CN208683906U - A kind of automatic stack feeder of silicon wafer with weight detecting function - Google Patents
A kind of automatic stack feeder of silicon wafer with weight detecting function Download PDFInfo
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- CN208683906U CN208683906U CN201820704973.7U CN201820704973U CN208683906U CN 208683906 U CN208683906 U CN 208683906U CN 201820704973 U CN201820704973 U CN 201820704973U CN 208683906 U CN208683906 U CN 208683906U
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- silicon wafer
- carrier
- conveying mechanism
- idler wheel
- conveying
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Abstract
The utility model discloses a kind of automatic stack feeders of silicon wafer with weight detecting function, including the carrier conveying mechanism being laterally arranged；An at least carrier is arranged in the top at carrier conveying mechanism both ends, and is drivingly connected with carrier conveying mechanism；The lower section of conveying device is arranged in elevating mechanism；The top of carrier conveying mechanism is arranged in Air knife mechanism；Silicon wafer carrying structure is disposed longitudinally on the top of conveying mechanism, positioned at the side of Air knife mechanism；The rear side of conveying device is arranged in feeding conveying mechanism；Lateral transport mechanism is equipped with several laterally side by side；First weighing unit is arranged between feeding conveying mechanism and lateral transport mechanism；Weighing manipulator, is equipped with bernoulli gripper；Longitudinal transmission mechanism is correspondingly arranged at the rear side of lateral transport mechanism；The rear side of longitudinal transmission mechanism is arranged in second weighing unit；The utility model conevying efficiency is high, precision is good, and has function of weighing, guarantees the yields of product.
Description
Technical field
The utility model relates to technical field of automation equipment, more particularly, to a kind of silicon wafer with weight detecting function
Automatic stack feeder.
Background technique
At present in manufacture of solar cells line or photovoltaic board assembly line, silicon wafer feeding is by operator mostly manually Lai complete
At not only working efficiency is low, the large labor intensity of operator, due also to human contact, causes the incident photon-to-electron conversion efficiency of silicon wafer to drop
It is low, or even damage silicon wafer.In addition, in process of production, wet processing processing step can be also designed into, by wet processing
After reason, the weight of silicon wafer can have different degrees of variation, if weight change is excessive, can determine that the silicon wafer is defective products, nothing
Method meets technique production requirement, it should reject defective products, avoid influencing product quality, however, in the prior art, and having can be with
The feeder of full-automatic detection silicon wafer weight, therefore, the product manufactured using the silicon wafer of defective products is called together because of quality
It returns, brings huge loss to enterprise, it is therefore necessary to improve.
Utility model content
In view of the deficienciess of the prior art, the purpose of the utility model is to provide a kind of high-precision, high efficiency, avoiding damaging
Bad silicon wafer and the automatic stack feeder of silicon wafer with weight detecting function.
To achieve the goals above, the technical scheme adopted by the utility model is
The automatic stack feeder of a kind of silicon wafer with weight detecting function, including the carrier conveyer being laterally arranged
Structure；For loading silicon wafer the top at carrier conveying mechanism both ends is arranged in, and drive with carrier conveying mechanism in an at least carrier
Connection is moved back and forth under the driving of carrier conveying mechanism in transverse direction with realizing；Conveying device is arranged in elevating mechanism
Lower section, and the silicon wafer in carrier can be driven to go up and down along the vertical direction, to realize that the silicon wafer of top in carrier is maintained at fixed
On horizontal plane；The top of carrier conveying mechanism is arranged in Air knife mechanism, can issue the air-flow of rule, is most pushed up with realizing to be located at
The silicon wafer at end is blown afloat, and is separated with beneath silicon wafer；Silicon wafer carrying structure is disposed longitudinally on the top of conveying mechanism, is located at air knife
The side of mechanism is transported the silicon wafer of top in carrier with realizing along the longitudinal direction；Feeding conveying mechanism, setting are filled in conveying
The rear side set flows at next station for will convey in transverse direction in silicon wafer carrying structure；Lateral transport mechanism, it is horizontal
To several are equipped with side by side, for receiving the silicon wafer flowed out from feeding conveying mechanism, and silicon wafer is transversely arranged good；First claims
Weight unit, is arranged between feeding conveying mechanism and lateral transport mechanism, for detecting before silicon wafer enters lateral transport mechanism
Weight；Weighing manipulator, for silicon wafer will to be transmitted between the first weighing unit in feeding conveying mechanism；Longitudinal conveyer
Structure is correspondingly arranged at the rear side of lateral transport mechanism, for conveying the silicon wafer in lateral transport mechanism toward longitudinal direction；Second
The rear side of longitudinal transmission mechanism is arranged in weighing unit, for weighing the weight of the silicon wafer flowed into from longitudinal transmission mechanism.
In further technical solution, the carrier includes loading frame, and loading frame is conveyed by slide rail pair and loading
Mechanism slips connect, and a through-hole is equipped at the bottom plate of loading frame, is equipped with silicon wafer supporting plate, elevator above the bottom plate of loading frame
The output end of structure passes through through-hole and contacts with silicon wafer supporting plate.
In further technical solution, the elevating mechanism includes lifting bottom plate, silicon wafer mandril, elevating screw, lifting cunning
Block and lift servo motor, lifting bottom plate are fixedly connected with the lower section of the carrier conveying mechanism, and lifting slider passes through slide rail pair admittedly
It is slidably connected with lifting bottom plate, one end of silicon wafer mandril is fixedly connected with lifting slider, and the other end passes through through-hole and the silicon wafer
Supporting plate contact, elevating screw are vertically arranged on lifting bottom plate, and are drivingly connected with lifting slider, the power of lift servo motor
Output end and elevating screw are drivingly connected.
In further technical solution, one end of the silicon wafer mandril and silicon wafer supporting plate is equipped with the first inductor, for examining
Whether have silicon wafer, if existing in carrier without silicon wafer if surveying in the carrier；Air knife mechanism is equipped with the second inductor, for detecting most
In place whether the silicon wafer on top.
In further technical solution, the silicon wafer carrying structure includes portal frame, carries sliding block, lower air cylinder, sucker
Mounting rack, bernoulli gripper and carrying servo motor, portal frame are arranged along the longitudinal direction, and across the conveying mechanism and institute
Feeding conveying mechanism is stated, sliding block is carried and is slidably connected by slide rail pair and portal frame, carry servo motor and carries slider-actuated
Connection, lower air cylinder are installed on carrying sliding block straight down, and sucker mounting rack is installed on the power output end of lower air cylinder, Bai Nu
Sharp sucker is installed on sucker mounting rack, and when lower air cylinder driving sucker mounting rack moves straight down, bernoulli gripper is by institute
The silica gel piece for stating top in carrier adsorbs.
In further technical solution, the top of the feeding conveying mechanism is equipped with silicon wafer testing agency, when silicon wafer is upper
When passing through silicon wafer testing agency under the drive of material conveyer structure, detection silicon wafer is with the presence or absence of unfilled corner or the unfavorable condition of lamination.
In further technical solution, the lateral transport mechanism includes idler wheel mounting rack, before having on idler wheel mounting rack
Axial transport idler wheel symmetrical afterwards and being laterally arranged, the surface of axial transport idler wheel is arranged with synchronous belt, transports the lower section of idler wheel
Equipped with the idler wheel driving motor being drivingly connected therewith, the bottom of idler wheel mounting rack is equipped with the bottom jack being drivingly connected therewith
Structure, to realize that idler wheel mounting rack rises overally or declines；Front and back is symmetrical and the axial transport idler wheel that is laterally arranged between be equipped with it is vertical
To the transport idler wheel of setting, be drivingly connected therewith by independent driving motor, when bottom lifting body by idler wheel mounting rack up
When jack-up, cross conveyor is located at longitudinally disposed transport idler wheel above the horizontal plane, and silicon wafer is arranged in transverse direction defeated
It send, when bottom lifting body lands idler wheel mounting rack down, cross conveyor is located at longitudinally disposed transport roller water
Plane is hereinafter, longitudinally disposed transport idler wheel catches silicon wafer, and silicon wafer is transported along the longitudinal direction toward longitudinal transmission mechanism
Place.
In further technical solution, the longitudinal direction transmission mechanism includes that the first segment set gradually from front to back longitudinally passes
Transfer mechanism and second segment longitudinal direction transmission mechanism.
