KR100455949B1 - 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 - Google Patents

정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 Download PDF

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Publication number
KR100455949B1
KR100455949B1 KR10-2002-0015990A KR20020015990A KR100455949B1 KR 100455949 B1 KR100455949 B1 KR 100455949B1 KR 20020015990 A KR20020015990 A KR 20020015990A KR 100455949 B1 KR100455949 B1 KR 100455949B1
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KR
South Korea
Prior art keywords
movable
substrate
contact
fixed
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR10-2002-0015990A
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English (en)
Korean (ko)
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KR20020076131A (ko
Inventor
세키토모노리
Original Assignee
오므론 가부시키가이샤
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Publication date
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Publication of KR20020076131A publication Critical patent/KR20020076131A/ko
Application granted granted Critical
Publication of KR100455949B1 publication Critical patent/KR100455949B1/ko
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Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

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  • Micromachines (AREA)
KR10-2002-0015990A 2001-03-27 2002-03-25 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 Expired - Fee Related KR100455949B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置
JPJP-P-2001-00089900 2001-03-27

Publications (2)

Publication Number Publication Date
KR20020076131A KR20020076131A (ko) 2002-10-09
KR100455949B1 true KR100455949B1 (ko) 2004-11-08

Family

ID=18944757

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2002-0015990A Expired - Fee Related KR100455949B1 (ko) 2001-03-27 2002-03-25 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법

Country Status (5)

Country Link
EP (1) EP1246216B1 (cg-RX-API-DMAC7.html)
JP (1) JP3651404B2 (cg-RX-API-DMAC7.html)
KR (1) KR100455949B1 (cg-RX-API-DMAC7.html)
CN (1) CN1234144C (cg-RX-API-DMAC7.html)
TW (1) TW550616B (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160002219A (ko) 2014-06-30 2016-01-07 대한민국 (관리부서 : 환경부 국립환경과학원장) 보안등의 가변식 차광기구
KR20160002218A (ko) 2014-06-30 2016-01-07 대한민국 (관리부서 : 환경부 국립환경과학원장) 보안등의 고정식 차광기구

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004046019A1 (es) * 2002-11-19 2004-06-03 Baolab Microsystems S.L. Relé miniaturizado y sus usos correspondientes
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
JP4540443B2 (ja) 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
JP2006147540A (ja) * 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd 電気機械スイッチ
JP2014130767A (ja) * 2012-12-28 2014-07-10 Omron Corp 静電マイクロリレーおよびその製造方法
DE102025102599A1 (de) * 2025-01-24 2026-07-30 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauteil

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2072199C (en) * 1991-06-24 1997-11-11 Fumihiro Kasano Electrostatic relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP3852224B2 (ja) * 1998-10-08 2006-11-29 オムロン株式会社 静電マイクロリレー
JP3796988B2 (ja) * 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160002219A (ko) 2014-06-30 2016-01-07 대한민국 (관리부서 : 환경부 국립환경과학원장) 보안등의 가변식 차광기구
KR20160002218A (ko) 2014-06-30 2016-01-07 대한민국 (관리부서 : 환경부 국립환경과학원장) 보안등의 고정식 차광기구

Also Published As

Publication number Publication date
JP2002289081A (ja) 2002-10-04
JP3651404B2 (ja) 2005-05-25
EP1246216B1 (en) 2014-06-04
CN1234144C (zh) 2005-12-28
CN1378225A (zh) 2002-11-06
EP1246216A3 (en) 2004-07-21
TW550616B (en) 2003-09-01
EP1246216A2 (en) 2002-10-02
KR20020076131A (ko) 2002-10-09

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