KR100491371B1 - 본딩 장치 - Google Patents

본딩 장치 Download PDF

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Publication number
KR100491371B1
KR100491371B1 KR10-2002-0081622A KR20020081622A KR100491371B1 KR 100491371 B1 KR100491371 B1 KR 100491371B1 KR 20020081622 A KR20020081622 A KR 20020081622A KR 100491371 B1 KR100491371 B1 KR 100491371B1
Authority
KR
South Korea
Prior art keywords
lens
tool
reference member
bonding
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2002-0081622A
Other languages
English (en)
Korean (ko)
Other versions
KR20030057322A (ko
Inventor
하야타시게루
Original Assignee
가부시키가이샤 신가와
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 신가와 filed Critical 가부시키가이샤 신가와
Publication of KR20030057322A publication Critical patent/KR20030057322A/ko
Application granted granted Critical
Publication of KR100491371B1 publication Critical patent/KR100491371B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07141—Means for applying energy, e.g. ovens or lasers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07531—Techniques
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/931—Shapes of bond pads
    • H10W72/932—Plan-view shape, i.e. in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
KR10-2002-0081622A 2001-12-28 2002-12-20 본딩 장치 Expired - Fee Related KR100491371B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2001-00400285 2001-12-28
JP2001400285A JP3813088B2 (ja) 2001-12-28 2001-12-28 ボンディング装置

Publications (2)

Publication Number Publication Date
KR20030057322A KR20030057322A (ko) 2003-07-04
KR100491371B1 true KR100491371B1 (ko) 2005-05-25

Family

ID=19189596

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2002-0081622A Expired - Fee Related KR100491371B1 (ko) 2001-12-28 2002-12-20 본딩 장치

Country Status (4)

Country Link
US (1) US6683731B2 (enExample)
JP (1) JP3813088B2 (enExample)
KR (1) KR100491371B1 (enExample)
TW (1) TWI255000B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3827645B2 (ja) * 2003-02-19 2006-09-27 株式会社新川 ボンディング装置及びボンディング外観検査装置
JP4547330B2 (ja) * 2005-12-28 2010-09-22 株式会社新川 ワイヤボンディング装置、ボンディング制御プログラム及びボンディング方法
US7810698B2 (en) * 2008-11-20 2010-10-12 Asm Assembly Automation Ltd. Vision system for positioning a bonding tool
US9136243B2 (en) * 2013-12-03 2015-09-15 Kulicke And Soffa Industries, Inc. Systems and methods for determining and adjusting a level of parallelism related to bonding of semiconductor elements
TWI580511B (zh) * 2014-06-10 2017-05-01 新川股份有限公司 A bonding device, and a method of estimating the placement position of the engagement tool
CN108986167B (zh) * 2017-06-05 2022-01-11 梭特科技股份有限公司 置晶设备的校正方法及使用该方法的置晶设备
TWI697656B (zh) * 2017-12-20 2020-07-01 日商新川股份有限公司 線形狀檢查裝置以及線形狀檢查方法
TWI826789B (zh) * 2020-06-05 2023-12-21 日商新川股份有限公司 打線接合裝置
CN112382590A (zh) * 2020-11-11 2021-02-19 华天科技(南京)有限公司 一种编带设备交手校正系统及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3178567B2 (ja) * 1993-07-16 2001-06-18 株式会社カイジョー ワイヤボンディング装置及びその方法
JP2982000B1 (ja) * 1998-07-03 1999-11-22 株式会社新川 ボンディング方法及びその装置
JP3328878B2 (ja) * 1998-10-26 2002-09-30 澁谷工業株式会社 ボンディング装置
JP3416091B2 (ja) 2000-01-21 2003-06-16 株式会社新川 ボンディング装置およびボンディング方法
JP2003163236A (ja) * 2001-11-27 2003-06-06 Shinkawa Ltd ワイヤボンディング装置
JP3802403B2 (ja) * 2001-11-27 2006-07-26 株式会社新川 ワイヤボンディング方法及び装置

Also Published As

Publication number Publication date
KR20030057322A (ko) 2003-07-04
JP2003197671A (ja) 2003-07-11
JP3813088B2 (ja) 2006-08-23
US20030123866A1 (en) 2003-07-03
TWI255000B (en) 2006-05-11
TW200408018A (en) 2004-05-16
US6683731B2 (en) 2004-01-27

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