KR100372536B1 - Dry nozzle and Dry apparatus make use of the Dry nozzle, and Cleaning apparatus - Google Patents

Abstract

Provided is a drying nozzle for realizing a high efficiency drying apparatus capable of sufficient drying of a workpiece.

The drying nozzle 1 of the present invention is a drying gas supply unit 2 having an air supply tube 9 for supplying air for spraying the substrate 10 onto the substrate 10 surface of which the surface is wet with liquid 21 and drying the substrate, and a predetermined surface from the substrate surface. A porous material having a plurality of through-holes for discharging the gas-liquid (liquid and gas) mixture of air and liquid from the substrate surface while maintaining a constant liquid thickness of the liquid attached to the substrate surface prior to drying disposed at a distance. The gas-liquid mixture discharge | release part 3 which has is adjacently arrange | positioned adjacent to the direction along a substrate surface.

Description

Dry nozzle and dry apparatus make use of the Dry nozzle, and Cleaning apparatus

The present invention relates to, for example, a drying nozzle for use in drying a substrate after wet treatment and a cleaning device having the same in manufacturing processes such as semiconductor devices and liquid crystal display panels.

In the field of electronic devices, such as a semiconductor device and a liquid crystal display panel, the process of wash | cleaning a semiconductor substrate or a glass substrate which is a to-be-processed substrate is essential during the manufacturing process.

In that case, drying of the board | substrate is necessary before flowing the board | substrate after washing | cleaning in a next process.

In the conventional method, by blowing air toward the substrate from a slit at the tip of the nozzle, using a drying apparatus having a drying nozzle connected to a source of air, for example, a source of air, a so-called air knife. The substrate was dried.

However, the conventional drying method of the substrate has the following problems. That is, for example, when drying a substrate having a diagonal length of 100 mm, the level of air was blown out at a flow rate of several tens of litres / min · cm from a slit of several mm in width at the tip of the nozzle. Therefore, when the air flow rate is very fast and the air is blown at such a high flow rate against the substrate surface sufficiently wet, a large amount of mist is generated in the drying apparatus, and in this state, a large amount of air flows inside the apparatus, so that the mist is applied to the substrate. Reattach.

In order to reliably prevent the reattachment of the mist, it is necessary to secure a large space for drying. In addition, there is a problem that the amount of air used is large. In order to discharge a large amount of air and to remove the generated mist from the apparatus, a large exhaust is required, and a compressor for supplying a large amount of air is required. There is a problem. In view of such circumstances, there is a need to provide a drying apparatus in which high efficiency drying is performed with a simple apparatus configuration.

The present invention has been made to solve the above problems, and a drying nozzle for realizing a high efficiency drying apparatus capable of sufficient drying of the object to be processed, a drying apparatus having the drying nozzle, and a cleaning apparatus capable of consistent treatment of drying. For the purpose of providing

1 is a perspective view illustrating a drying nozzle of a first embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1.

It is a perspective view which shows the drying nozzle of 2nd Embodiment of this invention.

4 is a cross-sectional view taken along line IV-IV of FIG. 3.

It is a perspective view which shows the drying nozzle of 3rd embodiment of this invention.

FIG. 6 is a cross-sectional view taken along line VI-VI of FIG. 5.

It is a perspective view which shows the drying nozzle of 4th embodiment of this invention.

FIG. 8 is a cross-sectional view taken along the line VII-VII of FIG. 7.

It is a perspective view which shows the drying nozzle of 5th Embodiment of this invention.

10 is a cross-sectional view taken along the line VII-VII of FIG. 9.

It is a perspective view which shows the drying nozzle of 6th Embodiment of this invention.

FIG. 12 is a cross-sectional view taken along the line?-? Of FIG.

It is a perspective view which shows the drying nozzle of 7th Embodiment of this invention.

14 is a cross-sectional view taken along the line XIV-VIV of FIG. 13.

It is a perspective view which shows the drying nozzle of 8th Embodiment of this invention.

FIG. 16 is a cross-sectional view taken along the line VIV-VVI of FIG. 15.

It is a perspective view which shows the drying nozzle of 9th Embodiment of this invention.

* Description of the symbols for the main parts of the drawings *

1,25,27,34,36,43,44,45,50-Drying nozzle

2,28,90-Dry gas supply unit (first member)

3-gas-liquid mixture discharge

9-tube for air supply (gas introduction path)

10, W-Substrate 19,91-Porous Materials

31-Air slit (gas discharge path) 92-Second member

In order to achieve the above object, the drying nozzle of the present invention introduces a gas for supplying a drying gas for drying the object to the surface of the object by spraying the surface toward the object with a small amount of liquid. A drying gas supply unit having a furnace and a predetermined distance away from the surface of the object to be treated to maintain a constant liquid thickness of the liquid attached to the surface of the object before drying, and The gas-liquid mixture discharge section having a plurality of through holes for discharging the gas-liquid mixture from the surface of the workpiece is disposed adjacent to each other in a direction along the surface of the workpiece.

In the drying nozzle of the present invention, the drying gas supply portion and the gas-liquid mixture discharge portion are adjacent to each other in the direction along the surface of the object to be treated, and the surface of the object to be opposed to the gas-liquid mixture discharge portion and the drying gas supply portion in this order. The drying nozzle and the workpiece are moved relative to each other to dry the workpiece.

At this time, first, when the gas-liquid mixture discharge part disposed on the surface of the workpiece to be separated from the surface of the workpiece by a predetermined distance passes, the liquid thickness of the liquid attached to the surface of the workpiece can be made constant and thin.

Subsequently, the drying gas is injected from the gas introduction path of the drying gas supply unit toward the surface of the workpiece to which the liquid thickness, which is a certain liquid thickness, adheres, so that the liquid is blown to the gas-liquid mixture discharge side, and the portion of the drying gas sprayed is dried. .

