KR100404032B1 - 둥근 수평 아암을 갖는 슬립 가능한 수직 래크 - Google Patents

둥근 수평 아암을 갖는 슬립 가능한 수직 래크 Download PDF

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Publication number
KR100404032B1
KR100404032B1 KR10-2000-7009357A KR20007009357A KR100404032B1 KR 100404032 B1 KR100404032 B1 KR 100404032B1 KR 20007009357 A KR20007009357 A KR 20007009357A KR 100404032 B1 KR100404032 B1 KR 100404032B1
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KR
South Korea
Prior art keywords
vertical
horizontal
wafer
support means
surface portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR10-2000-7009357A
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English (en)
Korean (ko)
Other versions
KR20010041263A (ko
Inventor
헹스트리챠드알.
Original Assignee
생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드
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Application filed by 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 filed Critical 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드
Publication of KR20010041263A publication Critical patent/KR20010041263A/ko
Application granted granted Critical
Publication of KR100404032B1 publication Critical patent/KR100404032B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/127—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by the substrate support
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/123—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by a material, a roughness, a coating or the like

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR10-2000-7009357A 1998-02-27 1999-02-19 둥근 수평 아암을 갖는 슬립 가능한 수직 래크 Expired - Lifetime KR100404032B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/031,887 1998-02-27
US09/031,887 US5931666A (en) 1998-02-27 1998-02-27 Slip free vertical rack design having rounded horizontal arms

Publications (2)

Publication Number Publication Date
KR20010041263A KR20010041263A (ko) 2001-05-15
KR100404032B1 true KR100404032B1 (ko) 2003-11-01

Family

ID=21861930

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2000-7009357A Expired - Lifetime KR100404032B1 (ko) 1998-02-27 1999-02-19 둥근 수평 아암을 갖는 슬립 가능한 수직 래크

Country Status (9)

Country Link
US (1) US5931666A (https=)
EP (1) EP1064673B1 (https=)
JP (1) JP2002505518A (https=)
KR (1) KR100404032B1 (https=)
CN (1) CN1126149C (https=)
AU (1) AU3303199A (https=)
CA (1) CA2318968C (https=)
DE (1) DE69939648D1 (https=)
WO (1) WO1999044222A1 (https=)

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KR20000002833A (ko) * 1998-06-23 2000-01-15 윤종용 반도체 웨이퍼 보트
US6171400B1 (en) 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US6205993B1 (en) 1999-04-15 2001-03-27 Integrated Materials, Inc. Method and apparatus for fabricating elongate crystalline members
US6225594B1 (en) 1999-04-15 2001-05-01 Integrated Materials, Inc. Method and apparatus for securing components of wafer processing fixtures
US6196211B1 (en) 1999-04-15 2001-03-06 Integrated Materials, Inc. Support members for wafer processing fixtures
US7055702B1 (en) * 2000-06-06 2006-06-06 Saint-Gobain Ceramics & Plastics, Inc. Slip resistant horizontal semiconductor wafer boat
ATE506693T1 (de) 2000-06-30 2011-05-15 Integrated Materials Inc Silizium-befestigungen für scheibenhaltervorrichtung zur wärmebehandlung und herstellungsverfahren
US6450346B1 (en) 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
US6455395B1 (en) 2000-06-30 2002-09-24 Integrated Materials, Inc. Method of fabricating silicon structures including fixtures for supporting wafers
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US6727191B2 (en) * 2001-02-26 2004-04-27 Integrated Materials, Inc. High temperature hydrogen anneal of silicon wafers supported on a silicon fixture
JP3931578B2 (ja) * 2001-03-30 2007-06-20 信越半導体株式会社 気相成長装置
US6629994B2 (en) * 2001-06-11 2003-10-07 Advanced Cardiovascular Systems, Inc. Intravascular stent
US6835039B2 (en) * 2002-03-15 2004-12-28 Asm International N.V. Method and apparatus for batch processing of wafers in a furnace
US6582221B1 (en) 2002-07-19 2003-06-24 Asm International N.V. Wafer boat and method for treatment of substrates
US7256375B2 (en) * 2002-08-30 2007-08-14 Asm International N.V. Susceptor plate for high temperature heat treatment
US6939132B2 (en) * 2002-09-30 2005-09-06 Samsung Austin Semiconductor, L.P. Semiconductor workpiece apparatus
US7033126B2 (en) * 2003-04-02 2006-04-25 Asm International N.V. Method and apparatus for loading a batch of wafers into a wafer boat
EP1670534B1 (en) * 2003-07-02 2010-01-27 Cook Incorporated Coaxial Catheters
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
US20050205502A1 (en) * 2004-03-18 2005-09-22 Brown Steven A Rails for semiconductor wafer carriers
US7520566B2 (en) * 2004-05-26 2009-04-21 Braun Seating Incorporated Stowable vehicle seat apparatus and method
US20060060145A1 (en) * 2004-09-17 2006-03-23 Van Den Berg Jannes R Susceptor with surface roughness for high temperature substrate processing
US20060065634A1 (en) * 2004-09-17 2006-03-30 Van Den Berg Jannes R Low temperature susceptor cleaning
US20060150906A1 (en) * 2005-01-07 2006-07-13 Selen Louis J M Wafer boat for reduced shadow marks
US7972703B2 (en) * 2005-03-03 2011-07-05 Ferrotec (Usa) Corporation Baffle wafers and randomly oriented polycrystalline silicon used therefor
JP5184040B2 (ja) * 2007-10-12 2013-04-17 コバレントマテリアル株式会社 縦型ウエハボート
US20110259840A1 (en) * 2010-04-23 2011-10-27 Advanced Semiconductor Engineering, Inc. Semiconductor package magazine
FI122720B (fi) 2010-07-13 2012-06-15 Tamturbo Oy Turbokompressorin säätöratkaisu
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
JP6770461B2 (ja) * 2017-02-21 2020-10-14 クアーズテック株式会社 縦型ウエハボート
KR102768950B1 (ko) 2020-02-06 2025-02-19 삼성디스플레이 주식회사 기판용 카세트
KR102709165B1 (ko) * 2021-10-29 2024-09-24 솔믹스 주식회사 웨이퍼 보트

