KR100502794B1 - 액정 표시 장치의 패널 제조 방법 - Google Patents

액정 표시 장치의 패널 제조 방법 Download PDF

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Publication number
KR100502794B1
KR100502794B1 KR1019970066461A KR19970066461A KR100502794B1 KR 100502794 B1 KR100502794 B1 KR 100502794B1 KR 1019970066461 A KR1019970066461 A KR 1019970066461A KR 19970066461 A KR19970066461 A KR 19970066461A KR 100502794 B1 KR100502794 B1 KR 100502794B1
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KR
South Korea
Prior art keywords
shot
area
stitch
shots
liquid crystal
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Expired - Fee Related
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KR1019970066461A
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English (en)
Korean (ko)
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KR19990047901A (ko
Inventor
김동규
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삼성전자주식회사
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Priority to KR1019970066461A priority Critical patent/KR100502794B1/ko
Priority to US09/066,908 priority patent/US5945256A/en
Priority to TW087106712A priority patent/TW439001B/zh
Priority to JP10135481A priority patent/JPH11174402A/ja
Publication of KR19990047901A publication Critical patent/KR19990047901A/ko
Application granted granted Critical
Publication of KR100502794B1 publication Critical patent/KR100502794B1/ko
Assigned to 삼성디스플레이 주식회사 reassignment 삼성디스플레이 주식회사 권리의 전부이전등록 Assignors: 삼성전자주식회사
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/13625—Patterning using multi-mask exposure

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1019970066461A 1997-12-06 1997-12-06 액정 표시 장치의 패널 제조 방법 Expired - Fee Related KR100502794B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019970066461A KR100502794B1 (ko) 1997-12-06 1997-12-06 액정 표시 장치의 패널 제조 방법
US09/066,908 US5945256A (en) 1997-12-06 1998-04-28 Exposing methods in photolithography used for manufacturing a liquid crystal display
TW087106712A TW439001B (en) 1997-12-06 1998-04-30 Exposing methods in photolithography used for manufacturing microlectronic devices and a manufacturing method a liquid crystal display using the same
JP10135481A JPH11174402A (ja) 1997-12-06 1998-05-18 微細電子装置の製造時に用いる写真工程における露光方法およびこれを用いた液晶表示装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970066461A KR100502794B1 (ko) 1997-12-06 1997-12-06 액정 표시 장치의 패널 제조 방법

Publications (2)

Publication Number Publication Date
KR19990047901A KR19990047901A (ko) 1999-07-05
KR100502794B1 true KR100502794B1 (ko) 2005-10-14

Family

ID=19526616

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970066461A Expired - Fee Related KR100502794B1 (ko) 1997-12-06 1997-12-06 액정 표시 장치의 패널 제조 방법

Country Status (4)

Country Link
US (1) US5945256A (https=)
JP (1) JPH11174402A (https=)
KR (1) KR100502794B1 (https=)
TW (1) TW439001B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210147640A (ko) 2020-05-29 2021-12-07 동우 화인켐 주식회사 노광 패턴, 이의 형성에 사용되는 노광 마스크, 및 이를 이용한 노광 패턴 형성 방법

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100502797B1 (ko) * 1997-12-01 2005-10-19 삼성전자주식회사 액정 표시 장치 및 그의 제조 방법
KR100282695B1 (ko) * 1998-04-28 2001-03-02 윤종용 반도체 장치의 제조 방법
TW491959B (en) * 1998-05-07 2002-06-21 Fron Tec Kk Active matrix type liquid crystal display devices, and substrate for the same
US6306561B1 (en) * 1999-03-04 2001-10-23 National Semiconductor Corporation Double metal pixel array for light valve utilizing lateral sublithographic spacer isolation
KR100686228B1 (ko) 2000-03-13 2007-02-22 삼성전자주식회사 사진 식각용 장치 및 방법, 그리고 이를 이용한 액정 표시장치용 박막 트랜지스터 기판의 제조 방법
JP4401551B2 (ja) * 2000-09-21 2010-01-20 エーユー オプトロニクス コーポレイション 液晶表示装置の製造方法、表示装置の製造方法、及び液晶表示装置
KR100848087B1 (ko) * 2001-12-11 2008-07-24 삼성전자주식회사 기판 위에 패턴을 형성하는 방법 및 이를 이용한 액정표시 장치용 기판의 제조 방법
WO2003052502A1 (en) * 2001-12-14 2003-06-26 Samsung Electronics Co., Ltd. A manufacturing method of liquid crystal display
US7142279B2 (en) * 2001-12-14 2006-11-28 Samsung Electronics Co., Ltd. Divisionally exposing an active area in LCD with a plurality of shots
KR100840322B1 (ko) * 2002-02-19 2008-06-20 삼성전자주식회사 액정 표시 장치의 패널 제조 방법
KR100491821B1 (ko) * 2002-05-23 2005-05-27 엘지.필립스 엘시디 주식회사 액정표시장치용 어레이기판과 그 제조방법
JP4328515B2 (ja) * 2002-11-19 2009-09-09 Ｎｅｃ液晶テクノロジー株式会社 液晶表示装置及びその製造方法
JP4365594B2 (ja) 2003-01-27 2009-11-18 シャープ株式会社 パターン形成方法、薄膜トランジスタ基板の製造方法、液晶表示装置の製造方法、及び露光マスク
KR100929672B1 (ko) * 2003-03-13 2009-12-03 삼성전자주식회사 액정 표시 장치용 표시판의 제조 방법
JP4372576B2 (ja) * 2003-03-19 2009-11-25 シャープ株式会社 露光マスクおよびパターン露光方法
KR100968566B1 (ko) * 2003-07-24 2010-07-08 삼성전자주식회사 액정 표시 장치 및 이에 포함된 표시판의 제조 방법
KR100692683B1 (ko) * 2003-08-25 2007-03-14 비오이 하이디스 테크놀로지 주식회사 액정표시장치의 화소전극 형성방법
TWI225961B (en) * 2003-11-17 2005-01-01 Au Optronics Corp Method of fabricating a liquid crystal display
KR100925984B1 (ko) * 2004-10-26 2009-11-10 엘지디스플레이 주식회사 액정표시장치 제조방법
US7061581B1 (en) * 2004-11-22 2006-06-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7898641B2 (en) * 2004-12-02 2011-03-01 Sharp Kabushiki Kaisha Production process of a display device, and a display device
CN104503128B (zh) * 2014-12-19 2018-01-09 深圳市华星光电技术有限公司 用于显示器的彩膜基板的制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06324473A (ja) * 1993-05-10 1994-11-25 Nikon Corp フオトマスク及び露光方法
US5486896A (en) * 1993-02-19 1996-01-23 Nikon Corporation Exposure apparatus
JPH09236930A (ja) * 1995-12-26 1997-09-09 Fujitsu Ltd パターン形成方法、一組の露光マスク、薄膜トランジスタマトリクス装置及びその製造方法、液晶表示装置及びその製造方法
JPH09260684A (ja) * 1996-01-17 1997-10-03 Toshiba Corp 液晶表示装置の製造方法
JPH11119410A (ja) * 1997-10-14 1999-04-30 Fujitsu Ltd パターン設計方法及びパターン設計装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061313B2 (ja) * 1985-02-06 1994-01-05 シャープ株式会社 液晶表示装置
EP0940710A3 (en) * 1993-12-07 1999-12-22 Kabushiki Kaisha Toshiba Display device and fabrication method thereof
US5795686A (en) * 1995-12-26 1998-08-18 Fujitsu Limited Pattern forming method and method of manufacturing liquid crystal display device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486896A (en) * 1993-02-19 1996-01-23 Nikon Corporation Exposure apparatus
JPH06324473A (ja) * 1993-05-10 1994-11-25 Nikon Corp フオトマスク及び露光方法
JPH09236930A (ja) * 1995-12-26 1997-09-09 Fujitsu Ltd パターン形成方法、一組の露光マスク、薄膜トランジスタマトリクス装置及びその製造方法、液晶表示装置及びその製造方法
JPH09260684A (ja) * 1996-01-17 1997-10-03 Toshiba Corp 液晶表示装置の製造方法
JPH11119410A (ja) * 1997-10-14 1999-04-30 Fujitsu Ltd パターン設計方法及びパターン設計装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210147640A (ko) 2020-05-29 2021-12-07 동우 화인켐 주식회사 노광 패턴, 이의 형성에 사용되는 노광 마스크, 및 이를 이용한 노광 패턴 형성 방법

Also Published As

Publication number Publication date
JPH11174402A (ja) 1999-07-02
TW439001B (en) 2001-06-07
US5945256A (en) 1999-08-31
KR19990047901A (ko) 1999-07-05

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