KR20260018834A - 기판수납용기 - Google Patents
기판수납용기Info
- Publication number
- KR20260018834A KR20260018834A KR1020257040056A KR20257040056A KR20260018834A KR 20260018834 A KR20260018834 A KR 20260018834A KR 1020257040056 A KR1020257040056 A KR 1020257040056A KR 20257040056 A KR20257040056 A KR 20257040056A KR 20260018834 A KR20260018834 A KR 20260018834A
- Authority
- KR
- South Korea
- Prior art keywords
- positioning
- substrate support
- side wall
- lateral
- container body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/020688 WO2024247263A1 (ja) | 2023-06-02 | 2023-06-02 | 基板収納容器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20260018834A true KR20260018834A (ko) | 2026-02-09 |
Family
ID=93657524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020257040056A Pending KR20260018834A (ko) | 2023-06-02 | 2023-06-02 | 기판수납용기 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2024247263A1 (https=) |
| KR (1) | KR20260018834A (https=) |
| CN (1) | CN121002638A (https=) |
| TW (1) | TW202448779A (https=) |
| WO (1) | WO2024247263A1 (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5361805B2 (ja) * | 2010-06-15 | 2013-12-04 | 信越ポリマー株式会社 | 基板収納容器 |
| JP6162803B2 (ja) * | 2013-06-19 | 2017-07-12 | ミライアル株式会社 | 基板収納容器 |
| US12424472B2 (en) * | 2021-03-29 | 2025-09-23 | Miraial Co., Ltd. | Substrate storing container |
-
2023
- 2023-06-02 KR KR1020257040056A patent/KR20260018834A/ko active Pending
- 2023-06-02 CN CN202380097566.8A patent/CN121002638A/zh active Pending
- 2023-06-02 WO PCT/JP2023/020688 patent/WO2024247263A1/ja not_active Ceased
- 2023-06-02 JP JP2025523203A patent/JPWO2024247263A1/ja active Pending
-
2024
- 2024-05-24 TW TW113119219A patent/TW202448779A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024247263A1 (ja) | 2024-12-05 |
| TW202448779A (zh) | 2024-12-16 |
| CN121002638A (zh) | 2025-11-21 |
| JPWO2024247263A1 (https=) | 2024-12-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| Q12 | Application published |
Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| E13 | Pre-grant limitation requested |
Free format text: ST27 STATUS EVENT CODE: A-2-3-E10-E13-LIM-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| E13-X000 | Pre-grant limitation requested |
St.27 status event code: A-2-3-E10-E13-lim-X000 |
|
| P11 | Amendment of application requested |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |