CN201841096U - Slurry coating machine for manufacturing slab - Google Patents
Slurry coating machine for manufacturing slab Download PDFInfo
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- CN201841096U CN201841096U CN2010201409501U CN201020140950U CN201841096U CN 201841096 U CN201841096 U CN 201841096U CN 2010201409501 U CN2010201409501 U CN 2010201409501U CN 201020140950 U CN201020140950 U CN 201020140950U CN 201841096 U CN201841096 U CN 201841096U
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Abstract
The project of the utility model aims to provide a slurry coating machine for manufacturing a slab, which has a plurality of coating heads with a simple composition, can realize light weight and depict the slurry pattern of a required shape on a substrate. The slurry coating machine (100) comprises a substrate keeping plate (6), supports (2A, 2B), the coating heads (5A to 5D), a main control part (9) and an auxiliary control part (10). The substrate (8) is placed on the substrate keeping plate (6) which is arranged on a stand (1). The supports can move along the X axis direction by using a linear motor. The coating heads are arranged on the supports and can move along the Y axis direction by using the linear motor. The main control part and the auxiliary control part make the supports and the coating heads respectively move, continuously spray slurry onto the substrate (8) and depict the slurry pattern. Moreover, a plurality of parallel transverse parts which are orthogonal with a plurality of parallel longitudinal parts are fixed on the longitudinal parts to form a groined shape on the substrate keeping plate (6).
Description
Technical field
The present invention relates to a kind of dull and stereotyped slurry coating machine of using of making, it uses in the manufacturing process dull and stereotyped, that semiconductor is assembled, flat board is placed on and sprays on the workbench that the nozzle of slurry relatively disposes, the slurry that is filled in the slurry admission extinguisher is ejected on the flat board from the ejiction opening of nozzle, and change the relative position of dull and stereotyped and nozzle simultaneously and slurry is coated on the flat board continuously, describe to require the pattern (paste patterns) of shape.
Background technology
The known dull and stereotyped slurry coating machine of using of making, the support that the parallel direction of last interarea (face of coating coating slurry) of the flat board (substrate) on having the edge and being placed on workbench etc. moves and be provided with nozzle and the head of slurry admission extinguisher (applicator head), described nozzle has the ejiction opening relative with substrate, and applicator head is arranged to move along the length direction of support.
This dull and stereotyped the manufacturing use the slurry coating machine, makes support and applicator head move to the position that requires on the substrate, and sprays slurry from the ejiction opening of nozzle simultaneously, can describe to require the paste patterns of shape thus on substrate.
For example, the slurry coating machine of record in the patent documentation 1 (the dull and stereotyped slurry coating machine of using of making) constitutes, and Y-axis travelling table (support) and Z axle travelling table (applicator head) move by the travel mechanism that uses ball-screw.
Patent documentation 1:(Japan) spy opens the 2000-93866 communique
For example, when on a plate base, describing a plurality of paste patterns, can possess a plurality of slurry ejiction openings by a plurality of supports and applicator head are set, thereby can describe a plurality of paste patterns efficiently simultaneously.
But, as patent documentation 1 record, when on the slurry coating machine that support and applicator head are moved by the travel mechanism that uses ball-screw, possessing a plurality of supports and applicator head, each support and applicator head all need ball-screw, servomotor, exist the become weight of complicated and device of the structure of slurry coating machine to increase such problem.
In addition, each ball-screw produces thermal expansion error owing to the temperature in the work rises, and therefore, has the such problem of correct Position Control that is difficult for carrying out each applicator head.In addition, also have on a plurality of movable parts that exist on the substrate, produce dust and this dust attached to the problem on the substrate.
Summary of the invention
So, problem of the present invention is to provide a kind of dull and stereotyped slurry coating machine of using of making, it can possess a plurality of slurry ejiction openings and realize lightweight with simple formation, can be on substrate coating coating slurry and describe to require the paste patterns of shape and then the pollution that can alleviate substrate correctly.
In addition, another problem of the present invention is to provide a kind of dull and stereotyped manufacturing use the slurry coating machine, although it has simple formation, also can stablize on substrate, high speed and correctly describe to require the paste patterns of shape.
In order to solve described problem, the dull and stereotyped manufacturing of the present invention used the slurry coating machine, utilizes linear motor to make to possess the applicator head of slurry ejiction opening to move, and describes paste patterns on substrate.
In addition, make vertical parts and cross member form groined type, form the workbench of placing substrate.
In addition, constitute the travel mechanism that covers applicator head with dust cover.
According to the present invention, can constitute the workbench of placing substrate by the structure that makes the groined type of indulging parts and the mutually orthogonal formation of cross member.Thereby, compare with the situation that forms workbench with a plate, the workbench lightweight can be made, and then dull and stereotyped the manufacturing can be made with the lightweight of slurry coating machine.
In addition, can on each of a plurality of supports, configuration have a plurality of applicator heads of slurry ejiction opening, and then can constitute and utilize linear motor that support and applicator head are moved.Thereby, can on substrate, describe paste patterns at high speed.
In addition, available dust cover covers the travel mechanism of applicator head, thereby can prevent dispersing of the dust that produces in the travel mechanism of applicator head.
According to the present invention, a kind of dull and stereotyped slurry coating machine of using of making can be provided, it can possess a plurality of applicator heads and realize lightweight with simple formation, can correctly describe to require the paste patterns of shape on substrate, and then the pollution that can alleviate substrate.
In addition, can provide a kind of dull and stereotyped manufacturing to use the slurry coating machine, although it has simple formation, also can on substrate, stablize, come coating coating slurry at a high speed and with the correct pattern that requires shape.
Promptly, the invention provides a kind of dull and stereotyped slurry coating machine of using of making, coating coating slurry on the substrate on the workbench that is positioned on the pallet and describe to require the paste patterns of shape, it is characterized in that, possess: support, can be placed on described substrate on the described workbench, describe described paste patterns on move along first direction in the face of main surface parallel, and extend along the second direction different with this first direction; A plurality of applicator heads can be arranged on the described support movably along described second direction, possess slurry admission extinguisher and nozzle, and described nozzle is formed with and will be filled in the ejiction opening of the slurry ejection of this slurry admission extinguisher; Applicator head advances and uses linear motor, and described a plurality of applicator head is moved separately with respect to described support; And control module, control described applicator head propelling linear motor, in the scope of described ejiction opening, described a plurality of applicator head is moved separately facing to interarea on described, and, described support is moved, spray slurry continuously from described ejiction opening and describe described paste patterns with interarea on described, described workbench is the fixing structure that forms groined type with a plurality of cross member that should vertical parts quadrature on a plurality of vertical parts of configuration in parallel to each other.
Wherein, described applicator head advances and comprises with linear motor: cradle portion magnet is configured on the described support along described second direction; And the head armature coil, relatively be configured in described a plurality of applicator head respectively with described cradle portion magnet, described a plurality of applicator head is moved separately with the translational speed of 20～500mm/s.
Described dull and stereotyped the manufacturing with the slurry coating facility is equipped with support propelling linear motor, and described support advances and comprises with linear motor: pallet portion magnet is configured on the described pallet along described first direction; And the cradle portion armature coil, being configured on the movable part of the described support of supporting in the mode relative with described pallet portion magnet, described support advances and with linear motor described support is moved with the translational speed of 20～500mm/s along described first direction.
Described dull and stereotyped the manufacturing is equipped with height adjusting unit with the slurry coating facility, and the distance adjustment that described height adjusting unit will be placed on described substrate on the described workbench between the described front end of going up interarea and described nozzle is the height that described paste patterns swells from described substrate.
Wherein, described height adjusting unit can in the scope of 5～80 μ m, regulate described on distance between the front end of interarea and described nozzle.
Described dull and stereotyped the manufacturing is equipped with the air pressure applying unit with the slurry coating facility, and described air pressure applying unit has described slurry admission extinguisher is applied air pressure and regulates the function of described air pressure.
Described air pressure applying unit can be regulated described air pressure in the scope of 0.05～1.00MPa.
Described dull and stereotyped the manufacturing attracts portion of mechanism fully with the slurry coating facility, and portion of described attraction mechanism attracts described applicator head propelling with the linear motor ambient air be placed on the ambient air of the described substrate on the described workbench.
Described dull and stereotyped the manufacturing with in the slurry coating machine disposed two across portion of described attraction mechanism and peeled off the unit, describedly peels off on the described substrate that the unit is used for being positioned on the described workbench accompanying dust and peels off.
The described dull and stereotyped slurry coating machine of using of making, possesses dust cover, described dust cover covers described applicator head and advances with linear motor and the abutment portion of the described applicator head of described armature coil is installed, the air of the inboard that the attraction of portion of described attraction mechanism is covered by described dust cover.
Wherein, described workbench can move along described first direction.
Described dull and stereotyped the manufacturing is equipped with aligning gear with the slurry coating facility, and described aligning gear moves described a plurality of applicator head respectively along described first direction with respect to described support.
Description of drawings
Fig. 1 is the approximate three-dimensional map of an embodiment of the slurry coating machine of expression present embodiment;
Fig. 2 is the stereogram of the structure of expression substrate holding tray;
Fig. 3 is the stereogram of the structure of expression adsorption plate.
Fig. 4 (a) is the side view of a concrete example of movable part of seeing the support of slurry coating machine from Y direction, (b) is the side view of a concrete example of movable part of seeing the support of slurry coating machine from X-direction;
Fig. 5 (a) is a side view of seeing a concrete example of the applicator head of slurry coating machine and travel mechanism thereof from Y direction, (b) is the stereogram of applicator head;
Fig. 6 (a) is that expression is configured in the optical distance measuring instrument on the applicator head and is arranged on the stereogram of the position relation of the nozzle on the front end that slurry takes in, and (b) is the A1 portion enlarged drawing of Fig. 6 (a);
Fig. 7 is the piece figure of a concrete example of expression master control part and control system thereof;
Fig. 8 is the piece figure of a concrete example of vice control part and control system thereof;
Fig. 9 (a) is the figure that is illustrated in a concrete example of the paste patterns that applies on the substrate, (b) is the figure of a concrete example of the false sealing of expression;
Figure 10 is the figure that the substrate of small-sized paste patterns has been described in expression;
Figure 11 is a concrete example of describing to move of paste patterns is described in a flow chart from expression to substrate;
Figure 12 is the coating starting position of expression paste patterns and the figure of origin position;
Figure 13 is a flow chart of at length representing the step 500 of Figure 11;
Figure 14 is a flow chart of at length representing the step 520 of Figure 13;
Figure 15 is the figure of interference range of the applicator head of expression X-direction;
Figure 16 is the figure of interference range of the applicator head of expression Y direction;
Figure 17 is the figure of output of the driving signal of expression support and applicator head;
Figure 18 is the figure of the output intent of the expression slurry coating coating instruction of moving processing;
Figure 19 be expression make applicator head with the rectangular direction of support on carry out the figure of the formation of minute movement;
Figure 20 is the stereogram of a concrete example of expression dust-proof mechanism;
Figure 21 is the profile of a concrete example of expression dust-proof mechanism;
Figure 22 is the figure of the structure of expression applicator head support;
Figure 23 is the figure of a concrete example that expression is provided with the dust-proof mechanism of fumer;
Figure 24 is the profile that possesses the support of electrostatic removal device;
Figure 25 is the profile that disposes the portion of attraction mechanism of lug;
Figure 26 is provided with a plurality of profiles that attract the support of portion of mechanism;
Figure 27 is the profile that possesses the support of Electrostatic Absorption mechanism.