The gas-liquid mixture mixed with the blown-out liquid and the drying gas is discharged from the surface of the object through the plurality of through-holes of the gas-liquid mixture discharge section.

In this way, the whole surface of the to-be-processed object surface is dried. That is, the drying nozzle of the present invention not only sprays dry gas by drying it, but also sprays the drying gas from the drying gas supply part within one nozzle, and the gas-liquid mixture is immediately discharged from the gas-liquid mixture discharge part near that time point. To discharge.

In addition, since the amount of liquid adhering to the surface of the workpiece is substantially constant and small at the time of gas injection, sufficient drying is performed even if a small amount of drying gas is injected.

According to the drying nozzle of this invention which has such an effect, since liquid mist does not generate | occur | produce at the time of gas injection like a conventional drying nozzle, there is no thing which swirls the inside of a device with a large quantity of drying gas, The to-be-processed object can be dried reliably. In addition, since the amount of the gas-liquid mixture remaining on the surface of the object to be processed is small, there is no need for a compressor for supplying air or an exhaust pump with a large displacement, and the utility equipment of the drying apparatus can be miniaturized and high efficiency can be achieved. In addition, the air supply amount can be realized by less than half of the conventional nozzle, and as a result, the exhaust amount is also less than half.

Preferably, the gas-liquid mixture discharge portion is made of a material having at least a portion facing the surface of the object to be hydrophilic.

According to this configuration, the contact between the gas-liquid mixture and the gas-liquid mixture discharge part which exist on the surface of a to-be-processed object improves, and discharge | emission of a gas-liquid mixture can be performed efficiently.

In addition, the "hydrophilic material" mentioned in this specification means that the contact angle of a material surface and a liquid is 20 degrees or less.

Examples of specific materials that can be used for the gas-liquid mixture discharge part include porous materials such as metals, plastics, ceramics, and the like, and particularly examples of hydrophilic materials include alumina, silicon oxide, hydrophilic polyethylene, and the like.

The drying gas supply unit is provided at a position closer to the gas mixture discharge portion than the first member in the direction along the surface of the workpiece and the first member having the gas introduction path, and having a plurality of through holes. The second member may be configured to supply the drying gas from both the gas introduction path of the first member and the plurality of through holes of the second member.

According to this configuration, since the drying gas is supplied from both the gas introduction path of the first member and the plurality of through holes of the second member, the liquid flows more reliably from the drying gas supply part toward the gas-liquid mixture discharge part. Drying can be performed.

The drying gas supply unit may be configured not only to inject the drying gas toward the object to be processed, but also to have a gas discharge path for discharging the drying gas injected toward the object to be processed.

According to this configuration, the drying gas sprayed on the surface of the workpiece can be immediately discharged from the gas discharge path, and control of the flow rate of the drying gas, the direction of flow, etc. can be easily performed, and efficient drying of the workpiece can be performed. have. In addition, a part of drying gas which touches the to-be-processed object surface when gas is discharged plays a role which reliably prevents liquid from inflowing to a drying gas supply part by the pressure difference with a gas mixture discharge part.

As a result, sufficient drying can be performed.

Moreover, you may provide the heating means which heats the said drying gas in the said drying gas supply part.

According to this structure, since the temperature of the drying gas introduce | transduced into a nozzle rises and a high temperature dry gas is blown out, drying efficiency can be improved.

The drying apparatus of the present invention includes a nozzle of the present invention and suction means connected to the gas-liquid mixture discharge part of the drying nozzle to suck the gas-liquid mixture.

According to the drying apparatus of the present invention, it is not necessary to use a large air supply compressor or a large exhaust pump by using the drying nozzle of the present invention, and these air supply compressors and exhaust pumps have the capacity of less than half of conventional nozzles. Since it is enough, it becomes possible to perform efficient drying with a relatively simple apparatus structure.

The cleaning apparatus of the present invention includes a plurality of substrate holding means for holding a substrate to be cleaned, and a plurality of substrates facing each other and arranged in parallel, each of which washes the substrate to be cleaned by a plurality of different cleaning methods. Of the substrate to be cleaned by relatively moving the substrate holding means and the cleaning nozzles in the parallel direction while maintaining a constant distance between the cleaning nozzle and each of the cleaning nozzles and the substrate to be cleaned. And a relative moving means for cleaning the entire surface to be cleaned, and a drying nozzle of the present invention disposed to face the substrate to be cleaned and to dry the substrate to be cleaned.

According to the cleaning apparatus of the present invention, after cleaning the substrate by a plurality of different cleaning methods using a plurality of cleaning nozzles, the substrate is cleaned by a plurality of different cleaning methods using the drying nozzle of the present invention. After the treatment, the substrate can be dried using the drying nozzle of the present invention.

In other words, a single device can realize a cleaning device capable of performing a plurality of types of cleaning and drying processes in a single device. It is useful for manufacturing processes, such as a liquid crystal display panel.

Embodiment of the Invention

(First embodiment)

EMBODIMENT OF THE INVENTION Hereinafter, 1st Embodiment of this invention is described with reference to FIG.

BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows the drying nozzle of this embodiment, and FIG. 2 is sectional drawing along the II-II line of FIG. The drying nozzle of this embodiment is used when drying only the surface of a rectangular glass substrate (processed object), for example.

In the drying nozzle of this embodiment, as shown in FIG. 1, the thin long box-shaped drying gas supply part 2 and the gas mixture discharge part 3 are adjacently arranged in parallel along the surface of a board | substrate.

The drying gas supply part 2 has a function of ejecting air (drying gas) toward the substrate surface, and the gas mixture discharge part 3 is disposed at a predetermined distance away from the substrate surface so that the liquid thickness of the liquid on the substrate surface is fixed before drying. In addition to having a function to make it, it has a plurality of through holes for discharging the gas-liquid mixture of air and liquid from the substrate surface. An air supply port 4 is provided in one longitudinal section of the drying gas supply unit 2, and two gas-liquid mixture outlets 5 are provided on the upper surface of the gas-liquid mixture discharge unit 3.

