JPWO2025134288A5 - - Google Patents
Info
- Publication number
- JPWO2025134288A5 JPWO2025134288A5 JP2024531405A JP2024531405A JPWO2025134288A5 JP WO2025134288 A5 JPWO2025134288 A5 JP WO2025134288A5 JP 2024531405 A JP2024531405 A JP 2024531405A JP 2024531405 A JP2024531405 A JP 2024531405A JP WO2025134288 A5 JPWO2025134288 A5 JP WO2025134288A5
- Authority
- JP
- Japan
- Prior art keywords
- plug
- ceramic
- circumferential surface
- semiconductor manufacturing
- manufacturing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025178752A JP2026012854A (ja) | 2023-12-20 | 2025-10-23 | 半導体製造装置用部材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/045783 WO2025134288A1 (ja) | 2023-12-20 | 2023-12-20 | 半導体製造装置用部材 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025178752A Division JP2026012854A (ja) | 2023-12-20 | 2025-10-23 | 半導体製造装置用部材 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2025134288A1 JPWO2025134288A1 (https=) | 2025-06-26 |
| JP7764607B1 JP7764607B1 (ja) | 2025-11-05 |
| JPWO2025134288A5 true JPWO2025134288A5 (https=) | 2025-11-19 |
Family
ID=96096428
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024531405A Active JP7764607B1 (ja) | 2023-12-20 | 2023-12-20 | 半導体製造装置用部材 |
| JP2025178752A Pending JP2026012854A (ja) | 2023-12-20 | 2025-10-23 | 半導体製造装置用部材 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025178752A Pending JP2026012854A (ja) | 2023-12-20 | 2025-10-23 | 半導体製造装置用部材 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20250210394A1 (https=) |
| JP (2) | JP7764607B1 (https=) |
| TW (1) | TW202527196A (https=) |
| WO (1) | WO2025134288A1 (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10770270B2 (en) * | 2016-06-07 | 2020-09-08 | Applied Materials, Inc. | High power electrostatic chuck with aperture-reducing plug in a gas hole |
| JP7441404B2 (ja) * | 2019-03-05 | 2024-03-01 | Toto株式会社 | 静電チャック、および処理装置 |
| JP2023035856A (ja) * | 2021-08-31 | 2023-03-13 | Toto株式会社 | 静電チャック、および処理装置 |
| JP7620578B2 (ja) * | 2022-01-07 | 2025-01-23 | 日本碍子株式会社 | 半導体製造装置用部材 |
| JP7569343B2 (ja) * | 2022-01-21 | 2024-10-17 | 日本碍子株式会社 | 半導体製造装置用部材 |
| JP7483121B2 (ja) * | 2022-02-09 | 2024-05-14 | 日本碍子株式会社 | 半導体製造装置用部材 |
-
2023
- 2023-12-20 WO PCT/JP2023/045783 patent/WO2025134288A1/ja active Pending
- 2023-12-20 JP JP2024531405A patent/JP7764607B1/ja active Active
-
2024
- 2024-08-12 US US18/800,232 patent/US20250210394A1/en active Pending
- 2024-09-23 TW TW113135976A patent/TW202527196A/zh unknown
-
2025
- 2025-10-23 JP JP2025178752A patent/JP2026012854A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110277341B (zh) | 静电吸盘 | |
| JP5633766B2 (ja) | 静電チャック | |
| KR20250007482A (ko) | 정전척 | |
| CN116313981A (zh) | 静电吸盘 | |
| CN111128838B (zh) | 静电吸盘 | |
| US7268423B2 (en) | Flexible rewiring plate for semiconductor components, and process for producing it | |
| EP1900680A3 (en) | Cap wafer having electrodes | |
| KR101590541B1 (ko) | 릴리프된 활성 영역을 가지는 다이를 포함하는 집적 회로 패키지 시스템 | |
| JP4858319B2 (ja) | ウェハ保持体の電極接続構造 | |
| TW201810513A (zh) | 基板保持裝置 | |
| CN107534269A (zh) | 具有基底和半导体激光器的装置 | |
| JP7802835B2 (ja) | 試料保持具 | |
| JP7319153B2 (ja) | 保持装置 | |
| KR20090030540A (ko) | 반도체 패키지, 이를 제조하기 위한 반도체 패키지의제조장치와 반도체 패키지의 제조방법, 그리고 반도체패키지를 구비한 전자 기기 | |
| JPWO2025134288A5 (https=) | ||
| CN110277343B (zh) | 静电吸盘 | |
| JP6680649B2 (ja) | 真空吸着部材 | |
| TW201832341A (zh) | 半導體裝置 | |
| JP7577524B2 (ja) | 保持装置 | |
| KR102863907B1 (ko) | 웨이퍼 배치대 | |
| WO2018190220A1 (ja) | シャワーヘッド | |
| JP2020004809A (ja) | 保持装置 | |
| US7649672B2 (en) | MEMS structure and method of fabricating the same | |
| EP1796158B1 (en) | Semiconductor manufacturing apparatus | |
| US6698088B2 (en) | Universal clamping mechanism |