KR100236272B1 - 클린룸용 보관고 - Google Patents

클린룸용 보관고 Download PDF

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Publication number
KR100236272B1
KR100236272B1 KR1019930000636A KR930000636A KR100236272B1 KR 100236272 B1 KR100236272 B1 KR 100236272B1 KR 1019930000636 A KR1019930000636 A KR 1019930000636A KR 930000636 A KR930000636 A KR 930000636A KR 100236272 B1 KR100236272 B1 KR 100236272B1
Authority
KR
South Korea
Prior art keywords
storage
container
lid
wafer
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019930000636A
Other languages
English (en)
Korean (ko)
Other versions
KR930016325A (ko
Inventor
히또시 가와노
앗쯔시 오꾸노
마사노리 쯔다
미쯔히로 하야시
뎃베이 야마시따
마사나오 무라다
쯔요시 다나까
데루야 모리따
아끼오 나까무라
Original Assignee
이노마다 시게오
신코덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이노마다 시게오, 신코덴키 가부시키가이샤 filed Critical 이노마다 시게오
Publication of KR930016325A publication Critical patent/KR930016325A/ko
Application granted granted Critical
Publication of KR100236272B1 publication Critical patent/KR100236272B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3212—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1019930000636A 1992-01-21 1993-01-20 클린룸용 보관고 Expired - Fee Related KR100236272B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP92-8663 1992-01-21
JP4008663A JP2982461B2 (ja) 1992-01-21 1992-01-21 クリーンルーム用保管庫

Publications (2)

Publication Number Publication Date
KR930016325A KR930016325A (ko) 1993-08-26
KR100236272B1 true KR100236272B1 (ko) 1999-12-15

Family

ID=11699175

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930000636A Expired - Fee Related KR100236272B1 (ko) 1992-01-21 1993-01-20 클린룸용 보관고

Country Status (3)

Country Link
JP (1) JP2982461B2 (https=)
KR (1) KR100236272B1 (https=)
TW (1) TW227546B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474572B1 (ko) * 2006-06-19 2014-12-18 엔테그리스, 아이엔씨. 레티클 스토리지 정화시스템

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3519212B2 (ja) * 1995-06-13 2004-04-12 高砂熱学工業株式会社 清浄な資材用保管庫
JP5236518B2 (ja) * 2009-02-03 2013-07-17 株式会社ダン・タクマ 保管システムおよび保管方法
JP5440871B2 (ja) 2010-08-20 2014-03-12 株式会社ダイフク 容器保管設備
JP5716968B2 (ja) * 2012-01-04 2015-05-13 株式会社ダイフク 物品保管設備
JP6106501B2 (ja) * 2013-04-12 2017-04-05 東京エレクトロン株式会社 収納容器内の雰囲気管理方法
CN111365957B (zh) * 2020-04-16 2023-05-09 重庆电力高等专科学校 镀铬管清洗烘干生产线
CN115649719B (zh) * 2022-12-13 2023-03-10 中科摩通(常州)智能制造股份有限公司 一种智能仓储巷道机器人及其智能仓储系统
EP4443236A1 (en) * 2023-04-05 2024-10-09 Brooks Automation (Germany) GmbH Stocker compartment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036205A (ja) * 1983-08-08 1985-02-25 Hitachi Ltd 収納装置
JPS63262310A (ja) * 1986-12-27 1988-10-28 Shinkawa Ltd キユア用ワーク収納箱

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995430A (en) 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036205A (ja) * 1983-08-08 1985-02-25 Hitachi Ltd 収納装置
JPS63262310A (ja) * 1986-12-27 1988-10-28 Shinkawa Ltd キユア用ワーク収納箱

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474572B1 (ko) * 2006-06-19 2014-12-18 엔테그리스, 아이엔씨. 레티클 스토리지 정화시스템

Also Published As

Publication number Publication date
JP2982461B2 (ja) 1999-11-22
JPH06156622A (ja) 1994-06-03
TW227546B (https=) 1994-08-01
KR930016325A (ko) 1993-08-26

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