JPWO2024247263A5 - - Google Patents

Info

Publication number
JPWO2024247263A5
JPWO2024247263A5 JP2025523203A JP2025523203A JPWO2024247263A5 JP WO2024247263 A5 JPWO2024247263 A5 JP WO2024247263A5 JP 2025523203 A JP2025523203 A JP 2025523203A JP 2025523203 A JP2025523203 A JP 2025523203A JP WO2024247263 A5 JPWO2024247263 A5 JP WO2024247263A5
Authority
JP
Japan
Prior art keywords
positioning portion
substrate storage
container body
support portion
substrate support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025523203A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024247263A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/020688 external-priority patent/WO2024247263A1/ja
Publication of JPWO2024247263A1 publication Critical patent/JPWO2024247263A1/ja
Publication of JPWO2024247263A5 publication Critical patent/JPWO2024247263A5/ja
Pending legal-status Critical Current

Links

JP2025523203A 2023-06-02 2023-06-02 Pending JPWO2024247263A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/020688 WO2024247263A1 (ja) 2023-06-02 2023-06-02 基板収納容器

Publications (2)

Publication Number Publication Date
JPWO2024247263A1 JPWO2024247263A1 (https=) 2024-12-05
JPWO2024247263A5 true JPWO2024247263A5 (https=) 2026-03-27

Family

ID=93657524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025523203A Pending JPWO2024247263A1 (https=) 2023-06-02 2023-06-02

Country Status (5)

Country Link
JP (1) JPWO2024247263A1 (https=)
KR (1) KR20260018834A (https=)
CN (1) CN121002638A (https=)
TW (1) TW202448779A (https=)
WO (1) WO2024247263A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5361805B2 (ja) * 2010-06-15 2013-12-04 信越ポリマー株式会社 基板収納容器
KR102098790B1 (ko) * 2013-06-19 2020-04-08 미라이얼 가부시키가이샤 기판수납용기
CN116888721A (zh) * 2021-03-29 2023-10-13 未来儿股份有限公司 基板收纳容器

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