A kind of conveyer for glass substrate
Technical field
It the utility model is related to glass substrate technical field, more particularly to a kind of conveyer for glass substrate.
Background technology
Currently, as the development of technology and the demand in market, the glass substrate breadth of FPD constantly expand, thickness is not
It is disconnected thinning, therefore when micro examination machine transmits to FPD glass substrate, it is desirable to what is contacted with glass substrate is each
Force of suction cup is in the same size, if there is sucker not adsorb on glass in transmit process, can cause to produce between sucker and rub
Wipe, cause occur cut on glass substrate, influence product quality, product rejection can be caused when serious.
A kind of glass substrate conveying device disclosed in patent document CN106044225 A includes:Air-floating apparatus, for placing
The glass substrate;Positioner, for that the glass substrate will be positioned at into the air supporting before the glass substrate is transmitted
On device;And mobile device, for driving the glass substrate to be moved along the air-floating apparatus.The patent uses airflow supports
Glass substrate, avoid glass substrate from being contacted in transportation with support meanss, scratch and pollute so as to prevent from causing, but this is special
Profit can not avoid the friction between glass substrate and hold assembly in glass substrate transportation, cause to draw on glass substrate
Trace, product quality is influenceed, in addition, the patent can not be avoided due to friction caused by trickle ground vibration and unevenness, so as to
It can not avoid occurring cut on glass substrate.
A kind of air supporting conveying arrangement of glass substrate disclosed in patent document CN205328207U includes fixed station and work
Platform, the fixed station both ends are provided with some groups of rollers, and the centre of fixed station is provided with the first groove, work is provided with the first groove
Platform, workbench are arranged on fixed station by U-shaped thin plate, and the U-shaped thin plate is provided with the through hole that air-flow enters, through hole and workbench
The second groove connection of lower section, is connected provided with several pressure chambers, pressure chamber by throttle orifice with the second groove on the table,
Conveyer belt is provided with above workbench, several Non-contact vacuum suckers are installed on conveyer belt, on Non-contact vacuum sucker
Provided with switch valve, sensor is provided with two rollers close to the first groove, sensor is connected with controller signals, controller
It is connected with switch valve signal.The patent holds glass substrate by Non-contact vacuum sucker and drives glass substrate to move, but should
Patent is unfavorable for mass producing because the unstability of the clamping of Non-contact vacuum sucker causes percent defective to rise.
How efficiently, reliably and securely thus transmit glass substrate and will not produce cut on the glass substrate is glass
Substrate field will further solve the problems, such as.
Utility model content
In order to solve the above problems, the utility model provides a kind of conveyer for glass substrate.The device is not
But can realize efficiently, reliably and securely transmit glass substrate, while can overcome due to glass substrate in transportation and folder
Cut problem caused by holding the friction between part.There is efficient, economic effect using conveyer of the present utility model, and
And automation, scale and it is easy to safeguard.
Conveyer of the present utility model for glass substrate includes frame and is located at glass in the frame
The skyborne air floating platform of substrate suspension, multiple legs of the frame are supported on ground, the shock insulation via shock insulation air bag
Air bag includes the upper junction plate of connection frame leg, supports the lower connecting plate on ground and be located at the upper junction plate and lower connecting plate
Between the air bag for being used to completely cut off vibration, the side of the air floating platform is provided with the transmission sucker for being used for transmitting the glass substrate
With the drive mechanism for driving the transmission sucker, the transmission sucker includes being used for adsorbing in glass baseplate surface edge simultaneously
Multiple suckers.
In an embodiment of the present utility model, the shock insulation air bag include measurement frame levelness inductive head and
For controlling the controller of air bag air inflow.
In an embodiment of the present utility model, the shock insulation air bag includes the adjustment spiral shell of adjustment rack level degree
Nail.
In an embodiment of the present utility model, the air bag connects compressed air source, the valve via valve
Electrically connect the controller.
In an embodiment of the present utility model, the frame side is provided with beam made of marble, the beam
For flatness within 5 microns, the beam is provided with the drive mechanism.
In an embodiment of the present utility model, the drive mechanism includes guide rail and motor, the driving
The motor driving transmission sucker moves along guide rail.
In an embodiment of the present utility model, the motor is linear electric motors, and the transmission sucker is located at
On connecting plate, the connecting plate is moved by the linear electric motors drives edge guide rail.
In an embodiment of the present utility model, the transmission sucker connects the connecting plate, institute via fixed seat
State fixed seat and be provided with the regulating bolt for being used for adjusting sucker height, the transmission sucker includes 16 to 25 suckers, each sucker
Elevation plane error is at -5 microns to 5 microns.
In an embodiment of the present utility model, the sucker is provided with pressure sensor, when each sucker and glass
Pressure between substrate reaches predetermined threshold, and the drive mechanism drives the transmission sucker.
In an embodiment of the present utility model, the conveyer is provided with electrical connection drive mechanism, pressure sensing
The processor of device and controller, the processor is general processor, digital signal processor, application-specific integrated circuit ASIC, existing
Field programmable gate array FPGA, analog circuit or digital circuit, the processor include memory, and the memory is deposited to be read-only
Reservoir ROM, random access memory ram, flash memory or Electrical Erasable programmable read only memory EEPROM.
Using device of the present utility model, it is possible to achieve:By multiple suckers, height can be realized by adsorbing glass substrate simultaneously
Effect, reliably and securely transmit, the influence of trickle ground vibration is completely cut off by shock insulation air bag and via as made of marble
Beam, controller etc. ensure rack level degree, and sucker is between 150V to 200V made of polyether-ether-ketone simultaneously by hardness
Adsorb and each sucker is highly maintained at same plane, so as to avoid the problem of glass substrate produces cut.
Brief description of the drawings
Fig. 1 is the part isometric schematic diagram of the conveyer for glass substrate of one embodiment of the present utility model.
Fig. 2 is that the structure of the shock insulation air bag of the conveyer for glass substrate of one embodiment of the present utility model is shown
It is intended to.
Fig. 3 is that the structure of the transmission sucker of the conveyer for glass substrate of one embodiment of the present utility model is shown
It is intended to.
Embodiment
Specific embodiment of the utility model is more fully described below with reference to accompanying drawings.Although this reality is shown in accompanying drawing
With new specific embodiment, it being understood, however, that may be realized in various forms the utility model without that should be illustrated here
Embodiment limited.Conversely, there is provided these embodiments are to be able to be best understood from the utility model, and can incite somebody to action
The scope of the utility model is completely communicated to those skilled in the art.
It should be noted that some vocabulary has been used to censure specific components among specification and claim.Ability
Field technique personnel it would be appreciated that, technical staff may call same component with different nouns.This specification and right
It is required that not in a manner of the difference of noun is used as and distinguishes component, but differentiation is used as with the difference of component functionally
Criterion."comprising" or " comprising " as mentioned in working as in specification in the whole text and claim are an open language, therefore should be solved
It is interpreted into " include but be not limited to ".Specification subsequent descriptions are to implement better embodiment of the present utility model, the right description
It is for the purpose of the rule of specification, is not limited to the scope of the utility model.The scope of protection of the utility model
It is defined when depending on appended claims institute defender.
With reference to embodiment and accompanying drawing, the utility model is described in further detail, but reality of the present utility model
The mode of applying is not limited only to this.
Fig. 1 be one embodiment of the present utility model the conveyer for glass substrate schematic perspective view, such as Fig. 1
Shown, the conveyer for glass substrate in the present embodiment includes frame 7 and is located at glass substrate 6 in the frame 7
Suspend skyborne air floating platform 9, and more than the 7 individual leg of frame is supported on ground, the shock insulation air bag via shock insulation air bag 8
8 include the upper junction plate 15 of the leg of connection frame 7, support the lower connecting plate 11 on ground and be located at the upper junction plate 15 and lower company
The air bag 19 for being used to completely cut off vibration between fishplate bar 11, the side of the air floating platform 9, which is provided with, to be used to transmit the glass substrate 6
Transmission sucker 5 and drive it is described transmission sucker 5 drive mechanism, it is described transmission sucker 5 include be used for simultaneously adsorb in glass
Multiple suckers 10 at the marginal surface of substrate 6.
In one embodiment, the hardness of the sucker 10 made of the polyether-ether-ketone is between 150V to 200V.
Conveyer of the present utility model is by shock insulation bag restraint, and avoiding trickle ground vibration influences, shock insulation gas
Capsule prevents the vibration on ground to be delivered on air floating platform, causes FPD glass substrate to be interfered with air floating platform,
FPD glass substrate produces cut when moving.It is real to be adsorbed simultaneously by multiple suckers in the edge of glass baseplate surface
Show and stably and reliably transmitted, due to the sucker polyether-ether-ketone that absorption will not be slided simultaneously and hardness is between 150V to 200V
The manufactured sucker 10 ensures with will not leave behind vestige after glass contact.The utility model realizes efficiently, reliably and securely
Transmit glass substrate and cut will not be produced on the glass substrate.
