DE69806115D1 - SOI-Bauelement mit Ein-/Ausgabeschutz - Google Patents

SOI-Bauelement mit Ein-/Ausgabeschutz

Info

Publication number
DE69806115D1
DE69806115D1 DE69806115T DE69806115T DE69806115D1 DE 69806115 D1 DE69806115 D1 DE 69806115D1 DE 69806115 T DE69806115 T DE 69806115T DE 69806115 T DE69806115 T DE 69806115T DE 69806115 D1 DE69806115 D1 DE 69806115D1
Authority
DE
Germany
Prior art keywords
input
output protection
soi component
soi
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69806115T
Other languages
English (en)
Other versions
DE69806115T2 (de
Inventor
Yasuo Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69806115D1 publication Critical patent/DE69806115D1/de
Publication of DE69806115T2 publication Critical patent/DE69806115T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/811Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
    • H10D89/813Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements specially adapted to provide an electrical current path other than the field-effect induced current path
    • H10D89/814Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements specially adapted to provide an electrical current path other than the field-effect induced current path involving a parasitic bipolar transistor triggered by the electrical biasing of the gate electrode of the FET, e.g. gate coupled transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/811Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
DE69806115T 1997-09-12 1998-03-25 SOI-Bauelement mit Ein-/Ausgabeschutz Expired - Fee Related DE69806115T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9248372A JPH1187727A (ja) 1997-09-12 1997-09-12 半導体装置

Publications (2)

Publication Number Publication Date
DE69806115D1 true DE69806115D1 (de) 2002-07-25
DE69806115T2 DE69806115T2 (de) 2002-10-02

Family

ID=17177128

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69806115T Expired - Fee Related DE69806115T2 (de) 1997-09-12 1998-03-25 SOI-Bauelement mit Ein-/Ausgabeschutz

Country Status (6)

Country Link
US (2) US6222710B1 (de)
EP (2) EP0923133B1 (de)
JP (1) JPH1187727A (de)
KR (1) KR100301411B1 (de)
DE (1) DE69806115T2 (de)
TW (1) TW416146B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6160292A (en) 1997-04-23 2000-12-12 International Business Machines Corporation Circuit and methods to improve the operation of SOI devices
US6140184A (en) 1998-06-01 2000-10-31 Motorola, Inc. Method of changing the power dissipation across an array of transistors
US6593605B2 (en) * 1998-06-01 2003-07-15 Motorola, Inc. Energy robust field effect transistor
US6587320B1 (en) * 2000-01-04 2003-07-01 Sarnoff Corporation Apparatus for current ballasting ESD sensitive devices
JP2001284540A (ja) * 2000-04-03 2001-10-12 Nec Corp 半導体装置およびその製造方法
US6385021B1 (en) * 2000-04-10 2002-05-07 Motorola, Inc. Electrostatic discharge (ESD) protection circuit
US6583972B2 (en) 2000-06-15 2003-06-24 Sarnoff Corporation Multi-finger current ballasting ESD protection circuit and interleaved ballasting for ESD-sensitive circuits
US6605981B2 (en) * 2001-04-26 2003-08-12 International Business Machines Corporation Apparatus for biasing ultra-low voltage logic circuits
US6888198B1 (en) * 2001-06-04 2005-05-03 Advanced Micro Devices, Inc. Straddled gate FDSOI device
TW521420B (en) * 2001-12-21 2003-02-21 Winbond Electronics Corp Electro-static discharge protection device for integrated circuit inputs
US6867103B1 (en) 2002-05-24 2005-03-15 Taiwan Semiconductor Manufacturing Company Method of fabricating an ESD device on SOI
US6724603B2 (en) * 2002-08-09 2004-04-20 Motorola, Inc. Electrostatic discharge protection circuitry and method of operation
CN1329986C (zh) * 2002-11-28 2007-08-01 华邦电子股份有限公司 集成电路输入的静电放电保护元件
TWI273693B (en) * 2004-03-19 2007-02-11 Mediatek Inc Electrostatic discharge protection device
JP2006019511A (ja) * 2004-07-01 2006-01-19 Fujitsu Ltd 半導体装置及びその製造方法
TW200631584A (en) * 2004-11-15 2006-09-16 Akzo Nobel Nv A medicament related to mirtazapine for the treatment of hot flush
US7446990B2 (en) * 2005-02-11 2008-11-04 Freescale Semiconductor, Inc. I/O cell ESD system
DE102005019157A1 (de) * 2005-04-25 2006-10-26 Robert Bosch Gmbh Anordnung von MOSFETs zur Steuerung von demselben
JP5586819B2 (ja) * 2006-04-06 2014-09-10 ピーエスフォー ルクスコ エスエイアールエル 半導体装置
US7808117B2 (en) * 2006-05-16 2010-10-05 Freescale Semiconductor, Inc. Integrated circuit having pads and input/output (I/O) cells
US7777998B2 (en) 2007-09-10 2010-08-17 Freescale Semiconductor, Inc. Electrostatic discharge circuit and method therefor
CN102025136A (zh) * 2009-09-17 2011-04-20 上海宏力半导体制造有限公司 一种静电放电保护电路

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4989057A (en) 1988-05-26 1991-01-29 Texas Instruments Incorporated ESD protection for SOI circuits
US5027263A (en) * 1988-09-16 1991-06-25 Kyushu University Switching power source means
JPH02260459A (ja) 1989-03-30 1990-10-23 Ricoh Co Ltd 入力保護回路
KR940004449B1 (ko) 1990-03-02 1994-05-25 가부시키가이샤 도시바 반도체장치
US5283449A (en) 1990-08-09 1994-02-01 Nec Corporation Semiconductor integrated circuit device including two types of MOSFETS having source/drain region different in sheet resistance from each other
JP3244581B2 (ja) 1993-12-29 2002-01-07 株式会社リコー デュアルゲート型cmos半導体装置
US5616935A (en) * 1994-02-08 1997-04-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor integrated circuit having N-channel and P-channel transistors
US5489792A (en) 1994-04-07 1996-02-06 Regents Of The University Of California Silicon-on-insulator transistors having improved current characteristics and reduced electrostatic discharge susceptibility
JPH0831948A (ja) 1994-07-15 1996-02-02 Nippondenso Co Ltd 半導体集積回路装置
JPH0837284A (ja) 1994-07-21 1996-02-06 Nippondenso Co Ltd 半導体集積回路装置
JPH08181219A (ja) 1994-12-21 1996-07-12 Nippondenso Co Ltd 半導体集積回路装置
US5610790A (en) 1995-01-20 1997-03-11 Xilinx, Inc. Method and structure for providing ESD protection for silicon on insulator integrated circuits
US5753955A (en) * 1996-12-19 1998-05-19 Honeywell Inc. MOS device having a gate to body connection with a body injection current limiting feature for use on silicon on insulator substrates
US6133591A (en) * 1998-07-24 2000-10-17 Philips Electronics North America Corporation Silicon-on-insulator (SOI) hybrid transistor device structure

Also Published As

Publication number Publication date
KR19990029167A (ko) 1999-04-26
US6373668B2 (en) 2002-04-16
JPH1187727A (ja) 1999-03-30
DE69806115T2 (de) 2002-10-02
US20010000218A1 (en) 2001-04-12
TW416146B (en) 2000-12-21
KR100301411B1 (ko) 2001-09-22
EP0923133A1 (de) 1999-06-16
EP0923133B1 (de) 2002-06-19
EP1237196A1 (de) 2002-09-04
US6222710B1 (en) 2001-04-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee