JPWO2025004621A5 - - Google Patents

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Publication number
JPWO2025004621A5
JPWO2025004621A5 JP2025529525A JP2025529525A JPWO2025004621A5 JP WO2025004621 A5 JPWO2025004621 A5 JP WO2025004621A5 JP 2025529525 A JP2025529525 A JP 2025529525A JP 2025529525 A JP2025529525 A JP 2025529525A JP WO2025004621 A5 JPWO2025004621 A5 JP WO2025004621A5
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JP
Japan
Prior art keywords
group
radiation
carbon atoms
atom
composition according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025529525A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025004621A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/018785 external-priority patent/WO2025004621A1/ja
Publication of JPWO2025004621A1 publication Critical patent/JPWO2025004621A1/ja
Publication of JPWO2025004621A5 publication Critical patent/JPWO2025004621A5/ja
Pending legal-status Critical Current

Links

JP2025529525A 2023-06-28 2024-05-22 Pending JPWO2025004621A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023106132 2023-06-28
PCT/JP2024/018785 WO2025004621A1 (ja) 2023-06-28 2024-05-22 感放射線性組成物及びパターン形成方法

Publications (2)

Publication Number Publication Date
JPWO2025004621A1 JPWO2025004621A1 (https=) 2025-01-02
JPWO2025004621A5 true JPWO2025004621A5 (https=) 2026-03-31

Family

ID=93938193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025529525A Pending JPWO2025004621A1 (https=) 2023-06-28 2024-05-22

Country Status (5)

Country Link
US (1) US20260104639A1 (https=)
JP (1) JPWO2025004621A1 (https=)
KR (1) KR20260027927A (https=)
TW (1) TW202500600A (https=)
WO (1) WO2025004621A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026054063A1 (ja) * 2024-09-09 2026-03-12 三菱瓦斯化学株式会社 ヨウ素含有(メタ)アクリル酸エステル化合物及びヨウ素・水酸基含有重合体の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102395705B1 (ko) * 2017-04-21 2022-05-09 후지필름 가부시키가이샤 Euv광용 감광성 조성물, 패턴 형성 방법, 전자 디바이스의 제조 방법
JP7636178B2 (ja) * 2020-02-28 2025-02-26 住友化学株式会社 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法

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