JP7598480B1 - セラミックヒータ - Google Patents

セラミックヒータ Download PDF

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Publication number
JP7598480B1
JP7598480B1 JP2023551769A JP2023551769A JP7598480B1 JP 7598480 B1 JP7598480 B1 JP 7598480B1 JP 2023551769 A JP2023551769 A JP 2023551769A JP 2023551769 A JP2023551769 A JP 2023551769A JP 7598480 B1 JP7598480 B1 JP 7598480B1
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JP
Japan
Prior art keywords
ceramic
terminal
plate
heater
fixing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023551769A
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English (en)
Japanese (ja)
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JPWO2024171391A1 (https=
JPWO2024171391A5 (https=
Inventor
健太郎 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
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NGK Insulators Ltd
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Publication of JPWO2024171391A1 publication Critical patent/JPWO2024171391A1/ja
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Publication of JP7598480B1 publication Critical patent/JP7598480B1/ja
Publication of JPWO2024171391A5 publication Critical patent/JPWO2024171391A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping

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  • Resistance Heating (AREA)
JP2023551769A 2023-02-16 2023-02-16 セラミックヒータ Active JP7598480B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/005549 WO2024171391A1 (ja) 2023-02-16 2023-02-16 セラミックヒータ

Publications (3)

Publication Number Publication Date
JPWO2024171391A1 JPWO2024171391A1 (https=) 2024-08-22
JP7598480B1 true JP7598480B1 (ja) 2024-12-11
JPWO2024171391A5 JPWO2024171391A5 (https=) 2025-01-22

Family

ID=92421128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023551769A Active JP7598480B1 (ja) 2023-02-16 2023-02-16 セラミックヒータ

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JP (1) JP7598480B1 (https=)
WO (1) WO2024171391A1 (https=)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005032842A (ja) * 2003-07-08 2005-02-03 Ibiden Co Ltd 電極構造およびセラミック接合体
KR20070069463A (ko) * 2005-12-28 2007-07-03 주식회사 코미코 정전척 및 히터
US20160002779A1 (en) * 2014-07-02 2016-01-07 Applied Materials, Inc. Multi-zone pedestal for plasma processing
JP2017228360A (ja) * 2016-06-20 2017-12-28 日本特殊陶業株式会社 加熱部材及び静電チャック
JP2018056332A (ja) * 2016-09-29 2018-04-05 日本特殊陶業株式会社 加熱装置
JP2019220537A (ja) * 2018-06-19 2019-12-26 日本特殊陶業株式会社 保持装置
JP3233344U (ja) * 2020-05-29 2021-08-05 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 冷却された基板支持アセンブリのための電気コネクタ
JP2022065943A (ja) * 2020-10-16 2022-04-28 日本碍子株式会社 ウエハ載置台
JP2022124055A (ja) * 2021-02-15 2022-08-25 日本特殊陶業株式会社 電極埋設部材及び半導体製造装置部品

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005032842A (ja) * 2003-07-08 2005-02-03 Ibiden Co Ltd 電極構造およびセラミック接合体
KR20070069463A (ko) * 2005-12-28 2007-07-03 주식회사 코미코 정전척 및 히터
US20160002779A1 (en) * 2014-07-02 2016-01-07 Applied Materials, Inc. Multi-zone pedestal for plasma processing
JP2017228360A (ja) * 2016-06-20 2017-12-28 日本特殊陶業株式会社 加熱部材及び静電チャック
JP2018056332A (ja) * 2016-09-29 2018-04-05 日本特殊陶業株式会社 加熱装置
JP2019220537A (ja) * 2018-06-19 2019-12-26 日本特殊陶業株式会社 保持装置
JP3233344U (ja) * 2020-05-29 2021-08-05 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 冷却された基板支持アセンブリのための電気コネクタ
JP2022065943A (ja) * 2020-10-16 2022-04-28 日本碍子株式会社 ウエハ載置台
JP2022124055A (ja) * 2021-02-15 2022-08-25 日本特殊陶業株式会社 電極埋設部材及び半導体製造装置部品

Also Published As

Publication number Publication date
WO2024171391A1 (ja) 2024-08-22
JPWO2024171391A1 (https=) 2024-08-22

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