When the drying nozzle 1 is used, any air source in the production line, for example, is connected to the air supply port 4, and any suction means such as a pump having drainage and exhaust functions is connected to the gas-liquid mixture outlet 5.

As shown in FIG. 2, the drying gas supply part 2 accommodates the air supply tube 9 (gas introduction path) which consists of the inner tube 7 and the double tube of the external appearance 8 inside the box-shaped casing 6. As shown in FIG.

Thereby, dust etc. are not contained in the air blown out on the board | substrate 10, and the board | substrate 10 is not polluted.

As an example, stainless steel (SUS316L) is used for the inner pipe | tube 7 and the external appearance 8 which comprise the air supply tube 9, and GEP-W treatment (Xinjiang Pantec Co., Ltd.) is given to the surface. And the air supply tube 9 is fixed with respect to the casing 6 by the fixing part 11 of two upper and lower places by means, such as welding.

A part of the inner tube 7 is provided with an opening portion 22, and the resistance member 12 for uniformly supplying air is assembled in the opening portion 22, and fixed to the inner tube 7 by fixing means such as a screw 13 or the like.

The resistance member 12 for uniformly supplying air is made of a material which is permeable to air so as to uniformly discharge the air introduced into the inner tube 7 from one end of the air supply tube 9 into the space between the inner tube 7 and the outer tube 8, It has some resistance at the time of air permeation. After all, when air penetrates through the resistance uniform member 12 for uniform supply of air, there is a certain amount of resistance. Therefore, even if air is supplied to the inner tube 7 only through one end of the air supply tube 9, the air is uniformly diffused in the inner tube 7. It flows out into the space between the inner tube 7 and the exterior 8 through the inside of the uniform supply resistance member 12, and air is sprayed uniformly in any position of the drying gas supply part 2 in the longitudinal direction. The resistance member 12 for uniformly supplying air is formed of a material such as a porous ceramic, for example, but a known filter material can also be used.

In addition, on the outer surface of the inner tube 7 corresponding to the opposite side of the attachment position of the resistance member 12 for uniformly supplying air, an air flow direction controller 14 protruding in a substantially triangular shape is fixed by welding or the like, and the fixed position of the air flow direction controller 14 is fixed. The opening part 23 is formed in the position above the external appearance 8 corresponding to the opening part 23, and the nozzle part 15 for blowing air is fixed by welding etc. at the front end toward the gas-liquid mixture discharge part 3 side.

It is preferable that the inclination of the nozzle unit 15 is such that the angle formed with the normal of the surface of the substrate 10 is about 5 ° to 30 °. The lower surface of the casing 6 is formed with an air jet slit 16 extending in the longitudinal direction as shown in FIG. 1, and the tip of the nozzle unit 15 is located in the air jet slit 16, and the front of the nozzle unit 15 and the air jet of the casing 6 are formed. The gap between the slit 16 is sealed by the sealing portion 17.

By this configuration, the air supplied into the inner tube 7 flows into the space between the inner tube 7 and the outer tube 8 through the resistance member 12 for uniformly supplying air, and flows in the space in the peripheral direction to form the shape of the air flow direction control unit 14. Is guided to the nozzle unit 15, and is injected toward the substrate 10 from the air jetting slit 16 at the front end of the nozzle unit 15, that is, on the lower surface of the drying gas supply unit 2 (in FIG. 2, the flow of air is indicated by the dotted arrows).

The gas-liquid mixture discharge part 3 accommodates and fixes the porous material 19 which has many through-holes inside the box-shaped casing 18 as shown in FIG.

Metal, plastic, ceramics, etc. are used for this porous material 19, but it is preferable that the part which opposes the board | substrate 10 at least has hydrophilicity. In this case, the contact between the gas-liquid mixture on the surface of the substrate 10 and the porous material 19 is improved, and the gas-liquid mixture can be discharged with good efficiency. Moreover, it is preferable that the surface facing the board | substrate 10 of the porous material 19 is small in surface roughness, and small in undulation. When using this drying nozzle 1, suction means such as a pump is connected to the gas-liquid mixture outlet 5 provided on the upper surface of the casing 18, and the gas-liquid mixture on the substrate 10 is discharged from the gas-liquid mixture outlet 5 through a plurality of through holes of the porous material 19. (In Fig. 2, the flow of the gas-liquid mixture is indicated by a dashed arrow). In addition, the drying gas supply part 2 and the gas-liquid mixture discharge part 3 are respectively fixed by the casing 6 and 18 by the screw 20. The drying nozzle 1 of the said structure has the drying gas supply part 2 and the gas-liquid mixture discharge part 3 the board | substrate 10, respectively. It is adjacent to each other along the surface, and in use, the substrate 10 surface faces in the order of the gas-liquid mixture discharge section 3 and the drying gas supply section 2 (in Fig. 2, nozzle 1 is from right to left and substrate 10 is from left). The substrate 10 is dried by relatively moving the drying nozzle 1 and the substrate 10 in the direction of movement to the right). First, when the gas-liquid mixture discharge part 3 disposed at a small distance apart from the wet substrate surface passes, the liquid 21 adhering to the surface of the substrate 10 is pushed out, and the liquid thickness is constant and thin. Subsequently, air is injected from the air jet slit 16 of the drying gas supply unit 2 toward the surface of the substrate 10 to which the liquid 21 having a constant liquid thickness is attached, and the liquid 21 is blown to the gas-liquid mixture discharge side 3, and the air is injected. Part of substrate 10 is dried.