Fig. 2 is that the structure of the shock insulation air bag of the conveyer for glass substrate of one embodiment of the present utility model is shown
It is intended to.As shown in Fig. 2 the shock insulation air bag 8 includes the inductive head 16 of the measurement levelness of frame 7 and for controlling air bag air inflow
Controller 18.The levelness of frame 7 can be detected by inductive head, if necessary to adjust, controller 18 is according to inductive head 16
Signal control air bag air inflow.
The shock insulation air bag 8 includes the adjusting screw 17 of adjustment rack level degree.Four shock insulation air bags that frame 7 is set
In, when ground there is trickle sinking or branch between ground and shock insulation air bag multiply part vertical direction be subjected to displacement cause one every
Air bag run-off the straight is shaken, rack level degree is adjusted by adjusting screw.
Further, the air bag 19 connects compressed air source via valve, and the valve electrically connects the controller
18.If necessary to adjust, unlatching and opening time entering with air bag of the controller 18 according to the signal control valve door of inductive head 16
Tolerance.
In an embodiment of the present utility model, the side of frame 7 is provided with beam 2 made of marble, the beam 2
Flatness within 5 microns, the beam 2 is provided with the drive mechanism.Beam 2 use marble material, flatness 5um with
It is interior, size very little affected by environment, it ensure that the levelness of each part of this conveyer.Glass substrate 6 passes through air floating platform 9
Suspend in atmosphere, during transmission, sucker is driven by drive mechanism.
In an embodiment of the present utility model, the drive mechanism includes guide rail 1 and motor 3, the drive
Dynamic motor 3 drives the transmission sucker 5 to be moved along guide rail 1.Overall to be moved along guide rail direction, guide rail 1 is fixed with beam 2, protecting
Demonstrate,prove the stability of transmission.
In an embodiment of the present utility model, the motor 3 is linear electric motors, and the transmission sucker 5 is set
On connecting plate 4, the connecting plate 4 is moved by the linear electric motors drives edge guide rail 1.FPD glass substrate is placed on
On air floating platform 9, FPD glass substrate is suspended in air on air floating platform, height 2um, is then transported on sucker 5 and inhales
The side of attached FPD glass substrate, linear electric motors drive connection plate make transmission sucker integrally be moved along glass direction of transfer,
In all transmission sucker installations and connecting plate.
Fig. 3 is that the structure of the transmission sucker of the conveyer for glass substrate of one embodiment of the present utility model is shown
It is intended to.As shown in figure 3, the transmission sucker 5 connects the connecting plate 4 via fixed seat 13, the fixed seat 13, which is provided with, to be used for
The regulating bolt 12 of sucker height is adjusted, the transmission sucker 5 includes 16 to 25 suckers 10, and sucker quantity can show according to flat board
Show that glass substrate size arranges varying number.Each elevation plane error of sucker 10 ensures each sucker at -5 microns to 5 microns
Glass can be adsorbed, relative slip will not be produced.
In an embodiment of the present utility model, the sucker 10 is provided with pressure sensor 14, when each sucker 10
Pressure between glass substrate 6 reaches predetermined threshold, the drive mechanism driving transmission sucker 5.
In an embodiment of the present utility model, the conveyer is provided with electrical connection drive mechanism, pressure sensing
The processor of device 14 and controller 18, the processor are general processor, digital signal processor, application specific integrated circuit
ASIC, on-site programmable gate array FPGA, analog circuit or digital circuit, the processor include memory, the memory
For read only memory ROM, random access memory ram, flash memory or Electrical Erasable programmable read only memory
EEPROM.By the Automated condtrol of processor, this conveyer transmits in which can realize high efficient and reliable, and more accurately adsorbs
So that cut is further avoided.
The conveyer of glass substrate of the present utility model can effectively solve glass substrate and make caused by during transport
Scratch, contamination phenomenon, improve the quality finished product rate and production efficiency of product;For improving liquid crystal panel industry towards more large scale
Development, which is expanded, plays a positive effect.
The application receives various modifications and interchangeable form, and specific embodiment is in the accompanying drawings by means of implementing
Example come show and the application be described in detail.But the application is not intended to be limited to disclosed particular form.On the contrary,
The application is intended to include all modifications form, equivalent and the refill in the range of the application, and scope of the present application is by appended
Claim and its legal equivalents limit.