Citations (2)

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Publication number Priority date Publication date Assignee Title
WO1996035228A1 (en) * 1995-05-05 1996-11-07 Saint-Gobain Industrial Ceramics, Inc. Slip free vertical rack design
EP0807961A1 (en) * 1996-05-17 1997-11-19 Asahi Glass Company Ltd. Vertical wafer boat

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JPS6216516A (ja) * 1985-07-15 1987-01-24 Mitsubishi Electric Corp 半導体製造装置
US5169453A (en) * 1989-03-20 1992-12-08 Toyoko Kagaku Co., Ltd. Wafer supporting jig and a decompressed gas phase growth method using such a jig
GB9021873D0 (en) * 1990-10-09 1990-11-21 Groom Bryan Ltd Ware support apparatus
JP3204699B2 (ja) * 1990-11-30 2001-09-04 株式会社東芝 熱処理装置
JPH05102056A (ja) * 1991-10-11 1993-04-23 Rohm Co Ltd ウエハー支持具
JP3234617B2 (ja) * 1991-12-16 2001-12-04 東京エレクトロン株式会社 熱処理装置用基板支持具
JPH06163440A (ja) * 1992-11-16 1994-06-10 Shin Etsu Chem Co Ltd 半導体縦型拡散炉用治具
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JP3245246B2 (ja) * 1993-01-27 2002-01-07 東京エレクトロン株式会社 熱処理装置
JPH07147258A (ja) * 1993-11-25 1995-06-06 Hitachi Ltd 半導体ウェハの熱処理装置
JP3316068B2 (ja) * 1993-12-01 2002-08-19 東京エレクトロン株式会社 熱処理用ボート
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
US5725101A (en) * 1995-06-26 1998-03-10 Kakizaki Manufacturing Co., Ltd. Thin-plate supporting container
JPH09251961A (ja) * 1996-03-15 1997-09-22 Toshiba Corp 熱処理用ボート
JPH09260296A (ja) * 1996-03-21 1997-10-03 Sumitomo Sitix Corp ウェーハ支持装置
JPH10321543A (ja) * 1997-05-20 1998-12-04 Sumitomo Metal Ind Ltd ウェハ支持体及び縦型ボート

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
WO1996035228A1 (en) * 1995-05-05 1996-11-07 Saint-Gobain Industrial Ceramics, Inc. Slip free vertical rack design
EP0807961A1 (en) * 1996-05-17 1997-11-19 Asahi Glass Company Ltd. Vertical wafer boat

Also Published As

Publication number Publication date
US5931666A (en) 1999-08-03
CA2318968C (en) 2004-07-20
AU3303199A (en) 1999-09-15
EP1064673A1 (en) 2001-01-03
CA2318968A1 (en) 1999-09-02
WO1999044222A1 (en) 1999-09-02
CN1126149C (zh) 2003-10-29
CN1292148A (zh) 2001-04-18
DE69939648D1 (de) 2008-11-13
EP1064673B1 (en) 2008-10-01
KR20010041263A (ko) 2001-05-15
JP2002505518A (ja) 2002-02-19

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