KR100286982B1 - 웨이퍼캐리어관련정보인식이가능한자동반송시스템및반송방법 - Google Patents

웨이퍼캐리어관련정보인식이가능한자동반송시스템및반송방법 Download PDF

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Publication number
KR100286982B1
KR100286982B1 KR1019980008998A KR19980008998A KR100286982B1 KR 100286982 B1 KR100286982 B1 KR 100286982B1 KR 1019980008998 A KR1019980008998 A KR 1019980008998A KR 19980008998 A KR19980008998 A KR 19980008998A KR 100286982 B1 KR100286982 B1 KR 100286982B1
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KR
South Korea
Prior art keywords
wafer carrier
information
automatic
carrier
host
Prior art date
Application number
KR1019980008998A
Other languages
English (en)
Korean (ko)
Other versions
KR19990075030A (ko
Inventor
조재웅
Original Assignee
윤종용
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 윤종용, 삼성전자주식회사 filed Critical 윤종용
Priority to KR1019980008998A priority Critical patent/KR100286982B1/ko
Priority to CN98122401A priority patent/CN1229050A/zh
Publication of KR19990075030A publication Critical patent/KR19990075030A/ko
Application granted granted Critical
Publication of KR100286982B1 publication Critical patent/KR100286982B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019980008998A 1998-03-17 1998-03-17 웨이퍼캐리어관련정보인식이가능한자동반송시스템및반송방법 KR100286982B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019980008998A KR100286982B1 (ko) 1998-03-17 1998-03-17 웨이퍼캐리어관련정보인식이가능한자동반송시스템및반송방법
CN98122401A CN1229050A (zh) 1998-03-17 1998-11-18 能够识别与晶片载体有关的数据的自动运输系统及方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019980008998A KR100286982B1 (ko) 1998-03-17 1998-03-17 웨이퍼캐리어관련정보인식이가능한자동반송시스템및반송방법

Publications (2)

Publication Number Publication Date
KR19990075030A KR19990075030A (ko) 1999-10-05
KR100286982B1 true KR100286982B1 (ko) 2001-04-16

Family

ID=19534927

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980008998A KR100286982B1 (ko) 1998-03-17 1998-03-17 웨이퍼캐리어관련정보인식이가능한자동반송시스템및반송방법

Country Status (2)

Country Link
KR (1) KR100286982B1 (zh)
CN (1) CN1229050A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100609297B1 (ko) * 2000-07-03 2006-08-04 호쿠요덴키 가부시키가이샤 광데이터 전송장치
CN104898615A (zh) * 2015-05-06 2015-09-09 深圳市立创达自动化设备有限公司 电路板上下料的控制装置及方法
CN106325272A (zh) * 2016-08-19 2017-01-11 武汉理工大学 一种与agv小车配合使用的运输托盘控制系统及方法
CN106493579B (zh) * 2016-10-31 2019-10-15 上海发那科机器人有限公司 一种钣金加工系统及其工作流程
KR101936296B1 (ko) * 2017-12-14 2019-04-03 오학서 자동 반송 시스템에서 무인 이송 장치와 설비간의 rf 통신 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970066775A (ko) * 1996-03-30 1997-10-13 김광호 반도체 제조 공정의 자동화 장치 및 그 제어 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970066775A (ko) * 1996-03-30 1997-10-13 김광호 반도체 제조 공정의 자동화 장치 및 그 제어 방법

Also Published As

Publication number Publication date
CN1229050A (zh) 1999-09-22
KR19990075030A (ko) 1999-10-05

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