JPWO2024171391A5 - - Google Patents

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Publication number
JPWO2024171391A5
JPWO2024171391A5 JP2023551769A JP2023551769A JPWO2024171391A5 JP WO2024171391 A5 JPWO2024171391 A5 JP WO2024171391A5 JP 2023551769 A JP2023551769 A JP 2023551769A JP 2023551769 A JP2023551769 A JP 2023551769A JP WO2024171391 A5 JPWO2024171391 A5 JP WO2024171391A5
Authority
JP
Japan
Prior art keywords
ceramic
plate
fixing plate
terminal
heater according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023551769A
Other languages
English (en)
Japanese (ja)
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JPWO2024171391A1 (https=
JP7598480B1 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/005549 external-priority patent/WO2024171391A1/ja
Publication of JPWO2024171391A1 publication Critical patent/JPWO2024171391A1/ja
Application granted granted Critical
Publication of JP7598480B1 publication Critical patent/JP7598480B1/ja
Publication of JPWO2024171391A5 publication Critical patent/JPWO2024171391A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023551769A 2023-02-16 2023-02-16 セラミックヒータ Active JP7598480B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/005549 WO2024171391A1 (ja) 2023-02-16 2023-02-16 セラミックヒータ

Publications (3)

Publication Number Publication Date
JPWO2024171391A1 JPWO2024171391A1 (https=) 2024-08-22
JP7598480B1 JP7598480B1 (ja) 2024-12-11
JPWO2024171391A5 true JPWO2024171391A5 (https=) 2025-01-22

Family

ID=92421128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023551769A Active JP7598480B1 (ja) 2023-02-16 2023-02-16 セラミックヒータ

Country Status (2)

Country Link
JP (1) JP7598480B1 (https=)
WO (1) WO2024171391A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005032842A (ja) * 2003-07-08 2005-02-03 Ibiden Co Ltd 電極構造およびセラミック接合体
KR100979915B1 (ko) * 2005-12-28 2010-09-03 주식회사 코미코 정전척 및 히터
TWI665328B (zh) * 2014-07-02 2019-07-11 Applied Materials, Inc. 用於電漿處理的多區域基座
JP6804878B2 (ja) * 2016-06-20 2020-12-23 日本特殊陶業株式会社 加熱部材及び静電チャック
JP6758143B2 (ja) * 2016-09-29 2020-09-23 日本特殊陶業株式会社 加熱装置
JP7101058B2 (ja) * 2018-06-19 2022-07-14 日本特殊陶業株式会社 保持装置
US12444585B2 (en) * 2020-05-29 2025-10-14 Applied Materials, Inc. Electrical connector for cooled substrate support assembly
JP7430617B2 (ja) * 2020-10-16 2024-02-13 日本碍子株式会社 ウエハ載置台
JP2022124055A (ja) * 2021-02-15 2022-08-25 日本特殊陶業株式会社 電極埋設部材及び半導体製造装置部品

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