KR100476287B1 - Paste applicator - Google Patents

Abstract

In the present invention, the substrate is placed on a table opposite the paste discharge port of the nozzle, and the relative positional relationship between the substrate and the nozzle is changed on the substrate by discharging the paste filled in the paste container from the paste discharge port onto the substrate. A paste applicator for applying a paste pattern having a shape, the frame (2A, 2B) that can move in one direction parallel to the upper surface of the substrate 8 on the table, and each move by a linear motor drive in the stretching direction of the frame There are a plurality of dispensing heads 5A to 5D provided so that each dispensing head has a nozzle in which the discharge port is opposed to the paste container and the substrate, and the frame and the dispensing head are moved to a desired position on the substrate. The control means 9 and 10 which apply | paste a paste in the desired position on a board | substrate from the discharge port are provided. Thereby, light weight can be aimed at a simple structure, it is possible to apply | coat a paste in a desired pattern exactly on a board | substrate, and it can also eliminate the possibility of contaminating a board | substrate.

Description

Paste Applicator {PASTE APPLICATOR}

According to the present invention, a substrate is mounted on a table so as to face a discharge port of a nozzle and used in a flat panel, a printed board, or a manufacturing process of a semiconductor assembly, and the paste filled in a paste container is discharged from the discharge port of this nozzle onto a substrate. The present invention relates to a paste applicator for changing a relative positional relationship between a substrate and a nozzle while applying a paste pattern having a desired shape onto the substrate, and more particularly to a drive mechanism of an application head including a nozzle.

The frame is provided on the table so as to be movable in one direction parallel to the upper surface of the substrate, and the paste head and the coating head having a nozzle facing the discharge port on the substrate are installed to be movable in the stretching direction of the frame. And a paste applicator which moves the application head to a desired position on the substrate to apply the paste at a desired position on the substrate from the discharge port of the nozzle, and the application head is driven by a servo motor using a ball screw (Japanese Patent Laid-Open No. 2000-93866). See publication number).

In this case, when a plurality of application heads are provided and each paste is to be applied simultaneously onto the substrate in a desired pattern from the nozzles, a ball screw or a servo motor is required for each application head, and the structure becomes complicated, and the weight of the device is increased. Not only that but also, not only that, each ball screw suffers from a difference in thermal expansion due to a rise in temperature during operation, which makes it difficult to precisely control the position of each application head. Moreover, there also existed a problem that there existed oscillation in the some movable part which exists on a board | substrate, and a board | substrate becomes contaminated.

SUMMARY OF THE INVENTION An object of the present invention is to provide a paste applicator that can be made light in weight with a simple configuration, which makes it possible to apply a paste in a desired pattern accurately on a substrate, and that contamination of the substrate does not occur.

It is another object of the present invention to provide a paste applicator that enables the application of a paste in a stable, high speed and precisely desired pattern, even on a simple configuration.

In order to achieve the said objective, this invention is a paste applicator which apply | coats and draws a paste pattern of a desired shape on the board | substrate mounted on the table, WHEREIN: In-plane parallel to the surface where the paste pattern of the board | substrate mounted on the table is apply | painted and drawn. And a linear motor which is movable in one direction and which is stretched in a direction different from this one direction, and which is arranged on the frame and is movable in the stretching direction of the frame, and which is filled in the paste container and the paste container. A plurality of application heads provided with nozzles having a paste discharge port for discharging the paste, and within the range of the paste discharge port facing the substrate mounted on the table, move the frame with respect to the table and move the plurality of application heads with respect to the frame. Face from paste discharge port of plural application heads And control means for the control for discharging, and a structure for applying rendering the paste pattern with a desired shape on a substrate by a plurality of coating heads.

The linear motors of the plurality of application heads each have a structure provided in the frame in accordance with the stretching direction thereof, and an armature coil provided in the application head opposite the magnets.

In order to achieve the above another object, the present invention, in the above configuration, the control means controls to move the plurality of application heads, respectively, in cooperation with each other, for example, the control means is a plurality of according to the stretching direction of the frame In the case of moving the application head, when two adjacent application heads fall within the preset mutual interference range, one of the two application heads is stopped to move the other application head, and after completion of the movement of the other application head To control one application head to move.

Further, two or more frames are provided in a parallel relationship with each other, and the control means stops one of these two frames when the two adjacent frames fall within the preset interference range when the two frames are moved. The other frame is moved, and after the end of the movement of the other frame, one frame is moved.

In addition, even when oscillation is carried out, by providing a dust suction mechanism in the frame and discharging the dust sucked by the suction mechanism out of the apparatus, the influence of dust can be eliminated as much as possible.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described using drawing.

1 is a perspective view showing an embodiment of the paste applicator of the present invention, wherein 1 is a mount, 2A, 2B is a frame, 3A, 3B is a fixed portion, 4A to 4D is a movable portion, and 5A to 5D is A coating head, 6 is a board | substrate holding board, 7 is a (theta) -axis rotation table, 8 is a board | substrate, 9 is a main control part, 10 is a sub-control part, 11 is a monitor, 12 is a keyboard.

In Fig. 1, on the mount 1, an X-axis drive mechanism composed of the fixing parts 3A and 3B, the movable parts 4A to 4D, and the frames 2A and 2B is provided. The fixing parts 3A and 3B are fixed on the mount 1 along the X-axis direction, and the two moving parts 4A and 4C on the fixing part 3A and the two moving parts on the fixing part 3B. 4B and 4D are provided so that a movement is possible, respectively. Then, the frame 2A extends over the movable portion 4A and the movable portion 4B (that is, along the Y axis direction), and further over the movable portion 4C and the movable portion 4D (that is, along the Y axis direction). 2B is provided, respectively.

Two application heads 5A, 5B are provided in the frame 2A so as to be movable in the longitudinal direction (ie, Y direction) of the frame 2A, and two application heads 5C, 5D) is provided to be movable in the longitudinal direction (that is, the Y direction) of the frame 2B. Thereafter, a drive mechanism for moving the application head in the frame length direction of the frames 2A and 2B may be referred to as a Y-axis drive mechanism.

On the mount 1, between the fixing portions 3A and 3B of the X-axis drive mechanism, a θ-axis rotation table 7 is provided which is mounted with a substrate holding plate 6 and which can rotate in the θ-axis direction. The substrate 8 is adsorbed and held (loaded) on the substrate holding plate 6. In addition, the mount 1 is provided with a monitor 11 and a keyboard 12, and a main controller 9, a sub-control unit 10, and the like are incorporated.

Fig. 2 is a view showing a part of the movable part 4A of the X-axis drive mechanism in Fig. 1, and Fig. 2A is a side view of this part as seen from the Y-axis direction, and Fig. 2B is It is a figure which looked at the part from the X-axis direction. 3a1 is a magnet, 3a2, 3a3 is a linear guide, 3a4 is a linear scale, 4a1 is an armature coil, 4a2 is a detection part, and the same code | symbol is attached | subjected to the part corresponding to FIG.

2 (a) and 2 (b), the magnet 3a1 and the linear guides 3a2 and 3a3 parallel to the fixing part 3A of the X-axis driving mechanism in the X-axis direction (the direction perpendicular to the longitudinal plane). And a linear scale 3a4, and the movable portion 4A is provided with a magnet 3a1 of the fixed portion 3A and an armature coil 4a1 constituting the linear motor and a detection portion 4a2 of the linear scale 3a4. have. The movable portion 4A moves in the X-axis direction along the linear guides 3a2 and 3a3 by the driving force of the linear motor.

