JPWO2024157518A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2024157518A5 JPWO2024157518A5 JP2024509335A JP2024509335A JPWO2024157518A5 JP WO2024157518 A5 JPWO2024157518 A5 JP WO2024157518A5 JP 2024509335 A JP2024509335 A JP 2024509335A JP 2024509335 A JP2024509335 A JP 2024509335A JP WO2024157518 A5 JPWO2024157518 A5 JP WO2024157518A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive
- gas passage
- elastic body
- hole
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPPCT/JP2023/002417 | 2023-01-26 | ||
| JP2023002417 | 2023-01-26 | ||
| PCT/JP2023/031890 WO2024157518A1 (ja) | 2023-01-26 | 2023-08-31 | ウエハ載置台 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2024157518A1 JPWO2024157518A1 (https=) | 2024-08-02 |
| JPWO2024157518A5 true JPWO2024157518A5 (https=) | 2024-12-24 |
| JP7618098B2 JP7618098B2 (ja) | 2025-01-20 |
Family
ID=91970183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024509335A Active JP7618098B2 (ja) | 2023-01-26 | 2023-08-31 | ウエハ載置台 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240297062A1 (https=) |
| JP (1) | JP7618098B2 (https=) |
| KR (1) | KR102772614B1 (https=) |
| CN (1) | CN120513512A (https=) |
| TW (1) | TW202431469A (https=) |
| WO (1) | WO2024157518A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102810844B1 (ko) * | 2023-02-06 | 2025-05-22 | 엔지케이 인슐레이터 엘티디 | 서셉터 |
| WO2026058633A1 (ja) * | 2024-09-12 | 2026-03-19 | 日本碍子株式会社 | ウエハ載置台 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090097229A (ko) * | 2008-03-11 | 2009-09-16 | 전영재 | 반도체 및 ｌｃｄ 제조용 정전척 |
| US8336891B2 (en) * | 2008-03-11 | 2012-12-25 | Ngk Insulators, Ltd. | Electrostatic chuck |
| JP5984504B2 (ja) * | 2012-05-21 | 2016-09-06 | 新光電気工業株式会社 | 静電チャック、静電チャックの製造方法 |
| JP5633766B2 (ja) * | 2013-03-29 | 2014-12-03 | Toto株式会社 | 静電チャック |
| US10770270B2 (en) * | 2016-06-07 | 2020-09-08 | Applied Materials, Inc. | High power electrostatic chuck with aperture-reducing plug in a gas hole |
| US10688750B2 (en) * | 2017-10-03 | 2020-06-23 | Applied Materials, Inc. | Bonding structure of E chuck to aluminum base configuration |
| KR102188779B1 (ko) * | 2018-10-15 | 2020-12-08 | 세메스 주식회사 | 기판 지지 장치 및 그 제조방법 |
| JP7402411B2 (ja) | 2018-10-30 | 2023-12-21 | Toto株式会社 | 静電チャック |
| JP7269759B2 (ja) | 2019-03-12 | 2023-05-09 | 新光電気工業株式会社 | 基板固定装置 |
| WO2021241645A1 (ja) * | 2020-05-28 | 2021-12-02 | 京セラ株式会社 | 通気性プラグ、基板支持アセンブリおよびシャワープレート |
| JP7600025B2 (ja) * | 2021-04-23 | 2024-12-16 | 新光電気工業株式会社 | 静電吸着部材及び基板固定装置 |
-
2023
- 2023-08-31 CN CN202380013320.8A patent/CN120513512A/zh active Pending
- 2023-08-31 WO PCT/JP2023/031890 patent/WO2024157518A1/ja not_active Ceased
- 2023-08-31 KR KR1020247008103A patent/KR102772614B1/ko active Active
- 2023-08-31 JP JP2024509335A patent/JP7618098B2/ja active Active
- 2023-09-13 TW TW112134834A patent/TW202431469A/zh unknown
-
2024
- 2024-02-21 US US18/582,759 patent/US20240297062A1/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPWO2024157518A5 (https=) | ||
| US10115946B2 (en) | Secondary battery | |
| JP2023538597A5 (https=) | ||
| JP2023538596A5 (https=) | ||
| CA2484292A1 (en) | Fuel cell assembly and a separator therefor | |
| JP2018160653A5 (https=) | ||
| CN107250538B (zh) | 泵组件及其制造方法 | |
| US9214523B2 (en) | Field-effect transistor | |
| JPWO2021140407A5 (https=) | ||
| JP2022095187A5 (https=) | ||
| JP7241571B2 (ja) | 封口体 | |
| KR20240119246A (ko) | 웨이퍼 적재대 | |
| CN212690202U (zh) | 一种发动机 | |
| CA2630527A1 (en) | Fuel cell and bonding structure of separator for fuel cell | |
| JPWO2023132063A5 (https=) | ||
| CN115176377A (zh) | 密闭电池 | |
| JP7045587B2 (ja) | 二次電池 | |
| JPWO2023163100A5 (https=) | ||
| JPWO2024142436A5 (https=) | ||
| CA3242141A1 (en) | Pocket-type battery case and secondary lithium battery included | |
| JPWO2023176902A5 (https=) | ||
| JP2021118073A5 (https=) | ||
| JP6625754B2 (ja) | ガスケット | |
| JP2022532155A5 (ja) | 発光パッケージ | |
| CN212136582U (zh) | 电池及电池组 |