In further technical solution, the carrier conveying mechanism includes conveyor mat, and the lower section of conveyor mat is equipped with defeated
Supply gas cylinder, the surface of conveyor mat is equipped with slide rail pair, and slide rail pair is equipped with conveying movable plate, convey the power output end of cylinder with
It conveys movable plate to be drivingly connected, carrier setting is on conveying movable plate.
In further technical solution, the surface of first weighing unit and the second weighing unit is equipped with lifting cover,
When needing to weigh silicon wafer weight, lifting cover automatic cover is closed.
Using the above structure and after method, the utility model compared to the prior art advantageously: 1, in carrier
The both ends of conveying mechanism are equipped with feeding station, carrier are equipped at feeding station, and realize automatic supply by elevating mechanism
Material, bilateral while operation is, it can be achieved that silicon wafer is full-automatic, high efficiency transport；2, lifting device uses servo motor and elevating screw
Mode control the supply of silicon wafer in carrier, precision lead screw can accurately control the height of rising, to guarantee position of silicon wafer
Accuracy, avoid silicon wafer carrying structure from damaging silicon wafer by pressure；3, silicon wafer carrying structure and weighing manipulator are all made of bernoulli gripper
Silicon wafer is drawn, is hardly contacted with the surface of silicon wafer, damage silicon wafer is avoided, the loss of silicon wafer in handling process is reduced, to drop
Low cost；4, with the first, second weighing unit, to silicon wafer by before wet processing processing and wet processing treated weight into
Row is detected and is recorded, and compared result carries out determination processing, if comparison result determines in the threshold range of user setting
For non-defective unit, will be automatically transmitted in carrier, if comparison result not in the threshold range of user setting, be determined as it is bad, if
It is standby by police instruction, to guarantee the quality of product.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the partial structural diagram of the utility model；
Fig. 3 is the enlarged structure schematic diagram of part A in Fig. 2.
Specific embodiment
Below it is only the preferred embodiment of the utility model, does not therefore limit the protection scope of the utility model.
As shown in Figure 1 to Figure 3, the automatic stack feeder of a kind of silicon wafer with weight detecting function, including laterally set
The carrier conveying mechanism 2 set；The top at 2 both ends of carrier conveying mechanism is arranged in for loading silicon wafer in an at least carrier 1, and with
Carrier conveying mechanism 2 is drivingly connected, and is moved back and forth in transverse direction under the driving of carrier conveying mechanism 2 with realizing；Elevator
Structure 3 is arranged in the lower section of conveying device, and the silicon wafer in carrier 1 can be driven to go up and down along the vertical direction, to realize in carrier 1 most
The silicon wafer on top is maintained on fixed horizontal plane；The top of carrier conveying mechanism 2 is arranged in Air knife mechanism 4, can issue rule
Air-flow, with realize will be located at top silicon wafer blow afloat, separated with beneath silicon wafer；Silicon wafer carrying structure 5, is disposed longitudinally on
The silicon wafer of top in carrier 1 is transported along the longitudinal direction with realizing positioned at the side of Air knife mechanism 4 top of conveying mechanism；
The rear side of conveying device is arranged in feeding conveying mechanism 6, for will convey in transverse direction in silicon wafer carrying structure 5, under inflow
At one station；Lateral transport mechanism 7 is equipped with several laterally side by side, for receiving the silicon flowed out from feeding conveying mechanism 6
Piece, and silicon wafer is transversely arranged good；First weighing unit 8 is arranged between feeding conveying mechanism and lateral transport mechanism 7, uses
Weight before detection silicon wafer enters lateral transport mechanism 7；It weighs manipulator 9, for will be in feeding conveying mechanism and first
Silicon wafer is transmitted between weighing unit 8；Longitudinal transmission mechanism 10, is correspondingly arranged at the rear side of lateral transport mechanism 7, and being used for will be lateral
Silicon wafer on transmission mechanism 7 is conveyed toward longitudinal direction；Second weighing unit is arranged in the rear side of longitudinal transmission mechanism 10, is used for
Weigh the weight of the silicon wafer flowed into from longitudinal transmission mechanism 10.