The fixed part 3B in FIG. 1 also has the same structure as this fixed part 3A, and the movable part 4B also has the same structure as the movable part 4A, and the detection part 4a2 of the movable part 4A. The main control part 9 is a fixed part based on the detection result of the linear scale 3a4 of the fixed part 3A which the detection part detected, and the detection result of the linear scale of the fixed part 3B which the detection part of the movable part 4B detected. 3A, the linear motor of the movable part 4A, the fixed part 3B, and the linear motor of the movable part 4B are controlled, and the position control of the movable parts 4A and 4B is performed so that these detection results may match, and the frame 2A ) Lengthwise direction is precisely matched in the direction perpendicular to the fixing parts (3A, 3B) (that is, the Y-axis direction).

In addition, the movable parts 4C and 4D in FIG. 1 also have the same structure as the movable part 4A, and the positional control of these movable parts 4C and 4D in which the main control part 9 is the same according to the detection result of these detection parts. Is done.

FIG. 3 is a view showing a part of the application head in FIG. 1, FIG. 3A is a side view seen from the Y direction, and FIG. 3B is a perspective view. In addition, 2a1 is a magnet, 2a2-2a4 is a linear guide, 2a5 is a linear scale, 5a1 is a base, 5a2 is an armature coil, 5a3 is a detection part, 5a1 is a Z-axis servo motor, 5a2 is a Z-axis 5A3 is a Z-axis table, 5A4 is an optical telemeter, 5A5 is a paste container (syringe), 5A6 is an image recognition camera, and the same code | symbol is attached | subjected to the part corresponding to FIG.

Hereinafter, although 5 A of application heads are demonstrated, it is the same also about other application heads 5B-5D.

In Figs. 3A and 3B, the frame 2A also includes a fixing portion (fixed side) of the Y-axis drive mechanism of the application head 5A (and thus of the application head 5B). According to the longitudinal direction (Y-axis direction) of the upper surface, the two linear guides 2a2 and 2a3 are parallel to the magnet 2a1 on both sides, and the linear guide 2a4 is on one side, and the other Linear scales 2a5 are respectively provided on the side surfaces.

The application head 5A also has a base 5a1 arranged to span the frame 2A, and an armature coil constituting the linear motor together with the magnet 2a1 of the frame 2A on the base 5a1. 5a2 and the detection part 5a3 of the linear scale 2a5 of the frame 2A are provided.

The linear scale 2a5 is provided on the side surface of the frame 2A along the Y-axis direction, and the detection unit 5a3 for detecting this is provided on the application head 5A opposite the linear scale 2a5. Based on the detection result from the linear scale 2a5 of this detection part 5a3, the main control part 9 uses the armature coil 5a2 of the application | coating head 5A, and the linear motor which consists of the magnet 2a1 of the frame 2A. By controlling, the position control in the Y-axis direction on the frame 2A is performed.

The base 5a1 of the application head 5A is further provided with a Z-axis servo motor 5A1, and the Z-axis guide 5A2 is further attached to this Z-axis guide motor 5A1. The Z-axis table 5A3 is further provided with a distance meter 5A4 in the Z-axis table 5A3, and a paste container 5A5 is provided in the distance meter 5A4, respectively, and in the Z-axis table 5A3. The image recognition camera 5A6 is provided.

The Z-axis servo motor 5A1 pastes through the Z-axis guide 5A2 by the control of the sub-control unit 10 (Fig. 1) based on the detection result of the rangefinder 5A4 provided on the Z-axis table 5A3. The storage container 5A5 and the image recognition camera 5A6 are driven in the Z-axis direction.

Such a configuration is also achieved for the other application heads 5B to 5D as shown in FIG.

Fig. 4 is a perspective view showing the positional relationship between the nozzles provided at the distal end of the optical rangefinder 5A4 and paste housing 5A5 in Fig. 3B, where reference numeral 5A7 denotes a nozzle support, and reference numeral 5A8 denotes a nozzle. The same reference numerals are given to parts corresponding to FIG. 3.

In FIG. 4, the nozzle support 5A7 is provided in the lower end part of paste storage container 5A5, and the nozzle 5A8 which the paste discharge port is open toward the board | substrate 8 is attached to the front end. The paste container 5A5 and the nozzle 5A8 communicate with each other by the nozzle support 5A7, and the paste discharge port of the nozzle 5A8 measures the distance of the optical telemeter 5A4 on the upper surface of the substrate 8. It is approached by the minute difference between the reflection point RA of light and (DELTA) X, (DELTA) Y.

This distance meter 5A4 measures the vertical (Z-axis direction) distance from the front end (paste discharge port) of the nozzle 5A8 to the surface (upper surface) of the substrate 8 by noncontact triangulation. Since the deviations (ΔX, ΔY) of the discharge point of the nozzle 5A8 and the reflection point RA of the distance measurement light at the distance meter 5A4 are set to such an extent that they are not affected by the unevenness of the surface of the substrate 8, the nozzle 5A8 In the vertical (Z-axis direction) distance from the distal end portion (paste discharge port) of the substrate 8 to the surface (upper surface) of the substrate 8, there is almost no error due to this deviation (ΔX, ΔY).

Therefore, based on the measurement result of this distance meter 5A4, the Z-axis servo motor 5A1 is controlled, and the nozzle tip part is made up and down according to the unevenness | corrugation (wrinkles) of the surface of the board | substrate 8, and thus the surface (upper surface) of the board | substrate 8 The vertical distance to () can always be kept constant.

The other structures of the application heads 5B to 5D shown in Fig. 1 also constitute such a configuration.

Next, the electric and pneumatic control system in this embodiment is demonstrated.

Fig. 5 is a block diagram showing the configuration of one embodiment of the main control section 9 in Fig. 1, wherein 4b1 to 4d1, 5b2 to 5d2 are armature coils, 4b2 to 4d2, 5b3 to 5d3 are detectors, and 7a. Is a servo motor, 7b is a θ-axis encoder, 9a is a microcomputer, 9b is an external interface, 9c is an image processing device, 9d is a motor controller, 9e1 to 9e4 are X-axis linear motor amplifiers, 9e5 9e8 are Y-axis linear motor amplifiers, 9e9 are θ-axis amplifiers, 16 are positive pressure sources, 18 are negative pressure sources, 17 and 19 regulators, and 20 are valve units 20, corresponding to FIG. The same code | symbol is attached | subjected to the part to perform.

In Fig. 5, the main controller 9 includes a microcomputer 9a, an external interface 9b, an image processing apparatus 9c, a motor controller 9d, X-axis linear motor amplifiers 9e1 to 9e4, and a Y-axis system. The amplifier 9e9 of the servomotor 7a which drives the linear motor amplifiers 9e5-9c8 and the (theta) axis | shaft rotation table 7 is provided. The servo motor 7a is provided with a θ-axis encoder 7b.

The armature coils 4b1, 4c1, and 4d1 are armature coils of the movable portions 4B, 4C, and 4D in FIG. 1, respectively, and correspond to the armature coils 4a1 for the movable portion 4A shown in FIG. The armature coils 5b2, 5c2, and 5d2 are armature coils of the coating heads 5B, 5C, and 5D in FIG. 1, respectively, and correspond to the armature coils 5a2 for the movable portion 5A shown in FIG. will be.

In addition, the detectors 4b2, 4c2, and 4d2 detect the linear scales (the linear scales 3a4 shown in Fig. 2 (b) shown in Fig. 2 (b) in the fixing parts 3A) respectively provided in the fixed parts 3A and 3B. The detector in the movable parts 4B, 4C, and 4D (FIG. 1) corresponds to the detector 4a2 in the movable part 4A shown in FIG. The detectors 5b3, 5c3, and 5d3 are coated for detecting the linear scales (in the fixed part 3A, the linear scales 3a4 shown in Fig. 2B) provided in the fixed parts 3A and 3B, respectively. The detector in the heads 5B, 5C, and 5D (Fig. 1) corresponds to the detector 5a3 in the coating head 5A shown in Fig. 3A.