Label declaration
1 pallet
2A, 2B support
2a1,2b1 cradle portion magnet (applicator head advances and uses linear motor)
3a1,3b1 pallet portion magnet (support advances and uses linear motor)
3J1,3J2 electrostatic removal device (peeling off the unit)
30B1 guide base (aligning gear)
30B2 movable base (aligning gear)
30m X-axis adjustment motor (aligning gear)
4a1～4d1 cradle portion armature coil (support advances and uses linear motor)
5A～5D applicator head
5A1～5D1 Z axle servomotor (height adjusting unit)
5A5～5D5 slurry admission extinguisher
5A8～5D8 nozzle
5A9～5D9 ejiction opening
5a1～5d1 abutment portion
5a2～5d2 head armature coil (applicator head advances and uses linear motor)
6 substrate holding trays (workbench)
6aa～6ae cross member
6ba～6bd indulges parts
8 substrates
The last interarea of 8a
9 master control part (control module)
10 sub-control portions (control module)
16 air positive pressure sources (air pressure applying unit)
17 adjusters (air pressure applying unit)
20E attracts portion of mechanism
100 slurry coating machines (the dull and stereotyped slurry coating machine of using of making)
101,102 dust covers
PTa～PTd paste patterns
The specific embodiment
Below, adopt accompanying drawing to explain embodiments of the present invention.
Fig. 1 is the expression dull and stereotyped stereogram made from an embodiment of slurry coating machine (hereinafter referred to as the slurry coating machine) 100 of the present invention, and 1 is pallet, and 2A, 2B are support, 3A, 3B are fixed part, 4A～4D is a movable part, and 5A～5D is an applicator head, and 6 is the substrate holding tray, 7 is crossed roller bearing, 8 is substrate, and 9 is master control part, and 10 are sub-control portion, 11 is monitor, and 12 is keyboard.
In addition, the length direction of establishing pallet 1 is a first direction, to establish width be second direction.
And to set with the first direction be X-axis, be Y-axis with the second direction, be the reference axis of Z axle with the short transverse, and will be made as the θ axle around the rotating shaft of Z axle.
As shown in Figure 1, on pallet 1, be provided with the X-axis travel mechanism that comprises fixed part 3A, 3B and movable part 4A～4D. Fixed part 3A, 3B are fixed on the both ends of for example Y direction of pallet 1 along X-direction, dispose two movable part 4A, 4C on fixed part 3A movably, dispose two movable part 4B, 4D on fixed part 3B movably.And, be provided with support 2A across movable part 4A and movable part 4B along Y direction, in addition, be provided with support 2B along Y direction across movable part 4C and movable part 4D.
That is, support 2A, 2B extend configuration on Y direction.
On support 2A, two applicator head 5A, 5B alignment arrangements movably on the length direction (being Y direction) of support 2A, on support 2B, two applicator head 5C, 5D alignment arrangements movably on the length direction (being Y direction) of support 2B.After, will be used to make applicator head 5A～5D to be called the y-axis shift actuation mechanism along the travel mechanism that the length direction of support 2A, 2B moves.
With the workbench of the zone between fixed part 3A, 3B in the upper surface of pallet 1, and dispose substrate holding tray 6 as placement substrate 8.
In addition, master control part 9 and sub-control portion 10 also can constitute integratedly.
As shown in Figure 2, the substrate holding tray 6 that the slurry coating machine 100 (with reference to Fig. 1) of present embodiment possesses constitutes groined type by a plurality of (among Fig. 2 being 5) cross member 6aa～6ae with the upside that the mode of quadrature is fixed on a plurality of (among Fig. 2 being 4) vertical parts 6ba～6bd.
For example, 4 vertical parts 6ba～6bd are when X-axis disposes in parallel to each other, and 5 cross member 6aa～6ae are fixed on vertical parts 6ba～6bd from upside in parallel to each other along Y-axis.
In addition, in order to improve the rigidity of substrate holding tray 6, for example also cross member 6aa～6ae can being made, the cross section is the U font parts of U word shape.In this case, cross member 6aa～6ae fixes in the mode of a side (the being upside) opening opposite with vertical parts 6ba～6bd.
In addition, adsorption plate 6ca～6ce utilizes not shown fixed part (coupling bolt etc.) to be fixed on each cross member 6aa～6ae, with the opening of the upside that stops up cross member 6aa～6ae.
And substrate 8 (with reference to Fig. 1) is placed on adsorption plate 6ca～6ce.
In addition, the quantity of vertical parts 6ba～6bd and cross member 6aa～6ae is not limited to quantity shown in Figure 2, as long as suitably determine respectively.
Dispose the adsorbing mechanism of absorption substrate 8 (with reference to Fig. 1) on adsorption plate 6ca～6ce.
For example, as shown in Figure 3, adsorption plate 6ca (6cb～6ce) forms hollow form, upper surface be formed with the adsorption hole 61,61,61 that connects with hollow bulb 60 ...
And hollow bulb 60 is connected with tube connector 63 via not shown suction device (vavuum pump etc.).
For example, (6cb～when 6ce) going up, master control part 9 (with reference to Fig. 1) then drives not shown suction device, attracts the air of hollow bulb 60 when substrate 8 (with reference to Fig. 1) is placed on adsorption plate 6ca.Substrate 8 by adsorption hole 61,61,61 ... attract and be attracted to adsorption plate 6ca (on the 6cb～6ce).
By such adsorbing mechanism is configured in adsorption plate 6ca (on the 6cb～6ce), can the substrate 8 (with reference to Fig. 1) that be placed on the substrate holding tray 6 (with reference to Fig. 2) is fixing.
In addition, adsorption plate 6ca shown in Figure 3 (label 64,64 of 6cb～6ce) ... be to be used to make that (6cb～6ce) is fixed on the through hole that the not shown fixed part (coupling bolt etc.) on cross member 6aa～6ae (with reference to Fig. 2) passes through with adsorption plate 6ca.
As shown in Figure 2, the structure by groined type constitutes substrate holding tray 6, thus, and for example compares with the situation of block plate formation substrate holding tray 6, can realize lightweight.
In addition, for example, as long as will be designed to fork shape to the device (not shown) of moving into that slurry coating machine 100 (with reference to Fig. 1) moves into substrate 8 (with reference to Fig. 1), and the pawl of fork shape constituted to embed between cross member 6aa～6ae, just can realize easily to move into the slurry coating machine 100 of substrate 8.
And as shown in Figure 1, substrate holding tray 6 is supported by crossed roller bearing 7, is installed on the pallet 1 of slurry coating machine 100.
In addition, as shown in Figure 2, also can be formation with a plurality of crossed roller bearing 7a supporting substrates holding trays 6.Crossed roller bearing 7a is by making substrate holding tray 6 support at the quadrature supporting 7b that X-direction and Y direction move, on a plurality of circumference that with crossed roller bearing 7 are the center uniformly-spaced to be provided with.
Rotating mechanism with crossed roller bearing 7a and quadrature supporting 7b shown in Figure 2, making substrate holding tray 6 is the center rotation with crossed roller bearing 7, and moves in X-direction and Y direction.
Like this, by utilizing crossed roller bearing 7,7a supporting substrates holding tray 6, substrate holding tray 6 is moved along the rotation of θ direction.
Fig. 4 (a) sees the side view that makes the movable part that support moves in X-direction from Y direction, and Fig. 4 (b) is the figure that sees movable part from X-direction.
And 3a1 is magnet (a pallet portion magnet), and 3a2,3a3 are line slideway, and 3a4 is a linear staff, and 4a1 is armature coil (a cradle portion armature coil), and 4a2 is a detector.
Shown in Fig. 4 (a) and (b), on fixed part 3A, be provided with the magnet 3a1 of pallet portion, line slideway 3a2,3a3 and linear staff 3a4, on movable part 4A, be provided with the magnet 3a1 of pallet portion with fixed part 3A relative and the cradle portion armature coil 4a1 of formation linear motor and the detector 4a2 of linear staff 3a4 along X-direction configuration.
In addition, the magnet 3a1 of pallet portion for example is that a plurality of flat thin magnets are in X-direction configuration in upright arrangement.
That is, the inscape 3an (n=1～4) of the inscape of fixed part 3B and fixed part 3A is identical, in fixed part 3B, will be set at 3bn (n=1～4) with the label of the corresponding inscape of fixed part 3A respectively.
In addition, the inscape 4am (m=1,2) of the inscape of movable part 4B～4D and movable part 4A is identical, in movable part 4B～4D, will be set at 4bm～4dm (m=1,2) with the label of the corresponding inscape of movable part 4A respectively.
And, the magnet 3a1 of pallet portion and cradle portion armature coil 4a1,4c1 combination and form a linear motor, magnet 3b1 of pallet portion and cradle portion armature coil 4b1,4d1 combination and form a linear motor.
Like this, the magnet 3a1 of pallet portion, 3b1 and cradle portion armature coil 4a1～4d1 make up respectively and the linear motor that forms, become to make support 2A, 2B (with reference to Fig. 1) go up the linear motor (support advances and uses linear motor) that moves at pallet 1 (with reference to Fig. 1).
Make support 2A (with reference to Fig. 1) when X-direction moves, for example master control part 9 (with reference to Fig. 1) is carried out Position Control to movable part 4A, 4B, so that the testing result of the linear staff 3a4 of the fixed part 3A that the detector 4a2 of movable part 4A detects is consistent with the testing result of the linear staff 3b4 of the fixed part 3B of the detector 4b2 detection of movable part 4A, the length direction of support 2A is maintained the direction vertical with fixed part 3A, 3B (that is Y direction) accurately.
In addition, master control part shown in Figure 19 couples of movable part 4C, 4D also carry out the Position Control same with movable part 4A, 4B, and support 2B is moved in X-direction.
Fig. 5 (a) is a side view of seeing applicator head from Y direction, and Fig. 5 (b) is the stereogram of applicator head.And, 2a1 is that magnet (cradle portion magnet), 2a2～2a4 are line slideway, 2a5 is a linear staff, and 5a1 is an abutment portion, and 5a2 is armature coil (a head armature coil), 5a3 is a detector, 5A1 is a Z axle servomotor, and 5A2 is the Z axis rail, and 5A3 is a Z axle workbench, 5A4 is that optical distance measuring instrument, 5A5 are slurry admission extinguisher (syringe), and 5A6 is the image recognition video camera.
Below applicator head 5A is described, other applicator head 5B～5D shown in Figure 1 constitutes similarly.
That is to say, the inscape 5Ap of the inscape of applicator head 5B shown in Figure 1～5D and applicator head 5A (p=1～9) and 5aq (q=1～3) are identical, in applicator head 5B～5D, will be set at 5Bp～5Dp (p=1～9) and 5bq～5dq (q=1～3) respectively with the label of the corresponding inscape of applicator head 5A.
In addition, details will be explained below, (5B8～5D8) is nozzle (with reference to Fig. 6 (a)) to label 5A8, (5B9～5D9) is that (5B8～5D8) goes up the slurry ejiction opening that forms to nozzle 5A8, and (5B7～5D7) is the supporting nozzle 5A8 (nozzle support (with reference to Fig. 6 (a)) of 5B8～5D8) to label 5A7 to label 5A9.
In addition, support 2B and support 2A shown in Figure 1 constitute in the same manner.
That is to say that the inscape 2ar (r=1～5) of the inscape of support 2B and support 2A is identical, in support 2B, will be set at 2br (r=1～5) respectively with the label of the corresponding inscape of support 2A.
And, with mode configuration header armature coil 5a2, the 5b2 relative with the cradle portion magnet 2a1 of support 2A, form a linear motor, mode configuration header armature coil 5c2,5d2 with relative with the cradle portion magnet 2b1 of support 2B form a linear motor.
Like this, cradle portion magnet 2a1,2b1 and cradle portion armature coil 5a2～5d2 make up respectively and the linear motor that forms, become to make applicator head 5A～5D (with reference to Fig. 1) go up the linear motor (applicator head advances and uses linear motor) that moves at support 2A, 2B (with reference to Fig. 1).
Shown in Fig. 5 (a) and (b), support 2A constitutes in the mode of the fixed part (fixation side) of the y-axis shift actuation mechanism of supporting applicator head 5A (5B), along top length direction (Y direction) configuration cradle portion magnet 2a1, and, extend abreast at its both sides and cradle portion magnet 2a1 and to be provided with two line slideway 2a2,2a3.And then, extend along the length direction of support 2A in the side of support 2A and to be provided with line slideway 2a4, extend along the length direction of support 2A in the another side and be provided with linear staff 2a5.
In addition, cradle portion magnet 2a1 for example is that a plurality of flat thin magnets are in Y direction configuration in upright arrangement.
In addition, applicator head 5A has the abutment portion 5a1 that disposes across the mode above the support 2A with in X-direction.
At this abutment portion 5a1, head armature coil 5a2 constitutes the applicator head propelling and uses linear motor to dispose with the relative mode of cradle portion magnet 2a1 of support 2A, and is provided with the detector 5a3 of the linear staff 2a5 of support 2A.
Linear staff 2a5 extends setting in the side of support 2A along Y direction, and its detector 5a3 that detects is arranged on the applicator head 5A in the mode relative with linear staff 2a5.Master control part 9 (with reference to Fig. 1), is controlled the applicator head propelling and is used linear motor the testing result that linear staff 2a5 detects based on detector 5a3, and thus, the Y direction to applicator head 5A on support 2A is carried out Position Control.
Shown in Fig. 5 (a), at the abutment portion 5a1 of applicator head 5A, the Z axis rail 5A2 that possesses Z axle servomotor 5A1 is installed, on this Z axis rail 5A2, be provided with the Z axle workbench 5A3 that moves in Z-direction by this Z axle servomotor 5A1.In addition, on this Z axle workbench 5A3, dispose optical distance measuring instrument 5A4, on optical distance measuring instrument 5A4, be provided with slurry admission extinguisher 5A5.
In addition, on Z axle workbench 5A3, be provided with image recognition video camera 5A6.
Z axle servomotor 5A1 is by the control of sub-control portion 10 (with reference to Fig. 1), via Z axle workbench 5A3 make slurry admission extinguisher 5A5, image recognition video camera 5A6 in Z-direction, be that above-below direction moves, described sub-control portion 10 is controlled to be control based on the testing result that is arranged on the optical distance measuring instrument 5A4 on the Z axle workbench 5A3.
Fig. 6 (a) is the stereogram of the position relation of expression optical distance measuring instrument and the nozzle that is located at slurry admission extinguisher front end, and 5A4 is the optical distance measuring instrument, and 5A7 is a nozzle support, and 5A8 is a nozzle.
Shown in Fig. 6 (a), the lower end of slurry admission extinguisher 5A5 is provided with nozzle support 5A7, at its leading section nozzle 5A8 is installed, and this nozzle 5A8 is towards substrate 8 and opening has slurry ejiction opening 5A9 (with reference to Fig. 6 (b)).Slurry admission extinguisher 5A5 and nozzle 5A8 are communicated with via nozzle support 5A7, and the ejiction opening 5A9 of nozzle 5A8 is approaching with the elementary errors of Δ X, Δ Y with the range finding reflection of light point RA of optical distance measuring instrument 5A4 on interarea 8a on the substrate 8.
Optical distance measuring instrument 5A4 is by the vertical range Δ Z (gap) of non-contacting three angular measurement method instrumentations from the leading section of nozzle 5A8 to the last interarea 8a of substrate 8.
Fig. 6 (b) represents details, deviation delta X, the Δ Y of the range finding reflection of light point RA of the leading section of nozzle 5A8 (ejiction opening 5A9) and optical distance measuring instrument 5A4 is set at the effect of the last interarea 8a that is not subjected to substrate 8 concavo-convex (fluctuating), so, among the vertical range Δ Z (gap) of ejiction opening 5A9 that the leading section from nozzle 5A8 forms interarea 8a to the substrate 8, the error that causes of this deviation delta X, Δ Y not almost.
Thereby, sub-control portion 10 (with reference to Fig. 1) controls Z axle servomotor 5A1 (with reference to Fig. 5 (a)) based on the instrumentation result of optical distance measuring instrument 5A4, make nozzle 5A8 consistent with the last interarea 8a of substrate 8 concavo-convex (fluctuating) and move up and down, thus, can always be maintained the vertical range Δ Z (gap) of the leading section of the last interarea 8a of substrate 8 and nozzle 5A8 constant.
Constitute according to this, Z axle servomotor 5A1 is a height adjusting unit of regulating the distance of the last interarea 8a of substrate 8 and nozzle 5A8.
Then, the control system to the electric and air pressure of present embodiment describes.
Fig. 7 is the piece figure of a concrete example of the formation of expression master control part, 4a1～4d1 is the cradle portion armature coil, 5a2～5d2 is the head armature coil, 4a2～4d2,5a3～5d3 is a detector, 7a is a servomotor, and 7b is the θ shaft encoder, and 9a is a microcomputer, 9b is an external interface, 9c is an image processing apparatus, and 9d is a motor controller, and 9e1～9e4 is that X-axis is the linear motor amplifier, 9e5～9e8 is that Y-axis is the linear motor amplifier, 9e9 is θ axle amplifier, and 16 is the air positive pressure source, and 18 is the air negative pressure source, 17,19 is adjuster, and 20 is valve cell.In addition, 15 is hard disk.
Detector 4a2～4d2, the detection output of 5a3～5d3 is transfused to motor controller 9d, export from motor controller 9d corresponding to these driving signals that detect output, by X-axis is linear motor amplifier 9e1～9e4, after Y-axis is linear motor amplifier 9e5～9e8 amplification, supply to cradle portion armature coil 4a1～4d1, head armature coil 5a2～5d2, control movable part 4A～4D (with reference to Fig. 1) thus, the driving of the linear motor of applicator head 5A～5D (with reference to Fig. 1), and to movable part 4A～4D, applicator head 5A～5D carries out Position Control.
By applicator head 5A (5B～5D) on substrate 8 require location-appropriate ground coating coating slurry to describe paste patterns the time, from air positive pressure source 16 or ((5B5～5D5) applies the air pressure of requirement to the slurry admission extinguisher 5A5 of 5B～5D), but the control signal of adjuster 17,19 at this moment and valve cell 20 is exported from external interface 9b to applicator head 5A via adjuster 17,19 and valve cell 20 in air negative pressure source 18.
Be applied to slurry admission extinguisher 5A5 (air pressure of 5B5～5D5), the scope of preferred 0.05～1.00MPa.
Details as described later, support 2A, 2B shown in Figure 1 and applicator head 5A～5D, its responsiveness can suitably change.Thereby, support 2A, 2B and applicator head 5A～5D are during with high speed motion, 9 raisings of master control part are applied to the air pressure of slurry admission extinguisher 5A5～5D5, thereby increase the spray volume of the slurry of ejiction opening 5A9～5D9 (with reference to Fig. 6 (a)) ejection that forms from the front end of nozzle 5A8～5D8 (with reference to Fig. 6 (a)).
On the other hand, when support 2A, 2B and applicator head 5A～5D move with low speed, 9 reductions of master control part are applied to the air pressure of slurry admission extinguisher 5A5～5D5, thus the spray volume of the slurry of the ejiction opening 5A9 that minimizing forms from nozzle 5A8～5D8～5D9 ejection.
Like this, control the air pressure that is applied to slurry admission extinguisher 5A5～5D5, thereby the amount of slurry of the per unit length of paste patterns can be maintained necessarily according to the responsiveness of support 2A, 2B and applicator head 5A～5D.
So the slurry coating machine 100 (with reference to Fig. 1) of present embodiment constitutes, master control part 9 controlled adjusters 17 are regulated 16 malleations of supplying with from the air positive pressure source by adjuster 17, slurry admission extinguisher 5A5～5D5 are applied the air pressure of 0.05～1.00MPa.
Constitute according to this, air positive pressure source 16 and adjuster 17 become the air pressure applying unit that slurry admission extinguisher 5A5～5D5 is applied air pressure and the air pressure that is applied is regulated.
And, as previously mentioned, be the scope of 0.05～1.00MPa with the air pressure settings that is applied on slurry admission extinguisher 5A5～5D5, can guarantee suitable slurry spray volume thus.
Fig. 8 is the piece figure of a concrete example of vice control part, 5A1～5D1 is the Z axle servomotor of applicator head 5A～5D, 5A4～5D4 is the optical distance measuring instrument that is configured on applicator head 5A～5D, 5A1a～5D1a is the Z shaft encoder of applicator head 5A～5D, 10a is a microcomputer, and 10b is an external interface, and 10c is a motor controller, 10d1～10d4 is a Z axle servomotor amplifier, and 21 is hard disk.
As shown in Figure 8, applicator head 5A is (on the 5B～5D), (be provided with Z shaft encoder 5A1a (5B1a～5D1a) on the 5B1～5D1) at Z axle servomotor 5A1, (5B1a～(rotation amount of 5B 1～5D1), it detects output via motor controller 10c input microcomputer 10a 5D1a) to detect Z axle servomotor 5A1 to utilize Z shaft encoder 5A1a.
On the other hand, (the instrumentation result of 5B4～5D4) is via external interface 10b input microcomputer 10a for optical distance measuring instrument 5A4, calculate from the last interarea 8a of the substrate 8 shown in Fig. 6 (a) to nozzle 5A8 that (the vertical range Δ Z (gap) of 5B8～5D8) generates the driving signal that is used to keep predetermined gap.This drives signal and (10d2～10d4) amplification after, supplies to Z axle servomotor 5A1 (5B1～5D1) by Z axle servomotor with amplifier 10d1 via motor controller 10c.Like this, sub-control portion 10 obtains optical distance measuring instrument 5A4 (the instrumentation result of 5B4～5D4) via external interface 10b, operation Z axle servomotor 5A1 (5B1～5D1), (5B3～5D3) move up and down carries out (the Position Control of the Z-direction (above-below direction) of 5B8～5D8) of the nozzle 5A8 shown in Fig. 6 (b) to make the servo workbench 5A3 of the Z axle shown in Fig. 5 (a).
In addition, not shown is that microcomputer 10a possesses: main operational part; The ROM of the handling procedure of height (gap) control of the nozzle when storage is used to describe operation; Result in the main operational part of interim storage, from the RAM of the input data of external interface 10b, motor controller 10c etc.; With input and output portion of external interface 10b, motor controller 10c swap data etc.In addition, store data necessary in the hard disk 21.
In addition, master control part 9 (with reference to Fig. 7) and sub-control portion 10 (with reference to Fig. 8) jointly constitute via external interface 9b, 10b each other, advance cradle portion armature coil 4a1～4d1 (with reference to Fig. 7), applicator head with linear motor to advance head armature coil 5a2～5d2 (with reference to Fig. 7), Z axle servomotor 5A1～5D1 (with reference to Fig. 8) with linear motor to unite transmission driving signal to support.Thus, based on the data of importing and be stored in the RAM of microcomputer 9a (with reference to Fig. 7) in advance from keyboard 12 (with reference to Fig. 1), make applicator head 5A～5D and move at each direction of principal axis of X, Y with respect to the substrate 8 (with reference to Fig. 1) that is placed on the substrate holding tray 6 (with reference to Fig. 1).
In addition, on applicator head 5A～5D (with reference to Fig. 1), make the nozzle 5A8～5D8 (with reference to Fig. 6 (a)) that is supported via Z axle workbench 5A3～5D3 move distance arbitrarily in Z-direction, in it moves, by the air pressure (malleation) after adjuster 17 adjustings, put on slurry admission extinguisher 5A5～5D5 continuously according to the data the RAM that imports and be stored in microcomputer 9a (with reference to Fig. 7) from keyboard 12 (with reference to Fig. 1) via valve cell 20.
Then, spray slurry continuously, on substrate 8, depict the paste patterns that requires shape from ejiction opening 5A9～5D9 of these nozzles 5A8～5D8.
In this slurry coating, as described later, motor controller 9d (with reference to Fig. 7) by master control part 9 (with reference to Fig. 7), often monitor the cradle portion armature coil 4a1～4d1 of each linear motor, the position of head armature coil 5a2～5d2 (with reference to Fig. 7) whether the interference range that presets (plural applicator head mutually too near and distance range between the applicator head that might bump) in, even when having imported wrong driving signal, also can coating be handled and stop, so that each applicator head 5A～5D (with reference to Fig. 1) does not bump by this supervisory programme.
The mobile support of movable part 4A～4D (with reference to Fig. 1) is advanced with the following formation of linear motor: it is fixed part 3A, 3B (with reference to Fig. 4 (a)) that the magnet 3a1 of pallet portion, 3b1 (with reference to Fig. 4 (a)) are configured in fixation side, and cradle portion armature coil 4a1～4d1 (with reference to Fig. 4 (a)) is arranged on becomes the movable part of movable side 4A～4D.
In addition, the mobile applicator head of applicator head 5A～5D (with reference to Fig. 1) is advanced with the following formation of linear motor: it is support 2A, 2B (with reference to Fig. 5 (a)) that cradle portion magnet 2a1,2b1 (with reference to Fig. 5 (a)) are arranged on fixation side, and head armature coil 5a2～5d2 (with reference to Fig. 5 (a)) is arranged on the applicator head 5A～5D that becomes movable side.
According to this formation, the generation of the error that the thermal expansion that can suppress to take place in the driving of existing ball-screw causes, only otherwise send rub-out signal to cradle portion armature coil 4a1～4d1, the head armature coil 5a2～5d2 of movable side, just can reduce the axial site error of XY, can carry out the correct Position Control of each applicator head 5A～5D.
In addition, the formation of the slurry coating machine 100 (with reference to Fig. 1) that constitutes like this is simple and generation dust is few.And, because the magnet 3a1 of pallet portion of fixation side, always act on attractive between the cradle portion armature coil 4a1～4d1 (with reference to Fig. 4 (a)) of 3b1 (with reference to Fig. 4 (a)) and movable side, so, support 2A, the form that 2B (with reference to Fig. 1) draws to pallet 1 (with reference to Fig. 1) side draught for quilt, can not vibrate when mobile, as long as the last interarea 8a (with reference to Fig. 6 (a)) of substrate 8 does not go up and rises and falls, just hardly can change from the last interarea 8a of substrate 8 to the vertical range Δ Z (gap) of ejiction opening 5A9～5D9 (with reference to Fig. 6 (b)) of nozzle 5A8～5D8 (with reference to Fig. 6 (b)) of each applicator head 5A～5D.
Fig. 9 (a) is the figure that is illustrated in a concrete example of the paste patterns of describing on the substrate that is positioned on the slurry coating machine, and PTa～PTd is a paste patterns, and Sa～Sd is the coating starting position of paste patterns PTa～PTd.
Concrete example shown in Fig. 9 (a) is to utilize four applicator head 5A～5D shown in Figure 1 to describe the example of four paste patterns PTa～PTd on substrate 8.
In addition, the paste patterns PTa shown in Fig. 9 (a) is the pattern that applicator head 5A describes, and paste patterns PTb is the pattern that applicator head 5B describes, and paste patterns PTc is the pattern that applicator head 5C describes, and paste patterns PTd is the pattern that applicator head 5D describes.
These paste patterns PTa～PTd is identical shaped (for example rectangle), set as pattern data to the two dimensional path data of end position from coating starting position Sa～Sd separately, the coating starting position Sa of paste patterns PTa, center O with substrate 8 is an initial point, set positions be coordinate (X1, Y1); The coating starting position Sb of paste patterns PTb, in the same manner set positions be coordinate (X2, Y2); The coating starting position Sc of paste patterns PTc, in the same manner set positions be coordinate (X3, Y3); The coating starting position Sd of paste patterns PTd, in the same manner set positions be coordinate (X4, Y4).
At this, the responsiveness during to the paste patterns Pta shown in slurry coating machine 100 (with reference to Fig. 1) depiction 9 (a)～PTd describes.
As mentioned above, movable part 4A～the 4D (with reference to Fig. 1) of slurry coating machine 100 and applicator head 5A～5D (with reference to Fig. 1) move by the driving of linear motor together, with the driving by ball-screw shown in the above-mentioned patent documentation 1 the first-class mobile formation of coating is compared, can be improved responsiveness (translational speed).
For example, for by the mobile formation of ball-screw the time, the responsiveness of support and applicator head is 100～300mm/s, but during for the mobile slurry coating machine 100 (with reference to Fig. 1) of the driving by linear motor, can be in range regulation support 2A, the 2B (with reference to Fig. 1) of 20～500mm/s and the responsiveness of applicator head 5A～5D (with reference to Fig. 1).
Thereby, during the paste patterns PTa of the rectangle shown in the depiction 9 (a) on substrate 8～PTd, master control part 9 (with reference to Fig. 1) is controlled to be support 2A, 2B and applicator head 5A～5D (with reference to Fig. 1): straight line portion is with the high-speed mobile of 300mm/s, and corner part moves with the low speed of 100mm/s.
Like this, the responsiveness of support 2A, 2B and applicator head 5A～5D (with reference to Fig. 1) is controlled to be low speed at corner part, thus can be at corner part coating coating slurry reliably, for example, it is constant can making the live width of paste patterns PTa～PTd in all parts.
In addition, in order to ensure the applying intensity of substrate 8, shown in chain-dotted line among Fig. 9 (b), coating coating slurry and describe false pattern (false sealing) on interarea 8a on the substrate 8 sometimes.
For example, around paste patterns PTa～PTd, describe the vacation sealing DMYa～DMYd of rectangle sometimes, or describe linear vacation sealing DMYx, the DMYy of X-direction and Y direction at the center on each limit of substrate 8.
This false sealing DMYa～DMYd, DMYx, DMYy do not require precision to live width and linearity, so, for example in the slurry coating machine 100 (with reference to Fig. 1) of present embodiment, support 2A, 2B (with reference to Fig. 1) and applicator head 5A～5D (with reference to Fig. 1) are moved with the maximum speed of 500mm/s and describe false sealing DMYa～DMYd, DMYx, DMYy.
Thereby, make the slurry coating machine 100 of the present embodiment that support 2A, 2B and applicator head 5A～5D move by linear motor, compare with the existing slurry coating machine that driving by ball-screw is moved support and applicator head, have an activity duration to shorten such excellent results.
In addition, as shown in figure 10, describe a plurality of (among Figure 10 being 4) small-sized paste patterns PTs1～PTs4 at the remaining area of the substrate 8 of having described paste patterns PTa～PTd sometimes.
In this case, for small-sized paste patterns PTs1～PTs4, support 2A, 2B (with reference to Fig. 1) and applicator head 5A～5D (with reference to Fig. 1) are moved with low speed.
Make the slurry coating machine 100 of the present embodiment that support 2A, 2B and applicator head 5A～5D move by linear motor, with make by ball-screw the coating first-class mobile existing slurry coating machine compare, can regulate the responsiveness of support 2A, 2B and applicator head 5A～5D significantly, therefore, can on substrate 8, describe the paste patterns of various sizes.
Then, with reference to Figure 11 the operation of describing of the paste patterns PTa～PTd shown in the depiction 9 (a) on substrate 8 is described (suitably with reference to Fig. 1～Fig. 9).
On substrate 8, describe the action of paste patterns PTa～PTd, carry out by the 10 control support 2A of master control part 9 and sub-control portion, 2B and applicator head 5A～5D.
As shown in figure 11, at first, behind the power supply of connection slurry coating machine 100 (step S100), master control part 9 is carried out the initial setting (step S200) of slurry coating machine 100.
In this initial setting, master control part 9 drives servomotor 7a makes substrate holding tray 6 move along the rotation of θ direction, is positioned at the benchmark angle of regulation.In addition, master control part 9 moves movable part 4A～4D and applicator head 5A～5D by driving linear motor, make the ejiction opening 5A9～5D9 of the front end of each nozzle 5A8～5D8 move to the origin position of the regulation of prior setting, and, carry out the setting of pattern data (two dimensional path data) from coating starting position Sa～Sd of paste patterns PTa～PTd to end position and location with mark, slurry coating height (for the gap of each applicator head 5A～5D) etc. from the last interarea 8a of substrate 8 to the ejiction opening 5A9～5D9 of the front end of nozzle 5A8～5D8.
These data are for example via keyboard 12 input, and each is imported among the RAM that microcomputer 10a that data are stored in the microcomputer 9a of master control part 9 and sub-control portion 10 possesses.In addition, also can to store the external storage device that is kept at master control part 9, sub-control portion 10 be in the storage mediums such as hard disk 15,21 to the data of being imported.
In this case, data necessary for example can be read from hard disk 15,21 by master control part 9 and sub-control portion 10 when initial setting.
In addition, the origin position of ejiction opening 5A9～5D9 in the XY coordinate system of the front end of nozzle 5A8～5D8 of applicator head 5A～5D, as shown in figure 12, be set at the assigned position Ta～Td outside the substrate 8, even before the coating beginning,, can not pollute substrate 8 from the front end drippage nozzle slurry of nozzle 5A8～5D8 yet.
As mentioned above, the processing of initial setting finishes back (step S200), and then, master control part 9 is fixed on the substrate holding tray 6 substrate 8.That is, make substrate 8 be loaded into (step S300) on the substrate holding tray 6.
For example, master control part 9 drives aforesaid suction device (not shown), and substrate 8 is adsorbed on the substrate holding tray 6.
Then, master control part 9 is carried out the location (step S400) of substrate 8.In this is handled, master control part 9 makes the position that is in step S200 initial setting, and (applicator head 5A～5D of origin position Ta～Td) suitably moves, so that the location that image recognition video camera 5A6～5D6 can photograph the substrate 8 that is placed on the substrate holding tray 6 positions with the mode of mark.
Then, location that each image recognition video camera 5A6～5D6 the takes position of centre of gravity with mark is obtained in the computing of the image processing apparatus 9c by master control part 9, detects the inclination of the θ direction of substrate 8.
Then, master control part 9 makes substrate holding tray 6 drive in the rotation of θ direction of principal axis based on this testing result by servomotor 7a.Come the inclination of the θ direction of correction substrate 8 thus.In addition, the axial margin of error of XY (Δ X1, Δ Y1) can be proofreaied and correct when starting point described later moves.Therefore, the location is stored among the RAM that is kept at microcomputer 9a with the view data of mark.
Back (step S400) is finished in the location of substrate 8, and then, master control part 9 is carried out slurry coating (step S500).
The order of slurry coating mainly is described with reference to Figure 13, and promptly the details of the processing among the step S500 is (suitably with reference to Fig. 1～Fig. 9).
As shown in figure 13, master control part 9 confirms on the substrate 8 whether uncoated pattern (that is, the paste patterns that does not have to describe but also do not describe being arranged) (step S510) is arranged.About the confirmation method that has or not, will explain below at this said uncoated pattern.
Applying the zero hour, whole paste patterns that apply all is the uncoated pattern, therefore, and the processing (step S520) that move the coating starting position that master control part 9 is carried out back.This processing is to make applicator head 5A～5D position mobile processing in the following manner: applicator head 5A～5D is moved, from origin position Ta～Td shown in Figure 12, the ejiction opening 5A9～5D9 of the front end of nozzle 5A8～5D8 of applicator head 5A～5D is relative with coating starting position Sa～Sd of paste patterns PTa～PTd.
Mainly illustrate that with reference to Figure 14 the details of this processing is (suitably with reference to Fig. 1～Fig. 9).
As shown in figure 14, master control part 9 confirms that (at this is that 4 paste patterns PTa～PTd) are identical shaped (step S521) for a plurality of paste patterns as rendered object, if identical shaped (step S521 → Yes), then be judged to be describable paste patterns enters next step.
On the other hand, (step S521 → No), 9 of master control part are not judged to be the paste patterns that can not unify to describe as rendered object, and processing is advanced to step S524 when not being identical shaped as the paste patterns of rendered object.The details of the processing of step S524 will be explained below.
For example, master control part 9 can judge whether whole paste patterns PTa～PTd is identical shaped based on the slurry data that are used to describe paste patterns PTa～PTd.
That is to say that master control part 9 is calculated the coating starting position of each paste patterns, the relative position relation of each corner part based on coordinate separately, thus, whether the whole paste patterns PTa～PTd of decidable is identical shaped.
It all is (step S521 → Yes), judge then whether all paste patterns PTa～PTd can describe (step S522) simultaneously can be according to the identical shaped paste patterns of describing the time that master control part 9 is judged to be paste patterns PTa～PTd.
Setting the decision condition that all paste patterns PTa～PTd can describe simultaneously is, coating starting position Sa, Sb are on the same X-axis, and coating starting position Sc, Sd are on the same X-axis, when X1=X2 and X3=X4 set up, then are the pattern that can describe simultaneously.
(step S522 → Yes), that is, when all paste patterns PTa～PTd can describe simultaneously, 9 of master control part advanced to step S523 with processing when X1=X2 and X3=X4 set up.
For example, coating starting position Sa～Sd according to two paste patterns (PTa and PTb, PTc and PTd) of two paste patterns (PTa and PTc, PTb and PTd) of X-direction adjacency and Y direction adjacency, the front end of each nozzle 5A8～5D8 is during with coating starting position Sa～Sd contraposition, and applicator head 5A～5D has contacted each other possibility (having the distance range of this possibility to be called interference range).Thereby master control part 9 applies starting position Sa～Sd and whether is in the affirmation of the interference range of nozzle (step S523).
Figure 15 is the figure of the interference range of explanation X-direction.
Among Figure 15, the paste patterns that describe is during for the paste patterns PTa shown in Fig. 9 (a)～PTd, for X-direction, in paste patterns PTa, PTb, substrate 8 (=the position of X2) leaving Y-axis becomes coating starting position Sa, Sb with distance X 1 in X-direction.In addition, in paste patterns PTc, PTd, substrate 8 (=the position of X4) leaving Y-axis becomes coating starting position Sc, Sd with distance X 3.During the coating beginning, the position of nozzle 5A8～5D8 of applicator head 5A～5D is set in these coatings starting position Sa～Sd.
At this, when setting interference range XC towards the X-direction of the O of substrate center from these coatings starting position Sa, Sb, Sc, Sd,
(X1-XC)-(X3+XC)＞0
That is,
X1-X3-2XC＞0
The time, applicator head 5C, the 5D of the applicator head 5A of support 2A, 5B and support 2B can not interfere with each other and move.
In addition, interference range XC is waited to determine by the size of the X-direction of applicator head 5A～5D.
Figure 16 is the figure of the interference range of explanation Y direction.
Among Figure 16, Y direction about the paste patterns PTa～PTd shown in Fig. 9 (a), in paste patterns PTa, the position of leaving X-axis with distance Y 1 of substrate 8 becomes coating starting position Sa, in paste patterns PTb, the position of leaving X-axis with distance Y 2 of substrate 8 becomes coating starting position Sb, in paste patterns PTc, the position of leaving X-axis with distance Y 3 of substrate 8 becomes coating starting position Sc, in paste patterns PTd, the position of leaving X-axis with distance Y 4 of substrate 8 becomes coating starting position Sd.
In addition, coating starting position Sa～Sd is set at Y1 and Y3 equates that (Y1=Y3), Y2 and Y4 equate (Y2=Y4).
At this, applying starting position from each when the Y direction of the O of substrate center is set interference range YC, among paste patterns PTa, the PTb,
(Y2-YC)-(Y1+YC)＞0
That is,
Y2-Y1-2YC＞0
The time, applicator head 5A, 5B can not interfere with each other and move.In addition, among paste patterns PTc, the PTd,
(Y4-YC)-(Y3+YC)＞0
That is,
Y4-Y3-2YC＞0
The time, applicator head 5C, 5D can not interfere with each other and move.
In addition, interference range YC is waited to determine by the size of the Y direction of applicator head 5A～5D.
Returning Figure 14 describes, at the paste patterns PTa～PTd that describes on the substrate 8 is identical shapedly (step S521 → Yes), can describe simultaneously that (or not step S523 → Yes), 9 calculating of master control part are not up to the amount of movement (step S525) of coating starting position during the interference range at nozzle for step S522 → Yes) and coating starting position Sa～Sd.
On the other hand, (step S521 → No) or ((step S523 → Yes), 9 of master control part advanced to step S524 with processing when step S522 → No) or coating starting position Sa～Sd were in the interference range of nozzle can not describe simultaneously time when paste patterns PTa～PTd that describes on substrate 8 is not identical shaped.
In this case, whole paste patterns unifications can not be described simultaneously, the paste patterns that master control part 9 can not be unified to describe (NG pattern) is as the uncoated pattern, for example be stored in (step S524) among the RAM, make the applicator head of describing the paste patterns that to describe in separately origin position standby.
And in order to describe describable paste patterns, master control part 9 makes the applicator head of describing this paste patterns move to the coating starting position.That is, according to position deviation calculate each nozzle from the origin position Ta～Td of correspondence shown in Figure 12 to the X of the coating starting position Sa～Sd of the paste patterns of describing, the amount of movement (step S525) of Y direction.
For example, when applicator head 5C, 5D are judged to be " interference is arranged " (step S523 → No), with the side in them for example the paste patterns PTd that describes of applicator head 5D for another applicator head 5C and applicator head 5A, 5B, carry out the processing of above-mentioned step S525 as the uncoated pattern.
In this case, master control part 9 makes applicator head 5D in origin position Td standby.Particularly, master control part 9 is established the position that the Y direction position of applicator head 5D is the Y coordinate of origin position Td.
In addition, from the origin position of the applicator head that applies describable paste patterns to the X of the coating starting position of the paste patterns of describing, the amount of movement of Y direction, following trying to achieve.
For example, be example with applicator head 5A, as shown in figure 12, the position coordinates of its origin position Ta is set at (X011, in the time of Y001), the coating starting position Sa (X1 of the nozzle 5A8 from origin position Ta to this applicator head 5A, Y1) amount of movement LX111, LY111 can followingly calculate.
LX111＝X1-X011
LY111＝Y1-Y001
Like this, calculate the amount of movement (step S525) of all applicator head 5A～5D that also comprise the applicator head relative, it is set (step S526) with the uncoated pattern.
At this, will the amount of movement of the nozzle setting of applicator head 5A～5D be set at respectively:
Wherein, LX is the amount of movement of X-direction, and LY is the amount of movement of Y direction.
In this case, because applicator head 5A, 5B are configured on the support 2A, the amount of movement of the X-direction of applicator head 5A, 5B equates; Because applicator head 5C, 5D are configured on the support 2B, the amount of movement of the X-direction of applicator head 5C, 5D equates.
Based on above setting, the applicator head that master control part 9 is used in describable paste patterns moves the amount of movement of having set (step S527), with the set positions of the front end of the nozzle coating starting position at corresponding paste patterns.
At this, when applicator head 5A～5D was moved, master control part 9 must make the movable part 4A of traversing carriage 2A and movable part 4B move simultaneously.In addition, the movable part 4C of traversing carriage 2B and movable part 4D are moved simultaneously.
With reference to Figure 17 support 2A, 2B and the mobile of applicator head 5A～5D are described.
Master control part 9 (with reference to Fig. 7) generates the driving signal that is used for mobile movable part 4A and movable part 4B by motor controller 9d (with reference to Fig. 7), as the exciting current of supplying with to cradle portion armature coil 4a1～4d1, by the driving signal (exciting current) that is generated being distributed and supplying to cradle portion armature coil 4a1,4b1, be controlled to be movable part 4A and movable part 4B as by a Motor Drive.
Similarly, by the driving signal (exciting current) that is generated by motor controller 9d being distributed and supplying to cradle portion armature coil 4c1,4d1, be controlled to be movable part 4C and movable part 4D as by a Motor Drive.
Like this, master control part 9 makes support 2A and support 2B displacement LX111, LX121 respectively by suitably supplying with exciting current to cradle portion armature coil 4a1～4d1.
In addition, master control part 9 (with reference to Fig. 7) generates the driving signal that is used for mobile applicator head 5A～5D by motor controller 9d (with reference to Fig. 7), as the exciting current of supplying with to head armature coil 5a2～5d2.
Specifically, master control part 9 generates the driving signal that makes applicator head 5A displacement LY111 by motor controller 9d, as the exciting current of supplying with to head armature coil 5a1; Generate the driving signal that makes applicator head 5B displacement LY112 by motor controller 9d, as the exciting current of supplying with to head armature coil 5b1; Generate the driving signal that makes applicator head 5C displacement LY121 by motor controller 9d, as the exciting current of supplying with to head armature coil 5c1; Generate the driving signal that makes applicator head 5D displacement LY122 by motor controller 9d, as the exciting current of supplying with to head armature coil 5d2.
And, supply with exciting current to head armature coil 5a2～5d2.
As mentioned above, in the step S527 of Figure 14,9 couples of motor controller 9d of master control part control, via X-axis is that linear motor is linear motor amplifier 9e5～9e8 with amplifier 9e1～9e4, Y-axis, will drive signal and supply with to cradle portion armature coil 4a1～4d1, head armature coil 5a2～5d2 simultaneously as exciting current.But, in this case, be not included among the step S524 of Figure 14 as the employed applicator head of the paste patterns of uncoated pattern.
In addition, moving of each applicator head 5A～5D also can not carried out the linear interpolation computing, and makes nozzle 5A8～5D8 arrive corresponding paste patterns PTa～PTd coating starting position Sa～Sd separately simultaneously.
And each applicator head 5A～5D moves to coating starting position Sa～Sd (step S527), and nozzle 5A8～5D8 is behind the mobile end of the coating starting position of corresponding paste patterns PTa～PTd Sa～Sd (step S528), and the step S520 of Figure 13 finishes.
Returning Figure 13 describes.As previously mentioned, the nozzle of each applicator head 5A～5D moves to (step S520) after coating starting position Sa～Sd of each the paste patterns PTa～PTd that describes, and sub-control portion 10 carries out the gap of nozzle 5A8～5D8 of applicator head 5A～5D and sets (step S530).
As previously mentioned, " gap " is the height (the vertical range AZ shown in Fig. 6 (b)) from the last interarea 8a of the substrate 8 of coating coating slurry to the front end of nozzle 5A8～5D8, sub-control portion 10 drives Z axle servomotor 5A1～5D1 of each applicator head 5A～5D, Z axle workbench 5A3～5D3 is moved in Z-direction, the position (apart from the vertical range Δ Z of the last interarea 8a of substrate 8, gap) of ejiction opening 5A9～5D9 that is formed at the front end of each nozzle 5A8～5D8 is set at the coating height (thickness) of the paste patterns PTa～PTd of coating.
Usually, the coating height setting of paste patterns PTa～PTd is 20～40 μ m.
In addition, the coating of the sealing of the vacation shown in Fig. 9 (b) DMYa～DMYd, DMYx, DMYy highly is preferably set to about 15 μ m.
The slurry coating machine 100 of present embodiment is in order to ensure this coating height, preferably constitutes the vertical range Δ Z (gap) of the leading section of the last interarea 8a (with reference to Fig. 6 (b)) of substrate 8 and nozzle 5A8～5D8 to be set in 5～80 μ m.
And the position that sub-control portion 10 will be formed at ejiction opening 5A9～5D9 of each nozzle 5A8～5D8 is set at the coating height of paste patterns PTa～PTd in the scope of 5～80 μ m.
In addition, when describing false sealing DMYa～DMYd, DMYx, DMYy on substrate 8, the height of ejiction opening 5A9～5D9 that sub-control portion 10 will be formed at the front end of each nozzle 5A8～5D8 is set at the coating height of false sealing DMYa～DMYd, DMYx, DMYy in the scope of 5～80 μ m.
Specifically, the 10 control motor controller 10c of sub-control portion generate the driving signal that is used to drive Z axle servomotor 5A1～5D1.This driving signal is the exciting current that drives Z axle servomotor 5A1～5D1, after sub-control portion 10 passes through Z axle servomotor amplifier 10d1～10d4 amplification with the exciting current that is generated, supply to Z axle servomotor 5A1～5D1 and driving as driving signal, Z axle workbench 5A3～5D3 is moved in Z-direction.
In addition, sub-control portion 10 utilizes Z shaft encoder 5A1a～5D1a to detect the amount of movement of Z axle workbench 5A3～5D3, and Z axle workbench 5A3～5D3 is moved aptly.
Therefore, for each applicator head 5A～5D, sub-control portion 10 is based on the initial movable range data that each nozzle 5A8～5D8 is set in advance, make the amount of each nozzle 5A8～5D8 decline initial movable distance, utilize its height of optical distance measuring instrument 5A4～5D4 instrumentation that is provided with separately apart from the last interarea 8a of substrate 8.
Then, sub-control portion 10 confirms to each applicator head 5A～5D whether the front end of each nozzle 5A8～5D8 is set at the coating height of paste patterns PTa～PTd, the front end of each nozzle 5A8～5D8 is set under the coating situation highly of paste patterns PTa～PTd, and the processing of this step S530 finishes.
In addition, when the front end of nozzle 5A8～5D8 is not set at the coating height of paste patterns PTa～PTd, 10 in sub-control portion rises or the decline slight distance nozzle 5A8～5D8, utilize optical distance measuring instrument 5A4～5D4 to its distance of each applicator head 5A～5D instrumentation, each applicator head 5A～5D is repeated this rising and decline apart from the slight distance of instrumentation and nozzle 5A8～5D8 to the last interarea 8a of substrate 8.Sub-control portion 10 repeats this processing, all is set to the coating height of paste patterns until the front end of all nozzle 5A8～5D8.
And after sub-control portion sets in 10 end gaps (step S530), then, master control part 9 is carried out slurry coating and is moved processing (step S540).
At this, master control part 9 makes nozzle 5A8～5D8 of the applicator head 5A～5D that can move freely move according to same paths, describes identical paste patterns by all applicator head 5A～5D.
Therefore, master control part 9 with two support 2A, 2B as by Motor Drive and mobile mode output drive signal.
In addition, master control part 9 with four applicator head 5A～5D as by Motor Drive and mobile mode output drive signal.
Specifically, master control part 9 is determined the action of support 2A, 2B, applicator head 5A～5D based on the data (pattern data) that are illustrated in the paste patterns PTa～PTd that describes on the substrate 8, to describe paste patterns by X, Y-axis diaxon.
And, when master control part 9 made support 2A, 2B action, as shown in figure 18, the driving signal (X-direction coating instruction) that motor controller 9d is generated distributed, by X-axis is linear motor amplifier 9e1～9e4 amplification, supplies to cradle portion armature coil 4a1～4d1.
In addition, when master control part 9 is moved applicator head 5A～5D, the driving signal (Y direction coating instruction) that motor controller 9d is generated distributes, and is linear motor amplifier 9e5～9e8 amplification by Y-axis, supplies to head armature coil 5a2～5d2.
And then, master control part 9 control valve unit 20, to slurry admission extinguisher 5A5～5D5 supply with malleation after utilizing adjuster 17 pressure regulation, negative pressure after utilizing adjuster 19 pressure regulation, spray slurry from ejiction opening 5A9～5D9 of nozzle 5A8～5D8.
By so a series of action, ejiction opening 5A9～5D9 of nozzle 5A8～5D8 of each applicator head 5A～5D is with the state relative with substrate 8, move in X, Y direction according to paste patterns, and, slurry admission extinguisher 5A5～5D5 to applicator head 5A～5D applies a little air pressure, makes the ejection of slurry from ejiction opening 5A9～5D9 of each nozzle 5A8～5D8.
And, as previously mentioned, the measured data at the interval of the ejiction opening 5A9～5D9 of nozzle 5A8～5D8 that sub-control portion 10 obtains by the optical distance measuring instrument 5A4～5D4 by applicator head 5A～5D and the last interarea 8a of substrate 8, measure the fluctuating of the last interarea 8a of substrate 8, drive Z axle servomotor 5A1～5D1 of applicator head 5A～5D according to this measured value.Thereby ejiction opening 5A9～5D9 is maintained at separately setting value apart from the height of the last interarea 8a of substrate 8, and slurry coating machine 100 can utilize the slurry of the coating amount of requirement to describe paste patterns PTa～PTd.
As above handle, master control part 9 is depicted the paste patterns PTa～PTd shown in Fig. 9 (a) on substrate 8.Then, master control part 9 judges that often and/or suitably whether each slurry ejiction opening is the terminal of paste patterns PTa～PTd of being determined by the pattern data on the substrate 8, if not its terminal, turns back to the mensuration processing of fluctuating of the last interarea 8a of substrate 8 again.And after, repeat shown in Figure 13 describing and handle (step S540), continue to the terminal that all applicator head 5A～5D arrive paste patterns PTa～PTd.
And when all applicator head 5A～5D arrived the terminal of paste patterns PTa～PTd, sub-control portion 10 drove Z axle servomotor 5A1～5D1 of applicator head 5A～5D, and its nozzle 5A8～5D8 is risen.And the numbering of the paste patterns after master control part 9 will be described to finish is entered into (step S550) among the RAM, returns step S510.
But, as former explanation, by carrying out the step S524 of Figure 14, for example, in its coating starting position, a side of two paste patterns that applicator head interferes with each other is logged among the RAM as the uncoated pattern, therefore, master control part 9 judges to remove whether uncoated pattern (step S510) is arranged applying the paste patterns of finishing, and (step S510 → Yes) described the uncoated pattern to the action of this uncoated pattern execution in step S520～S550 when the uncoated pattern was arranged.
At this moment, there is other applicator head with this applicator head possibility of interference to stop describing of paste patterns and is withdrawn into separately origin position, so can not interfere.And, finish (step S510 → No), finish the slurry coating operation (step S500) among Figure 11 after the coating of all paste patterns.
Then, after the step S500 of Figure 11 finished, then, the substrate 8 that master control part 9 will have been described paste patterns PTa～PTd was discharged to the outside (step S600) of slurry coating machine 100.
That is to say that master control part 9 stops the driving of foregoing suction device (not shown), remove the absorption of substrate 8 to substrate holding tray 6.
And, when on polylith substrate 8, describing identical shaped paste patterns PTa～PTd (step S700 → No), again to the processing of substrate 8 execution in step S300～S700 of describing paste patterns PTa～PTd, thereafter, to all substrates 8, when a series of paste patterns PTa～PTd describe finish the back (step S700 → Yes), a series of operation (step S800) of paste patterns PTa～PTd described in master control part 9 end on substrate 8.
As previously discussed, the slurry coating machine 100 (with reference to Fig. 1) of present embodiment can describe to require the paste patterns PTa～PTd (with reference to Fig. 9 (a)) of shape on substrate 8 (with reference to Fig. 1).
In addition, as shown in figure 10, when on substrate 8, describing small-sized paste patterns PTs1～PTs4, after the slurry coating that finishes step S500 shown in Figure 11, master control part 9 (with reference to Fig. 1) and sub-control portion 10 (with reference to Fig. 1) suitably make support 2A, 2B (with reference to Fig. 1) and applicator head 5A～5D (with reference to Fig. 1) move, and describe small-sized paste patterns PTs1～PTs4.
Its sequence of operation is so long as be that the order of benchmark gets final product with the order of describing paste patterns PTa～PTd.
Then, other embodiment of the present invention (variation) is described.
With respect to this, this variation is with the fixing formation of a support (for example support 2B), does not just want the formation of movable part 4C, 4D.
And, supporting substrates holding tray 6, and constitute and can move in X-direction at the rotatable crossed roller bearing 7 of θ direction of principal axis.In addition, support 2A is removable equally by movable part 4A, 4B and aforesaid formation.
Particularly when substrate holding tray 6 being moved, can constitute and with the speed of the scope of 20～500mm/s substrate holding tray 6 to be moved by not shown linear motor.
In this variation, during X-direction coating coating slurry on substrate 8, substrate 8 is moved and coating coating slurry in X-direction.
The support 2A that can move in X-direction moves before beginning coating, with the interval of the X-direction of applicator head 5A, the 5B of the applicator head 5C, the 5D that determine support 2B and support 2A.
In this variation, have substrate holding tray 6 can be also used as that substrate 8 moves in applying device move into advantages such as device.
In addition, in the above embodiment and variation that has illustrated, applicator head 5A～5D (with reference to Fig. 1) can (with reference to Fig. 1) move along Y direction on support 2A, 2B, but also can carry out the formation of minute movement for applicator head 5A～5D with respect to support 2A, 2B along X-direction.
Figure 19 represents can be with respect to support 2A, the 2B configuration example at the applicator head 5A～5D of X-direction minute movement.
In addition, among Figure 19, be that example describes with applicator head 5A, but other applicator head 5B～5D (with reference to Fig. 1) also is identical formation.
The difference of applicator head 5A shown in applicator head 5A shown in Figure 19 and Fig. 5 (a) is, Z axis rail 5A2 is via being used to make applicator head 5A at the aligning gear of X-direction minute movement and supported by support 2A.In addition, among Figure 19, the identical label of key element mark for identical with the applicator head 5A shown in Fig. 5 (a) and (b) suitably omits detailed explanation.
The aligning gear of applicator head 5A possesses the movable base 30B2 of supporting Z axis rail 5A2, in addition, possesses the guide rail base 30B1 that is used for movably supporting in X-direction movable base 30B2 on support 2A.
That is to say that applicator head 5A is supported by movable base 30B2.
Guide rail base 30B1 comprises: the 30B1a of upper rall portion that is provided with is extended on the top at support 2A along X-direction; Below support 2A, extend the 30B1c of lower guide portion that is provided with along X-direction; And at the supporting arm 30B1b of the 30B1a of the upper rall portion hanger bearing lower guide 30B1c of portion.
And the 30B1c of lower guide portion is mounted in the side that applicator head 5A is installed and extends from support 2A.
Also possess top mobile device 30G1 that moves in upper rall portion 30B1a upper edge X-direction and the bottom mobile device 30G2 that moves in lower guide portion 30B1c upper edge X-direction, movable base 30B2 is supported by 30B1a of upper rall portion and the 30B1c of lower guide portion via top mobile device 30G1 and bottom mobile device 30G2.
Specifically, the 30B2a of upper support portion of movable base 30B2 is fixed on the mobile device 30G1 of top, and the 30B2c of lower support portion is fixed on the mobile device 30G2 of bottom.
And 30B2a of upper support portion and the 30B2c of lower support portion are linked by linking part 30B2b, constitute movable base 30B2.
According to this formation, movable base 30B2 can be with respect to support 2A in the X-direction minute movement.
In addition, the aligning gear of applicator head 5A possesses and is used to X-axis adjustment motor 30m that movable base 30B2 is moved.
For example, the X-axis adjustment is linked by coupling unit 30Cp with rotating shaft and the rotating shaft 30S that motor 30m extends downwards from the X-axis adjustment with the top that motor 30m is configured in the 30B1a of upper rall portion as shown in figure 19.Rotating shaft 30S disposes in the mode of extending downwards, and its lower end is installed in the bearing 30R rotation supporting freely of the 30B1c of lower guide portion.
On rotating shaft 30S, dispose the cam mechanism 30C that the 30B2c of lower support portion that makes movable base 30B2 moves along X-direction.
And by following the spinning movement of X-axis adjustment with the cam mechanism 30C of the rotation of motor 30m, the 30B2c of lower support portion of movable base 30B2 is transferred in X-direction, and movable base 30B2 is in the X-direction minute movement.
According to the aligning gear of such formation, can make the applicator head 5A that supported by movable base 30B2 with respect to support 2A in the X-direction minute movement.
About applicator head 5B shown in Figure 1～5D, also possesses aligning gear with the identical formation of applicator head 5A shown in Figure 19, thus, can finely tune the position of the X-direction of each applicator head 5A～5D, therefore, for example have and to come absorptive substrate 8 by the fine setting of applicator head 5A～5D in the such excellent results of the side-play amount of direction of rotation.
In addition, on substrate 8 (with reference to Fig. 1), describe in the operation of the paste patterns PTa～PTd shown in Fig. 9 (a) for example, comprise that the applicator head 5A (with reference to Fig. 1) of nozzle 5A8 (with reference to Fig. 6 (a)) moves on substrate 8.Therefore, in the structure of existing applicator head 5A, follow the action of applicator head 5A and produce dust, the clean conditions of the area of application is worsened.
Particularly, because slurry coating machine 100 shown in Figure 1 possesses four applicator head 5A～5D, the generating capacity of dust increases.Therefore, for example, producing LCD (Liquid Crystal Display: need under the situation about describing of carrying out paste patterns under the clean environment, have the problem that yield rate reduces, quality is low that causes in the production process in the time of LCD) etc.
So, for example also can on slurry coating machine 100 shown in Figure 1, dust-proof mechanism be set.
Figure 20 is the stereogram of mounting portion of a concrete example of the dust-proof mechanism that possesses of expression slurry coating machine 100 shown in Figure 1,20E is for attracting portion of mechanism, 20E1 is an aiutage, and 20E2 is band HEPA (High Efficiency Particulate Air: the efficiency particulate air) fan of filter.
In addition, Figure 21 is travel mechanism's (y-axis shift actuation mechanism) of expression applicator head and the drawing in side sectional elevation that attracts the concrete example of the 20E of portion of mechanism.
In Figure 20 and Figure 21, the identical label of key element mark for identical with the applicator head 5A shown in Fig. 5 (a) and (b) suitably omits detailed explanation.
In addition, in Figure 20 and Figure 21, illustrate support 2A and applicator head 5A, but support 2B (with reference to Fig. 1) and applicator head 5B～5D (with reference to Fig. 1) also can be identical formation.
As shown in figure 20, between support 2A and movable part 4A, 4B, being respectively equipped with the formation that attracts the 20E of portion of mechanism.
In addition, as shown in figure 21, on support 2A, constitute and the identical applicator head 5A of formation shown in Fig. 5 (a) and (b), also possess not shown applicator head 5B (with reference to Fig. 1).
And, be configured among the applicator head 5A (5B) on the support 2A, mainly be that the y-axis shift actuation mechanism is covered by dust cover 101.
Below, with respect to dust cover 101 with y-axis shift actuation mechanism one side of applicator head 5A inboard as dust cover 101.
In addition, 10CB shown in Figure 21 is the soft pipe arrangement of cable/pneumatics that is used for supplying with to applicator head 5A electricity and air pressure, and SH is elongated hole (the air-breathing slotted hole of using), and SHN is for attracting the hole.
The soft pipe arrangement 10CB of cable/pneumatics shown in Figure 21, to the supply line (not shown) of head armature coil 5a2 supply capability, be used for sending the holding wire distributions such as (not shown) of the detection signal of detector 5a3 (with reference to Fig. 5 (a)) to master control part 9 (with reference to Fig. 1), be clustered in cable support 2aM, be connected with master control part 9, sub-control portion 10 (with reference to Fig. 1), valve cell 20 (with reference to Fig. 7) etc.
Like this, in the y-axis shift actuation mechanism of applicator head 5A, owing to dispose many cables, when applicator head 5A moved, when these cables contacted with each other friction, constituent material was separately peeled off and is produced particulate (dust).
In addition, on the contact site of line slideway 2a2,2a3 and abutment portion 5a1, also produce the particulate of formation such as dispersing of constituent material, lubricating oil.
The dust-proof mechanism that support 2A possesses is to be used to prevent that such particulate is attached on the substrate 8 and the mechanism that the yield rate of production is reduced.
Therefore, utilize dust cover 101 that the y-axis shift actuation mechanism that support 2A goes up the applicator head 5A that constitutes is covered and the formation dust-proof mechanism.
In addition, as shown in figure 21, on abutment portion 5a1, dispose applicator head support 50A.Applicator head support 50A is the parts of cantilever support applicator head 5A, and it constitutes: the end is one side-prominent and Z axis rail 5A2 is installed towards what applicator head 5A was installed.
As shown in figure 22,50A is formed with slot 50A2,50A3 at the applicator head support, and it forms along the groove shape of the moving direction of abutment portion 5a1 (being Y direction).
Slot 50A2 forms the groove shape of one or more (among Figure 22 being two) at the upside of applicator head support 50A, and slot 50A3 forms the groove shape of one or more (among Figure 22 being two) at the downside of applicator head 50A.
The quantity of slot 50A2,50A3 is unqualified, sets with the reasonable quantity of one or more to get final product.
And, slot 50A2 forms above applicator head support 50A, the end of dust cover 101 is engaging movably slidably, and when Y direction moved, applicator head support 50A slided along the end of dust cover 101 and moves applicator head support 50A with abutment portion 5a1.
In addition, slot 50A3 forms below applicator head support 50A, and the end of dust cover 102 is engaging movably slidably.
Like this, the formation that end by dust cover 101 engages with slot 50A2, the end of dust cover 102 engages with slot 50A3 can prevent that the particulate that disperses in the inboard of dust cover 101 from dispersing laterally from the holding section of applicator head support 50A and dust cover 101,102.
In addition, inside at applicator head support 50A constitutes: be formed with the through hole 50A1 that connects from the inboard of dust cover 101 to the outside, the soft pipe arrangement 10CB of cable/pneumatics is drawn out to applicator head 5A (with reference to a Figure 21) side by through hole 50A1 from the inboard of dust cover 101.
And the 20E of portion of attraction mechanism shown in Figure 20,21 attracts the particulate that produces in the inboard of dust cover 101, the particulate that produces on substrate 8.
As shown in figure 20, attract the 20E of portion of mechanism to be provided with the aiutage 20E1 that extends respectively downwards, the front end of these aiutages 20E1 is equipped with the fan 20E2 of band HEPA filter.In addition, fan 20E2 is preferably placed at the position of more leaning on the below than the face of placing substrate 8.
That is to say that dust-proof mechanism shown in Figure 20 comprises: cover the y-axis shift actuation mechanism be configured in the applicator head 5A (SB) on the support 2A dust cover 101, attract the fan 20E2 of the 20E of portion of mechanism, aiutage 20E1, band HEPA filter.
Being collected in the particulate that attracts in the 20E of portion of mechanism is sent downwards by aiutage 20E1 with air by fan 20E2.
According to this formation, for example the above particulate of 0.3 μ m is caught by the HEPA filter in the fan 20E2, particulate can be removed.Then, the clean air of having removed particulate is discharged from fan 20E2.
In addition, as shown in figure 21, attract the 20E of portion of mechanism to be provided with elongated hole SH in substrate 8 sides, the particulate that attracts substrate 8 sides to produce, and, on support 2A, be provided with attraction hole SHN, with the particulate that attracts to produce in the inboard of dust cover 101,102.
And, attract the 20E of portion of mechanism to attract particulate, and catch the particulate that is attracted with the HEPA filter that is configured on the fan 20E2 by the driving of fan 20E2 shown in Figure 20.
In addition, the air in dust cover 101,102 outsides attracted to the inboard of dust cover 101,102 from the gap of dust cover 101,102 and support 2A, and thus, it is clean that near the atmosphere the applicator head 5A also becomes.
In addition, as shown in figure 20, be not limited to and attract the 20E of portion of mechanism to be located at the formation at the both ends of support 2A, as long as will attract the 20E of portion of mechanism to be set at from the end of support 2A extends along Y direction to the other end, and with the interval of regulation the formation of a plurality of elongated hole SH is set in substrate 8 sides, just can makes the whole maintenance cleaning of last interarea 8a of substrate 8.
When dust-proof mechanism is made as formation shown in Figure 20,21, in the describing of paste patterns, by the particulate that attracts the 20E of portion of mechanism just can attract the shift action because of applicator head 5A to produce.
Thereby, can be with the atmosphere purification of nozzle 5A8 (with reference to Fig. 6 (a)) periphery, can prevent also that particulate from falling or attached to the last interarea 8a of substrate 8, can keep the clean state of paste patterns in describing aptly.
Figure 23 is the stereogram of the variation of expression dust-proof mechanism, possesses fumer 20E3.
In addition, among Figure 23, omitted the diagram of movable part 4A, 4B and fixed part 3A, 3B.
The difference of dust-proof mechanism shown in Figure 23 and dust-proof mechanism shown in Figure 20 is: the fumer 20E3 that is provided with the band wrinkle 20E3a of mechanism in the both sides of substrate 8, utilize the aiutage 20E1 will fumer 20E3 and attract to connect between the 20E of portion of mechanism, discharge the air of removing behind the particulate from the fan 20E2 that is located at the band HEPA filter on the fumer 20E3.
The fumer 20E3 of the band wrinkle 20E3a of mechanism is formed with the 20E3a of wrinkle mechanism of softness in its connecting portion upper edge X-direction with aiutage 20E1, even between aiutage 20E1 and fumer 20E3, produce position deviation, also can absorption will be departed from by the 20E3a of this wrinkle mechanism along X-direction.
In addition, the direction setting of fan 20E2 is to utilize the effect of HEPA filter to make the direction that does not comprise particulate in the air that is discharged from, at this, be set at the moving direction (being X-direction) of support 2A, but also can be the same as with dust-proof mechanism shown in Figure 20 downside.