In the present embodiment, the both ends of conveying device are respectively provided with four successively transversely arranged carriers 1, and the carrier 1 wraps
Loading frame 11 is included, loading frame 11 is slidably connected by slide rail pair and loading conveying mechanism, and it is logical that one is equipped at the bottom plate of loading frame 11
Hole, the bottom plate top of loading frame 11 are equipped with silicon wafer supporting plate, and the output end of elevating mechanism 3 passes through through-hole and contacts with silicon wafer supporting plate.
In further technical solution, the elevating mechanism 3 include lifting bottom plate 31, silicon wafer mandril 32, elevating screw 33,
Lifting slider 34 and lift servo motor 35, lifting bottom plate 31 are fixedly connected with the lower section of the carrier conveying mechanism 2, lifting slider
34 are slidably connected by slide rail pair and lifting bottom plate 31 admittedly, and one end of silicon wafer mandril 32 is fixedly connected with lifting slider 34, another
End contacted across through-hole with the silicon wafer supporting plate, elevating screw 33 be vertically arranged in goes up and down bottom plate 31 on, and with lifting slider 34
It is drivingly connected, the power output end and elevating screw 33 of lift servo motor 35 are drivingly connected.
In further technical solution, one end of the silicon wafer mandril 32 and silicon wafer supporting plate is equipped with the first inductor 36, uses
In detecting in the carrier 1 whether have silicon wafer, if existing in carrier 1 without silicon wafer；Air knife mechanism 4 is equipped with the second inductor, uses
In detection top silicon wafer whether in place.
In further technical solution, the silicon wafer carrying structure 5 includes portal frame 51, carries sliding block 52, lower air cylinder
53, sucker mounting rack 54, bernoulli gripper 55 and carrying servo motor 56, portal frame 51 are arranged along the longitudinal direction, and across
The conveying mechanism and the feeding conveying mechanism 6 carry sliding block 52 and are slidably connected by slide rail pair with portal frame 51, and carrying is watched
It takes motor 56 and carries sliding block 52 and be drivingly connected, lower air cylinder 53 is installed on straight down carries sliding block 52, sucker mounting rack 54
It is installed on the power output end of lower air cylinder 53, bernoulli gripper 55 is installed on sucker mounting rack 54, when lower air cylinder 53 drives
When sucker mounting rack 54 moves straight down, bernoulli gripper 55 adsorbs the silica gel piece of top in the carrier 1.
In further technical solution, the top of the feeding conveying mechanism 6 is equipped with silicon wafer testing agency 61, when silicon wafer exists
When passing through silicon wafer testing agency 61 under the drive of feeding conveying mechanism, detection silicon wafer is with the presence or absence of unfilled corner or the bad feelings of lamination
Condition.
In further technical solution, the lateral transport mechanism 7 includes idler wheel mounting rack 71, is had on idler wheel mounting rack 71
There is the axial transport idler wheel 72 that front and back is symmetrical and is laterally arranged, the surface of axial transport idler wheel 72 is arranged with synchronous belt, transport rolling
The lower section of wheel is equipped with the idler wheel driving motor being drivingly connected therewith, and the bottom of idler wheel mounting rack 71 is equipped with the bottom being drivingly connected therewith
Portion's lifting body 73, to realize that idler wheel mounting rack 71 rises overally or declines；Front and back is symmetrical and the axial transport rolling that is laterally arranged
It is equipped with longitudinally disposed transport idler wheel between wheel 72, is drivingly connected therewith by independent driving motor, when bottom lifting body 73
When idler wheel mounting rack 71 is up jacked up, cross conveyor is located at longitudinally disposed transport idler wheel above the horizontal plane, and by silicon
Piece arranges conveying in transverse direction, when bottom lifting body 73 lands idler wheel mounting rack 71 down, cross conveyor position
In longitudinally disposed transport idler wheel horizontal plane hereinafter, longitudinally disposed transport idler wheel catches silicon wafer, and along the longitudinal direction by silicon wafer
It transports toward at longitudinal transmission mechanism 10.
In further technical solution, the longitudinal direction transmission mechanism 10 includes the first segment longitudinal direction set gradually from front to back
Transmission mechanism 101 and second segment longitudinal direction transmission mechanism 102.