The detection outputs of the detectors 4a2 to 4d2 and 5a3 to 5d3 are supplied to the motor controller 9d, drive signals corresponding to these detection outputs are output to the motor controller 9d, and amplifiers 9e1 to 9e4 for the X-axis system. Amplified by the Y-axis linear motor amplifiers 9e5 to 9e8, and then supplied to the armature coils 4a1 to 4d1 and 5a2 to 5d2, whereby the movable portions 4A and 4B and the application heads 5A to 5D are The linear motor is driven and controlled so that the movable portions 4A and 4B and the application heads 5A to 5D are position controlled.

The image processing apparatus 9c is a substrate obtained by an image recognition camera 5A6 (FIG. 3B) provided in the application head 5A or an image recognition camera provided in the application heads 5B to 5D. By processing the video signal on (8), positioning of the board | substrate 8 etc. is performed based on the image processing data acquired by this.

In order to apply the paste in a pattern appropriate to a desired position on the substrate 8 by the application heads 5A to 5D, the regulators 17 and 19 and the valve unit 20 from the positive pressure source 16 or the negative pressure source 18 are applied. Although the desired air pressure is applied to the paste container (the paste container 5A5 in FIG. 3 in the coating head 5A) of the coating heads 5A to 5D, the regulators 17 and 19 and the valve unit in that case are applied. The control signal of 20 is sent from the external interface 9b. Reference numeral 15 is a hard disk.

Although not shown, the microcomputer 9a is a ROM which stores a main program unit and a processing program for performing application drawing described later, the results of processing at the main computer unit, the external interface 9b, the image processing apparatus 9c, and the motor controller. And an input / output unit for exchanging data with the external interface 9b, the image processing apparatus 9c, the motor controller 9d, or the like. The hard disk 15 stores input data such as data representing a paste pattern to be drawn from the keyboard 12, processing result data of the microcomputer 9a, and the like.

FIG. 6 is a block diagram showing an example of one embodiment of the sub-control unit 10 in FIG. 1, wherein 5B1, 5C1, and 5D1 are Z-axis servo motors of the coating heads 5B, 5C, and 5D, and 5B4 and 5C4. 5D4 is an optical rangefinder of the application heads 5B, 5C, 5D, 5A1a, 5B1a, 5C1a, and 5D1a are Z-axis encoders of the application heads 5A, 5B, 5C, 5D, 10a is a microcomputer, and 10b is The external interface, 10c is a motor controller, 10d1 to 10d4 are amplifiers for the Z-axis servo motors 5A1, 5B1, 5C1 and 5D1, respectively, and 21 is a hard disk.

In FIG. 6, the sub-control unit 10 includes a microcomputer 10a, an external interface 10b, a motor controller 10c, and amplifiers 10d1 to 10d4 for Z-axis servo motors.

In each coating head 5A, the Z-axis encoder 5A1a is provided in the Z-axis servo motor 5A1, and the amount of rotation of the Z-axis servo motor 5A1 is detected by the Z-axis encoder 5A1a and the detection output thereof. It is supplied to the microcomputer 10a via this external interface 10b.

On the other hand, the measurement result of the optical rangefinder 5A4 is supplied to the microcomputer 10a via the external interface 10b, and the distance (nozzle height) from the application surface of the board | substrate 8 to the nozzle 5A8 (FIG. 4) The drive signal is calculated to produce a prescribed nozzle height. This drive signal is amplified by the Z-axis servo motor amplifier 10d1 via the motor controller 10c and then supplied to the Z-axis servo motor 5A1. Thus, the measurement result of the optical rangefinder 5A4 is acquired through the external interface 10b, Z-axis servo motor 5A1 is operated, Z-axis table 5A3 shown in FIG. 5 is moved up and down, and FIG. Position control of the nozzle 5A8 shown in the Z-axis direction is performed.

Similarly, the other coating heads 5B to 5D also have the same configuration as the coating head 5A shown in Fig. 4, and the rotational amounts of the respective Z-axis servo motors 5B1 to 5D1 are each Z-axis encoder 5B1a. To 5D1a, and are supplied from the motor controller 10c to the microcomputer 10a. The motor controller 10c obtains the measurement result of the optical rangefinders 5B4 to 5D4 of the coating heads 5B to 5D via the external interface 10b, and operates the Z-axis servo motors 5B1 to 5D1, as shown in FIG. The Z-axis table corresponded to the Z-axis table 5A3 of 5 A of application | coating heads shown in the upper and lower sides, and the position control of the nozzles in the Z-axis direction is performed.

Although not shown in the microcomputer 10a, a ROM storing a processing program for controlling the height of the main computing unit and the nozzles during application of the drawing, a result of the processing at the main computing unit, the external interface 10b and the motor controller ( RAM for storing input data from 10c) and the like, and an input / output unit for exchanging data with the external interface 10b or the motor controller 10c. In addition, desired data is stored in the hard disk 21.

The main control part 9 and the sub-control part 10 are comprised as mentioned above, and armature coils 4a1-4d and Y of each linear motor in the movable parts 4A and 4B which are movable in the X-axis direction (FIG. 1). The armature coils 5a2 to 5d2 and the Z-axis servo motors 5A1 to 5D1 of the respective linear motors of the application heads 5A to 5D that are movable in the axial direction (Fig. 1) are the external interfaces 9b of the main control section 9b. And the application head based on the data already inputted from the keyboard 12 and stored in the RAM of the microcomputer 9a by the main control unit 9 and the sub-control unit 10 through 10b. (5A to 5D) (therefore, these nozzles) move in the X and Y angular directions with respect to the substrate 8 adsorbed and held on the substrate holding plate 6, and further, the coating heads 5A to 5D Nozzle supported by Z-axis table (Z-axis table 5A3 (FIG. 3) at coating head 5A) (Nozzle 5A8 (FIG. 4) at coating head 5A) ] Is moved a certain distance in the Z-axis direction, and during that movement, it is input from the keyboard 12 to the paste container (paste container 5A5 (FIG. 3) in the coating head 5a), and the microcomputer 9a. The air pressure regulated by the static pressure regulator 17 based on the data stored in the RAM of Fig. 9) is continuously applied, the paste is discharged from the paste discharge port of these nozzle tips, and a desired paste pattern is applied and drawn on the substrate 8. .

In the paste coating operation, as described later, the positions of the armatures 4a1 to 4d1 and 5a2 to 5d2 of each linear motor are preset by the motor controller 9d of the main control section 9 (Fig. 5). It always monitors whether it is in the interference range (the range of distances between coating heads in which the coating head is too close and may cause a collision), and the coating is performed so as not to collide by this monitoring program even when an incorrect movement command is entered. The processing can be stopped.

The linear motors of the movable parts 4A to 4D moving in the X-axis direction and the coating heads 5A to 5D moving in the Y-axis direction are formed by installing a plurality of magnets side by side (fixing part 3A, 3B). And the armature coil on the movable side (installed on the movable parts 4A to 4D side or the application heads 5A to 5D side], and the fixed side magnet Since it is a common type, it does not cause a difference due to thermal expansion that has occurred in the conventional ball screw drive, and there is no position error in the XY axis direction unless an error signal is given to the armature coil on the movable side. Accurate position control of the application heads 5A to 5D can be performed. In addition, the configuration is simple and there is little oscillation. Since the suction force always acts between the magnet on the fixed side and the armature coil on the movable side, the application head is of a type constrained on the mount 1 side, and does not vibrate during movement, and the upper main surface of the substrate 8 ( If there is no wrinkle on the surface to which the paste is applied, there is little variation in the distance from the upper main surface of the substrate 8 to the paste discharge port of the nozzles of the respective coating heads 5A to 5D.

Fig. 7 is a diagram showing one specific example of the paste pattern applied on the substrate 8 in the present embodiment, in which reference signs PTa to PTd denote paste patterns, and reference signs Sa to Sd start application of the paste patterns PTa to PTd. Location.

In this embodiment, as shown in FIG. 7, four paste patterns PTa to PTd are applied onto the substrate 8 by the four application heads 5A to 5D shown in FIG. These paste patterns PTa to PTd have the same shape, and two-dimensional path data from the application start positions Sa to Sd to the end position are set, and the application start positions Sa of the paste patterns PTa are formed on the substrate ( The application start position Sb of the paste pattern PTb is similarly started to apply the paste pattern PTc to the coordinates X2 and Y2 with the center 0 of 8 as the origin. Similarly, it is assumed that the position Sc is positioned at the coordinates X3 and Y3, and the application start position Sd of the paste pattern PTd is similarly positioned at the coordinates X4 and Y4.

Next, the coating drawing operation of the paste pattern of this embodiment is demonstrated with reference to FIG.

In Fig. 8, power is first turned on (step 100), and the initial setting of the apparatus is made (step 200).

In this initial setting, by driving the servo motor 7a (FIG. 5) in FIG. 1 to rotate the θ-axis rotation table 7, the substrate holding plate 6 is moved in the θ direction to a predetermined reference angle. By positioning and driving the linear motors of the movable parts 4A and 4B and the application heads 5A to 5D, the application heads 5A to 5D are moved to move the paste ejection openings at their nozzle tips to a predetermined predetermined home position. At the same time, two-dimensional path data from the application start position to the end position of the paste patterns PTa to PTd, the mark data for positioning, and the paste application height (of the substrate 8 with respect to the application heads 5A to 5D). Distance from the surface to the paste discharge port of the nozzle tip portion].

These data are input from the keyboard 12, and each input data is built in the microcomputer 9a (Fig. 5) of the main control section 9 or the microcomputer 10a (Fig. 6) of the sub-control section 10. It is stored in RAM and stored in a storage medium such as hard disks 15 and 21 which are external storage devices of the control units 9 and 10.

Moreover, the said origin position in the XY coordinate system of the paste discharge port of the nozzle tip part of application | coating head 5A, 5B, 5C, 5D is set to predetermined positions Ta-Td out of the board | substrate 8 as shown in FIG. In addition, even if these nozzle pastes hang down before the start of coating, the substrate 8 is not contaminated.

When the process of the above initial setting (step 200) is complete | finished, the board | substrate 8 is next mounted on the board | substrate holding board 6, and is hold | maintained (step 300).

Subsequently, positioning of the substrate 8 is performed (step 400). In this process, any of the image recognition cameras of the application heads 5A to 5D (in the application head 5A, the image recognition camera 5A6 (FIG. 3)) initially set in step 200 is replaced with a substrate holding board ( The positioning mark of the board | substrate 8 loaded in 6) is positioned in the position which can image | photograph, and this positioning mark is imaged. The center of gravity position of the picked-up positioning mark is determined by the image processing of the main control device 9 (FIG. 5), the inclination in the θ direction of the substrate 8 is detected, and the servo motor is based on this detection result. By driving the θ-axis rotation table 7 at 7a, the inclination of the substrate 8 in the θ direction is corrected. Incidentally, the errors ΔX1 and ΔY1 in the XY axis direction are corrected when the starting point moves later, so that the image data of the positioning mark is stored and stored in the RAM of the microcomputer 9a.

When positioning of the board | substrate 8 of step 400 is complete | finished, a paste application | coating operation | movement is performed next (step 500). This will be explained with reference to FIG.

In Fig. 10, first, it is checked whether there is an uncoated pattern on the substrate 8 (that is, whether there is a pattern that must be applied, but not yet applied) (step 510). The presence or absence of an uncoated pattern is mentioned later.

At the time of application | coating start, since all the patterns which should be apply | coated are uncoated, it progresses to the next starting point movement process (step 520). This moves the application heads 5A to 5D and moves the application heads 5A to 5D from the origin positions Ta to Td shown in Fig. 9 to the application start positions Sa to Sd of the paste patterns PTa to PTd. The process of positioning and moving these application heads 5A-5D so that the paste discharge port of each nozzle front part may oppose. This will be explained with reference to FIG.

In Fig. 11, first, it is confirmed that the pattern (here, four patterns) to be drawn is the same shape (step 521), and if it is the same pattern, it is confirmed that the pattern can be applied simultaneously (step 522).

The judgment conditions which can be apply | coated simultaneously are that application start point positions Sa and Sb are on the same X axis, and application start point positions Sc and Sd are on the same X axis, and X1 = X2 and X3 = When X4 is established, application | coating is made at the same time.

When any pattern can be applied at the same time, if there are two or more application start positions close to each other, the application heads and nozzles to which the nozzle tip portions are positioned may collide with each other (the range of such a possible distance is called an interference range). ), It is confirmed whether or not each of the nozzles is in the interference range at each of the coating start positions Sa to Sd (step 523).

12 is a diagram for explaining such an interference range in the X-axis direction.

In FIG. 12, when the paste pattern to be applied is the patterns PTa to PTd shown in FIG. 7, in the patterns PTa and PTb with respect to the X-axis direction, in the X-axis direction from the center O of the substrate 8 Thus, the position separated by the distance X1 (= X2) becomes the application start positions Sa and Sb. In the patterns PTc and PTd, the positions separated from the center O of the substrate 8 by the distance X3 (= X4) become the coating start positions Sc and Sd. At the start of coating, the nozzles of the coating heads 5A, 5B, 5C, and 5D are set to these coating starting positions Sa, Sb, Sc, and Sd, respectively.

Here, the interference range XC is set in the X-axis direction toward the substrate center 0 from these coating start positions Sa, Sb, Sc, and Sd. here,

(X1-XC)-(X3 + XC)> 0

In other words,

X1-X3-2XC> 0

In this case, the application heads 5A and 5B in the frame 2A and the application heads 5C and 5D in the frame 2B are operable without interfering with each other.

Fig. 13 is a diagram illustrating an interference range in the Y axis direction.

In Fig. 13, in the case of PTa to PTd which is the pattern shown in Fig. 7, in the pattern PTa, the position apart from the center O of the substrate 8 by the distance Y1 in the pattern PTa is the coating start position (Sa). In the coating pattern PTb, the position separated by the distance Y2 from the center O of the substrate 8 is Y3 away from the center O of the substrate 8 in the coating start position Sb, and in the coating pattern PTc. In the application | coating start position Sc and the application pattern PTd, the position becomes Y-starting position Sd from the center O of the board | substrate 8 in the position. The interference range YC is set in the direction toward the substrate center 0 from each application start position.

In the patterns PTa and PTb,

(Y2-YC)-(Y1 + YC)> 0

In other words,

Y2-Y1-2YC> 0

, The application heads 5A and 5B can operate without interfering with each other. In the patterns PTc and PTd,

(Y4-YC)-(Y3 + YC)> 0

In other words,

Y4-Y3-2YC> 0

, The application heads 5C and 5D can operate without interfering with each other.

For a pattern that satisfies all the conditions of steps 521 to 523 of FIG. 11 (there is an example of determination), the processing proceeds to the next step 525, but if the condition of any one of these steps 521 to 523 is not satisfied (no determination) If there is any), it is impossible to apply all of the patterns simultaneously, and one of the two patterns that cannot be applied in a batch is stored as an uncoated pattern (step 524), and the other satisfies all the conditions of steps 521 to 523. It is set as an applicable pattern with a pattern, and the application | coating head which apply | coats these patterns is made to stand by each origin position.

Then, the application head for applying the applicable pattern is moved, and the amount of movement in the X and Y axis directions from the corresponding origin position to which the nozzles apply from the corresponding starting position shown in Fig. 9 is calculated from the positional deviation. (Step 525). Presently, for example, if there is a determination that the coating heads 5C and 5D are "with interference" (step 523), one of them, for example, the coating head 5D is an uncoated pattern, and the other is applied. The above-described step 525 is performed on the application head 5C and the application heads 5A and 5B.

In addition, the movement amount of the X and Y-axis directions from the origin position of the coating head which apply | coats an applicable pattern to the application | coating start position of the pattern to apply | coat is calculated | required as follows.