In addition, support 2A and dust cover 101 are formation as shown in figure 21, but also can go up the not shown dust cover of configuration and attract portion of mechanism at Z axle workbench 5A3 (with reference to Figure 21).According to this formation, available HEPA filter is removed the particulate that produces near nozzle 5A8 (with reference to Figure 21).
In addition, shown in Figure 20～23, possess dust cover 101 and attract the slurry coating machine 100 (with reference to Fig. 1) of the 20E of portion of mechanism can carry out suitable design alteration.
As shown in figure 24, also can be for possessing the formation of electrostatic removal device (or ultrasonic vibrator) 3J1,3J2.
For example, as shown in figure 24, to dispose two electrostatic removal device 3J1,3J2 across the mode that attracts the 20E of portion of mechanism in X-direction.Electrostatic removal device 3J1,3J2 peel off the unit and dispose as what will be adsorbed on that particulate on the substrate 8 peels off, are easy to the particulate that is adsorbed on the substrate 8 is peeled off.According to this formation, for example, can remove electricity to the charged corpuscle on the last interarea 8a that drops on substrate 8, cancellation (reducing) is to the absorption affinity of substrate 8, thereby attracts particulate from elongated hole SH easily.
In addition, also can replace electrostatic removal device 3J1,3J2 and use ultrasonic vibrator.Constitute according to this, utilize ultrasonic wave to make to fall and float from the surface of substrate 8, can easily it be attracted from elongated hole SH attached to the particulate on the last interarea 8a of substrate 8.
In this case, can think that also substrate 8 utilization is added in the intensity of the ultrasonic energy on the ultrasonic vibrator and vibrates, make to fall and remove attachment state, thus, attract the 20E of portion of mechanism easily to attract particulate attached to the particulate on the substrate 8 self vibration.
In addition, for example, as shown in figure 25, also can be the formation that possesses a plurality of lug 3F in substrate 8 sides that attract the 20E of portion of mechanism.
As shown in figure 25, the vertical a plurality of lug 3F that erect of lower surface from the 20E of portion of attraction mechanism shown in Figure 24 (promptly relative with substrate 8 face) for example are set (being the Z-direction below).
By such lug 3F is set, be attracted in the air-flow of the air of elongated hole SH, alternately produce flowing of vertical direction (Z-direction).Promptly, by the lug 3F of a plurality of vertical direction is set, the particulate that drops on the last interarea 8a of substrate 8 utilizes electrostatic removal device (or ultrasonic vibrator) 3J1,3J2 to peel off from the last interarea 8a of substrate 8, last interarea 8a from substrate 8 floats these particulates by mobile and the flowing of vertical direction of horizontal direction, therefore, can obtain to attract the 20E of portion of mechanism to attract the effect of particulate easily.
In addition, for example, as shown in figure 26, also can be many formations that attract the 20E of portion of mechanism along the X-direction alignment arrangements that to possess a plurality of lug 3F.According to such formation, can make the function that attracts the 20E of portion of mechanism to have the structural member of support 2A concurrently.
In addition, Figure 26 represents to be provided with three situations that attract the 20E of portion of mechanism, and each attracts the 20E of portion of mechanism to constitute, and equally with the 20E of portion of attraction mechanism shown in Figure 25 is provided with a plurality of lug 3F, thus the particulate of absorptive substrate 8 sides easily.
In addition, for example on the 20E of portion of attraction mechanism of three central configuration that attract the 20E of portion of mechanism, form and attract hole SHN, be used to absorb the particulate of dust cover 101,102 inboards.
In addition, attract the quantity of the 20E of portion of mechanism to be not limited to three, as long as possess the 20E of portion of attraction mechanism that is provided with a plurality of lug 3F more than two, and at least one gas that attracts the 20E of portion of mechanism to constitute absorption dust cover 101,102 inboards gets final product.
In addition, though not shown, constitute also can for, with in X-direction across disposing many modes that attract the 20E of portion of mechanism, possess for example two electrostatic removal devices (or ultrasonic vibrator) 3J1,3J2 (with reference to Figure 24).
And, as shown in figure 27, also can be the formation that possesses Electrostatic Absorption unit 3S.
As shown in figure 27, below the applicator head support 50A that supports applicator head 5A, possesses Electrostatic Absorption unit 3S in the outside of dust cover 101,102.
The fixing means of Electrostatic Absorption unit 3S is unqualified, goes up as long as for example be fixed on support 2A.
In addition, in example shown in Figure 27, possess a 20E of portion of attraction mechanism that is provided with lug 3F, but constitute also can for, for example shown in Figure 21～22, possessing configuration Electrostatic Absorption unit 3S on the support 2A that attracts the 20E of portion of mechanism.
More than embodiments of the present invention are illustrated, but the present invention is not limited to this embodiment, also can followingly implement.
That is, also can be the slurry coating machine that possesses a support, can also be the formation that possesses the support more than three.
In addition, also can be the formation that on a support, possesses the applicator head more than three.
In addition, the paste patterns that applicator head is described on substrate is not limited to the rectangle shown in Fig. 9 (a), can be clathrate, waveform, zigzag etc. also, also can be the closed curve shape.
And the kind of the slurry that applies on substrate is unqualified.
In addition, applicator head that applicator head 5A shown in Figure 1～5D moves is advanced uses linear motor, so long as support 2A, 2B side are that fixed part, applicator head 5A～5D side are the motor of the formation of movable part, its kind and form are just unqualified.
Similarly, the support that movable part 4A～4D is moved advances with the kind and the form of linear motor unqualified.
In addition, as shown in Figure 1, (under the situation of the slurry coating machine 100 of 5B～5D), (particulate that produces in the travel mechanism of 5B～5D) increases applicator head 5A possessing many applicator head 5A.
Thereby, need prevent applicator head 5A (dispersing of the particulate that produces in the travel mechanism of 5B～5D).Therefore, also can be that the formation that not shown dust attracts exhaust gear is set on support 2A.
Attract exhaust gear by not shown dust is set, can form the paste patterns that does not have the pollution that particulate causes.
As described above, according to the present invention, can realize lightweight with simple formation, can be on substrate the pattern coating coating slurry of shape as requested correctly, needn't worry the pollution of substrate.
In addition, according to the present invention,, also can stablize, on substrate, correctly describe to require at high speed the paste patterns of shape even simply constitute.
Claims (12)
1. dull and stereotyped slurry coating machine of using of making, coating coating slurry on the substrate on the workbench that is positioned on the pallet and describe to require the paste patterns of shape is characterized in that possessing:
Support, can be placed on described substrate on the described workbench, describe described paste patterns on move along first direction in the face of main surface parallel, and extend along the second direction different with this first direction;
A plurality of applicator heads can be arranged on the described support movably along described second direction, possess slurry admission extinguisher and nozzle, and described nozzle is formed with and will be filled in the ejiction opening of the slurry ejection of this slurry admission extinguisher;
Applicator head advances and uses linear motor, and described a plurality of applicator head is moved separately with respect to described support; And
Control module, control described applicator head propelling linear motor, in the scope of described ejiction opening, described a plurality of applicator head is moved separately facing to interarea on described, and, described support is moved, spray slurry continuously from described ejiction opening and describe described paste patterns with interarea on described
Described workbench is the fixing structure that forms groined type with indulging a plurality of cross member of parts quadrature on a plurality of vertical parts of configuration in parallel to each other.
2. dull and stereotyped manufacturing the as claimed in claim 1 used the slurry coating machine, it is characterized in that,
Described applicator head advances and comprises with linear motor:
Cradle portion magnet is configured on the described support along described second direction; And
The head armature coil relatively is configured in described a plurality of applicator head respectively with described cradle portion magnet,
Described a plurality of applicator head is moved separately with the translational speed of 20～500mm/s.
3. use the slurry coating machine as claim 1 or described dull and stereotyped manufacturing of claim 2, it is characterized in that possessing support propelling linear motor, described support advances and comprises with linear motor:
Pallet portion magnet is configured on the described pallet along described first direction; And
The cradle portion armature coil is configured on the movable part of the described support of supporting in the mode relative with described pallet portion magnet,
Described support advances and with linear motor described support is moved with the translational speed of 20～500mm/s along described first direction.
4. the dull and stereotyped slurry coating machine of using of making as claimed in claim 1, it is characterized in that, possess height adjusting unit, the distance adjustment that described height adjusting unit will be placed on described substrate on the described workbench between the described front end of going up interarea and described nozzle is the height of described paste patterns from described substrate protuberance.
5. dull and stereotyped manufacturing the as claimed in claim 4 used the slurry coating machine, it is characterized in that, described height adjusting unit can in the scope of 5～80 μ m, regulate described on distance between the front end of interarea and described nozzle.
6. dull and stereotyped manufacturing the as claimed in claim 1 used the slurry coating machine, it is characterized in that possessing the air pressure applying unit, and described air pressure applying unit has described slurry admission extinguisher is applied air pressure and regulates the function of described air pressure.
7. dull and stereotyped manufacturing the as claimed in claim 6 used the slurry coating machine, it is characterized in that described air pressure applying unit can be regulated described air pressure in the scope of 0.05～1.00MPa.
8. the dull and stereotyped slurry coating machine of using of making as claimed in claim 1, it is characterized in that, possess the portion of mechanism that attracts, portion of described attraction mechanism attracts described applicator head to advance with the linear motor ambient air and is placed on the ambient air of the described substrate on the described workbench.
9. dull and stereotyped manufacturing the as claimed in claim 8 used the slurry coating machine, it is characterized in that, disposes two across portion of described attraction mechanism and peels off the unit, describedly peels off on the described substrate that the unit is used for being positioned on the described workbench accompanying dust and peels off.
10. use the slurry coating machine as claim 8 or described dull and stereotyped manufacturing of claim 9, it is characterized in that,
Possess dust cover, described dust cover covers described applicator head and advances with linear motor and the abutment portion that the described applicator head of described armature coil is installed,
Portion of described attraction mechanism attracts the air of the inboard that covered by described dust cover.
11. dull and stereotyped manufacturing the as claimed in claim 1 used the slurry coating machine, it is characterized in that described workbench can move along described first direction.
12. dull and stereotyped manufacturing the as claimed in claim 1 used the slurry coating machine, it is characterized in that possessing aligning gear, described aligning gear moves described a plurality of applicator head respectively along described first direction with respect to described support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201409501U CN201841096U (en) | 2010-03-15 | 2010-03-15 | Slurry coating machine for manufacturing slab |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201409501U CN201841096U (en) | 2010-03-15 | 2010-03-15 | Slurry coating machine for manufacturing slab |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201841096U true CN201841096U (en) | 2011-05-25 |
Family
ID=44036000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201409501U Expired - Fee Related CN201841096U (en) | 2010-03-15 | 2010-03-15 | Slurry coating machine for manufacturing slab |
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| Country | Link |
|---|---|
| CN (1) | CN201841096U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104722444A (en) * | 2013-12-23 | 2015-06-24 | 昆山国显光电有限公司 | Coating device |
| CN105521914A (en) * | 2016-01-06 | 2016-04-27 | 蚌埠市瑞泰汽配制造有限公司 | Glue coater for filter |
-
2010
- 2010-03-15 CN CN2010201409501U patent/CN201841096U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104722444A (en) * | 2013-12-23 | 2015-06-24 | 昆山国显光电有限公司 | Coating device |
| CN104722444B (en) * | 2013-12-23 | 2017-03-29 | 昆山国显光电有限公司 | A kind of apparatus for coating |
| CN105521914A (en) * | 2016-01-06 | 2016-04-27 | 蚌埠市瑞泰汽配制造有限公司 | Glue coater for filter |
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