TW576759B - Paste applicator - Google Patents

Abstract

In the paste applicator, the substrate is placed on a table so as to oppose to the paste outlet of a nozzle, the relative positional relationship between the substrate and nozzle is changed while discharging the paste which is filled in a paste storing cylinder on the substrate from the paste outlet, thereby a paste pattern in a desired shape is formed on the substrate. As this paste applicator frames 2A and 2B capable of shifting in one direction parallel to the upper face of a substrate 8 and a plurality of coating heads 5A-5D provided, so as to be able to shift in an extension direction of the frame by linear motor drive are provide on the table. Each coating head has the nozzle having the outlet port which is opposed to the paste storing cylinder and substrate, and control means 9 and 10 forcing the frames and the each coating head to shift to a desired position on the substrate and to apply the paste to the desired position on the substrate from the outlet of the each nozzle. Thus, the present invention can realize lightweight with a simple structure, so make it possible to exactly apply a paste to a substrate in a desired pattern, and to eliminate contamination on the substrate.

Description

576759 A7 _____B7 V. Description of the invention (> [Background of the invention] (Please read the precautions on the back before filling out this page) The present invention relates to a fluid coating machine, the manufacturing process of flat plates and printed substrates or semiconductor assembly, etc. For use, the substrate is placed on the table against the discharge port of the nozzle, and the fluid filled in the fluid containing cylinder is discharged from the nozzle through the discharge port of the nozzle and the relative position relationship between the substrate and the nozzle is changed. A fluid model for coating a desired shape on a substrate, in particular, a driving mechanism for a coating head including a nozzle. A fluid coating machine is provided with a frame on a worktable and a direction parallel to the upper surface of the substrate. And the coating head is provided with a nozzle in the fluid containing cylinder and the substrate so that the discharge port is oppositely movable in the extending direction of the frame, so that the frame and the coating head are moved to a desired position on the substrate, and the discharge port of the nozzle is on the substrate. The fluid is applied at a desired position, and the application head is driven by a servo motor using a ball screw (refer to Japanese Patent (Patent) JP 2 0 0 0 -9 3 8 6 No. 6). This situation is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, which is provided with a plurality of coating heads, so that the nozzles each apply the fluid to the substrate in the desired pattern to be coated at the same time. Ball screws and servo motors are necessary for each coating head, which complicates the structure and increases the weight of the device. Furthermore, not only that, each ball screw is caused by a rise in temperature during operation and a thermal expansion difference. The accurate position control of each coating head becomes a difficult problem. In addition, there is a problem that dust is present on a plurality of movable parts on the substrate and the substrate is contaminated. [Disclosure of the Invention] The purpose of the present invention is to Provide a fluid coating machine that applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -4-576759 A7 B7 in a simple paper size. V. Description of the invention (} The structure can achieve light weight. The model can be used to coat the fluid correctly, so there will be no contamination of the substrate. (Please read the precautions on the back before filling this page) The other purpose is to provide a fluid coating machine, which, even with a simple structure, can be stably performed on a substrate at a high speed and with a model of a correct desired shape to coat the fluid. In order to achieve the above object, the present invention The fluid coating machine is a fluid coating machine for coating and drawing a fluid model of a desired shape on a substrate mounted on a workbench. The fluid coater is provided with a frame so that the fluid model mounted on the substrate on the workbench is parallel to the surface to be painted. The surface can be moved in one direction and extend in different directions from that one direction; a plurality of coating heads are arranged in the frame, and a linear motor can be moved in the direction of the frame extension, and a fluid containing cylinder is provided. And the nozzle has a fluid discharge port for discharging the fluid filled in the fluid containing cylinder; and a control device so that the fluid discharge port is within a range opposite to the substrate mounted on the table, and moves the frame to the table, At the same time, the plurality of coating heads are moved to the frame, and the fluid discharge port of the plurality of coating heads is used to control the discharge of the fluid; Several coating heads are used to form a fluid model on a substrate to draw a desired shape. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Each of the linear motors of the coating heads is attached to the frame along the extension direction. Made up of coils. In order to achieve the other objects described above, the present invention is the control device in the above configuration, when a plurality of coating heads are moved along the extending direction of the frame, and when two adjacent coating heads are brought into a predetermined mutual interference range, It is to stop one of the two coating heads and to move the other coating head to the standard of the paper (CNS) A4 (210X297 mm) -5- 576759 A7 B7 5. Description of the invention (each action After the movement of the other coating head is finished, control can make one coating head move. (Please read the precautions on the back before filling this page.) Also, as a frame, two or more are arranged in parallel with each other. When the control device moves these frames and causes two adjacent frames to enter a predetermined range of mutual interference, it stops one of the two frames and moves the other frame. After the movement is completed, one of the frames can be controlled to move. Furthermore, even if dust is generated, a dust suction mechanism is provided in the frame to perform dust suction by the suction mechanism. As a structure outside the device, the influence of dust can be eliminated as much as possible. [Simplified description of the drawing] FIG. 1 is a schematic perspective view showing an embodiment of a fluid coating machine according to the present invention. FIG. 2 is a view showing FIG. 1 A side view of a specific example of the frame and its driving mechanism in a fluid coating machine. Printed by the 8th Industrial Cooperative Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 3 shows the coating head and its driving mechanism in the fluid coating machine shown in Figure 1 A partial cross-sectional view of a specific example. Fig. 4 is a perspective view showing the positional relationship between the optical distance meter and the nozzle provided at the front end of the fluid receiving in the coating head shown in Fig. 1. Fig. 5 is a view showing the main part in Fig. 1 A block diagram of a specific example of the control section and its control system. Figure 6 is a block diagram showing a specific example of the sub-control section and its control system in Figure 1. This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297) %) -6- 576759 A7 _______B7______

V. Description of the Invention (X FIG. 7 is a diagram showing a specific example of applying a fluid model to a substrate in the embodiment shown in FIG. 1. FIG. 8 is a diagram illustrating a coating operation of a fluid model of the substrate in the embodiment shown in FIG. A flowchart of a specific example. Fig. 9 is a diagram for explaining step 500 of Fig. 8. Fig. 10 is a detailed flowchart of step 50 of Fig. 8. Fig. 1 is a diagram showing Fig. 10 Step 5 2 0 Detailed flow chart. Figure 12 is used to explain the setting of the interference area of the X-axis direction to the frame when the model shown in Figure 7 is used to apply the fluid. Figure 1 3 is used to explain Figure 7 shows the setting of the interference area of the Y-axis direction of the model when applying the fluid to the coating head. Figure 14 shows the movement instructions for the movement of the nozzle shown in Figure 9 and Figure 15 shows The drawing of the coating instruction for the fluid coating movement processing of Fig. 10 is shown. Fig. 16 is a cross-sectional view when the coating head and the frame can be moved slightly at right angles as a configuration. The structure drawing of the surface for attracting dust. Figure 18 is painted in Figure 17 Cross-sectional view of the cloth head when the movable part is provided with a cover. Fig. 19 is a structural diagram when the exhaust box is provided in Fig. 17. Fig. 20 is a cross-sectional view of a coating head when a peeling mechanism is provided to peel off dust on the substrate surface. 。 This paper size applies Chinese National Standard (CNS) M specification (210X297 mm) '(Please read the precautions on the back before filling out this page) Binding and ordering Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperative 576759 Intellectual Property of the Ministry of Economic Affairs A7 __B7_ printed by the Bureau ’s Consumer Cooperatives V. Description of the invention (“Figure 2 1 is a cross-sectional view when a convex piece is provided in the suction mechanism section. FIG. 2 is a cross-sectional view when a plurality of suction mechanism sections are provided. FIG. 2 3 Structural drawing when an electrostatic absorbing mechanism is added in addition to the attraction mechanism section of Fig. 21. [Explanation of the component numbers] 1 ... stand 2 A, 2 B ... frame 2 AB, 3 b ... support member 2 a 1, 3 a 1 ... magnet 2 a 2 ~ 2 a 4, 3 a 2, 3 a 3 ... linear guide 2 a 5, 3 a 4 ... linear scale 3 A, 3 B ... fixed part 3 J 1, 3 J 2 ... static electricity removal Device, 3 Μ 4 ... cable ball bearing 3 S ... electrostatic attraction device 4 Α ~ 4 D ... movable part 4al, 5a2, 4bl to 4dl, 5b2 to 5d2 ... motor element coil 4a, 4b ... X-axis drive mechanism section 4a2, 5a3 ... detection section 4b2 to 4d2, 5b2 to 5d2 ... detector 5 A to 5D … Coating head 5 A 1,5 B 1,5 C 1,5 D 1 ... Z-axis servo motors 5Ala ~ 5Dla ... Z-axis encoder This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) (Please Read the precautions on the back before filling in this page). Binding and order% -8-576759 A7 B7 V. Description of the invention Guide 5 A 3 «_» Z-axis table 5 A 4 5 B 4, 5 C 4 5 D 4… Optical distance meter 5 A 5 • »» Fluid container 5 A 6… Image recognition camera 5 A 7… Nozzle support 5 A 8 • · Nozzle 5 C 1 5 C 2… Dust cover 5 C 1 a 5 C 2 a… Guide rail 6… Substrate holding plate 7… Θ Axis rotary table 7 a… Servo motor 7 b… Θ axis Encoder 8… Substrate 9… Main control unit 9 a 1 0 a… Microcomputer 9 b 1 0 b… External interface 9 c • • • Image processing device 9 d 1 0 C… Motor controller 9 e 1 9 e 4… X Amplifiers for linear motors for shaft systems 9 e 5 9 e 8 ... γ Amplifiers for linear motors for shaft systems 1 0 X 1 7 ... Auxiliary control unit 1 0 C Β ... Electric cables / pneumatic piping (please first Read the notes on the back and fill in this page again) Binding · -The size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) -9- 576759 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Explanation (, 1 0 d 1 ~ 1 〇d 4 ... amplifier 1 1 ... monitor 1 2 ... keyboard 1 5, 2 1 ... hard disk 1 6 ... positive pressure source 1 7, 1 9 ... regulator 2 0 ... valve unit 2 Ο E… suction mechanism 2 Ο E 1… exhaust cylinder 2 〇 E 2… fan with EPA filter 2 〇 E 3… exhaust tank 3 〇 B 1… fixed base 30B2… movable base 3 0 C… cam section 3 0 C p… connection 30G1, 30G2 ... linear guide 3 m ... X-axis adjustment motor 3 0 R ... bearing 3 0 S ... rotary axis 5 0A ... Z-axis moving table support bracket LX ... X-axis movement amount LY ... The amount of movement in the Y-axis direction PT a ~ PT d ... fluid model S a ~ S d ... coating start position (please read the precautions on the back before filling this page). The size of the paper is bound to the Chinese National Standard (CNS) A4 specification (210X297 mm) -10- 576759 A7 B7 V. Description of the invention ($ S Η ... micro-slit hole S ΗN ... attraction hole (please read the precautions on the back before filling this page) [Implementation mode of the invention] Hereinafter, embodiments of the present invention will be described using drawings. Fig. 1 is a perspective view showing an embodiment of a fluid coating machine according to the present invention. The 1-series stand, 2 A, 2 B-series frames, 3 A, 3 B-series fixed sections, 4A-4D movable sections, 5A-5D coating heads. , 6 series substrate holding plate, 7 series 0 axis rotary table, 8 series substrate, 9 series main control part, 10 series sub control part, 11 series display, 12 series keyboard. In the same figure, the gantry 1 is provided with an X-axis drive mechanism composed of fixed portions 3A, 3B and movable portions 4A to 4D, and frames 2A, 2B. The fixed parts 3 A and 3 B are fixed on the pedestal 1 along the X-axis direction. Two fixed parts 4A and 4C are fixed on the fixed part 3A, and the fixed parts are fixed.

Two movable parts 4 B and 4 D are provided on I 3 B so as to be movable. Moreover, 'Frame 2A spans movable section 4A and movable section 4B (ie, along the Y-axis direction), and frame 2B spans movable section 4C and movable section of the Ministry of Economy ’s Intellectual Property Bureau employee consumer cooperative prints 4D (ie , Along the Y axis). In the frame 2A, the two coating heads 5A and 5B are provided so as to be movable in the length direction (ie, the Y direction) of the frame 2A, and in the frame 2B, the two coating heads 5C and 5D are provided. It can move in the length direction of the frame 2 B (ie, the Y direction). Hereinafter, in the frame length direction of the frames 2A and 2B, a driving mechanism will be referred to as a Y-axis driving mechanism for moving the coating head. This paper size applies to China National Standards (CNS) A4 (210X297 mm) -11-576759 A7 B7____ V. Description of the invention (& Please read the notes on the back before filling this page) On the stand 1, on X The fixed parts 3A and 3B of the shaft driving mechanism are used to mount the substrate holding tray 6 and a 0-axis rotating table 7 is provided in the 0-axis direction to rotate the substrate 8 on the substrate holding tray 6 The display 1 and the keyboard 12 'are installed on the pedestal 1, and the main control unit 9 and the sub control unit 10 are built in. Fig. 2 shows the structure shown in Fig. 1 Part A of the movable part 4 of the X-axis drive mechanism is a side view of the part viewed from the Y-axis direction in the same figure (a), and a view of the part viewed from the X-axis direction in the same figure (b). 3 a 1 series magnets, 3 a 2, 3 a 3 series linear guides, 3 a 4 series linear scales, 4 a 1 series motor element coils, 4 a 2 series detection sections, parts corresponding to Figure 1 are given the same number In Figures 2 (a) and (b), the fixed part 3A of the X-axis driving mechanism is provided with a magnet 3 a 1 parallel to the X-axis direction (the direction perpendicular to the paper surface). Linear guides 3 a 2, 3 a 3, and linear scales are printed by the consumer property cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and 3 a 4, and the movable part 4A is provided with a magnet 3 a 1 fixed to the fixed part 3A. The motor element coil 4 a 1 of the linear motor and the detection part 4 a 2 of the linear scale 3 a 4. The movable part 4 A is moved along the linear guide 3 a 2 and 3 a 3 by the driving force of the linear motor. In the X-axis direction. The fixed portion 3 B in FIG. 1 is also formed in the same structure as the fixed portion 3 A, and the movable portion 4 B is also formed in the same structure as the movable portion 4A, and the detection portion 4 a 2 of the movable portion 4 A is detected. Based on the detection result of the linear scale 3 a 4 of the fixed portion 3 A and the detection result of the linear scale of the fixed portion 3 B detected by the detection portion of the movable portion 4 B, the main control portion 9 is used to control the solid basis ^ Zhang scale is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) -12- 576759 A7 __B7 V. Description of invention () 〇 (Please read the precautions on the back before filling this page) Fixed part 3 A, movable part 4 The linear motor of A and the linear motor of the fixed part 3 B and the movable part 4 B make these test results Position control of the movable parts 4 a and 4 B and good precision in the length direction of the frame 2 A. The fixed parts 3A and 3 B can be aligned with the vertical direction (ie, the γ-axis direction). The movable sections 4C and 4D are also formed in the same structure as the movable section 4a1. Based on the detection results of these detection sections, the main control section 9 can also perform the position control of the movable sections 4C and 4D. Fig. 3 shows a partial view of the coating head in Fig. 1, the same figure (a) is a side view seen from the Y direction, and the same figure (b) is a perspective view.尙 Yes, 2al series magnets, 2a2 to 2a4 series linear guides, 2a5 series linear scales, 5a series 1 abutments, 5a series 2 motor element coils, 5a series 3 detection units, 5 A series 1 Z-axis servo motors , 5 A 2 series Z-axis guide, 5A3 series Z-axis table, 5A4 series optical distance meter, 5A5 series fluid containing cylinder (syringe), 5 A 6 series portrait recognition camera, parts corresponding to Figure 1 are given the same Numbering. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The following describes the coating head 5 A, but the same applies to other coating heads 5B to 5D. In Figs. 3 (a) and (b), the fixing portion (fixed side) of the Y-axis drive mechanism of the coating head 5A (and thus the coating head 5B) is also formed in the frame 2A, along the longitudinal direction of the upper surface thereof. (Y-axis direction) The magnet 2 a 1 is provided with two linear guides 2 a 2 and 2 a 3 on both sides thereof in parallel with each other, and the linear guide 2 a 4 is provided on one side thereof and provided on the other side thereof. Linear scale. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -13- 576759 A7 B7 V. Description of the invention (printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and the coating head 5A, with abutment 5 a 1 is configured to span the frame 2A, and the base 5 a 1 is provided with a motor element coil 5 a 2 for forming a linear motor simultaneously with the magnet 2 a 1 of the frame 2A, and the linear scale of the frame 2 A The detection part 5 a 3 of 2 a 5 The linear scale 2 a 5 is set on the side of the frame 2 A along the Y-axis direction, and the detection part 5 a 3 that detects this is placed on the linear scale 2 a 5 is set to the coating head 5 A. The linear scale 2 a 5 of the detection unit 5 a 3 is used to control the main control unit 9 to control the motor element coil 5 a 2 by the coating head 5 A according to the detection result. A linear motor composed of the magnet 2 a 1 of the frame 2 A and the position control in the Y-axis direction are formed on the frame 2 A. The base 5 a 1 of the coating head 5A is also a z-axis servo motor 5A 1 The Z-axis servo motor 5A 1 is provided with a Z-axis guide 5A2, and the Z-axis guide 5A2 is provided with a Z-axis table 5A3. Further, a distance meter 5A4 is provided on the Z-axis table 5A3, and a fluid storage tube 5A5 is provided on the distance meter 5A4, and a portrait recognition camera 5A is further provided on the z-axis table 5A3. 6. The Z-axis servo motor 5 A 1 is based on the detection result of the distance meter 5 A 4 installed on the z-axis table 5 A 3 and controlled by the auxiliary control unit 10 (Figure 1) through the Z-axis guide rod. 5 A 2 drives the fluid containing tube 5 A 5 and the image recognition camera 5 A 6 in the z-axis direction. The other coating heads 5 B to 5 D shown in FIG. 1 are also formed in the same structure. Optical distance meter not set in Figure 3 (b) The paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)

-14- 576759 A7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ___B7 V. Description of the invention () 2 5 A 4 and the positional relationship between the nozzles at the front end of the fluid containing cylinder 5 A 5 An oblique view, 5 A 7 series nozzle support, 5 A and 8 series nozzles are assigned the same numbers in the parts corresponding to FIG. 3. In the same figure, a nozzle holder 5 A7 is provided at the lower end of the fluid containing cylinder 5 A5, and a nozzle 5A8 for opening the fluid discharge port is mounted on the front end portion thereof toward the substrate 8. The fluid containing cylinder 5A5 and the nozzle 5A8 are connected by a nozzle support 5A7, and the fluid outlet of the nozzle 5A8 is on the upper surface of the substrate 8. The reflection point RA of the distance measurement light with the optical distance meter 5 A 4 is △ X. The difference of △ Y is approached. The distance meter 5 A 4 is measured from the front end (fluid discharge port) of the nozzle 5 A 8 to the surface (upper surface) of the substrate 8 by a vertical (Z-axis direction) distance measurement using a non-contact triangulation method. The deviations Δ X and Δ 计 of the reflection points RA of the light measured with a distance of 5 A 4 from the outlet of the nozzle 5 A 8 are set so as not to be affected by the unevenness of the surface of the substrate 8. The vertical distance (in the Z-axis direction) from the front end (fluid discharge port) of the nozzle 5 A 8 to the surface (upper surface) of the substrate 8 is almost error-free by the offsets ΔX and ΛΥ. Therefore, according to the measurement result of the distance meter 5 A 4, it is used to control the Z-axis servo motor 5 A 1, and the irregularities on the surface of the substrate 8 are combined. The vertical distance (interval) can often be kept constant. The other coating heads 5B to 5D shown in Fig. 1 are also formed in the same manner. Secondly, for the electrical and air pressure control system power port in this embodiment (please read the precautions on the back before filling this page).

This paper size is applicable to China National Standard (CNS) A4 specification (210X 297 mm) -15- 576759 A7 B7 V. Description of invention (h for explanation. (Please read the notes on the back before filling this page) Figure 5 Series A block diagram showing a specific example of the main control section 9 in FIG. 1, 4bl to 4dl, 5b2 to 5d2 series motor element coils, 4 b 2 to 4 d 2, 5 b 3 to 5 d 3 series detectors, 7 a Servo motor '7 b series 0-axis encoder, 9 a series microcomputer, 9 b series external interface, 9 c series day image processing device, 9 d series motor controller, 9 e 丄 ~ 9 e 4 series X-axis system linear Amplifiers for motors, 9 e 5 ~ 9 e 8-series Y-axis system linear motor amplifiers, 9 e 9-series 0-axis amplifiers, 16 series positive pressure sources, 18 series negative pressure sources, 17 series regulators, The 9-series regulator and 20-series valve unit are assigned the same numbers as those in Figure 1. In the same figure, the main control section 9 is equipped with an amplifier 9 e 9 with a servo motor 7 a to drive the microcomputer 9 a and External interface 9 b, image processing device 9 c, motor controller 9 d, amplifier for line motor in X-axis system 9 e 1 ~ 9 e 4, for linear motor in Y-axis system Larger 9 e 5 to 9 e 8 and Θ-axis rotary table 7. There is a β-axis encoder 7 b in the servo motor 7 a. The motor component coils are printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 b 1, 4 c 1, 4 d are the motor element coils of the movable parts 4B, 4C, and 4D in Fig. 1, and the movable part 4A shown in Fig. 2 is equivalent to the motor element coil 4 a 1. The motor element The coils 5b2, 5c2, and 5d2 are the motor element coils of the coating heads 5B, 5C, and 5D in FIG. 1, respectively, and the movable part 5A shown in FIG. 3 corresponds to the motor element coils 5a 2. Also, the detector 4b 2, 4 c 2, 4 d 2, are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) in the size of the movable paper, -16- 576759 A7 B7 V. Description of the invention () 4 (Please read the back Note: Please fill in this page again.) The detectors of Parts 4 B, 4 c, and 4 D (Figure 1) are used to detect the linear scale provided on the fixed parts 3A and 3B. (The fixed part 3A is shown in Figure 2 (b). The linear scale 3 a 4) shown corresponds to the detector 4 a 2 of the movable part 4 A shown in FIG. 2 (b). The detector 5 b 3, 5 c 3, 5d3, is divided The detectors with coating heads 5B, 5C, and 5D (Fig. 1) are used to detect the linear scales provided at the fixed portions 3 A and 3 B (with the fixed portion 3 A, the linear scale shown in Fig. 2 (b)) 3 a 4), corresponding to the detector 5 a 3 of the coating head 5 A shown in FIG. 3 (a). The detection outputs of the detectors 4 a 2 to 4 d 2, 5 a 3 to 5 d 3 are supplied to the motor controller 9 d, and the motor controller 9 d is output according to the drive signals of these detection outputs, so that The X-axis system linear motor amplifiers 9 e 1 to 9 e 4 and the Y-axis system linear motor amplifiers 9 e 5 to 9 e 8 are amplified and supplied to the motor element coils 4al to 4dl, 5a2 to 5d2. The linear motors of the movable sections 4A and 4B and the application heads 5A to 5D are driven and controlled, and the movable sections 4A and 4B and the application heads 5A to 5D are position-controlled. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

The image processing device 9 c is an image recognition camera 5 A 6 (FIG. 3 (b)) installed on the coating head 5 A and an image recognition camera also installed on the coating heads 5 B to 5 D. The image signal on the substrate 8 can be used to position the substrate 8 based on the acquired image processing data. The fluid is applied in a suitable pattern by applying the coating heads 5 A to 5 D at the desired position on the substrate 8 by the positive pressure source 16 or the negative pressure source 18 through the regulators 17, 19, and the valve unit 2. 0External force is required for the air pressure. The paper size is in accordance with Chinese National Standard (CNS) A4 (21〇'〆297mm) -17- 576759 A7 B7 5. Description of the invention (5) Coating head 5 A ~ 5 D fluid containment cylinder (with coating head 5 A, which is shown in Figure 3 fluid containment cylinder 5A5), but the regulator 17 in this case (please read the precautions on the back before filling this page) 1 9 and valve unit 2 The control signal of 〇 is sent from the external interface 9 b. 1 5 series hard drive. The microcomputer 9 a is not shown in the figure, but has an input / output unit and the like. The communication data is used to store a ROM for processing the main calculation unit and a coating program described later. The main calculation unit is composed of the processing results and The external interface 9b, the image processing device 9c, the motor controller 9d, and the like are used to store the input RA, the external interface 9b and the image processing device 9c, the motor controller 9d, and the like. On the hard disk 15, the input data and the data of the processing result of the microcomputer 9a are stored by displaying the fluid model data of the day by the keyboard 12 and the like. Fig. 6 shows a block diagram of the auxiliary control unit 10 in Fig. 1-a specific example, 5B1, 5C1, 5D1 are Z-axis servo motors of coating heads 5B, 5C, 5D, 5B4, 5C4, 5D4 are coating heads 5B, and the Ministry of Economic Affairs Intellectual Property Bureau employee consumer cooperative prints 5C, 5D optical distance meters, 5Ala, 5Bla, 5Cla, 5Dla coating heads 5A, 5B, 5C, 5D2 • Z-axis encoder, 1 0 a microcomputer, 1 〇b External interface, 10 c series motor controller, 10 d 1 to 10 d 4 series are amplifiers for Z-axis servo motors 5A1, 5B1, 5C1, 5D1, 21 series hard disks. In the same figure, the sub-control unit 17 is equipped with a microcomputer 10 a and an external interface 10 b, a motor controller 10 c, and a Z-axis servo motor device 10dl to 10d4o. National Standard (CNS) A4 Specification (210X 297 mm) -18- 576759 Printed by A7 Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs _ _B7 V. Invention Description (36 each coating head 5 A, attached to Z axis servo motor 5 A 1 is provided with a Z-axis encoder 5 A 1 a, the rotation amount of the Z-axis servo motor 5 A 1 is detected by the Z-axis encoder 5 A 1 a, and its detection output is supplied to the external interface 1 0 b Microcomputer 1 〇a. In addition, the measurement result of the optical distance meter 5 A 4 is supplied to the microcomputer 1 〇a through the external interface 1 0 b, and is calculated from the coating surface of the substrate 8 to the nozzle 5A8 (FIG. 4). The distance (nozzle height) is generated in order to form a driving signal for a predetermined nozzle height. This driving signal is amplified by the motor controller 1 0 c and is amplified by the Z-axis servo motor amplifier 10 d 1 and supplied to the Z-axis. Servo motor 5 A 1. In this way, the optical distance is obtained through the external interface 1 0 b The measurement result of 5 A 4 is used to operate the Z-axis servo motor 5 A 1, and the Z-axis table 5A 3 shown in FIG. 5 is moved up and down to perform the Z-axis position control of the nozzle 5A 8 shown in FIG. 4. Similarly, the other coating heads 5 B to 5D have the same structure as the coating head 5A shown in FIG. 4, and the rotation amounts of the respective Z-axis servo motors 5B 1 to 5D 1 are set by the respective Z-axis encoders 5 B 1 a to 5 D 1 a is detected and supplied to the microcomputer 10 a by the motor controller 10 c. The motor controller 10 c is an optical distance meter 5 B to 5D obtained through the external interface 10 b 4 The measurement results of ~ 5 D 4 are used to operate the Z-axis servo motors 5B1 to 5D1, and the Z-axis table corresponding to the Z-axis table 5 A 3 of the coating head 5A shown in FIG. 5 is moved up and down, and these nozzles are performed. Position control in the Z-axis direction. It is not shown in the microcomputer 10 a, but it is equipped with an input / output section (please read the precautions on the back before filling this page). This paper size applies Chinese National Standard (CNS) A4 Specifications (210X297 mm) -19- 576759 A7 B7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Ming (h uses interactive data to store the ROM of the processing program for the main calculation section and the nozzle height control during coating and painting described later, the main calculation section consists of the processing result and the external interface 1 0 b and the motor controller 1 〇 c, etc. used to accommodate the input RA, external interface 10b, and motor controller 10c. The hard disk 21 contains required data. The main control section 9 and the sub-control section 10 are configured as described above, and are connected to the motor element coils 4 a 1 to 4 d 1 of each linear motor that can move in the movable sections 4A and 4B in the X-axis direction (FIG. 1). The motor element coils 5a2 to 5d2 of each linear motor and the Z-axis servo motors 5A1 to 5D1 of the coating heads 5 A to 5 D that can be moved in the Y-axis direction (Figure 1) are passed through the external interface 9 of the main control unit 9 b, 10b is connected to the main control section 9 and the sub-control section 10, whereby the keyboard 12 is input in advance to make the coating heads 5A to 5D based on the data stored in the RAM of the microcomputer 9a (thus, These nozzles) are used to move the substrate 8 held on the substrate holding tray 6 in the X and Y axis directions, and pass through the Z-axis table of the coating heads 5A to 5D (at the coating head 5A, the The Z-axis table 5A3 (Figure 3)) will support the nozzle (in the coating head 5A, the nozzle 5A8 (Figure 4)) to move an arbitrary distance in the Z-axis direction. During its movement, the fluid containing cylinder (in the The coating head 5 A is a fluid containing cylinder 5A5 (Figure 3)) is input by the keyboard 12 to adjust according to the positive pressure of the data stored in the RAM of the microcomputer 9 a 17 is modulated so that the pressure applied and is continued, whereby the front end of a nozzle of the fluid such that the fluid discharge port is discharged, and the substrate 8 of the fluid model to be coated drawn. In addition, in this fluid coating operation, as described later, the paper is controlled by the master. The paper size applies the Chinese National Standard (CNS) A4 (210X297 mm) (please read the precautions on the back before filling this page).