The gas-liquid mixture mixed with the liquid blown down below the gas-liquid mixture discharge section 3 is sucked and discharged from the surface of the substrate 10 through a plurality of through holes of the porous material 19 of the gas-liquid mixture discharge section 3. In this way, the whole area | region of the board | substrate 10 surface can be dried.

The drying nozzle of this embodiment discharges a gas-liquid mixture directly from the gas-liquid mixture discharge part 3, injecting air from the drying gas supply part 2 in this nozzle. In addition, since the amount of the liquid 21 adhering to the surface of the substrate 10 is almost constant and small at the time of injecting air, even when spraying a small amount of air, sufficient drying is performed.

Therefore, according to the drying nozzle 1 of this embodiment, mist does not generate | occur | produce at the time of air injection like the conventional drying nozzle, and it can reliably dry a board | substrate. In addition, since the amount of the gas-liquid mixture remaining on the substrate surface is small, there is no need for a pump having a large displacement and a compressor for supplying air, and the efficiency of the entire drying apparatus can be improved.

(2nd Embodiment)

A second embodiment of the present invention will now be described with reference to FIGS. 3 and 4.

3 is a perspective view showing a drying nozzle of the present embodiment, and FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 3. The drying nozzle of the first embodiment performs drying only on the substrate surface, whereas the drying nozzle of the present embodiment can dry both the front surface and the back surface of the substrate at the same time.

The drying nozzle 25 of this embodiment arrange | positions the drying nozzle of 1st Embodiment up-down symmetrically, as shown to FIG. 3 and FIG. 4, and each structure is the same as the drying nozzle of 1st Embodiment. Therefore, in Fig. 3 and Fig. 4, the same components as those in Figs. 1 and 2 are denoted by "* a" in the nozzle at the upper side and "* b" in the nozzle at the lower side, and the same reference numerals are assigned to the explanation. Omit. In addition, the upper nozzle and the lower nozzle may be moved independently as a separate body, or may be configured to be connected and moved together by any method.

According to the form of the drying nozzle 25 of this embodiment, since both the surface and the back surface of the board | substrate 10 can be dried simultaneously, for example, when it applies to the washing | cleaning apparatus which wash | cleans both surfaces of a board | substrate simultaneously, or only a board | substrate surface can be cleaned. It is also suitable for use as a drying means such as when the back side is slightly wet.

In the case where two nozzles, an upper nozzle and a lower nozzle, are provided, conventionally, the amount of mist generated, the increase in the exhaust capacity of the pump, the increase in the air compressor, etc. also become larger than in the case of one nozzle, and the problem becomes larger. According to the drying nozzle 25 of the form, this problem can also be avoided.

(Third Embodiment)

A third embodiment of the present invention will now be described with reference to FIGS. 5 and 6.

5 is a perspective view showing a drying nozzle of the present embodiment, and FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG. 5. The drying nozzle of this embodiment adds a gas discharge path to the drying gas supply part of the drying nozzle of 1st embodiment. Therefore, in FIG. 5 and FIG. 6, the same code | symbol is attached | subjected about the component common to FIG. 1 and FIG. 2, and detailed description is abbreviate | omitted.

The drying nozzle 27 of this embodiment is also the same as 1st Embodiment, and as shown in FIG. 5, the gas supply part 28 for drying and the gas-liquid mixture discharge part 3 are adjacently arranged in the direction along the surface of a board | substrate. By the way, in the first embodiment, the air supply port 4 is provided in the drying gas supply unit 2, and the gas-liquid mixture discharge port 5 is provided in the gas-liquid mixture discharge unit 3, whereas in the present embodiment, the air supply port is provided in the drying gas supply unit 28. 29 is installed. That is, the air supply port 4 is installed on one side of the drying gas supply unit 28 in the longitudinal direction, and two air outlets 29 are installed on the upper surface thereof, and two gas-liquid mixture outlets 5 are installed on the upper surface of the gas-liquid mixture discharge unit 3. It is.

As shown in FIG. 6, the drying gas supply part 28 accommodates the air supply tube 9 (gas introduction path) like 1st Embodiment inside the casing 30. As shown in FIG. The same applies to the first embodiment in which the resistance member for supplying air uniformity 12 is fixed to the opening 22 in the pipe 7, the air flow direction control part 14 is fixed to the outer surface, and the nozzle part 15 is fixed to the opening 23 of the outer appearance 8.

However, the difference from the first embodiment is that the air jet slit 31 extends in the longitudinal direction like the air jet slit 16 at a position biased toward the gas-liquid mixture discharge part 3 rather than the air jet slit 16 on the lower surface of the casing 30 as shown in FIG. Gas exhaust passage) is formed, and the air exhaust port 29 is provided on the upper surface of the casing 30. In addition, the structure of the gas-liquid mixture discharge part 3 is the same as that of 1st Embodiment.

When using the drying nozzle 27 of this embodiment, an arbitrary exhaust pump etc. are connected to the air discharge port 29. Then, the flow of air is different from that of the nozzle of the first embodiment, and the internal space of the tube 7, the resistance member 12 for air uniform supply, the space between the inner tube 7 and the outer tube 8, the nozzle unit 15, and the air jet slit 16 are separated. Until the air is injected onto the substrate 10 through the same, the air injected onto the substrate 10 is sucked into the immediately adjacent air discharge slit 31, and is discharged to the air outlet 29 through the inner space of the casing 30 of the drying gas supply unit 28.

However, since the entire amount of the air injected onto the substrate 10 is not sucked into the air discharge slit 31 but naturally flows into the gas-liquid mixture discharge section 3, it is a mixture of air and liquid that is discharged from the gas-liquid mixture discharge section 5.

In the case of this embodiment, the screw 20 which fixes the drying gas supply part 28 and the gas-liquid mixture discharge part 23 is sealed by the cover 32. As shown in FIG. As a result, oscillation (dust generation) from the screw stopper portion is prevented, and contamination of the substrate 10 due to oscillation is prevented.

In this configuration, the air injected onto the surface of the substrate is immediately discharged to the air discharge slit 31, so that control of the flow rate, flow direction, and the like of the drying gas can be easily performed, and the substrate is dried efficiently. In addition, a part of the air adhering to the substrate surface at the time of gas discharge acts to reliably prevent the liquid from flowing into the drying gas supply part 28 due to the pressure difference from the gas-liquid mixture discharge part 3. As a result, sufficient drying can be performed.

(4th Embodiment)

A fourth embodiment of the present invention will now be described with reference to FIGS. 7 and 8.

7 is a perspective view showing a drying nozzle of the present embodiment, and FIG. 8 is a cross-sectional view taken along the line VII-VII of FIG. 7. The drying nozzle of the third embodiment performs drying only of the substrate surface The drying nozzle of the present embodiment simultaneously dries both the front surface and the back surface of the substrate.

The drying nozzle 34 of this embodiment arrange | positions the drying nozzle 27 of 3rd Embodiment up-down symmetrically, as shown to FIG. 7 and FIG. 8, and each structure is completely different from the drying nozzle 27 of 3rd Embodiment. not. Therefore, in FIG.7 and FIG.8, about the component common to FIG.5 and FIG.6, the upper nozzle is attached with the subscript "* a" and the lower nozzle is attached with the superscript "* b", and it attaches | subjects the same code | symbol, and demonstrates. Omit.

In addition, the upper nozzle and the lower nozzle may be moved separately as a separate body, or may be configured to be connected and moved together in an arbitrary manner.

(5th Embodiment)

A fifth embodiment of the present invention will now be described with reference to FIGS. 9 and 10.

9 is a perspective view showing a drying nozzle of the present embodiment, and FIG. 10 is a cross-sectional view taken along the line VII-VII of FIG. 9. The drying nozzle of this embodiment adds the porous material for air supply to the drying gas supply part of the drying nozzle of 3rd Embodiment which added the gas discharge path. Therefore, in FIG. 9 and FIG. 10, the same code | symbol is attached | subjected about the component common to FIG. 5 and FIG. 6, and detailed description is abbreviate | omitted.

In the case of the drying nozzle 44 of this embodiment, as shown to FIG. 5 and FIG. 6, the drying gas supply part 90 has the 1st member 28 which has the air supply tube 9 like 3rd embodiment, and the gas-liquid of this 1st member 28. As shown in FIG. It is provided in the mixture discharge part 3 side, and has the 2nd member 92 which has the porous material 91 which has many through-holes.

Then, air is supplied to the first member 2 and the second member 92 from each of the air supply port 4 of the first member 2 and the air supply port 93 of the second member 92, and is provided on the lower surface of the casing on the second side of the first member. Air is blown toward the surface of the substrate 10 from both the air blowing slit 16 and the plurality of through holes of the porous material 91 of the second member 92.

According to the drying nozzle 44 of this embodiment, since air is supplied from both the air blowing slit 16 of the 1st member 28, and the many through-holes of the 2nd member 92, the gas-liquid mixture on the board | substrate 10 from the gas supply part 90 for drying is provided. Liquid flows more reliably toward the discharge | release part 3 side, and sufficient drying can be performed.

(Sixth Embodiment)

A sixth embodiment of the present invention will now be described with reference to FIGS. 11 and 12.

FIG. 11 is a perspective view showing a drying nozzle of the present embodiment, and FIG. 12 is a cross-sectional view taken along the line II-II of FIG. 11. The drying nozzle of this embodiment adds an air curtain formation part to the drying nozzle of 3rd Embodiment which added the gas discharge path to the drying gas supply part. Therefore, in FIG. 11 and FIG. 12, the same code | symbol is attached | subjected about the component common to FIGS. 5 and 6, and detailed description is abbreviate | omitted.

The drying nozzle 36 of this embodiment is also the same as 3rd Embodiment, and as shown in FIG. 11, the drying gas supply part 28 and the gas-liquid mixture discharge part 3 are adjacently arranged in the direction along the surface of a board | substrate, The air supply port 4 and the air discharge port 29 are provided, and the gas-liquid mixture discharge section 3 is provided with the gas-liquid mixture discharge port 5. In addition, in this embodiment, the air curtain forming part 37 is provided in the opposite side to the gas-liquid mixture discharge part 3 via the drying gas supply part 28, and the two air supply ports 38 for air curtain are provided on the upper surface of the air curtain forming part 37. It is installed.

12, the configuration of the drying gas supply part 28 and the gas-liquid mixture discharge part 3 is exactly the same as that of 3rd embodiment. And in the air curtain formation part 37, the porous material 40 is being fixed to the lower part of the casing 39 which opened the lower surface side. As the porous material 40, the same material as the porous material 19 of the gas-liquid mixture discharge part 18 may be used. In addition, the drying gas supply part 28 and the air curtain forming part 37 are fixed by the screw 41.

When using the drying nozzle 36 of this embodiment, in addition to the air supply port 29 of the drying gas supply part 28, air is also supplied to the air curtain air supply port 38 of the air curtain formation part 37. However, the air supply amount to the air supply port 38 for the air curtain does not have to be as large as the air supply amount to the air supply port 29 of the drying gas supply unit 28. In this case, an air curtain is formed on the front side of the substrate 10 in the traveling direction, and air is ejected from the rear side toward the substrate 10, but the air curtain is formed, thereby suppressing the flow of air injected onto the substrate 10 toward the air curtain side. By jetting air from 16, the liquid is more likely to flow to the gas-liquid mixture discharge part 3 side. Thereby, drying efficiency can be improved.

(7th Embodiment)

A seventh embodiment of the present invention will now be described with reference to FIGS. 13 and 14.