In further technical solution, the carrier conveying mechanism 2 includes conveyor mat 21, and the lower section of conveyor mat 21 is set
There is conveying cylinder 22, the surface of conveyor mat 21 is equipped with slide rail pair, and slide rail pair is equipped with conveying movable plate 23, conveying cylinder 22
Power output end and conveying movable plate 23 are drivingly connected, and the setting of carrier 1 is on conveying movable plate 23.
In further technical solution, the surface of first weighing unit 8 and the second weighing unit is equipped with lifting cover,
When needing to weigh silicon wafer weight, lifting cover automatic cover is closed.
Working principle: the neat silicon wafer of stacking is placed in loading frame 11, then loading frame 11 is placed in carrier conveying mechanism 2
Conveying movable plate 23 on, subsequent start-up board, the first inductor 36 of elevating mechanism 3 automatically be corresponding to it the load of setting by detection
Whether there is silicon wafer in object frame 11, if having detected silicon wafer, carries out next step operation；If without silicon wafer, 1 conveying device of carrier
It is traversing, next loading frame 11 is moved to the top of elevating mechanism 3, detecting step is repeated, if equal nothing in all loading frames 11
Silicon wafer then stops operation, and user is prompted to supplement silicon wafer, and after having supplemented silicon wafer, board continues operation.
When having enough silicon wafers in loading frame 11, elevating mechanism 3 makes the silicon in loading frame 11 by jacking up silicon wafer supporting plate
Piece rises overally the distance of a silicon wafer thickness, when the second inductor of Air knife mechanism 4 has detected the silicon wafer of top
When in place, begin to send out regular air-flow, air-flow, which is formed, stablizes symmetrical lifting force, by a silicon wafer of top with it is beneath
Silicon wafer steadily separate.
In the present embodiment, the gas hole mounting base of Air knife mechanism 4 is slot, can adjust and blow according to the actual situation
Highly, range and angle etc..
After silicon wafer separation, bernoulli gripper 55 draws the silicon wafer blown afloat, and then, silicon wafer is carried to by silicon wafer handling device
At feed mechanism, while the silicon wafer in loading frame 11 is jacked up the distance of a silicon wafer thickness by lifting device upwards.
In the present embodiment, there are two being set side by side due to bernoulli gripper 55, corresponding carrier 1 and lifting device
Equivalent setting, so silicon wafer handling device can disposably carry two silicon wafers, enters feeding conveying mechanism 6 when two
In, feeding conveying mechanism 6 conveys two silicon wafers toward transverse direction, and by way of silicon wafer testing agency 61, detects the silicon passed through
Piece is bad with the presence or absence of unfilled corner, lamination etc., and unfavorable condition, then stop transmitting if it exists, and equipment is by police instruction.
When the silicon wafer being flowed into above transverse conveying mechanism in place when, bottom lifting body 73 is whole by cross drive mechanism
Body pulls downward on, and conveys silicon wafer along the longitudinal direction with longitudinally disposed transport idler wheel, is transmitted to first segment and longitudinally transmits
Mechanism 10, and slowly flowed to second segment longitudinal direction transmission mechanism 10, first segment longitudinal direction transmission mechanism 10 and second segment longitudinally pass
Transfer mechanism 10 conveys silicon wafer with synchronous speed；The rear of second segment longitudinal direction transmission mechanism 10 is equipped with wet processing unit.
In the present embodiment, since silicon wafer wet processing unit speed is slower, therefore from second segment longitudinal direction transmission mechanism 102
When being transmitted to silicon wafer wet processing unit, transmission mechanism will be to synchronize the transmission speed rotation of wet processing unit, and by silicon wafer
It is output to silicon wafer wet processing unit, the speed detection sensor that this system is installed on wet process transmission line can detect wet process work automatically
The transmission speed of skill unit.
Equipment provided by the utility model also has weight detecting function, according to the detection time of user setting, works as system
It detects and has reached detection time, weighing manipulator 9 can draw a silicon wafer from feeding conveying mechanism, in the present embodiment
In, it is equipped with bernoulli gripper 55 in manipulator 9 of weighing, silicon wafer is drawn by bernoulli gripper 55, and silicon wafer is transported to first
At weighing unit 8, subsequent 81 automatic cover of lifting cover is closed, and carries out weight measurement to the silicon wafer for not carrying out wet-treating, and record weight
Measure data；After weight detecting, silicon wafer is carried in feeding conveying mechanism by weighing manipulator 9 from the first weighing unit 8,
It allows silicon wafer to flow into next process, after carrying out wet processing processing, then passes through the second weighing unit progress weight detecting, system
This data is recorded, and automatically analyzes weight difference of the silicon wafer before and after wet processing cell processing, by the weight difference and user setting
Threshold values be compared, and compared result carry out determination processing, if comparison result is sentenced in the threshold range of user setting
Be set to non-defective unit, will be automatically transmitted in carrier 1, if comparison result not in the threshold range of user setting, be determined as it is bad,
Equipment is by police instruction.The case where data that user can record according to front and back understand the production of product, to guarantee the matter of product
Amount.
The above content is only the preferred embodiment of the utility model, for those of ordinary skill in the art, according to this reality
With novel thought, there will be changes in the specific implementation manner and application range, and the content of the present specification should not be construed as
Limitations of the present invention.
Claims (10)
1. a kind of automatic stack feeder of silicon wafer with weight detecting function, it is characterised in that: including
The carrier conveying mechanism being laterally arranged；
For loading silicon wafer the top at carrier conveying mechanism both ends is arranged in, and drive with carrier conveying mechanism in an at least carrier
Connection is moved back and forth under the driving of carrier conveying mechanism in transverse direction with realizing；
Elevating mechanism is arranged in the lower section of conveying device, and the silicon wafer in carrier can be driven to go up and down along the vertical direction, is carried with realizing
The silicon wafer of the interior top of tool is maintained on fixed horizontal plane；
The top of carrier conveying mechanism is arranged in Air knife mechanism, can issue the air-flow of rule, will be located at the silicon of top to realize
Piece is blown afloat, and is separated with beneath silicon wafer；
Silicon wafer carrying structure is disposed longitudinally on the top of conveying mechanism, positioned at the side of Air knife mechanism, with realize by carrier most
The silicon wafer on top transports along the longitudinal direction；
The rear side of conveying device is arranged in feeding conveying mechanism, for will convey in transverse direction in silicon wafer carrying structure, flows into
At next station；
Lateral transport mechanism is equipped with several laterally side by side, for receiving from feeding conveying mechanism the silicon wafer of outflow, and by silicon
Piece is transversely arranged good；
First weighing unit is arranged between feeding conveying mechanism and lateral transport mechanism, enters lateral biography for detecting silicon wafer
Weight before transfer mechanism；
Weighing manipulator, is equipped with bernoulli gripper, for that will transmit silicon between the first weighing unit in feeding conveying mechanism
Piece；
Longitudinal transmission mechanism is correspondingly arranged at the rear side of lateral transport mechanism, for the silicon wafer in lateral transport mechanism is past vertical
It is conveyed to direction；
The rear side of longitudinal transmission mechanism is arranged in second weighing unit, for weighing the silicon wafer flowed into from longitudinal transmission mechanism
Weight.
2. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 1, feature exist
In: the carrier includes loading frame, and loading frame is slidably connected by slide rail pair and loading conveying mechanism, the bottom of loading frame
It is equipped with a through-hole at plate, silicon wafer supporting plate is equipped with above the bottom plate of loading frame, the output end of elevating mechanism passes through through-hole and silicon wafer
Supporting plate contact.
3. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 2, feature exist
In: the elevating mechanism includes lifting bottom plate, silicon wafer mandril, elevating screw, lifting slider and lift servo motor, goes up and down bottom plate
It is fixedly connected with the lower section of the carrier conveying mechanism, lifting slider passes through slide rail pair admittedly and is slidably connected with lifting bottom plate, silicon wafer top
One end of bar is fixedly connected with lifting slider, and the other end passes through through-hole and contacts with the silicon wafer supporting plate, and elevating screw is vertically arranged
It is drivingly connected on lifting bottom plate, and with lifting slider, the power output end and elevating screw of lift servo motor are drivingly connected.
4. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 3, feature exist
In: one end of the silicon wafer mandril and silicon wafer supporting plate is equipped with the first inductor, for detecting in the carrier whether have silicon wafer, if
Exist in carrier without silicon wafer；Air knife mechanism is equipped with the second inductor, for whether in place to detect the silicon wafer of top.
5. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 1, feature exist
In: the silicon wafer carrying structure includes that portal frame, carrying sliding block, lower air cylinder, sucker mounting rack, bernoulli gripper and carrying are watched
Motor is taken, portal frame is arranged along the longitudinal direction, and across the conveying mechanism and the feeding conveying mechanism, it is logical to carry sliding block
It crosses slide rail pair to be slidably connected with portal frame, carries servo motor and connect with slider-actuated is carried, lower air cylinder is installed straight down
In carrying sliding block, sucker mounting rack is installed on the power output end of lower air cylinder, and bernoulli gripper is installed on sucker mounting rack, when
When lower air cylinder driving sucker mounting rack moves straight down, bernoulli gripper adsorbs the silica gel piece of top in the carrier
Firmly.
6. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 1, feature exist
It is equipped with silicon wafer testing agency in: the top of the feeding conveying mechanism, when passing through silicon under drive of the silicon wafer in feeding conveying mechanism
When piece testing agency, detection silicon wafer is with the presence or absence of unfilled corner or the unfavorable condition of lamination.
7. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 1, feature exist
In: the lateral transport mechanism includes idler wheel mounting rack, is transported on idler wheel mounting rack with the transverse direction that front and back is symmetrical and is laterally arranged
The surface of defeated idler wheel, axial transport idler wheel is arranged with synchronous belt, and the lower section for transporting idler wheel is equipped with the idler wheel driving being drivingly connected therewith
Dynamic motor, the bottom of idler wheel mounting rack is equipped with the bottom lifting body being drivingly connected therewith, to realize idler wheel mounting rack on the whole
It rises or declines；Front and back is symmetrical and the axial transport idler wheel that is laterally arranged between be equipped with longitudinally disposed transport idler wheel, by independent
Driving motor is drivingly connected therewith, and when bottom lifting body up jacks up idler wheel mounting rack, cross conveyor is located at vertical
To setting transport idler wheel above the horizontal plane, and silicon wafer is arranged to conveying in transverse direction, when bottom lifting body pacifies idler wheel
It shelves when landing down, cross conveyor is located at longitudinally disposed transport idler wheel horizontal plane hereinafter, longitudinally disposed transport is rolled
Wheel catches silicon wafer, and silicon wafer is transported along the longitudinal direction toward at longitudinal transmission mechanism.
8. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 1, feature exist
In: the longitudinal direction transmission mechanism includes the first segment longitudinal direction transmission mechanism set gradually from front to back and second segment longitudinal direction conveyer
Structure.
9. -8 any automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 1,
Be characterized in that: the carrier conveying mechanism includes conveyor mat, and the lower section of conveyor mat is equipped with conveying cylinder, the table of conveyor mat
Face is equipped with slide rail pair, and slide rail pair is equipped with conveying movable plate, and the power output end and conveying movable plate for conveying cylinder are drivingly connected,
Carrier setting is on conveying movable plate.
10. the automatic stack feeder of a kind of silicon wafer with weight detecting function according to claim 1, feature exist
In: the surface of first weighing unit and the second weighing unit is equipped with lifting cover, when needing to weigh silicon wafer weight, lifting
Cover automatic cover closes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820704973.7U CN208683906U (en) | 2018-05-13 | 2018-05-13 | A kind of automatic stack feeder of silicon wafer with weight detecting function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820704973.7U CN208683906U (en) | 2018-05-13 | 2018-05-13 | A kind of automatic stack feeder of silicon wafer with weight detecting function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208683906U true CN208683906U (en) | 2019-04-02 |
Family
ID=65877153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820704973.7U Expired - Fee Related CN208683906U (en) | 2018-05-13 | 2018-05-13 | A kind of automatic stack feeder of silicon wafer with weight detecting function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208683906U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108545468A (en) * | 2018-05-13 | 2018-09-18 | 东莞晟能自动化设备有限公司 | A kind of automatic stack feeder of silicon chip with weight detecting function |
-
2018
- 2018-05-13 CN CN201820704973.7U patent/CN208683906U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108545468A (en) * | 2018-05-13 | 2018-09-18 | 东莞晟能自动化设备有限公司 | A kind of automatic stack feeder of silicon chip with weight detecting function |
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