, 1T

-20- 576759 A7 B7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy V. Invention description (Ministry 9 (Figure 5) of the motor controller 9 d, the motor element coils 4 a 1 ~ 4 d of each linear motor 1, The position of 5 a 2 to 5 d 2 is often monitored to check whether it is in a preset interference range (to make the coating heads too close to the distance between the coating heads that may cause conflicts), even when the wrong movement instruction is entered, but With this monitoring, the coating process can be stopped without collision. The linear motors 4 A to 4 D moving in the X-axis direction and 5 A to 5 D coating heads in the Y-axis direction are used to Multiple magnets are juxtaposed. The formed magnet is used as the fixed side (located on the fixed part 3 A, 3 B and the frame 2 A, 2 B side), and the motor element coil is used as the movable side (located on the movable part 4 A ~ 4. D side and coating head 5 A ~ 5 D side), in order to be a form for sharing the fixed side magnets, the previous ball screw drive will not cause a difference due to the thermal expansion generated, as long as the motor element coils on the movable side are not given Error signal is limited, no position in XY direction The error can control the correct position of each coating head 5A ~ 5D. In addition, it has a simple structure and generates less dust. In addition, the attraction force is often applied between the fixed-side magnet and the movable-side motor element coil, so coating The head is restrained on the side of the gantry 1 and does not vibrate during movement. If there is no bend on the main surface (the surface on which the fluid is applied) on the substrate 8, the main surface from the substrate 8 to each coating head 5 The distance from the fluid outlet of A to 5 D hardly changes. Fig. 7 shows a specific example of a fluid model in which < is coated on the substrate 8 in this embodiment. PTa to PTd are fluid models, Sa to Sd It is the coating starting position of fluid model PT a to PT d. (Please read the precautions on the back before filling this page) This paper size is applicable to Chinese National Standard (CNS) M specification (210X 297 mm) -21-576759 A7 B7 V. Description of the invention (h (please read the precautions on the back before filling this page) Take this specific example as shown in Figure 7, with 4 coating heads 5A ~ 5D shown in Figure 1, on the substrate 8 For coating 4 fluid models PTa ~ PTd. The volume models PTa to PTd are of the same shape, and the 2-way path data is set from the coating start positions S a to S d to the end positions. The fluid model PT a's coating start position S a is based on the center 0 of the substrate 8 Is the origin, at the coordinates (X 1, Y 1), the coating start position Sb of the fluid model PTb is also at the coordinates (X2, Y 2), and the coating start position S c of the fluid model PT c is also at the coordinates ( X3, Y3), the coating start position Sd of the fluid model PT d is also set at the coordinates (X4, Y4) respectively. Secondly, according to FIG. 8, for the fluid model of this embodiment, The coating drawing operation will be described. In FIG. 8, first, a step (200) for initial setting of a device for turning on a power source (step 100) is printed by the 8th Industrial Cooperative Cooperative of the Bureau of Intellectual Property, No. 1 Ministry of Economic Affairs, and the initial setting is shown in FIG. 1 In order to drive the servo motor 7 a (FIG. 5), the β-axis rotary table 7 is rotated, and the substrate holding disc 6 is moved to the 0 direction and positioned at a predetermined reference angle. The linear motors 4A, 4B, and coating heads 5A to 5D move the coating heads 5 Α to 5D to set the fluid outlets at the front ends of the nozzles to a predetermined origin position determined in advance, and the fluid model PT a to PT d, 2 yuan path data and positioning mark data from the application start position to the end position, the fluid application height (for each coating head 5 A to 5 D, the fluid outlet from the surface of the substrate 8 to the nozzle front end is This paper size is set according to the Chinese National Standard (CNS) A4 specification (210X297 mm) -22 · 576759 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (5. Distance up to (k)). The input of these data is performed by the keyboard 12, and each input data is stored in the microcomputer 9a (Fig. 5) and the microcomputer 10a (Fig. 6) of the sub control unit 10, At the same time, memory media such as hard disks 15 and 21 stored in the external storage devices of the control units 9, 10 are stored. Yes, the above-mentioned origin position of the XY coordinate system of the fluid outlet of the nozzle tip of the coating heads 5A, 5B, 5C, and 5D is shown in FIG. 9 as the predetermined positions Ta to Td outside the substrate 8, at These nozzle fluids are allowed to drip before the start of coating, but do not contaminate the substrate 8. After the above initial setting (step 200) is completed, the substrate 8 is placed on the substrate holding tray 6 and held (step 300). Next, the positioning of the substrate 8 is performed (step 400). In this process, the image recognition camera with the application heads 5 A to 5 D (in the application head 5 A, the image recognition camera 5 A 6 (FIG. 3)) is performed after the initial setting is performed. The image recognition camera is positioned so that the positioning mark on the substrate 8 mounted on the substrate holding tray 6 can be photographed, and the positioning mark is photographed. The position of the center of gravity of the positioning mark after photography is obtained by the image processing of the main control device 9 (FIG. 5), and the tilt is detected in the 0 direction of the substrate. Based on the detection result, the servo motor 7a is used to The 0-axis rotary table 7 is driven to correct the inclination of the substrate 8 in the 0 direction. In addition, the error points in the XY axis direction (△ X 1, △ Y 1) are corrected when the starting point described later is moved. Therefore, please make sure to read (please read the precautions on the back before filling in this page). This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -23- 576759 Printed by A7 __B7 of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy R A Μ in the microcomputer 9 a and is stored. After the positioning of the substrate 8 in step 400 is finished, the fluid coating operation is performed next (step 500). This will be described with reference to FIG. 10 In the same figure, first, to confirm whether there is an uncoated model on the substrate 8 (step 5 10) (that is, it is necessary to apply a coating, but whether there is a model for uncoated drawing). For the presence or absence of an uncoated model, As described below, at the beginning of coating, the entire pattern to be coated is not coated, so it moves to the next starting point (step 5 2 0). This system moves the coating heads 5A to 5D, as shown in FIG. 9 Above origin position T a to T d at the application start positions S a to S d of the fluid model PT a to PT d so that the fluid outlets at the nozzle tips of the application heads 5A to 5D can be opposed, so that these application heads 5 A to 5 D The process of positioning movement. This will be explained according to Figure 11. In the same figure, first, the model used to confirm the drawing object (here, four models) is the same shape (step 521). If the same model , It is also used to confirm the model that can be coated (step 5 2 2). The conditions for determining coating at the same time are that the coating start point positions S a and Sb are on the same X axis, and the coating start point positions Sc and Sd are required. On the same X axis, when X1 = X2 and X3 = X4 are established, they can be coated at the same time. When all models can be coated at the same time, they are close to two or more coating start positions, and the nozzles are made separately. Coating head with position attached to the front end (please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) -24- 576759 A7 ____B7_ V. Description of the invention (^ ( Please read the notes on the back before filling in this ) There is a possibility that the nozzles and the nozzles collide with each other (the distance range with such a possibility is called the interference range), and the nozzles are confirmed to be in the interference range at the coating start positions S a to S d (step 5 2 3) Fig. 12 is a diagram for explaining the range of interference in the X-axis direction. In the same figure, the fluid model to be applied for the fluid models PT a to PT d shown in Fig. 7 is taken in the X-axis direction with the fluid model PT a, PTb is a position where the center 0 of the substrate 8 is separated by a distance XI (= X2) in the X-axis direction to form the coating start positions Sa and Sb. The fluid models P T c and P T d form the coating start positions S c and Sd at positions separated by a distance X3 (= X4) from the center 0 of the substrate 8. At the beginning of coating, the nozzles of the coating heads 5A, 5B, 5C, and 5D are respectively formed at these coating start positions S a, S b, S c, and S d °, and the coating start positions are thereby set. Sa, Sb, Sc, and Sd are set to the center of the substrate in the X-axis direction to set the interference range. Therefore, (X 1-X C)-(X3 + XC) < 0 printed by the cooperative of employees of the Intellectual Property Bureau of the Ministry of Economic Affairs, ie,

