778B (zh) * | 2024-03-04 | 2025-06-17 | 广东省科学院新材料研究所 | 一种微通道反应器及其制备方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996003206A1 (en) * | 1994-07-25 | 1996-02-08 | E.I. Du Pont De Nemours And Company | Chemical mixing and reaction apparatus and processes for the preparation thereof |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3159312A (en) * | 1962-09-28 | 1964-12-01 | Budd Co | Dispensing device for mixing two viscous fluids |
| US3394924A (en) * | 1966-07-18 | 1968-07-30 | Dow Chemical Co | Interfacial surface generator |
| US3476521A (en) * | 1967-01-20 | 1969-11-04 | Joseph T Wise | Polymerizing apparatus |
| GB1160401A (en) * | 1967-02-15 | 1969-08-06 | British Motor Corp Ltd | Mixing Liquids. |
| BE783859A (fr) * | 1971-06-18 | 1972-09-18 | Petzholdt J S | Dispositif de melange, d'homogeneisation et d'emulsionnement |
| DE2245820C2 (de) * | 1972-09-19 | 1974-08-22 | Windmoeller & Hoelscher, 4540 Lengerich | Strangpresse zum Verarbeiten plastischer, insbesondere thermoplastischer oder nicht vernetzter elastomerer Massen |
| DE2252201A1 (de) * | 1972-10-25 | 1974-05-22 | 5090 Leverkusen | Vorrichtung zum herstellen von formteilen aus schnell miteinander reagierenden chemischen komponenten |
| US3927868A (en) * | 1974-05-28 | 1975-12-23 | Thomas B Moore | Static-type mixer, and receptacle and method of packaging utilizing same |
| US4087862A (en) * | 1975-12-11 | 1978-05-02 | Exxon Research & Engineering Co. | Bladeless mixer and system |
| US4316673A (en) * | 1978-08-08 | 1982-02-23 | General Dynamics, Pomona Division | Mixing device for simultaneously dispensing two-part liquid compounds from packaging kit |
| US4432651A (en) * | 1982-06-04 | 1984-02-21 | The Dow Chemical Company | Apparatus for mixing vapor and liquid phases of anhydrous ammonia |
| US4534659A (en) * | 1984-01-27 | 1985-08-13 | Millipore Corporation | Passive fluid mixing system |
| US5137369A (en) * | 1991-01-18 | 1992-08-11 | Hodan John A | Static mixing device |
| US5531831A (en) * | 1994-12-12 | 1996-07-02 | Minnesota Mining And Manufacturing Company | Static blending device |
| DE19511603A1 (de) | 1995-03-30 | 1996-10-02 | Norbert Dr Ing Schwesinger | Vorrichtung zum Mischen kleiner Flüssigkeitsmengen |
| DE19536856C2 (de) * | 1995-10-03 | 1997-08-21 | Danfoss As | Mikromischer und Mischverfahren |
| DE19540292C1 (de) * | 1995-10-28 | 1997-01-30 | Karlsruhe Forschzent | Statischer Mikrovermischer |
| DE19541265A1 (de) | 1995-11-06 | 1997-05-07 | Bayer Ag | Verfahren zur Herstellung von Dispersionen und zur Durchführung chemischer Reaktionen mit disperser Phase |
| US5826981A (en) * | 1996-08-26 | 1998-10-27 | Nova Biomedical Corporation | Apparatus for mixing laminar and turbulent flow streams |
| DE19746581A1 (de) * | 1997-10-22 | 1999-04-29 | Merck Patent Gmbh | Mikromischer |
| DE19746584A1 (de) * | 1997-10-22 | 1999-04-29 | Merck Patent Gmbh | Gehäuse für Mikromischer |
-
1997
- 1997-10-22 DE DE19746583A patent/DE19746583A1/de not_active Withdrawn
-
1998
- 1998-10-12 KR KR10-2000-7004186A patent/KR100518060B1/ko not_active Expired - Fee Related
- 1998-10-12 JP JP2000516764A patent/JP2001520112A/ja active Pending
- 1998-10-12 EP EP98951514A patent/EP1047489B1/de not_active Expired - Lifetime
- 1998-10-12 WO PCT/EP1998/006462 patent/WO1999020379A1/de not_active Ceased
- 1998-10-12 US US09/529,970 patent/US6457854B1/en not_active Expired - Fee Related
- 1998-10-12 DE DE59805556T patent/DE59805556D1/de not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996003206A1 (en) * | 1994-07-25 | 1996-02-08 | E.I. Du Pont De Nemours And Company | Chemical mixing and reaction apparatus and processes for the preparation thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100898065B1 (ko) | 2007-10-19 | 2009-05-15 | 송상섭 | 마이크로 리액터 |
| KR101176175B1 (ko) | 2010-07-30 | 2013-05-09 | 광주과학기술원 | 마이크로 믹서 및 이의 제조 방법 |
| TWI705850B (zh) * | 2018-06-21 | 2020-10-01 | 大陸商中微半導體設備(上海)股份有限公司 | 耐腐蝕的氣體混合裝置及等離子處理設備 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001520112A (ja) | 2001-10-30 |
| KR20010024538A (ko) | 2001-03-26 |
| DE19746583A1 (de) | 1999-04-29 |
| DE59805556D1 (de) | 2002-10-17 |
| EP1047489B1 (de) | 2002-09-11 |
| US6457854B1 (en) | 2002-10-01 |
| WO1999020379A1 (de) | 1999-04-29 |
| EP1047489A1 (en) | 2000-11-02 |
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