JPWO2024171391A1 - - Google Patents
Info
- Publication number
- JPWO2024171391A1 JPWO2024171391A1 JP2023551769A JP2023551769A JPWO2024171391A1 JP WO2024171391 A1 JPWO2024171391 A1 JP WO2024171391A1 JP 2023551769 A JP2023551769 A JP 2023551769A JP 2023551769 A JP2023551769 A JP 2023551769A JP WO2024171391 A1 JPWO2024171391 A1 JP WO2024171391A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/005549 WO2024171391A1 (ja) | 2023-02-16 | 2023-02-16 | セラミックヒータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2024171391A1 true JPWO2024171391A1 (https=) | 2024-08-22 |
| JP7598480B1 JP7598480B1 (ja) | 2024-12-11 |
| JPWO2024171391A5 JPWO2024171391A5 (https=) | 2025-01-22 |
Family
ID=92421128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023551769A Active JP7598480B1 (ja) | 2023-02-16 | 2023-02-16 | セラミックヒータ |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7598480B1 (https=) |
| WO (1) | WO2024171391A1 (https=) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005032842A (ja) * | 2003-07-08 | 2005-02-03 | Ibiden Co Ltd | 電極構造およびセラミック接合体 |
| KR100979915B1 (ko) * | 2005-12-28 | 2010-09-03 | 주식회사 코미코 | 정전척 및 히터 |
| TWI665328B (zh) * | 2014-07-02 | 2019-07-11 | Applied Materials, Inc. | 用於電漿處理的多區域基座 |
| JP6804878B2 (ja) * | 2016-06-20 | 2020-12-23 | 日本特殊陶業株式会社 | 加熱部材及び静電チャック |
| JP6758143B2 (ja) * | 2016-09-29 | 2020-09-23 | 日本特殊陶業株式会社 | 加熱装置 |
| JP7101058B2 (ja) * | 2018-06-19 | 2022-07-14 | 日本特殊陶業株式会社 | 保持装置 |
| US12444585B2 (en) * | 2020-05-29 | 2025-10-14 | Applied Materials, Inc. | Electrical connector for cooled substrate support assembly |
| JP7430617B2 (ja) * | 2020-10-16 | 2024-02-13 | 日本碍子株式会社 | ウエハ載置台 |
| JP2022124055A (ja) * | 2021-02-15 | 2022-08-25 | 日本特殊陶業株式会社 | 電極埋設部材及び半導体製造装置部品 |
-
2023
- 2023-02-16 JP JP2023551769A patent/JP7598480B1/ja active Active
- 2023-02-16 WO PCT/JP2023/005549 patent/WO2024171391A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024171391A1 (ja) | 2024-08-22 |
| JP7598480B1 (ja) | 2024-12-11 |
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