FIG. 13 is a perspective view showing a drying nozzle of the present embodiment, and FIG. 14 is a cross-sectional view taken along the line IV-XIV of FIG. 13. While the drying nozzle of the sixth embodiment performs drying only on the substrate surface, the drying nozzle of the present embodiment simultaneously dries both the front surface and the back surface of the substrate.

The drying nozzle 43 of this embodiment arrange | positions the drying nozzle 36 of 6th Embodiment up-down symmetrically, as shown to FIG. 13 and FIG. 14, and each structure is completely different from the drying nozzle 36 of 6th Embodiment. not. Therefore, in FIG. 13 and FIG. 14, about the component which is common to FIG. 11 and FIG. 12, the upper nozzle is attached with the subscript "* a" and the lower nozzle is attached with the superscript "* b", and it attaches | subjects the same code | symbol, and demonstrates. Omit.

In addition, the upper nozzle and the lower nozzle may be moved separately as a separate body, or may be configured to be connected and moved together in an arbitrary manner.

(8th Embodiment)

An eighth embodiment of the present invention will now be described with reference to FIGS. 15 and 16.

15 is a perspective view illustrating a drying nozzle of the present embodiment, and FIG. 16 is a cross-sectional view taken along the line VI-VI of FIG. 15. The drying nozzle of this embodiment adds the heater (heating means) which heats air in addition to the drying gas supply part of the drying nozzle of 6th Embodiment which added the air curtain. Therefore, in FIG. 15 and FIG. 16, the same code | symbol is attached | subjected about the component common to FIG. 11 and FIG. 12, and detailed description is abbreviate | omitted.

In the case of the drying nozzle 45 of this embodiment, the heater 93 is provided inside the air supply tube 9 of the drying gas supply part 28 as shown in FIG. By this structure, air is heated while flowing in the drying gas supply part 28, and air higher than the original air introduce | transduced into the nozzle is blown off to the board | substrate 10. FIG. For example, the temperature of the air is preferably 60 ° C to 80 ° C. In addition, in FIG. 15, the code | symbol 94 is a power supply line for heaters.

According to the drying nozzle 45 of this embodiment, since hot air blows off on the surface of the board | substrate 10, drying efficiency can be improved.

(Ninth embodiment)

Hereinafter, a ninth embodiment of the present invention will be described with reference to FIG.

This embodiment is an example of the washing | cleaning apparatus provided with the drying nozzle of this invention.

Fig. 17 is a diagram showing a schematic configuration of the cleaning apparatus 51 of the present embodiment, and is an apparatus for sheet cleaning of a large glass substrate (hereinafter referred to as a substrate) of, for example, several hundred mm diagonal.

Reference numeral 52 is a cleaning unit, 53 is a stage (substrate holding means), 54, 55, 56, 49 is a cleaning nozzle, 50 is a drying nozzle, 57 is a substrate transport robot, 58 is a loader cassette, 59 is an unloader The cassette, 60 is a hydrogen water and ozone water generating part, 61 is a washing | cleaning liquid regeneration part, W is a board | substrate.

As shown in FIG. 17, the center of an upper surface of an apparatus is the washing | cleaning part 52, and the stage 53 which hold | maintains the board | substrate W is provided. The stage 53 is provided with a rectangular stepped portion matching the shape of the substrate W. The substrate W is fitted on the stepped portion, and is held by the stage 53 in a state where the surface of the substrate W and the surface of the stage 53 coincide with each other.

Moreover, the space part is formed below the step part, and the board | substrate elevating shaft protrudes from below the stage 53 in the space part. A shaft driving source such as a cylinder is provided at the lower end of the substrate lifting shaft, and the substrate lifting shaft moves up and down by the operation of the cylinder upon delivery of the substrate W by the substrate transport robot 57, which will be described later. Thus, the substrate W is raised or lowered. Moreover, the nozzle for back surface cleaning of the board | substrate W protrudes from the hole provided in the center of the stage, and in this apparatus, the surface side is mainly wash | cleaned, but at the same time, the back surface side can also be lightly cleaned.

The rack base 62 is provided in the position which opposes through stage 53, and the cleaning nozzles 54, 55, 56, 49 are hypothesized between these rack bases 62. As shown in FIG. The cleaning nozzles consist of four nozzles arranged in parallel, and each of the cleaning nozzles 54, 55, 56, and 49 is cleaned by different cleaning methods.

In the case of this embodiment, these four nozzles supply ultrasonic ozone to the substrate and supply ultrasonic wave by ultrasonic element 63 while supplying ultraviolet cleaning nozzle 54 which mainly decomposes and removes organic substances by irradiating ultraviolet rays from ultraviolet lamp 48 and ozone water. Ozone water ultrasonic cleaning nozzle 55 for cleaning, hydrogen water ultrasonic cleaning nozzle 56 for applying ultrasonic vibration by ultrasonic element 63 while supplying hydrogen water, and pure rinse cleaning nozzle 49 for rinsing by supplying pure water. .

These four nozzles are sequentially moved along the rack base 62 while maintaining a constant distance from the substrate W above the substrate W, so that the entire surface to be cleaned of the substrate W is cleaned by four kinds of cleaning methods. Moreover, the drying nozzle 50 of the said embodiment is hypothesized between the same rack base 62, and it is set as the structure in which the wet substrate W after washing | cleaning is dried by this washing nozzle 50. FIG. In addition, although the drying nozzle 50 was shown by one rod in FIG. 17, it contains the above-mentioned drying gas supply part, gas-liquid mixture discharge part, etc. actually.

As the moving means of each nozzle, sliders which are horizontally movable along the linear guides on the rack base 62 are respectively provided, and pillars are respectively placed on the upper surface of each slider, and the nozzles 54, 55, 56, 49 and both ends of the drying nozzle 50 are fixed. A drive source such as a motor is provided on each slider, and each slider is configured to move on the rack base 62.

Then, the cleaning nozzles 54, 55, 56, 49 and the drying nozzle 50 are individually moved horizontally by operating the motors on the respective sliders according to control signals supplied from the control unit (not shown) of the apparatus. have. In addition, a support source such as a cylinder (not shown) is installed in the support column, and the height of each cleaning nozzle 54, 55, 56, 49 and the drying nozzle 50, i.e., each cleaning nozzle 54, is increased by moving the support column up and down. , 55, 56, 49 and the space | interval of the board | substrate W, and the space | interval of the drying nozzle 50 and the board | substrate W are each adjustable.

Each of the cleaning nozzles 54, 55, 56, and 49 is provided with an introduction passage having an introduction port for introducing the cleaning liquid at one end thereof and a discharge passage having an outlet for discharging the cleaning solution after cleaning at one end thereof. An intersection is formed by crossing the discharge passages at each other end, and an opening is formed at the intersection to open toward the substrate W, which is called a push-pull nozzle (saving fluid nozzle). In this case, the opening portion extends at least the width of the substrate W in a direction crossing the parallel directions of the cleaning nozzles 54, 55, 56, and 49 (in this embodiment, the introduction passage and the discharge passage per one cleaning nozzle). 3 pairs are provided in the intersection part and the opening part which crossed | crossed, and the opening part extends to the length more than the width | variety of the board | substrate W by combining three. A pressure reducing pump is used to control the suction force of the cleaning liquid at the cross section by using the pressure reducing pump at the pressure control part on the discharge passage side, and the pressure of the cleaning liquid in contact with the atmosphere of the opening (the surface tension of the cleaning liquid and the surface of the surface to be cleaned of the substrate W). Tension) and atmospheric pressure.

As a result, the relationship between the pressure Pw (including the surface tension of the cleaning liquid and the surface tension of the surface to be cleaned of the substrate W) and the atmospheric pressure Pa of the cleaning liquid in contact with the atmosphere of the opening portion is Pw PPa, which is supplied to the substrate W through the opening portion, and the substrate The cleaning liquid in contact with the W does not leak to the outside of the cleaning nozzle but is discharged to the discharge passage. That is, the cleaning liquid supplied from the cleaning nozzle onto the substrate W is removed from the substrate W without being in contact with portions other than the portion (opening) to which the cleaning liquid on the substrate W is supplied. Moreover, the ultrasonic element 63 is provided above the intersection so as to face the substrate W, and ultrasonic waves are applied to the cleaning liquid while the substrate W is being cleaned.

The hydrogen water and ozone water generation | generation part 60 and the washing | cleaning liquid regeneration part 61 are provided in the side of the washing | cleaning part 52. As shown in FIG. In the hydrogen water and ozone water generator 60, a hydrogen water production device 64 and an ozone water production device 65 are assembled. The cleaning liquid in any case can also be produced by dissolving hydrogen gas or ozone gas in pure water. The hydrogen water generated by the hydrogen water production device 64 is supplied to the hydrogen water ultrasonic cleaning nozzle 56 by the liquid feeding pump 67 provided in the middle of the hydrogen water supply pipe 66. In the same manner, the ozone water generated by the ozone water producing apparatus 65 is supplied to the ozone water ultrasonic cleaning nozzle 55 by the liquid feeding pump 69 provided in the middle of the ozone water supply pipe 68. The pure rinse cleaning nozzle 49 is supplied with pure water from a pure water supply pipe (not shown) in the production line.

In addition, the cleaning liquid regeneration unit 61 is provided with filters 70 and 71 for removing the putty and foreign matter contained in the cleaning liquid after use.

The hydrogen water filter 70 for removing the putty in hydrogen water and the ozone water filter 71 for removing the putty in ozone water are provided as separate systems. That is, the used hydrogen water discharged from the discharge port of the hydrogen water ultrasonic cleaning nozzle 56 is recovered by the hydrogen water filter 70 by the liquid feed pump 73 provided in the middle of the hydrogen water recovery piping 72. In the same manner, the used ozone water discharged from the outlet of the ozone water ultrasonic cleaning nozzle 55 is recovered by the liquid feed pump 75 provided in the middle of the ozone water recovery pipe 74 to be collected by the ozone water filter 71.

The hydrogen water after passing through the hydrogen water filter 70 is supplied to the hydrogen water ultrasonic cleaning nozzle 56 by a liquid feeding pump 77 provided in the middle of the regenerated hydrogen water supply pipe 76. In the same way, the ozone water after passing through the ozone water filter 71 is supplied to the ozone water ultrasonic cleaning nozzle 55 by the liquid feeding pump 79 provided in the middle of the regenerative ozone water supply pipe 78. In addition, the hydrogen water supply pipe 66 and the renewable hydrogen water supply pipe 76 are connected directly in front of the hydrogen water ultrasonic cleaning nozzle 56. The solenoid 80 introduces fresh hydrogen water into the hydrogen water ultrasonic cleaning nozzle 56, or introduces the renewable hydrogen water. It is made to be able to change or. In the same way, the ozone water supply pipe 68 and the regeneration ozone water supply pipe 78 are connected directly in front of the ozone water ultrasonic cleaning nozzle 55, and the solenoid 81 introduces fresh ozone water or introduces regeneration ozone water. It is possible.

Also, the hydrogen water and ozone water after passing through each filter 70, 71 have been removed, but the concentration of gas in the liquid is lowered. The ozone gas may be replenished.

The loader cassette 58 and the unloader cassette 59 are detachably provided on the side of the washing section 52. These two cassettes 58 and 59 have the same shape in which a plurality of substrates W can be accommodated, the substrate W before cleaning is stored in the loader cassette 58, and the substrate W that has been cleaned is stored in the unloader cassette 59. Subsequently, the substrate transfer robot 57 is provided at an intermediate position between the cleaning unit 52, the loader cassette 58, and the unloader cassette 59. The substrate conveyance robot 57 has an arm 82 having an elastically restrictive link mechanism thereon, the arm 82 is rotatable and liftable, and supports and conveys the substrate W at the distal end of the arm 82.

