JPWO2024247263A1 - - Google Patents

Info

Publication number
JPWO2024247263A1
JPWO2024247263A1 JP2025523203A JP2025523203A JPWO2024247263A1 JP WO2024247263 A1 JPWO2024247263 A1 JP WO2024247263A1 JP 2025523203 A JP2025523203 A JP 2025523203A JP 2025523203 A JP2025523203 A JP 2025523203A JP WO2024247263 A1 JPWO2024247263 A1 JP WO2024247263A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025523203A
Other languages
Japanese (ja)
Other versions
JPWO2024247263A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024247263A1 publication Critical patent/JPWO2024247263A1/ja
Publication of JPWO2024247263A5 publication Critical patent/JPWO2024247263A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
JP2025523203A 2023-06-02 2023-06-02 Pending JPWO2024247263A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/020688 WO2024247263A1 (ja) 2023-06-02 2023-06-02 基板収納容器

Publications (2)

Publication Number Publication Date
JPWO2024247263A1 true JPWO2024247263A1 (https=) 2024-12-05
JPWO2024247263A5 JPWO2024247263A5 (https=) 2026-03-27

Family

ID=93657524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025523203A Pending JPWO2024247263A1 (https=) 2023-06-02 2023-06-02

Country Status (5)

Country Link
JP (1) JPWO2024247263A1 (https=)
KR (1) KR20260018834A (https=)
CN (1) CN121002638A (https=)
TW (1) TW202448779A (https=)
WO (1) WO2024247263A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5361805B2 (ja) * 2010-06-15 2013-12-04 信越ポリマー株式会社 基板収納容器
JP6162803B2 (ja) * 2013-06-19 2017-07-12 ミライアル株式会社 基板収納容器
US12424472B2 (en) * 2021-03-29 2025-09-23 Miraial Co., Ltd. Substrate storing container

Also Published As

Publication number Publication date
WO2024247263A1 (ja) 2024-12-05
KR20260018834A (ko) 2026-02-09
TW202448779A (zh) 2024-12-16
CN121002638A (zh) 2025-11-21

Similar Documents

Publication Publication Date Title
CL2026000327A1 (es) Dispositivos de estimulación eléctrica, controladores y métodos relacionados
JPWO2024247263A1 (https=)
BR102023008688A2 (https=)
BR102023007252A2 (https=)
BY13172U (https=)
CN307049537S (https=)
CN307047465S (https=)
CN307047079S (https=)
CN307046771S (https=)
CN307048413S (https=)
CN307046752S (https=)
CN307046021S (https=)
CN307046014S (https=)
CN307049431S (https=)
CN307045805S (https=)
CN307045723S (https=)
CN307045457S (https=)
CN307045396S (https=)
CN307045088S (https=)
BY13168U (https=)
BY23963C1 (https=)
BY13176U (https=)
BY13175U (https=)
BY13174U (https=)
BY13163U (https=)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251202