When Xl-X3-2XC > 0, the coating heads 5A and 5B on the frame 2A and the coating heads 5C and 5D on the frame 2B can operate without interference. This paper size applies the Chinese National Standard (CNS) A4 specification (210X29 * 7mm) -25- 576759 A7 _B7_ V. Description of the invention (Moxibustion 3 Figure 1 3 is used to explain the interference range of the Y-axis direction. The same figure In the case of the fluid models PT a to PT d shown in FIG. 7, in the Y-axis direction, the model PT a is formed from the center 0 of the substrate 8 so that only the separation distance Y 1 forms the coating start position S a to coat the model. PT b is the coating start position Sb formed by the center 0 of the substrate 8 only at the separation distance Y 2 and the coating model PTc is formed by the center 0 of the substrate 8 only the separation distance Y 3 at the coating start position S c The coating model PT d is formed from the center 0 of the substrate 8 so that only the separation distance Y 4 forms the coating start position S d. The interference range YC is set from the coating start position toward the substrate center 0 respectively. With the model PT a 、 PT b system (Y2-YC)-(Y1 + YC) > 〇 (Please read the notes on the back before filling this page) Binding and ordering Υ r—Η Υ

ο > C Y

Printed by the Intellectual Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, which can be interfering with each other Β series 5 d AT 5 p head, cloth c coating τ, ρ