Presently, for example, if the application head 5A is taken as an example and the position coordinates of the origin position Ta are (X011, Y0l1), the nozzle 5A8 of the application head 5A from the origin position Ta is obtained. Movement amount LX111, LY111 to application | coating start point Sa (X1, Y1),

LX111 = X1-X011, LY111 = Y1-Y011

It can be calculated easily.

In this way, the movement amount of all the coating heads 5A to 5D including the coating head for the uncoated pattern is calculated (step 525), and this is set (step 526). Here, the set movement amounts of the nozzles of the coating heads 5A to 5D, respectively,

Coating head 5A: (LX111, LY111)

Coating head 5B: (LX112, LY112)

Coating head (5C): (LX121, LY121)

Coating head 5D: (LX122, LY122)

Shall be. However, LX is a movement amount in the X-axis direction, and LY is a movement amount in the Y-axis direction.

Based on the above settings, the application head used for the application | coating pattern is moved by this set movement amount, and the front-end | tip part of these nozzles is set to the application | coating start position of the pattern applicable (step 527).

Here, when moving the application head, the armature coils 4a1 and 4a2 of the movable parts 4A and 4B for driving the frame 2A of the Y-axis moving mechanism must be driven at the same time. In addition, the armature coils 4c and 4d of the movable portions 4C and 4D for driving the frame 2B of the Y-axis moving mechanism must also be driven at the same time.

At present, the application heads 5A to 5D are moved, and described with reference to Fig. 14 (where reference numerals 4a1 to 4d1 and 5a2 to 5d2 are fixed parts 4A to 4D and Figs. 5 to 5A to 5D). The armature coil of the linear motor shown in Fig. 2), the movable portion 4A and the movable portion 4B are electrically set by the motor controller 9d as if it is a single motor, and the movable portion 4C and the movable portion 4D are also provided. The motor controller 9d is electrically set as if it is a single motor, and a command running on the microcomputer 9a sends a command for moving the frame 2A and the frame 2B by the distance LX111 and LX121, respectively. . The command of the distance LX111 is supplied to the armature coils 4a1 and 4b1 of the linear motors of the movable parts 4A and 4B, and the command of the distance LX121 is supplied to the armature coils 4c1 and 4d1 of the linear motors of the movable parts 4C and 4D. do.

In the Y-axis direction, the application head 5A has a command of the distance LY111 to the armature coil 5a1 of the linear motor, and the application head 5B has a command of the distance LY112 to the armature coil 5b1 of the linear motor. The application of the distance LY121 to the armature coil 5c1 of the linear motor is applied to the application head 5C, and the instruction of the distance LY122 to the application head 5D is separately supplied to the armature coil 5d1 of the linear motor.

As mentioned above, in step 527 of FIG. 11, the armature coil of the linear motor shown in FIG. 5 of the fixing parts 4A to 4D and the application heads 5A to 5D is provided with the above-mentioned movement commands for the amplifiers 9e1 to 9e8 ( Are simultaneously supplied via FIG. 5). However, in this case, the coating head used for the pattern which became the uncoated pattern in step 524 of FIG. 11 is not included.

In addition, in the nozzle movement of each coating head, a linear interpolation calculation may be performed and these nozzles may arrive at the application starting position of each applicable pattern simultaneously.

As mentioned above, when each application | coating head 5A-5D moves, and the movement to the application | coating start position Sa-Sd of the corresponding pattern of these nozzles is completed (step 528), it has completed step 520 of FIG. do.

Then, when step 520 is complete | finished in FIG. 10, the gap setting of the nozzle of coating head 5A-5D is performed (step 530). This " gap " is the height of the tip of the nozzle from the paste coating surface of the substrate 8, and this step is performed by the Z-axis servo motors 5A1 to 5D1 in the coating heads 5A to 5D (Fig. 6). To move the Z-axis table in the Z-axis direction to apply paste positions PTa to PTd (distances from the top surface of the substrate 8) of the paste ejection openings of the respective nozzle tips (Figs. 7 and 9). It is set to the application height of ().

For this reason, first, based on the initial movement distance data about these nozzles preset for each coating head 5A-5D, these nozzles are lowered by this initial movement distance, and the height from the board | substrate 8 surface Is measured by a rangefinder (in the case of the coating head 5A, which is provided at each of the rangefinder 5A4 (Fig. 3)). Next, it is checked for each of the application heads 5A to 5D whether the tip of each nozzle is set to a height for drawing the paste pattern, and if each nozzle tip is set to a height for drawing the paste pattern, The process of step 530 ends.

In addition, when the nozzle tip is not set to the height at which the paste pattern is drawn, the nozzle is lowered by a small distance, the distance to the paste coating surface of the substrate 8 is measured by a distance meter, and the distance measurement and the micro distance of the nozzle are measured. The lowering is repeated, and this process is repeated until all the nozzle tips are set to the height at which the paste pattern is drawn.

When the process of step 530 mentioned above is complete | finished, a paste application | movement movement process is performed next (step 540).

Here, the nozzles of the application heads 5A to 5D that are freely operable are drawn in the same path. Thus, as shown in Fig. 15, each armature coils 4a1 to 4d1 for moving the application heads 5A to 5D in the X-axis direction, as if they are one motor, are used in the motor controller 9d (Fig. 5). An electrical setting is made, and thus the armature coils 5a2 to 5d2 of these application heads 5A to 5D, which move the application heads 5A to 5D in the Y-axis direction, are as if they are one motor. Electrical setting is made in (9d), and a program running on the microcomputer 9a may be given a coating instruction to the X and Y axes so as to draw a paste pattern on two axes of the X and Y axes based on the pattern data. .

Thereby, in the state where the paste discharge port of the nozzle tip part of each coating head 5A-5D opposes the board | substrate 8, it moves to X and Y-axis direction according to this paste pattern data, and, as shown in FIG. Similarly, air pressure is slightly applied to the paste storage cylinders (in the coating head 5A, paste storage cylinders 5Aa5 (FIG. 3)) of the coating heads 5A to 5D, and the paste discharge is started from the paste discharge ports at the respective tip portions of the nozzles.

As described above, the microcomputer 10a of the sub-control unit 10 can be obtained from the rangefinder of the application heads 5A to 5D (the rangefinder 5A4 (FIGS. 3 and 4) in the application head 5A)). Wrinkles on the surface of the substrate 8 are measured by actual measurement data of the interval between the paste ejection openings of the coating heads 5A to 5D and the paste coating surface of the substrate 8, and the Z axis servos of the coating heads 5A to 5D are measured according to this measurement value. By driving the motor (Z-axis servo motor 5A1 (FIG. 3) in the coating head 5A), the height of the paste discharge port from the paste coating surface of the substrate 8 is maintained at the set value, respectively. Thereby, a paste pattern can be apply | coated with a desired coating amount.

As described above, drawing of the paste patterns PTa to PTd shown in Figs. 7 and 9 proceeds, but whether each paste discharge port is an end portion of the drawing pattern determined by the paste pattern data on the substrate 8? It is always judged whether or not, and if it is not the end part, it returns to the measurement process of the surface wrinkle of the board | substrate 8 again, and repeats the above application drawing below, until the paste pattern formation reaches the end part of the drawing pattern. Continue.

When the paste discharge port reaches the drawing pattern end portion, the coating heads 5A to 5D drive the Z-axis servo motor to raise the nozzle. Then, the number of the completed pattern is registered in the RAM of the microcomputer 10a (Fig. 6) (step 550), and the process returns to step 510.

By the way, as described above, in step 524 of Fig. 11, one of the two patterns which cause the interference between the coating heads is registered as an uncoated pattern. It is determined whether or not there is an application pattern (step 510). If there is, the operation of the above steps 520 to 550 is executed for this uncoated pattern. At this time, since the application of the paste pattern has ended and retracted to its origin position, the other application heads that might interfere with the application heads do not cause interference. Then, when the application of all the patterns is completed (step 510), the paste coating step (step 500) in Fig. 8 is completed.

In FIG. 8, when step 500 is complete | finished, the board | substrate holding board 6 (FIG. 1) is released, and the board | substrate 8 with which application was completed is discharged | emitted out of an apparatus (step 600). And when forming a paste pattern in the same pattern in several board | substrate (step 700), the above operation | movement from step 300 is performed with respect to the board | substrate which apply | coats and draws a paste pattern newly, and with respect to all the board | substrates after that. When this series of paste pattern drawing processes is completed (step 700), the operation is finished (step 800).

Next, another embodiment of the present invention will be described.

In the configuration shown in Fig. 1, the two frames 2A and 2B are configured to be movable in the perpendicular direction (the X-axis direction) toward the longer frame. On the other hand, in this embodiment, the board | substrate holding board 6 is mounted by making one frame (for example, frame 2B) fixed (moving parts 4C and 4D unnecessary). The θ-axis rotation table 7 rotatable in the θ-axis direction is configured to be movable in the X-axis direction. The frame 2A is movable by the movable portions 4A and 4B in the same manner as the configuration described above.

In this embodiment, application | coating is performed, moving the board | substrate 8 to an X-axis direction at the time of the operation | movement of apply | coating paste in the X-axis direction on the board | substrate 8 surface. The frame 2A movable in the X-axis direction is moved to determine the distance between the application head of the frame 2B and the X-axis direction of the frame 2A application head before the application is started. By setting it as this structure, there exists an advantage that it can combine with the carrying-in mechanism which carries in the board | substrate holding board 6 into the coating apparatus of the board | substrate 8.

Next, although the application head part was movable in the Y-axis direction in the previous embodiment, it is better to make it move so that it may move even in the X-axis direction. 16 shows another embodiment of the coating head portion.

The difference from FIG. 3 in this embodiment is that the X-axis correction mechanism of the coating head portion for moving the paste application mechanism portion in the X-axis direction is provided between the frame 2A and the armature coil 5A2. The X-axis correction mechanism of this coating head part is attached to movable base 30B2 in which the armature coil 5A2 was formed in Z shape. A fixed base 30-B1 formed in a Z shape so as to face the movable base 30B2 is attached to the support bracket 8. The movable base 30B2 moves on the fixed base 30B1 via the linear motion guides 30-G1 and 30G2.

The motor 30m for X-axis adjustment is attached to the motor mounting stand provided on the fixed base 30-B1. The rotary shaft of this X-axis adjustment motor 30m is connected to the shaft 30S by the coupling 30Cp. The end of this shaft 30S is being fixed to the bearing 30R provided below the fixed base 30B1. The cam part 30C provided in the middle of this shaft 30S is provided in contact with the movable base 30B2. Therefore, by rotating the motor 30m for adjusting the X-axis, the cam portion 30C rotates so that the movable base 30B2 moves in the X-axis direction by the eccentric amount of the cam portion.

In this way, the shift amount in the rotational direction of the substrate can be absorbed by the adjustment of the head portion by the configuration so that the position of each coating head portion can be finely adjusted in the X-axis direction.

In the coating drawing operation of the paste pattern, the coating head 5A including the nozzle 5A8 moves on the substrate 8. For this reason, in the structure of the conventional coating head part, there exists a possibility that the clean state of a coating area may deteriorate. In particular, in the above embodiments, the head portion increases, so that the amount of dust generated increases. Therefore, when it is necessary to apply | coat application in a clean environment, such as LCD, for example, there exists a problem that a production yield falls and a quality falls.

Then, embodiment of the structure which provides an oscillation prevention mechanism and solves such a problem is demonstrated below.

Fig. 17 is a perspective view showing an attachment portion of an example of the oscillation preventing mechanism in the embodiment shown in Fig. 1, wherein 20E is a suction mechanism portion, 20E1 and 20E2 are exhaust pipes, 20EF1 and 20EF2 are HEPA (High Efficiency Particulate). Air) fan with a filter (hepa filter), and the same reference numerals are given to parts corresponding to FIG.

In Fig. 17, the frame 2A, which is the Y-axis moving mechanism, is provided with a driving part for moving the application head 5A (5B, 5C, 5D) shown in Fig. 1 in the Y direction, which will be described later. It consists of a dust-proof cover as a whole. At both ends of the frame 2A, suction mechanisms 20E for sucking particles generated on the inside covered with the dust cover of the frame 2A and particles on the substrate 8 side are provided. Each of these suction mechanisms 20E is provided with an exhaust cylinder 20E1 extending downward, and a fan 20EF1 with a HEPA filter is attached to the distal end of these exhaust cylinders 20E1. These fans 20EF1 are positioned further below the surface on which the substrate 8 is mounted. That is, this specific example consists of the dustproof cover which is not shown of the frame 2A, the suction mechanism part 20E, the exhaust cylinder 20E1, and the fan 20EF1 with a HEPA filter.

Particles collected in the suction mechanism part 20E are fed downwardly by the fan 20EF1 together with the air through the exhaust container 20E1, for example, particles of 0.3 µm or more are captured by the HEPA filter in the fan 20EF1. By doing so, the particles are removed. Thus, clean air from which particles are removed is exhausted from the fan 20EF1.

Fig. 18 is a cross sectional view showing one embodiment of the drive portion of the coating head portion 5A and the suction mechanism portion 20E in Fig. 17, wherein 2AB is a support member, 5C1, 5C2 is a dust cover, and 2a2, 2a3 are Linear guide, 5a1 is the base, 2aM is the cable bare, 10CB is the electrical cable / pneumatic flexible piping, SH is the slit hole (intake long hole), SHN is the suction hole, The same code | symbol is attached | subjected to a part, and the overlapping description is abbreviate | omitted.

In Fig. 18, the driving portion of the application head 5A covered with the dustproof covers 5C1 and 5C2 is accommodated on the supporting member 2AB extended in the X direction (FIG. 17 and Fig. 18 is perpendicular to the surface). have. The supporting member 2AB is sandwiched between the X-axis moving mechanism portions 4A and 4B in FIG. The dust cover 5C1 and 5C2 are being fixed to this support member 2AB.

As a drive part of the coating head part 5A, the two linear guides 2a2 and 2a3 parallel to each other extended in the X-axis direction, and the base 5a1 which can move these linear guides 2a2 and 2a3 in the Y-axis direction as rails ), A linear motor movable portion 5a2 for moving the base 5a1 in the Y-axis direction, a linear motor fixing portion 2a1, and a cable bare 2aM. On the side where the application head 5A of the frame 2A is attached, a gap along the X-axis direction is formed between the dustproof covers 5C1 and 5C2, and the lower end portion of the base 5a1 on the application head 5A side. The Z-axis moving table support bracket 50A protrudes outward from the gap between the dustproof covers 5C1 and 5C2. 5 A of application head parts are affixed to the outer part of the dustproof covers 5C1 and 5C2 of this Z-axis moving table support bracket 50A. In the gap portion between the dustproof covers 5C1 and 5C2, rail portions 5C1a and 5C2a which form irregularities in the dustproof covers 5C1 and 5C2, respectively, are formed along this gap (that is, in the Y-axis direction), and Z On the upper and lower surfaces of 50 A of axial movement table support brackets, uneven | corrugated shapes are similarly formed facing these rail parts 5C1a and 5C2a, and rail parts 5C1a and 5C2a are 50 A of these Z axis moving table support brackets. By non-contacting with the concave-convex shape of the upper and lower surfaces of the upper and lower surfaces, these rail portions 5C1a and 5C2a hold the Z axis moving table support bracket 50A from the upper and lower surfaces so as to be held therein, and furthermore, the Z axis moving table support bracket 50A. ) Is guided in the Y-axis direction.