The cleaning apparatus 51 having the above-described configuration may include, for example, various cleaning conditions such as the cleaning nozzle 54, 55, 56, 49 or the distance between the drying nozzle 50 and the substrate W, the moving speed of the cleaning nozzle or the drying nozzle, the flow rate of the cleaning liquid, Except for setting the drying condition by the operator, the operation of each part is controlled by the control unit and is configured to automatically operate.

Therefore, when using this cleaning apparatus 51, the board | substrate W before washing | cleaning is set to the loader cassette 58, and when an operator operates a start switch, the board | substrate W is conveyed from the loader cassette 58 to the stage 53 by the board conveyance robot 57, and on the stage 53 Ultraviolet cleaning, ozone ultrasonic cleaning, hydrogen ultrasonic cleaning, rinse cleaning, and drying are sequentially performed automatically by the cleaning nozzles 54, 55, 56, 49, and the drying nozzle 50. After drying, the substrate transport robot 57 It is housed in the unloader cassette 59.

In the cleaning device 51 of the present embodiment, each of the four cleaning nozzles 54, 55, 56, and 49 is cleaned by other cleaning methods such as ultraviolet cleaning, ozone ultrasonic cleaning, hydrogen ultrasonic cleaning, and rinse cleaning. Therefore, various cleaning methods can be performed with one device. Thus, for example, a variety of to-be-removed substances are sufficiently washed and removed, such as removing a fine particle diameter by hydrogen ultrasonic cleaning and ozone ultrasonic cleaning, and also washing the cleaning liquid attached to the substrate surface with rinse cleaning. can do.

In addition, in the case of the washing apparatus of the present embodiment, the drying nozzle 50 of the above-described embodiment is provided, so that the washing and drying processing can be performed automatically. In particular, at the time of drying, the mist of air spray does not generate | occur | produce like the conventional drying nozzle, and the board | substrate W can be dried reliably. According to the cleaning apparatus 51 of the present embodiment, the drying nozzle of the above embodiment eliminates the necessity of providing a spin-drying drying means, and is a manufacturing line for various electronic apparatuses including semiconductor devices, liquid crystal display panels, and the like. The high efficiency washing | cleaning apparatus joined to the can be realized.

Moreover, the technical scope of this invention is not limited to the said embodiment, A various change can be added within the range which does not deviate from the meaning of this invention. For example, a double pipe type air supply tube was used as the gas introduction path for the drying gas supply unit, but the specific shape of the gas introduction path may be arbitrarily selected. In addition, if a porous material is used in the gas-liquid mixture discharge section, but a member having a plurality of through-holes for discharging the gas-liquid mixture, for example, a plurality of tubules may be bundled together. The drying gas is not limited to air, and any gas such as nitrogen can be used.

As described in detail above, according to the drying nozzle of the present invention, as in the conventional drying nozzle, liquid mist does not occur during gas injection, and the object to be treated can be dried. The amount of gas used for drying can also be reduced. Since the amount of the gas-liquid mixture remaining on the surface of the workpiece is small, a pump having a large displacement is not required, and the utility equipment of the drying apparatus can be downsized and high efficiency can be achieved. Therefore, high efficiency drying apparatus and washing | cleaning apparatus can be implement | achieved by the sieve of the drying nozzle of this invention.

Claims (7)

A drying gas supply unit having a gas introduction path for supplying a drying gas for drying the object by spraying toward a to-be-processed object whose surface is wet with liquid; A gas-liquid mixture discharge portion having a plurality of through holes for discharging the gas-liquid mixture of the drying gas and the liquid from the surface of the object to be disposed adjacently in a direction along the surface of the object, The gas-liquid mixture discharge portion is disposed so that a surface facing the surface of the workpiece is spaced a predetermined distance from the surface of the workpiece, so that the predetermined amount of the liquid adhered to the surface of the workpiece before drying in the drying gas supply portion. By removing the portion at a height higher than the distance, the liquid thickness is made constant at the same thickness as the predetermined distance, thereby reducing the amount of the liquid attached to the surface of the workpiece, and supplying the drying gas required for drying. Drying nozzle, characterized in that configured to reduce. The method of claim 1, And the gas-liquid mixture discharge part is made of a material having at least a portion of the object facing the surface of the object to be hydrophilic. The method of claim 1, The drying gas supply unit is provided at a position closer to the gas mixture discharge portion than the first member in the direction along the surface of the workpiece and the first member having the gas introduction path, and having a plurality of through holes. And a second member, wherein the drying gas is supplied from both the gas introduction passage of the first member and the plurality of through holes of the second member. The method of claim 1, And a gas exhaust passage for discharging the drying gas injected toward the object to be treated is provided in the drying gas supply unit. The method of claim 1, Drying nozzles, characterized in that the heating means for heating the drying gas is provided in the drying gas supply unit. The drying apparatus of Claim 1 which has a drying means connected to the said gas-liquid mixture discharge part of the said drying nozzle, and the suction means which aspirates the said gas-liquid mixture, The drying apparatus which reduces the supply amount of the drying gas required for drying. . A substrate holding means for holding a substrate to be cleaned, a plurality of cleaning nozzles facing each other and arranged in parallel with each other, each of which washes the substrate to be cleaned by a plurality of different cleaning methods; The entire surface to be cleaned of the substrate to be cleaned is moved by relatively moving the substrate holding means and the cleaning nozzles in the parallel direction while maintaining a constant distance between the cleaning nozzles and the substrate to be cleaned. And a relative moving means arranged so as to face the substrate to be cleaned and a drying nozzle as set forth in claim 1 to dry the substrate to be cleaned. .