KR100319544B1 - 내식성부재및그제조방법 - Google Patents

내식성부재및그제조방법 Download PDF

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Publication number
KR100319544B1
KR100319544B1 KR1019980044792A KR19980044792A KR100319544B1 KR 100319544 B1 KR100319544 B1 KR 100319544B1 KR 1019980044792 A KR1019980044792 A KR 1019980044792A KR 19980044792 A KR19980044792 A KR 19980044792A KR 100319544 B1 KR100319544 B1 KR 100319544B1
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KR
South Korea
Prior art keywords
silicon carbide
film
carbide film
resistant member
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019980044792A
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English (en)
Korean (ko)
Other versions
KR19990037372A (ko
Inventor
마사오 니시오카
게이이찌로 와타나베
Original Assignee
시바타 마사하루
니뽄 가이시 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 시바타 마사하루, 니뽄 가이시 가부시키가이샤 filed Critical 시바타 마사하루
Publication of KR19990037372A publication Critical patent/KR19990037372A/ko
Application granted granted Critical
Publication of KR100319544B1 publication Critical patent/KR100319544B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057—Carbides
    • C04B41/5059—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/20—Resistance against chemical, physical or biological attack
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/24992—Density or compression of components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Structural Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
KR1019980044792A 1997-10-27 1998-10-26 내식성부재및그제조방법 Expired - Fee Related KR100319544B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29421197A JP3929140B2 (ja) 1997-10-27 1997-10-27 耐蝕性部材およびその製造方法
JP97-294211 1997-10-27

Publications (2)

Publication Number Publication Date
KR19990037372A KR19990037372A (ko) 1999-05-25
KR100319544B1 true KR100319544B1 (ko) 2002-02-19

Family

ID=17804775

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980044792A Expired - Fee Related KR100319544B1 (ko) 1997-10-27 1998-10-26 내식성부재및그제조방법

Country Status (6)

Country Link
US (2) US6117573A (https=)
EP (1) EP0924317B1 (https=)
JP (1) JP3929140B2 (https=)
KR (1) KR100319544B1 (https=)
DE (1) DE69805742T2 (https=)
TW (1) TW585930B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100751945B1 (ko) * 1999-09-03 2007-08-24 엘지전자 주식회사 방송 예약 청취 방법 및 장치
JP5160181B2 (ja) * 2006-11-21 2013-03-13 三菱マテリアル株式会社 トリクロロシラン製造装置
KR100863935B1 (ko) * 2008-01-14 2008-11-18 주식회사 코미코 용사 코팅용 분말과 그 제조 방법 및 이를 이용한 코팅막의제조 방법
US9016293B2 (en) * 2009-08-21 2015-04-28 Gas Turbine Efficiency Sweden Ab Staged compressor water wash system
US9228575B2 (en) * 2010-11-16 2016-01-05 Zoeller Pump Company, Llc Sealed and self-contained tankless water heater flushing system
KR102051668B1 (ko) * 2016-12-20 2019-12-04 주식회사 티씨케이 SiC 증착층을 포함하는 반도체 제조용 부품 및 그 제조방법
JP6798000B1 (ja) 2019-12-23 2020-12-09 株式会社フェローテックマテリアルテクノロジーズ ＳｉＣとＳｉによる混合部材の製造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL216964A1 (https=) * 1979-07-07 1981-02-13 Biuro P Przemyslu Metal
JPS59189622A (ja) * 1983-04-13 1984-10-27 Toshiba Ceramics Co Ltd 半導体用拡散炉プロセスチユ−ブ
JPS59203799A (ja) * 1983-04-28 1984-11-17 Sharp Corp 炭化珪素単結晶基板の製造方法
DE3530551C1 (de) * 1985-08-27 1986-08-28 Nukem Gmbh Vorrichtung zur Beschichtung von Formkörpern mit Siliziumcarbid
JPH089504B2 (ja) * 1986-08-29 1996-01-31 住友化学工業株式会社 高密度炭化ケイ素焼結体の製造方法
JPH03153876A (ja) * 1989-11-10 1991-07-01 Shin Etsu Chem Co Ltd 炭化珪素質部材
US5283361A (en) * 1991-04-23 1994-02-01 Eli Lilly And Company N-hydroxy-N-[3-[2-(halophenylthio)phenyl]prop-2-enyl]ureas as lipoxygenase inhibitors
SE9202195D0 (sv) * 1992-07-17 1992-07-17 Sandvik Ab Method of coating a ceramic body
US5296258A (en) * 1992-09-30 1994-03-22 Northern Telecom Limited Method of forming silicon carbide
RU2082824C1 (ru) * 1994-03-10 1997-06-27 Московский государственный авиационный институт (технический университет) Способ защиты жаропрочных материалов от воздействия агрессивных сред высокоскоростных газовых потоков (варианты)
JP3583812B2 (ja) * 1994-09-05 2004-11-04 東京電力株式会社 セラミックコーティング部材とその製造方法
DE4441132A1 (de) * 1994-11-21 1996-05-23 Grohe Armaturen Friedrich Dichtungselement, insbesondere für Absperr- und Regelorgane und Verfahren zu seiner Herstellung
US5861346A (en) * 1995-07-27 1999-01-19 Regents Of The University Of California Process for forming silicon carbide films and microcomponents
US6042900A (en) * 1996-03-12 2000-03-28 Alexander Rakhimov CVD method for forming diamond films
JPH1012692A (ja) * 1996-06-25 1998-01-16 Nisshinbo Ind Inc ダミーウエハ
US5904778A (en) * 1996-07-26 1999-05-18 Applied Materials, Inc. Silicon carbide composite article particularly useful for plasma reactors

Also Published As

Publication number Publication date
JPH11131236A (ja) 1999-05-18
TW585930B (en) 2004-05-01
US6117573A (en) 2000-09-12
DE69805742D1 (de) 2002-07-11
EP0924317A1 (en) 1999-06-23
KR19990037372A (ko) 1999-05-25
JP3929140B2 (ja) 2007-06-13
US6447842B1 (en) 2002-09-10
DE69805742T2 (de) 2003-01-02
EP0924317B1 (en) 2002-06-05

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