The base 5a1 is guided to the linear guides 2a2 and 2a3 or the rails 5C1a and 5C2a by the drive of the linear motor 5a2 provided on one end side of the supporting member 2AB, and moves in the Y axis direction. Thus, the coating head 5A moves in the Y axis direction.

In addition, a passage is provided from the outside of the dust cover 5C1, 5C2 to the upper surface of the base 5a1 in the dust cover 5C1, 5C2 through the inside of the Z-axis moving table support bracket 50A or the end thereof. The electric cable to the application head 5A and the pneumatic flexible pipe 10CB move through the passage. In the dustproof covers 5C1 and 5C2, wiring such as these electric cables, pneumatic flexible pipes 10CB, linear motors 5a2, and the like are gathered and stored in the cable bare 2aM, and the above-described control unit or pneumatic control unit (not shown) Is connected to. Here, the electric cable includes an encoder signal and a power cable of the Z-axis servo motor 5A1, a signal cable between the applicator, the main controller 9, and the sub-control unit 10, although not shown.

Here, when the coating head portion 5A is moved in the Y-axis direction for application of the paste pattern, the power supply and the signal to the Z-axis servo motor 5A1 or the rangefinder 5A4, which are components of the coating head 5A, are moved. Cables, compressed air, vacuum, and flexible pipes 10CB made of resin for opening the atmosphere are brought into contact with each other and rubbed, and at this time, the material is separated from each surface. That is, particles (dust) are generated. In addition, particles (dust), such as lubricating oil, are generated by friction between the guide balls and the rails of the linear guides 2a2 and 2a3 for guiding the movement in the Y-axis direction of the application head 5A.

For this reason, in this embodiment, the suction mechanism part 20E is provided in the both ends of the support member 2AB, respectively, and these particles are blown in. In the suction mechanism 20E, suction slit holes (i.e., long holes for suction) SH are provided on the substrate 8 side to blow particles generated on the substrate 8 side, and at the same time, support member 2AB. The suction hole SHN is provided so that the gas in the space formed by the dustproof covers 5C1 and 5C2 can also be sucked. In this suction mechanism 20E, gas containing such particles is sucked by the fan 20EF1 shown in FIG. 17, and the sucked gas is discharged through the discharge container 20E1 as described in FIG. .

Moreover, the outside air of the dust cover 5C1, 5C2 is sucked in the space formed by the support member 2AB and the dust cover 5C1, 5C2 from the clearance gap between the dust cover 5C1, 5C2, but by this, 5A) Atmosphere of neighborhood is clean, too

In addition, although the suction mechanism 20E was provided in the both ends of the frame 2A here, it is assumed that it is extended from one end of the frame 2A to the other end in the Y-axis direction, and the plurality of suction mechanisms 20E are provided on the substrate 8 side. By providing the slit holes SH at predetermined intervals, the entire surface of the substrate 8 can be kept clean.

17 and 18, the atmosphere around the nozzle 5A8 due to the particles generated during the paste pattern coating drawing accompanying the movement of the coating head 5A is further cleaned up. It is possible to prevent particles from dropping or adhering to the upper surface of the substrate 8 to stably maintain the clean state during the paste coating operation.

Fig. 19 is a perspective view showing an attachment portion of another specific example of the oscillation preventing mechanism in the embodiment shown in Fig. 1, wherein reference numeral 20E3 denotes an exhaust case, and the same reference numerals are given to the parts corresponding to Fig. 17.

In Fig. 19, this embodiment differs from the embodiment shown in Fig. 17 by providing exhaust cases 20E3 with bellows on both sides of the substrate 8, and exhaust pipes between them and the suction mechanism 20E. It connects to 20E1, and it is comprised so that it may exhaust from the fan 20EHF1 with a HEPA filter provided in the exhaust case 20E3.

This bellows exhaust case 20E3 has a connection surface with the exhaust cylinder 20E1 (upper surface of the case 20E3 shown) formed of bellows, and the exhaust cylinder 20E1 and the case in the X-axis direction. Even if a position shift occurs between 20E3, the bellows can be absorbed.

In addition, the direction of the fan 20EF1 does not include particles in the gas exhausted by the effect of the HEPA filter here, and is set as the moving direction of the frame 2A (that is, the X-axis direction). Similarly to the specific example, the direction may be downward.

In addition, although the frame 2A has the structure shown in FIG. 18, the cover and the suction mechanism part which are not shown similarly may be provided also in Z-axis movement table 5A3 in FIG. Thereby, the particle generated in the vicinity of the nozzle 5A8 can be removed by the HEPA filter.

20 is a cross-sectional view showing another specific example of the suction mechanism part 20E in FIGS. 17 and 19, wherein 3J1 and 3J2 are static electricity removing devices (or ultrasonic vibrators), and the same parts as those in FIG. Overlapping description is omitted by giving a sign.

As shown in Fig. 20, this embodiment is designed to hold the suction mechanism 20E in the embodiment shown in Fig. 18, and to remove or easily peel off the dust adsorbed on the substrate. 3J1, 3J2) are installed. Thereby, the charged particle which fell on the surface of the board | substrate 8 is static-discharged, the adsorption force to the board | substrate 8 is removed, and it is easily attracted from the slit hole SH.

In this specific example, an ultrasonic vibrator may be used instead of the static electricity removing devices 3J1 and 3J2. In this case, the particles falling and adhered to the surface of the substrate 8 are peeled off from this surface and floated, and are easily sucked from the slit hole SH. In addition, although the substrate 8 vibrates due to the intensity of the ultrasonic energy applied to the ultrasonic vibrator, it can be easily sucked by vibrating the dropped particles themselves to open the adhered state.

FIG. 21 is a cross-sectional view showing still another specific example of the suction mechanism 20E in FIGS. 17 and 19, wherein 20F is a pin, and the same reference numerals are given to the parts corresponding to FIG. do.

In FIG. 21, this specific example is provided with a plurality of pins 20F perpendicular to the lower surface of the suction mechanism portion 20E (that is, perpendicular to the X-axis direction) in the specific example shown in FIG.

By providing such pin 20F, the flow of a perpendicular | vertical direction generate | occur | produces alternately in the airflow drawn into the slit hole SH. That is, by providing a plurality of pins 20F in the vertical direction, particles dropped on the surface of the substrate 8 are separated from the surface of the substrate 8 by the static electricity removing devices (or ultrasonic vibrators) 3J1 and 3J2. It floats from the surface of the board | substrate 8 by the horizontal flow and the vertical flow, and makes it easy to suck.

Fig. 22 is a sectional view showing still another specific example of the suction mechanism 20E in Figs. 17 and 19, and the same reference numerals will be given to the parts corresponding to the above-mentioned application drawings, and the overlapping description will be omitted.

In Fig. 22, this specific example is provided by arranging a plurality of suction mechanisms 20E with pins 20F in the X-axis direction, and also has the function of the structural member (support member 2AB) of frame 5A. I had it.

Here, the case where three suction mechanism parts 20E are provided is shown, These are 20E arrange | positioned in the center in these suction mechanism parts 20E, making it easy to absorb the particle by the board | substrate side by installing the fin 20F. Has a suction hole SHN and absorbs the gas in the space formed by the dustproof covers 5C1 and 5C2.

However, this specific example is not limited only to such a configuration, and there are two or more absorbing mechanisms 20E with fins 20F, and at least one of them is a gas in a space formed of the dust cover 5C1, 5C2. It can be absorbed. 20 and 21, the static elimination devices (or ultrasonic vibrators) 3J1 and 3J2 are placed outside the arrangement of the absorption mechanism 20E with the fin 20F in the Y-axis direction. You may install it.

Fig. 23 is a sectional view showing still another specific example of the suction mechanism 20E in Figs. 17 and 19, wherein 3S is an electrostatic adsorption means, and the same reference numerals are given to the parts corresponding to the above drawings. Omit the description.