Y

CY ο > C Υ + 3 Υ This paper size is applicable to Chinese National Standard (CNS) A4 specification (21 × 297 mm) -26- 576759 Printed by A7, B7, Employee Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs (When i4 Y4-Y3-2YC > 0, the coating heads 5 C and 5D can operate without interfering with each other. For all conditions to satisfy steps 5 2 1 to 5 2 3 in Figure 1 1 (determination of Yes) The model is processed in the next step 5 2 5 but does not satisfy one of the conditions of these steps 5 2 1 ~ 5 2 3 (determination of N 0), then all models cannot be coated at the same time. One of the two models that cannot be coated is used as an uncoated model to keep the memory (step 5 2 4), and the other party is a model that satisfies all the conditions of step 5 2 1 to 5 2 3 As a coatable, the coating heads for coating the models are waiting at the origin positions respectively. In order to move the coating heads for coating the coatable models, the nozzles are moved from the proper origin position to the coating as shown in FIG. 9. Move the X and Y axis directions up to the coating start position of the model The amount is calculated from the position deviation (step 525). Now, for example, the application heads 5C and 5D are determined as "interference" (step 523), then one of these, for example, the application head 5D is For the uncoated model, the above-mentioned step 525 is performed on the other coating heads 5 C and 5A and 5B. In addition, from the origin position of the coating head for coating the coatable model to the coating start position of the coated model The amount of movement in the X and Y axis directions up to this point is obtained as follows. Now, for example, taking the coating head 5 A as an example, and setting the position coordinates of the origin position T a as (X 0 1 1, Y 0 1 1), then the origin position (please read the notes on the back before filling this page). The size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) -27- 576759 A7 B7 V. Invention Explanation (The moving amount L3 to the coating start point ga (X1, Y1) of the nozzle 5 A 8 of the coating head 5 A, LXiii, Yi Ya Gong Gong, are LXlll = Xl-X〇ll > LYl11 = Yi- γ 〇1 1 can be easily calculated. In this way, it also includes the coating head for the uncoated model. The moving amounts of the coating heads 5A to 5D (step 525) and set them (step 526). Therefore, the set moving amounts of the nozzles of the coating heads 5A to 5D are respectively set as the coating heads 5A: (LX111, LY111) coating Head 5B: (LX112, LY112) Coating head 5C: (LX121, LY121) Coating head 5D: (LX122, LY122) However, LX is the amount of movement in the X-axis direction, and LY is the amount of movement in the Y-axis direction. According to the above setting, the coating head used for the coatable mold is moved only by the set moving amount, and the tip of these nozzles is set to the appropriate coating start position of the mold (step 5 2 7). Therefore, when the coating head is moved, the motor element coils 4a1, 4a2 for driving the movable parts 4A, 4B of the frame 2A of the Y-axis moving mechanism must be driven simultaneously. In addition, the motor element coils 4a1, 4a2 for driving the movable portions 4C, 4D of the frame 2B of the Y-axis moving mechanism must also be driven simultaneously. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) --------- install-(Please read the precautions on the back before filling out this page) Order the staff of the Intellectual Property Bureau of the Ministry of Economy Printed by the cooperative -28- 576759 A7 B7 V. Description of the invention (k (please read the precautions on the back before filling in this page) Now, as to move the coating heads 5A ~ 5D, explain it according to Figure 14 (here 4 a 1 to 4 d 1, 5 a 2 to 5 d 2 are the motor element coils of the linear motor shown in FIG. 5 of the fixed portion 4 A to 4 D and the coating head 5 A to 5 D), then the movable portion 4 A and the movable part 4 B are like a motor, and are electrically set by the motor controller 9 d, and the movable part 4 C and the movable part 4 D are also like a motor. 9 d is electrically set, and a program is run on the microcomputer 9 a to send the frame 2 A and the frame 2 B to only the movement distances LX1 1 1 and LX121. The distance LX1 1 1 instructions are The motor element wires a 4 a 1 and 4 b 1 of the linear motor supplied to the movable sections 4 A and 4 B, and the command of the distance LX1 2 1 are supplied to the movable section. The motor element coils 4c 1, 4dl of the linear motors of parts 4C and 4D are printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. For the axis direction, the coating head 5A is connected to the motor element line 5a of the linear motor. 1 The command to make the distance LY1 1 1 is in the coating head 5 B, which is connected to the motor element coil of the linear motor 5 b 1 The command to make the distance LY1 1 2 is in the coating head 5C, which is connected to the motor element coil of the linear motor 5 c 1 makes the command of the distance LY1 2 1 to the coating head 5 D, which is connected to the motor element coil of the linear motor 5 d 1 makes the command of the distance LY 1 2 2 respectively. As above, in step 527 of FIG. 11 The motor element coils of the linear motor shown in FIG. 5 in the fixed portions 4A to 4D and the coating heads 5 A to 5D are supplied with the movement instructions through the amplifiers 9 e 1 to 9 e 8 (FIG. 5) at the same time. However, this situation is not included in the steps of Figure 11. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 gong) -29- 576759 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Explanation (\ ί 5 2 4 is used for uncoated models In addition, the movement of the nozzles of each coating head is performed by a linear interpolation calculation so that these nozzles can be reached at the same time as the respective coating start positions of the appropriate model. As described above, each coating head is made 5A to 5D are moved, and the appropriate coating start positions S a to S d of these nozzles are used to finish the movement (step 5 2 8), so that step 5 2 0 of FIG. 10 is finished. Therefore, in FIG. 10, after the completion of step 520, the nozzle openings of the applicator heads 5A to 5D are set (step 530). The "opening" refers to the height of the tip of the nozzle of the fluid coating surface of the substrate 8. This process is used to drive the Z-axis servo motors 5A1 to 5D1 in the coating heads 5A to 5D (Fig. 6) and make The Z-axis table moves in the Z-axis direction, and performs coating of fluid models PT a to PTd (Fig. 7 and Fig. 9) that are set to the positions (distance from the upper surface of the substrate 8) of the fluid ejection outlet at the tip of the nozzle. height. Therefore, first, for each of the coating heads 5A to 5D, the nozzles that have been set in advance are lowered based on the initial moving distance data according to the initial moving distance data, and the heights of the surfaces of the substrates 8 are respectively set. The distance meter (in the case of 5 A coating head, the distance meter is 5 A 4 (Figure 3)). Next, to confirm whether each of the coating heads 5 A to 5 D is set such that the height of the front end of each nozzle is used to draw the height of the fluid model, and the tip of each nozzle is set to be used to draw the height of the fluid model, it is formed The process of step 530 is ended. (Please read the precautions on the back before filling out this page) This paper size applies the Chinese National Standard (CNS) A4 specifications (210X297 mm) -30- 576759 A7 _B7 V. Description of the invention ((Please read the precautions on the back before (Fill in this page) Yes, if the tip of the nozzle is not set to the height for drawing the fluid model, the nozzle will be lowered by a small distance, and the distance up to the fluid coating surface of the substrate 8 will be measured by a distance meter. The measurement and the descending distance of the nozzles are repeated, and the process is repeated until all the tip ends of the nozzles are set to draw the height of the fluid model. When the process of the above step 5 to 30 is completed, the fluid coating moving process is performed next. (Step 540). Here, the nozzles of the movable coating heads 5 A to 5 D can freely draw the same path. Therefore, as shown in FIG. 15, the coating heads 5 A to 5 D are moved to X In the axial direction, each of the motor element coils 4 a 1 to 4 d 1 is electrically set by a motor controller 9 d (FIG. 5) like a single motor. Similarly, the coating heads 5 A to 5 D are moved to Y axis square Make these coating heads 5 ~ 50 motor element coils 5 3 2 ~ 5〇12 'like one motor, and the electrical setting is formed by the motor controller 9d, and the program is run on the microcomputer 9a, Based on the model data, the fluid model is drawn on the two axes of X and Y. If the coating instruction can be given on the X and Y axes, it can be printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. This will make each coating head 5 A ~ 5 D The fluid ejection outlet at the front end of the nozzle is moved to the X and Y axes according to the fluid model data in the state of being placed on the substrate 8, and at the same time, as shown in FIG. 5, 'the fluid containing cylinders in the coating heads 5A to 5D ( In the coating head 5A, a fluid containing cylinder 5A5 (Fig. 3) is applied so that a small amount of air pressure is applied, and the fluid discharge is started from the fluid discharge port at the front end of each nozzle. As described above, the sub-controller 10 The paper size of the microcomputer applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) -31-576759 A7 _____B7 _ V. Description of the invention (such as '(Please read the notes on the back before filling this page) l〇a' 系Distance meter from coating head 5A ~ 5D ( The coating head 5A 'is a distance meter 5A4 (Figures 3 and 4)). The measured data of the interval between the fluid outlet of the coating heads 5A to 5D and the fluid coating surface of the substrate 8 is used to determine the surface of the substrate 8 According to this measurement, a Z-axis servo motor (5 A 'at the coating head is a Z-axis servo motor 5 A 1 (Figure 3)) is used to drive the coating head 5 A to 5 D, and the fluid from the substrate 8 is used. The coating surface maintains the height of the fluid discharge port at a respective setting. Thus, the fluid model can be coated with a desired coating amount. As described above, the drawing of the fluid models PTa to PTd shown in FIG. 7 and FIG. 8 is performed, but the respective fluid outlets are determined by the above-mentioned fluid model data on the substrate 8 to always determine whether to draw the model terminal. If it is not at the terminal, the measurement process of the surface curvature of the substrate 8 is returned again. Hereinafter, the above-mentioned coating and drawing are repeated, and the fluid model formation is continued until the terminal of the drawing model is reached. In addition, when the fluid discharge port reaches the end of the drawing model, the application heads 5 A to 5 D are used to drive the Z-axis servo motor and raise its nozzle. Furthermore, the coated model number is registered in the microcomputer 10 a RAM (step 550) printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs (Fig. 6), and returns to step 510. However, as explained earlier, According to step 5 2 4 of FIG. 11, one of the two models that generate interference between coating heads is registered as an uncoated model, so in FIG. 10, except for the model that has been coated, it is used to judge whether there is any Coat the model (step 5 1 0). If so, for the uncoated model, perform the above steps 5 2 0 ~ 5 5 0. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm 1 -32- 576759 A7 ____ B7 5 2. Description of the invention (k. At this time, other coating heads that may interfere with the coating head at this time will finish the coating of the fluid model and retreat to its original position, so there will be no interference. In addition, all The pattern formation coating is completed (step 5 1 0), and the coating process (step 5 0) is terminated in FIG. 8. In FIG. 8, step 5 0 is terminated, and then, the substrate holding tray 6 is released (FIG. 8) 1), and the coated substrate 8 is discharged out of the device (step 6 0 0). Also, when a plurality of substrates are used to form a fluid model with the same model (step 7 0 0), a new fluid is used The substrate for coating and drawing of the model is executed in step 300, and then the series of fluid model drawing processing is completed for all the substrates (step 7 0), then it is considered as the end of the operation. this invention The other embodiment will be described. In the structure shown in FIG. 1, the two frames 2A and 2B are respectively movable in a right-angle direction (X-axis direction) in the length direction of the frame. In contrast, in this embodiment, A 1-sided frame (for example, frame 2 B) is fixed (do not move the parts 4 C, 4D), it is used to mount the substrate holding tray 6, and a rotatable 0-axis rotary table 7 is configured in the 0-axis direction. It moves in the X-axis direction. The frame 2A is movable by the movable parts 4A and 4B as described above. In this embodiment, when the X-axis direction on the substrate 8 surface is used to apply fluid, the The substrate 8 can be moved in the X-axis direction and can be coated. The frame 2 A that can be moved in the X-axis direction is moved to determine the X-axis direction of the coating head of the frame 2 B and the coating head of the frame 2 A before coating is started. As the basic structure, it can also be used for the substrate holding tray 6. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page). Intellectual Property Bureau employee consumption Printed by Sakusha-33- 576759 A7 B7 V. Description of the invention (h is the advantage of the loading mechanism carried in the coating device of the substrate 8. (Please read the precautions on the back before filling this page) Secondly, 'So far In the embodiments so far, the coating head can be moved in the γ-axis direction on the frame, but it is also possible to make small movements in the X-axis direction. Fig. 16 shows other embodiments of the coating head. This embodiment The difference from FIG. 3 is the point where an X-axis correction mechanism is provided between the frame 2 A and the motor element coil 5 A 2 in order to move the fluid application mechanism section in the X-axis direction. The X-axis correction mechanism of the coating head is such that the motor element coil 5 A 2 is mounted on a movable base 3 0 B 2 formed in a zigzag shape. The fixed abutment 3 0 B 1 which is placed opposite to the movable abutment 3 0 B 2 and is formed in a zigzag shape is attached to the support bracket 8. The movable abutment 30B2 is fixed on the movable abutment 3 0 B 1 through the linear guides 30G1 and 30G2. Printed by the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs, Cooperative of Yellow. It is set on a fixed abutment 3 0 B 1 and an X-axis adjustment motor 3 Om is mounted on the motor setting table. The rotation shaft of the X-axis adjustment motor 3 Om is connected to a rotation shaft 3 0 S through a connector 3 0 C p. An end portion of the rotating shaft 3 0 S is fixed to a bearing 3 0 R provided below the fixed base 3 0 B 1. The cam portion 3 0 C provided in the middle of the rotation shaft 30 S is provided so as to be able to block the movable base 3 0 B 2. Therefore, by rotating the X-axis adjustment motor 3 Om and rotating the cam portion 3 0 C, only the eccentricity of the cam portion causes the movable base 3 0 B 2 to move in the X-axis direction. In this way, the positions of the coating heads in the X-axis direction can be finely adjusted, and the offset in the rotation direction of the substrate can be absorbed by the adjustment of the heads. The coating and drawing operation of the fluid model is to use the coating head 5 A including the nozzles 5 A 8 to move the substrate 8. Therefore, the previous paper size of the coated head applies the Chinese National Standard (CNS) A4 (210X297 mm) -34- 576759 A7 B7 V. Description of the invention (h (Please read the precautions on the back before filling this page) ) The structure may cause deterioration of the clean state of the coating area. In particular, in the previous embodiments, the amount of dust is increased because the head portion is increased. Therefore, for example, 'at 1 ^ c D In a clean environment, it is necessary to perform coating and drawing, which will cause problems such as a reduction in yield and quality. Therefore, a dust generation prevention mechanism is provided, and a configuration embodiment to solve this problem will be described below. Fig. 1 7 It is a perspective view of a mounting portion of a specific example of the dust generation prevention mechanism shown in FIG. 1 '2 〇 E system suction mechanism section' 20E1 series exhaust pipe, 20E2 series with HEPA (High Efficiency Particulate Air) furnace The electric fan (Hepa-filter *) is given the same number in the part corresponding to Figure 1. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the frame of the Y-axis moving mechanism in the figure 2 A is provided with a driving unit to move the coating head 5A (5B, 5C, 5D) shown in FIG. 1 in the Y direction. As described later, this system is configured to be covered with a dust cover as a whole. Both end portions of the frame 2 A are provided with a suction mechanism portion 2 O E for attracting particles (dust mustard) and particles on the substrate 8 side generated by the dust-proof cover of the frame 2 A inside the covered area. The mechanical part 20E is respectively provided with an extended exhaust tube 20E1 below, and an electric fan 20E2 with a HE PA filter is installed at the front end of the exhaust tube 2 0 E 1. These electric fans 20E2 are positioned It is lower than the surface on which the substrate 8 is placed. That is, in this specific example, a dust cover and a suction mechanism section 2 0 E and an exhaust pipe 2 0 E 1 and an E PA filter with a frame 2A are not shown. Electric fan 2 〇 E 2 is constituted. This paper size applies Chinese National Standard (CNS) A4 specification (210X29 * 7 mm) -35- 576759 A7 B7 V. Description of the invention (particles collected in the suction mechanism department 2 〇 E It is sent to the lower side by the fan 20E2 through the exhaust tube 20E1 together with the air, for example, to make 0 · 3 // m to The above particles are captured by the Η E PA filter in the electric fan 20E2 to remove the particles. Therefore, the clean air of the removed particles is evacuated by the electric fan 2 0 Ε 2. Figure 18 shows in Figure 8 Figure 17 Driving part and suction mechanism part 2 of the coating head 11 1 Ο Ε — a cross-sectional view of a specific example, 2 A Β series support members, 5 C 1, 5 C 2 series dust cover, 2 a 2, 2 a 3 series linear guides, 5al series abutments, 3M4 series cable ball bearings, 10CB series electrical cables / air pressure flexible piping, S Η series micro slit holes (long holes for suction), S ΗN series suction holes, The same reference numerals are given to the parts corresponding to the front drawings, and repeated explanation is omitted. In the figure, the driving member of the coating head 5A covered with the dust cover 5C1, 5C2 is housed on the support member 3b extending in the X direction (Figs. 17 and 18, which is perpendicular to the surface). This support member 2AB is spanned from the Y-axis moving mechanisms 4a and 4b in Fig. 17, respectively. Dust covers 5 C 1, 5 C 2 are fixed to the support member 2 A B. As the driving part of the coating head 5 A, it is composed of: 2 linear guides 2a2, 2a3, which extend parallel to each other in the X-axis direction; abutment 5a 1, which uses these linear guides 2a2, 2a3 as guides It can move in the Y-axis direction; the linear motor movable portion 5 a 2 and the linear motor fixed portion 2 a 1 move the base 5 a 1 in the Y-axis direction; and the cable ball bearing 2 aM. On the side of the coating head 5A where the frame 2A is installed, the paper size is in accordance with the Chinese National Standard (CNS) Α4 specification (210X297 male |) (Please read the precautions on the back before filling this page).

、 1T Printed by Jiqi Langjie Huishi Production Bureau Employee Consumer Cooperatives-36- 576759 A7 ____—____ B7 V. Description of the invention (b4 The dust cover 5 C 1 and 5 C 2 are provided with a gap along the X-axis direction, and the base (Please read the precautions on the back before filling in this page) The lower end of the 5 A side of the coating head on the stage 5 a 1 moves the z-axis to the table support bracket 5 〇 A between the dust cover 5 C 1, 5 C 2 The gap is projected to the outside. The coating head 5A is mounted on the part outside the dust cover _5C1 and 5C2 of the Z-axis moving table support bracket 5 〇 A. The anti-scratch cover 5 C 1 and 5 C 2 The gaps are formed on the dust caps 5 C 1 and 5 C 2 so that the guide rails 5 C 1 a and 5 C 2 a are formed along the gap (ie, in the Y-axis direction), and are formed in the Z-axis. The moving table support bracket 5 〇 A is also positioned above and below these guide rail portions 5Cla, 5C2a so that the uneven shape is formed similarly, and the guide rail portions 5 C 1 a, 5 C 2 a are here. The Z-shaped moving table supporting bracket 5 〇 A has a concave-convex shape part above and below which is engaged with the non-contact, so that the guide rail portions 5C1 a and 5C2a support the Z-shaped moving table. The stand 5 Ο A can be inserted into and held from above and below, and the Z-axis moving table support bracket 5 〇 A can be guided in the Y-axis direction. Printed abutment 5 a 1. It is driven by a linear motor 5 a 2 provided on one end side of the support member 2AB, and is guided and moved by the linear guides 2 a 2 and 23 3 and the guide rail 5 <: 13, 503. In the ¥ -axis direction, the coating head 5 A is moved in the Y-axis direction. In addition, the outside of the dust cover 5C1, 5C2 moves the table support bracket 5 Ο A or its end to the dust cover through the Z axis. A passage is provided on the upper surface of the abutment 5 a 1 in 5 C 1 and 5 C 2, and the coating head 5 A is used to fold the electrical cable and the air pressure easily bendable pipe 10 CB through the passage. The dust cover 5C1 In 5C2, these electrical cables and air compressors are used to make the paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -37- 576759 A7 _______B7_ 5. Description of the invention (^ ~ bent pipe 1 0 CB, Furthermore, the wirings of the linear motors 5 a 2 and the like are collected in a cable ball bearing 2 a Μ and are housed and connected. Connected to the control section and air compressor control section not shown above. Here, as the electrical cable, it is the encoder signal and power cable of a Z-axis servo motor 5 A 1, and the coating is not shown. Signal cables of the main control unit 9 and the sub-control unit 10. Here, for the coating drawing of the fluid model and the like, if the coating head 5 A is moved in the Y-axis direction, the z The shaft servo motor 5 A 1 and the distance gauge 5 A 4 contact and rub the power supply and signal cables with the compressed air and the resin flexible pipe 1 oc for vacuum and atmospheric release. The surface makes the material peel. That is, particles (dust) are generated. Furthermore, particles (dust), such as scattering of lubricating oil, are generated due to friction between the guide balls of the linear guides 2 a 2 and 2 a 3 and the movement of the Y-axis direction of the coating head 5A due to the friction between the guide balls of the linear guides 2 a 2 and 2 a 3. Therefore, in this embodiment, suction mechanism portions 20 E are provided on both end sides of the support member 2 A B, respectively, and the particles can be inhaled. The suction mechanism section 20 E is provided with a micro slit hole for suction (ie, a long hole for suction) SH on the substrate 8 side, and particles generated by suction on the substrate 8 side, and is also provided with a suction hole S HN, The gas in the space where the support member 2 AB and the dust cover 5C1, 5C2 are formed can also be sucked. In the suction mechanism section 20E, the gas containing the particles is sucked by the electric fan 20E2 shown in FIG. 17, and the sucked gas is discharged through the discharge tube 20E1 as described in FIG. 17.尙 Yes, the gap between the dust cover 5 C 1, 5 C 2 makes the air outside the dust cover 5 C 1, 5 C 2 be attracted to the support member 3 b and this paper size applies Chinese National Standard (CNS) A4 Specifications (210X297mm) (Please read the precautions on the back before filling this page). Binding and printing Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-38- 576759 Α7 Β7 V. Description of the invention (k dust cover 5 C 1 5 C 2 is formed in the space, but by this, the atmosphere near the coating head 5 A is also cleaned. Here, the suction mechanism section 2 0 E can be provided at both ends of the frame 2 A. However, extending from one end of the frame 2 A to the other end in the Y-axis direction, a plurality of micro slits S 在 are provided on the substrate 8 side, and the entire surface of the substrate 8 is set at predetermined intervals. As described above, according to the configuration shown in Figs. 17 and 18, as the coating head 5 A moves, the particles generated in the fluid model coating drawing are used to purify the nozzle 5 A 8 The surrounding atmosphere and the upper surface of the substrate 8 are used to prevent particles from falling off and adhering to the fluid. The clean state can be stably maintained during the cloth movement. Fig. 19 is a perspective view showing the mounting portion of another specific example of the dust prevention mechanism according to the embodiment shown in Fig. 1. The 2 0 E 3 series exhaust box is in the corresponding position. The same numbers are assigned to the parts in Fig. 17. In the same figure, the specific example is different from the specific example shown in Fig. 17 in that the exhaust box 2 with corrugations 2 0 E 3 is provided on both sides of the base plate 8. The exhaust mechanism 2 〇 E is connected to the exhaust mechanism 2 〇 E 1, and the exhaust fan 2 0 E 3 with a HEPA filter installed in the exhaust box 2 〇 E 3 constitutes a point where exhaust can be performed. The so-called corrugated exhaust box 2 Ο Ε 3 is formed by corrugating the connection surface (above the box 2 Ο Ε 3 in the figure) with the exhaust tube 2 Ο Ε 1 and exhausting in the X-axis direction Even if there is a positional shift between the tube 2 Ο Ε 1 and the box 2 Ο Ε 3, the ripple can be used for absorption. Yes, the movement of the electric fan 20E2 is based on this. The paper standard is in accordance with Chinese national standards ( CNS) Α4 specification (210X297 mm) (Please read the precautions on the back before filling out this page) Printed by the Employees ’Cooperative of the Property Bureau • 39- 576759 Α7 Β7 Printed by the Consumers’ Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (h The effect of the filter is framed by the exhaust gas system without particles The moving direction of 2A (that is, the X-axis direction) is the same as the specific example shown in Fig. 17, and it may be directed downward. The frame 2A has the structure shown in Fig. 18, but in Fig. 18 In the Z-axis moving table 5A3, a cover and a suction mechanism section (not shown) may be provided in the same manner. Thereby, the particles generated near the nozzles 5 a and 8 can be removed with a Η E PA filter. Fig. 20 is a sectional view showing other specific examples of the attraction mechanism section 3E in Figs. 17 and 19, and 3 J 1, 3 J 2 is a static elimination device (or, an ultrasonic vibrator), corresponding to Parts in FIG. 18 are given the same reference numerals, and redundant descriptions are omitted. This specific example is shown in FIG. 20, and in the specific example shown in FIG. 18, it can be used to hold the suction mechanism portion 20E to peel off the dust adsorbed on the substrate, or to facilitate peeling. It is equipped with static elimination devices 3 J 1 and 3 J 2. Thereby, the static electricity is dropped on the surface of the substrate 8 or charged particles, and the substrate 8 disappears. The adsorption force is easily attracted by the micro slit S 尙. In this specific example, it replaces the static elimination device 3 J 1 ， 3 J 2 ， Using ultrasonic vibrator is also available. In this case, particles which have fallen on the surface of the substrate 8 and adhered are peeled off from the surface and floated, and are easily attracted by the micro slits SS. In addition, it is thought that the substrate 8 is vibrated by the intensity of the ultrasonic energy source applied to the ultrasonic vibrator, but it is easy to attract by dropping the attached particles to vibrate themselves by opening the attached state. , (Please read the notes on the back before filling this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (210X29 * 7mm) -40- 576759 A7 _____B7_ V. Description of the invention (k Figure 2 1 shows the attraction mechanism department in Figure 1 7 and Figure 19 2 〇 E and other specific example cross-sectional views, 3 F series of convex pieces, the same number is assigned to the part corresponding to FIG. 20 and repeated description is omitted. In the same figure, this specific example is the specific example shown in FIG. A plurality of convex pieces 2 0 F are provided vertically (that is, at a right angle in the X-axis direction) below the suction mechanism portion 2 0 E. By setting the convex pieces 2 F, the micro-slit holes SH are sucked and sucked. The air current alternately generates the vertical flow. That is, the convex pieces 20 F are set in the vertical direction so that particles falling on the surface of the substrate 8 are passed through a static elimination device (or an ultrasonic vibrator). ) 3J1 and 3J2 are peeled off from the surface of the substrate 8. This is caused by the horizontal and vertical flow, which floats from the surface of the substrate 8 and is easy to be attracted. Figure 2 2 shows Figure 17 and Figure 19 The cross section of the suction mechanism section 2 Ο E and other specific examples corresponds to the front view. Parts are given the same number and repeated explanation is omitted. In the same figure, the specific example is that the suction mechanism section 2 0 E with convex pieces 2 0 F is arranged in a plurality of X-axis directions, and also holds a frame 5 A. The function of the structural member (supporting member 2 AB). Here, it is shown that three suction mechanism sections 2 0 E are provided. These are provided with convex pieces 2 F to easily absorb particles on the substrate side, and make The 2 O E, which is arranged in the center of these suction mechanism portions 2 0 E, has suction holes S Η N, which can be used to absorb the gas in the space where the dust covers 5 C 1 and 5 C 2 are formed. However, this specific For example, the system is not limited to this structure only, so that the paper size of the paper with the tabs applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) (please read the precautions on the back before filling this page). Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives -41-576759 A7 B7 V. Description of the invention (such as 20 of the attraction mechanism department 2 0 E, there are more than 2 of which, if more than 1 can be used to absorb the dust cover 5 C 1, 5 C 2 can be formed by the gas in the space. Also, such as In the specific example shown in FIG. 20 and FIG. 21, a static electricity removing device (or an 'ultrasonic vibrator') 3 J 1 can be installed on the outside of the arrangement of the suction mechanism portion 2 0 E with the convex piece 2 0 F in the Y-axis direction. 3 J 1 3 J 2 can also be 0. Fig. 2 3 is a sectional view showing the suction mechanism section 2 0 E in Fig. 17 and Fig. 19, and other specific examples are sectional views. 3 S is an electrostatic adsorption device. The same parts are given the same numbers and repeated descriptions are omitted. In the same figure, the specific example is below the Z-axis moving table support bracket 5 0 A for supporting the coating head 5 A, and the support member 2AB of the frame 2 A. Equipped with electrostatic sorption device 3S. The electrostatic absorbing device 3 S is a particle that appears on the outside of the frame 2 A and is adsorbed by electrostatic force to prevent pollution of the surrounding atmosphere. Here, one is used as an example of the attraction mechanism section 2 0 E with the convex piece 20 F, but the specific examples shown in FIG. 18 and FIG. 20 to FIG. 22 have been described above. Similarly, The same effect can be obtained by installing the electrostatic absorbing device 3S. As mentioned above, although one Embodiment of this invention was described, this invention is not limited to this embodiment, It can form as follows. That is, as the frame, only one set may be used, or three or more sets may be set, and three or more coating heads may be set in one frame. In addition, the coating head is used as the fluid model of the desired shape, and it is coated on the substrate in multiple dots or in a wave or zigzag pattern. This paper applies the Chinese National Standard (CNS) A4 specification (210 &gt); < 297 mm) (Please read the precautions on the back before filling out this page)-Binding and printing Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-42- 576759 A7 B7 V. Description of the invention (k) Yes, coating It is also possible to form a closed curve. Furthermore, any fluid may be used as the fluid system applied to the substrate. (Please read the precautions on the back before filling in this page.) Furthermore, as a linear motor installed in the coating head, if there is a structure that forms a fixed part on the frame side and a movable part on the side of the coating head, it is of any type. can. In addition, by providing a plurality of coating heads in this way, the drive mechanism portion is increased. The need to prevent dust from being generated during frictional friction of the movable portion is also increased, and it is necessary to install and place the device structure taking this point into consideration. Therefore, the dust suction and exhaust mechanism provided in the frame as a structure to be discharged outside the device can be used to form a non-polluting fluid model. As described above, according to the present invention, light weight can be achieved with a simple structure, and a model with a desired shape can be formed on the substrate for coating the fluid accurately, and there is no risk of substrate contamination. In addition, according to the present invention, even if it has a simple structure, it can be applied stably and at high speed on a substrate, and it can be used as a model for applying a fluid with a desired shape accurately. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is sized to the Chinese National Standard (CNS) A4 (210 × 297 mm) -43-

Claims (1)

576759 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 VI. Application for patent scope 1 1. A fluid coating machine, which is a fluid coating machine on a substrate mounted on a work table to apply a fluid model that draws a desired shape The machine is characterized in that: I frame 'makes the fluid model of the substrate mounted on the table movable in one direction on a plane parallel to the surface being painted and painted, and extending in a direction different from the one direction Direction ;, a plurality of coating heads are arranged in the frame, and a linear motor is provided to move in the extending direction of the frame, and a fluid containing cylinder and a nozzle are provided with a fluid outlet to discharge the fluid filled with the fluid The fluid contained in the cylinder; and a control device so that the fluid outlet is opposite to the substrate mounted on the table, moves the frame for the table, and simultaneously makes the plural coating heads for the frame Moving, and the fluid outlet of the plurality of coating heads is used to control the discharge of fluid; and the plurality of coating heads are on the substrate It is used to paint the fluid model of the desired shape. 2. The fluid coating machine described in item 1 of the scope of the patent application, wherein each of the plurality of linear motors of the coating head is attached to the aforementioned frame, and along the extending direction, a set magnet and an opposing magnet are provided. A motor element coil provided in the coating head. 3. The fluid coating machine according to item 1 of the scope of the patent application, wherein the control device moves the plurality of coating heads along the extending direction of the frame, and makes the two coating heads adjacent to each other set in advance. When within the range of mutual interference, the aforementioned coating head of one of the two is stopped and the aforementioned coating head of the other is moved, and the aforementioned coating head of the other is moved -------------- IT ----- Φ0 (Please read the precautions on the back before filling in this page) This paper size is based on China National Standard (CNS) A4 (210 × 297 mm) -44- Consumption by Employees of Intellectual Property Bureau, Ministry of Economic Affairs Cooperative printed 576759 A8 B8 C8 D8 夂 After the patent application Fanyuan 2 is finished, control can move one of the aforementioned coating heads. 4 · The fluid coating machine described in item 1 of the scope of the patent application, wherein the above-mentioned frames are arranged in a parallel arrangement relationship with each other in more than two, and the above-mentioned control device is to make these frames adjacent when the frames are moved. When each of the foregoing frames enters a predetermined range of mutual interference, the one of the two frames is stopped and the other frame is moved. After the other frame is moved, the one frame is made. Control can move people. 5. The fluid coating machine described in item 1 of the scope of patent application, which is a supporting member of the moving mechanism section of the coating head, and is provided with a suction mechanism section for attracting the atmosphere on and around the substrate on which the fluid is applied. . 6. The fluid coating machine described in item 5 of the scope of patent application, which holds the suction mechanism section and is provided with a peeling mechanism for peeling off the dust on the substrate. 7 · The fluid coating machine described in item 5 of the scope of the patent application is constituted by a cover to cover the coating head moving mechanism and a suction mechanism unit to suck the air inside the cover. 8 · — a fluid coating machine, which is placed on the table of the nozzle outlet for placing the substrate, and the fluid filled in the fluid containing cylinder from the aforementioned outlet to spit out the aforementioned substrate and make the aforementioned substrate The fluid coating machine for changing the relative positional relationship between the nozzles and applying a fluid model of a desired shape is characterized in that: two sets of coating head supporting mechanisms are provided with: a substrate moving mechanism for moving the substrate in one direction; And moving mechanism, using the Chinese National Standard (CNS) A4 specification (210X297 mm) in the paper size of the aforementioned substrate -------------- IT ----- (Please read first Note on the back side, please fill out this page again) -45- 5r76759 A8 B8 C8 D8 ~, patent application scope 3 sides parallel to the movement direction of the aforementioned substrate moving mechanism at a slightly right angle, the plural coating heads are individually coordinated and One of the coating head support mechanisms is configured to be movable in the moving direction of the substrate, and the other coating head support mechanism is fixed to the moving direction of the substrate as a structure . 9. The fluid coating machine described in item 8 of the scope of patent application, wherein the coating head is provided with a correction mechanism to move the moving direction of the nozzle and the substrate in the same direction. 1 〇. The fluid coating machine described in item 8 or 9 of the scope of patent application, wherein the coating head support mechanism configured to be movable in the moving direction of the aforementioned substrate is configured to draw a fluid model on the substrate, so that Do not move the drive control in the direction of substrate movement. (Please read the precautions on the back before filling this page). Packing. Order Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Printed by the Consumer Cooperatives This paper uses the Chinese National Standard (CNS) A4 size (210X297 mm) -46-