KR100301411B1 - 반도체 장치 - Google Patents

반도체 장치 Download PDF

Info

Publication number
KR100301411B1
KR100301411B1 KR1019980014488A KR19980014488A KR100301411B1 KR 100301411 B1 KR100301411 B1 KR 100301411B1 KR 1019980014488 A KR1019980014488 A KR 1019980014488A KR 19980014488 A KR19980014488 A KR 19980014488A KR 100301411 B1 KR100301411 B1 KR 100301411B1
Authority
KR
South Korea
Prior art keywords
input
output protection
nmos transistor
region
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019980014488A
Other languages
English (en)
Korean (ko)
Other versions
KR19990029167A (ko
Inventor
야스오 야마구찌
Original Assignee
다니구찌 이찌로오, 기타오카 다카시
미쓰비시덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다니구찌 이찌로오, 기타오카 다카시, 미쓰비시덴키 가부시키가이샤 filed Critical 다니구찌 이찌로오, 기타오카 다카시
Publication of KR19990029167A publication Critical patent/KR19990029167A/ko
Application granted granted Critical
Publication of KR100301411B1 publication Critical patent/KR100301411B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/811Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
    • H10D89/813Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements specially adapted to provide an electrical current path other than the field-effect induced current path
    • H10D89/814Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements specially adapted to provide an electrical current path other than the field-effect induced current path involving a parasitic bipolar transistor triggered by the electrical biasing of the gate electrode of the FET, e.g. gate coupled transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/811Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
KR1019980014488A 1997-09-12 1998-04-23 반도체 장치 Expired - Fee Related KR100301411B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP97-248372 1997-09-12
JP9248372A JPH1187727A (ja) 1997-09-12 1997-09-12 半導体装置

Publications (2)

Publication Number Publication Date
KR19990029167A KR19990029167A (ko) 1999-04-26
KR100301411B1 true KR100301411B1 (ko) 2001-09-22

Family

ID=17177128

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980014488A Expired - Fee Related KR100301411B1 (ko) 1997-09-12 1998-04-23 반도체 장치

Country Status (6)

Country Link
US (2) US6222710B1 (enExample)
EP (2) EP1237196A1 (enExample)
JP (1) JPH1187727A (enExample)
KR (1) KR100301411B1 (enExample)
DE (1) DE69806115T2 (enExample)
TW (1) TW416146B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6160292A (en) 1997-04-23 2000-12-12 International Business Machines Corporation Circuit and methods to improve the operation of SOI devices
US6140184A (en) 1998-06-01 2000-10-31 Motorola, Inc. Method of changing the power dissipation across an array of transistors
US6593605B2 (en) * 1998-06-01 2003-07-15 Motorola, Inc. Energy robust field effect transistor
US6587320B1 (en) * 2000-01-04 2003-07-01 Sarnoff Corporation Apparatus for current ballasting ESD sensitive devices
JP2001284540A (ja) * 2000-04-03 2001-10-12 Nec Corp 半導体装置およびその製造方法
US6385021B1 (en) * 2000-04-10 2002-05-07 Motorola, Inc. Electrostatic discharge (ESD) protection circuit
US6583972B2 (en) 2000-06-15 2003-06-24 Sarnoff Corporation Multi-finger current ballasting ESD protection circuit and interleaved ballasting for ESD-sensitive circuits
US6605981B2 (en) * 2001-04-26 2003-08-12 International Business Machines Corporation Apparatus for biasing ultra-low voltage logic circuits
US6888198B1 (en) * 2001-06-04 2005-05-03 Advanced Micro Devices, Inc. Straddled gate FDSOI device
TW521420B (en) * 2001-12-21 2003-02-21 Winbond Electronics Corp Electro-static discharge protection device for integrated circuit inputs
US6867103B1 (en) 2002-05-24 2005-03-15 Taiwan Semiconductor Manufacturing Company Method of fabricating an ESD device on SOI
US6724603B2 (en) * 2002-08-09 2004-04-20 Motorola, Inc. Electrostatic discharge protection circuitry and method of operation
CN1329986C (zh) * 2002-11-28 2007-08-01 华邦电子股份有限公司 集成电路输入的静电放电保护元件
TWI273693B (en) * 2004-03-19 2007-02-11 Mediatek Inc Electrostatic discharge protection device
JP2006019511A (ja) * 2004-07-01 2006-01-19 Fujitsu Ltd 半導体装置及びその製造方法
TW200631584A (en) * 2004-11-15 2006-09-16 Akzo Nobel Nv A medicament related to mirtazapine for the treatment of hot flush
US7446990B2 (en) * 2005-02-11 2008-11-04 Freescale Semiconductor, Inc. I/O cell ESD system
DE102005019157A1 (de) * 2005-04-25 2006-10-26 Robert Bosch Gmbh Anordnung von MOSFETs zur Steuerung von demselben
JP5586819B2 (ja) * 2006-04-06 2014-09-10 ピーエスフォー ルクスコ エスエイアールエル 半導体装置
US7808117B2 (en) * 2006-05-16 2010-10-05 Freescale Semiconductor, Inc. Integrated circuit having pads and input/output (I/O) cells
US7777998B2 (en) 2007-09-10 2010-08-17 Freescale Semiconductor, Inc. Electrostatic discharge circuit and method therefor
CN102025136A (zh) * 2009-09-17 2011-04-20 上海宏力半导体制造有限公司 一种静电放电保护电路

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5489792A (en) * 1994-04-07 1996-02-06 Regents Of The University Of California Silicon-on-insulator transistors having improved current characteristics and reduced electrostatic discharge susceptibility
US5610790A (en) * 1995-01-20 1997-03-11 Xilinx, Inc. Method and structure for providing ESD protection for silicon on insulator integrated circuits

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4989057A (en) 1988-05-26 1991-01-29 Texas Instruments Incorporated ESD protection for SOI circuits
US5027263A (en) * 1988-09-16 1991-06-25 Kyushu University Switching power source means
JPH02260459A (ja) 1989-03-30 1990-10-23 Ricoh Co Ltd 入力保護回路
KR940004449B1 (ko) 1990-03-02 1994-05-25 가부시키가이샤 도시바 반도체장치
US5283449A (en) 1990-08-09 1994-02-01 Nec Corporation Semiconductor integrated circuit device including two types of MOSFETS having source/drain region different in sheet resistance from each other
JP3244581B2 (ja) 1993-12-29 2002-01-07 株式会社リコー デュアルゲート型cmos半導体装置
US5616935A (en) * 1994-02-08 1997-04-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor integrated circuit having N-channel and P-channel transistors
JPH0831948A (ja) 1994-07-15 1996-02-02 Nippondenso Co Ltd 半導体集積回路装置
JPH0837284A (ja) 1994-07-21 1996-02-06 Nippondenso Co Ltd 半導体集積回路装置
JPH08181219A (ja) 1994-12-21 1996-07-12 Nippondenso Co Ltd 半導体集積回路装置
US5753955A (en) * 1996-12-19 1998-05-19 Honeywell Inc. MOS device having a gate to body connection with a body injection current limiting feature for use on silicon on insulator substrates
US6133591A (en) * 1998-07-24 2000-10-17 Philips Electronics North America Corporation Silicon-on-insulator (SOI) hybrid transistor device structure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5489792A (en) * 1994-04-07 1996-02-06 Regents Of The University Of California Silicon-on-insulator transistors having improved current characteristics and reduced electrostatic discharge susceptibility
US5610790A (en) * 1995-01-20 1997-03-11 Xilinx, Inc. Method and structure for providing ESD protection for silicon on insulator integrated circuits

Also Published As

Publication number Publication date
US20010000218A1 (en) 2001-04-12
EP0923133A1 (en) 1999-06-16
US6373668B2 (en) 2002-04-16
EP0923133B1 (en) 2002-06-19
JPH1187727A (ja) 1999-03-30
EP1237196A1 (en) 2002-09-04
KR19990029167A (ko) 1999-04-26
US6222710B1 (en) 2001-04-24
DE69806115D1 (de) 2002-07-25
DE69806115T2 (de) 2002-10-02
TW416146B (en) 2000-12-21

Similar Documents

Publication Publication Date Title
KR100301411B1 (ko) 반도체 장치
US6274908B1 (en) Semiconductor device having input-output protection circuit
US5610426A (en) Semiconductor integrated circuit device having excellent dual polarity overvoltage protection characteristics
US4893157A (en) Semiconductor device
EP0782192B1 (en) Electrostatic discharge structure of semiconductor device
JP4856803B2 (ja) 基板トリガ静電破壊保護又は電気的オーバストレス保護を行うラテラル・バイポーラ・デバイス
JPH11121750A5 (enExample)
IE52929B1 (en) Inpit protection circuit for an mis transistor
US5604655A (en) Semiconductor protection circuit and semiconductor protection device
KR100351648B1 (ko) 에스오아이 전계 효과 트랜지스터 및 그 제조 공정과 에스오아이 회로망
US5710452A (en) Semiconductor device having electrostatic breakdown protection circuit
US4969020A (en) Semiconductor device
US5969923A (en) Electrostatic protection structure for MOS circuits
JP3320872B2 (ja) Cmos集積回路装置
US6580592B2 (en) Semiconductor device
JP2839375B2 (ja) 半導体集積回路装置
US4868621A (en) Input protection circuit
JPH0312784B2 (enExample)
CN111725206A (zh) Pmos触发的scr器件、scr器件的制造方法及scr静电保护电路
KR960016483B1 (ko) 정전기 보호장치를 구비하는 반도체 집적회로 및 그 제조방법
KR100289838B1 (ko) 정전방전회로를 포함하는 반도체장치 및 그의 제조방법
US5432369A (en) Input/output protection circuit
JP2008091936A (ja) 半導体装置
JPH039559A (ja) 半導体集積装置
JPH09199609A (ja) Mos集積回路およびその製造方法

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

R17-X000 Change to representative recorded

St.27 status event code: A-5-5-R10-R17-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

R17-X000 Change to representative recorded

St.27 status event code: A-5-5-R10-R17-oth-X000

FPAY Annual fee payment

Payment date: 20090609

Year of fee payment: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20100626

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20100626

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000