In FIG. 23, this specific example provided the electrostatic adsorption means 3S on the frame 2A support member 2AB below 50A of Z-axis moving table support brackets which support 5A of application heads. This electrostatic adsorption means 3S adsorb | sucks the particle which came out of the outside of frame 2A by electrostatic force, and can prevent the surrounding air pollution.

Although the example which used one absorption mechanism 20E with the fin 20F was mentioned here as an example, the electrostatic adsorption means 3S is provided in the specific example shown to FIG. 18, FIG. 20-FIG. 22 mentioned above in this way. The same effect can also be obtained.

As mentioned above, although one Embodiment of this invention was described, this invention is not limited to this embodiment, You may carry out as follows. That is, only one base may be provided as a frame, or three or more sets may be provided, and three or more application heads may be provided in one frame.

The paste pattern having a desired shape drawn by the application head may be applied in a zigzag pattern in a plurality of point shapes on the substrate, or may be applied in a wavy or serrated form, or may be applied in a closed curved linear.

In addition, any paste may be applied to a substrate.

Moreover, as a linear motor provided in an application head, what kind and type may be sufficient as it is a structure in which a frame side becomes a fixed part and an application head side becomes a movable part.

In addition, when a plurality of application heads are provided in this manner, when the drive mechanism portion is increased, the necessity of preventing dust generated during the frictional sliding movement of the movable portion also increases, and it is necessary to set the device configuration to this point. Therefore, a paste pattern free of contamination can be formed by providing the dust suction exhaust mechanism in the frame and discharging it out of the apparatus.

As described above, according to the present invention, light weight can be achieved with a simple configuration, and the paste can be applied on the substrate in a precisely desired pattern, and there is no fear of contamination of the substrate.

Further, according to the present invention, even in a simple configuration, it is possible to apply the paste in a pattern of a precisely desired shape on the substrate at stable and high speed.

1 is a schematic perspective view showing one embodiment of a paste applicator according to the present invention;

FIG. 2 is a side view showing one specific example of a frame and its driving mechanism in the paste applicator shown in FIG. 1; FIG.

Fig. 3 is a partial cross sectional view showing one specific example of the coating head and its driving mechanism in the paste applicator shown in Fig. 1;

Fig. 4 is a perspective view showing the positional relationship between an optical telemeter and a nozzle provided at the tip end of paste storage in the coating head shown in Fig. 1;

Fig. 5 is a block diagram showing an example of one embodiment of the main controller and its control system in Fig. 1;

FIG. 6 is a block diagram showing an example of a sub-control unit and its control system in FIG. 1; FIG.

FIG. 7 is a view showing one specific example of a paste pattern applied on a substrate in the embodiment shown in FIG. 1; FIG.

FIG. 8 is a flowchart showing one specific example of an application drawing operation of a paste pattern on a substrate of the embodiment shown in FIG.

FIG. 9 is a diagram for explaining step 500 in FIG. 8; FIG.

FIG. 10 is a flowchart showing step 500 in detail in FIG. 8; FIG.

FIG. 11 is a flowchart showing step 520 in detail in FIG. 10; FIG.

FIG. 12 is a diagram for explaining the setting of an interference region of a frame in the X-axis direction when the paste is applied in the pattern shown in FIG.

FIG. 13 is a diagram for explaining the setting of an interference region of the application head in the Y-axis direction when the paste is applied in the pattern shown in FIG.

FIG. 14 is a diagram showing a method for sending a movement command with respect to the movement of the nozzle shown in FIG. 9; FIG.

FIG. 15 is a diagram showing a method of dispensing a coating command with respect to the paste coating moving process in FIG. 10; FIG.

Fig. 16 is a sectional view when the application head portion is configured to be able to slide in a direction perpendicular to the frame.

Fig. 17 is a diagram showing a configuration in which a suction and discharge mechanism for sucking dust from the substrate surface is provided.

FIG. 18 is a cross-sectional view when the cover is provided on the movable portion of the application head in FIG.

Fig. 19 is a diagram showing the configuration when the exhaust case is provided in Fig. 17;

Fig. 20 is a sectional view of an application head portion when a peeling mechanism for peeling off dust on a substrate surface is provided.

Fig. 21 is a sectional view when a pin is attached to the suction mechanism part.

Fig. 22 is a sectional view when a plurality of suction mechanism portions are provided.

FIG. 23 is a configuration diagram when an electrostatic adsorption mechanism is added in addition to the suction mechanism part of FIG. 21; FIG.

<Explanation of symbols for the main parts of the drawings>

1: trestle

2A, 2B: Frame

3A, 3B: Fixed part

4A to 4D: moving parts

5A to 5D: Application Head

6: board | substrate holding board

7: θ axis rotation table

8: substrate

9: subject fisherman

10: sub-control unit

11: monitor

12: keyboard

Claims (10)

In the paste applicator which apply-draws the paste pattern of a desired shape on the board | substrate mounted on the table, A frame which is movable in one direction in a plane parallel to the surface on which the paste pattern of the substrate mounted on the table is coated and drawn, and is drawn in a direction different from the one direction; A plurality of application heads arranged in the frame, the linear motor being provided to be movable in the stretching direction of the frame, and having a nozzle including a paste container and a paste discharge port for discharging the paste filled in the paste container; The linear motor is controlled to move the frame with respect to the table and to move the plurality of application heads with respect to the frame within the range in which the paste discharge port faces the substrate mounted on the table, A control means for controlling discharge of the paste from the paste discharge ports of the plurality of application heads, A paste applicator, wherein the plurality of coating heads apply and draw a paste pattern having a desired shape on the substrate. The linear motor of claim 1, wherein each of the linear motors of each of the plurality of application heads comprises: A paste applicator, comprising: a magnet provided in the frame in the stretching direction and an armature coil provided in the application head opposite the magnet. 2. The control means according to claim 1, wherein the control means moves one or more of the two application heads along the extending direction of the frame, when one of the two adjacent application heads falls within a preset interference range. And stopping the application head of the other to move the other application head, and after the completion of the movement of the other application head, to control the movement of the one application head. 2. The frame according to claim 1, wherein two or more frames are provided in a parallel relationship with each other, and the control means, when two frames are moved, these two frames when two adjacent frames fall within a preset interference range of each other. And stopping the frame of one of the dogs to move the frame of the other, and controlling the movement of the one of the frames after completion of the movement of the other frame. The paste applicator according to claim 1, wherein a suction mechanism portion for sucking air on and around the substrate for applying the paste is provided on a support member of the moving mechanism portion of the application head. The paste applicator according to claim 5, wherein a peeling mechanism for peeling dust on the substrate is provided between the suction mechanism portions. The paste applicator according to claim 5, wherein the coating head moving mechanism is covered with a cover, and the suction mechanism unit sucks air inside the cover. Applying a paste pattern having a desired shape while changing a relative positional relationship between the substrate and the nozzle while discharging the paste on the substrate and the table for loading the substrate so as to face the discharge port of the nozzle from the discharge port on the substrate. In paste applicator to do, A substrate moving mechanism for moving the substrate in one direction, and a moving mechanism for moving the plurality of coating heads individually in a direction substantially perpendicular to the moving direction of the substrate moving mechanism in parallel with the substrate surface; Two sets of provided coating head support mechanisms are provided, one of the coating head support mechanisms is configured to be movable in the movement direction of the substrate, and the other coating head support mechanism is configured to be fixed in the movement direction of the substrate. The paste applicator characterized by the above-mentioned. The paste applicator according to claim 8, wherein a correction mechanism for moving the nozzle in the same direction as the moving direction of the substrate is provided in the application head. 10. The method of claim 8 or 9, wherein the application head support mechanism configured to be movable in the movement direction of the substrate is configured to drive control not to move in the substrate movement direction when drawing a paste pattern on the substrate. A paste applicator characterized by the above.