KR100491019B1 - 다점계측 두께 측정계 - Google Patents

다점계측 두께 측정계 Download PDF

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Publication number
KR100491019B1
KR100491019B1 KR10-2002-0010420A KR20020010420A KR100491019B1 KR 100491019 B1 KR100491019 B1 KR 100491019B1 KR 20020010420 A KR20020010420 A KR 20020010420A KR 100491019 B1 KR100491019 B1 KR 100491019B1
Authority
KR
South Korea
Prior art keywords
thickness
measured
measurement
box
ionizing
Prior art date
Application number
KR10-2002-0010420A
Other languages
English (en)
Korean (ko)
Other versions
KR20020070824A (ko
Inventor
가가와다케시
Original Assignee
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 가부시끼가이샤 도시바 filed Critical 가부시끼가이샤 도시바
Publication of KR20020070824A publication Critical patent/KR20020070824A/ko
Application granted granted Critical
Publication of KR100491019B1 publication Critical patent/KR100491019B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/04—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/06—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring the deformation in a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/08—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR10-2002-0010420A 2001-03-01 2002-02-27 다점계측 두께 측정계 KR100491019B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001056817 2001-03-01
JPJP-P-2001-00056817 2001-03-01
JP2002013937A JP3948965B2 (ja) 2001-03-01 2002-01-23 多点計測厚み計
JPJP-P-2002-00013937 2002-01-23

Publications (2)

Publication Number Publication Date
KR20020070824A KR20020070824A (ko) 2002-09-11
KR100491019B1 true KR100491019B1 (ko) 2005-05-24

Family

ID=26610434

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2002-0010420A KR100491019B1 (ko) 2001-03-01 2002-02-27 다점계측 두께 측정계

Country Status (4)

Country Link
JP (1) JP3948965B2 (zh)
KR (1) KR100491019B1 (zh)
CN (1) CN1223827C (zh)
TW (1) TWI272371B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10307356A1 (de) * 2003-02-21 2004-09-16 Sikora Ag Verfahren und Vorrichtung zur Bestimmung der Dicke der Isolation eines Flachkabels in Bereichen der metallischen Leiterbahnen
JP2006170883A (ja) * 2004-12-17 2006-06-29 Toshiba Corp 厚さプロファイル測定装置
JP2009098095A (ja) * 2007-10-19 2009-05-07 Yasuto Ioka 電離箱型ｘ線異物検出装置および筒状電離箱
KR100921417B1 (ko) * 2007-12-17 2009-10-14 한국원자력연구원 단일 지점 동위원소 방사선원을 이용한 다면적 두께 측정장치 및 측정 방법
JP5847674B2 (ja) * 2012-09-10 2016-01-27 株式会社東芝 Ｘ線厚さ計

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890112A (ja) * 1981-11-26 1983-05-28 Toshiba Corp 放射線厚さ計
JPS60230008A (ja) * 1984-04-28 1985-11-15 Toshiba Corp 放射線厚さ計
KR100319430B1 (ko) * 1993-04-26 2002-06-20 쟝 가브리엘 메날드 평평한제품의두께프로파일을측정하는어셈블리를위한교정장치및그교정방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890112A (ja) * 1981-11-26 1983-05-28 Toshiba Corp 放射線厚さ計
JPS60230008A (ja) * 1984-04-28 1985-11-15 Toshiba Corp 放射線厚さ計
KR100319430B1 (ko) * 1993-04-26 2002-06-20 쟝 가브리엘 메날드 평평한제품의두께프로파일을측정하는어셈블리를위한교정장치및그교정방법

Also Published As

Publication number Publication date
JP2002328016A (ja) 2002-11-15
CN1223827C (zh) 2005-10-19
CN1378067A (zh) 2002-11-06
TWI272371B (en) 2007-02-01
JP3948965B2 (ja) 2007-07-25
KR20020070824A (ko) 2002-09-11

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