JP2022095187A5 - - Google Patents

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Publication number
JP2022095187A5
JP2022095187A5 JP2020208364A JP2020208364A JP2022095187A5 JP 2022095187 A5 JP2022095187 A5 JP 2022095187A5 JP 2020208364 A JP2020208364 A JP 2020208364A JP 2020208364 A JP2020208364 A JP 2020208364A JP 2022095187 A5 JP2022095187 A5 JP 2022095187A5
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JP
Japan
Prior art keywords
groove
resistance region
electrostatic chuck
high resistance
chuck according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020208364A
Other languages
English (en)
Japanese (ja)
Other versions
JP7632812B2 (ja
JP2022095187A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2020208364A external-priority patent/JP7632812B2/ja
Priority to JP2020208364A priority Critical patent/JP7632812B2/ja
Priority to KR1020210172709A priority patent/KR102891255B1/ko
Priority to TW110146493A priority patent/TWI882197B/zh
Priority to US17/550,502 priority patent/US11909335B2/en
Priority to CN202111535843.8A priority patent/CN114709158A/zh
Publication of JP2022095187A publication Critical patent/JP2022095187A/ja
Publication of JP2022095187A5 publication Critical patent/JP2022095187A5/ja
Publication of JP7632812B2 publication Critical patent/JP7632812B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020208364A 2020-12-16 2020-12-16 静電チャック、基板固定装置 Active JP7632812B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020208364A JP7632812B2 (ja) 2020-12-16 2020-12-16 静電チャック、基板固定装置
KR1020210172709A KR102891255B1 (ko) 2020-12-16 2021-12-06 정전 척 및 기판 고정 장치
TW110146493A TWI882197B (zh) 2020-12-16 2021-12-13 靜電夾盤及基板固定裝置
US17/550,502 US11909335B2 (en) 2020-12-16 2021-12-14 Electrostatic chuck and substrate fixing device
CN202111535843.8A CN114709158A (zh) 2020-12-16 2021-12-15 静电吸盘和基板固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020208364A JP7632812B2 (ja) 2020-12-16 2020-12-16 静電チャック、基板固定装置

Publications (3)

Publication Number Publication Date
JP2022095187A JP2022095187A (ja) 2022-06-28
JP2022095187A5 true JP2022095187A5 (https=) 2023-09-26
JP7632812B2 JP7632812B2 (ja) 2025-02-19

Family

ID=81941912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020208364A Active JP7632812B2 (ja) 2020-12-16 2020-12-16 静電チャック、基板固定装置

Country Status (5)

Country Link
US (1) US11909335B2 (https=)
JP (1) JP7632812B2 (https=)
KR (1) KR102891255B1 (https=)
CN (1) CN114709158A (https=)
TW (1) TWI882197B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4331103A4 (en) * 2021-04-30 2025-03-19 Estat Actuation, Inc. ELECTROADHESIVE ROTARY COUPLING
JP7759834B2 (ja) * 2022-03-31 2025-10-24 日本碍子株式会社 ウエハ載置台
CN120981907A (zh) * 2023-04-24 2025-11-18 日本碍子株式会社 晶片载放台
US20250119077A1 (en) * 2023-10-09 2025-04-10 Toyota Motor Engineering & Manufacturing North America, Inc. Electrostatic clutches with high strength substrate fabric
JP2026026650A (ja) * 2024-08-05 2026-02-18 Toto株式会社 静電チャック

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6108189A (en) * 1996-04-26 2000-08-22 Applied Materials, Inc. Electrostatic chuck having improved gas conduits
JP2000323558A (ja) * 1999-05-07 2000-11-24 Nikon Corp 静電吸着装置
JP4559595B2 (ja) * 2000-07-17 2010-10-06 東京エレクトロン株式会社 被処理体の載置装置及びプラズマ処理装置
JP3834466B2 (ja) * 2000-10-30 2006-10-18 株式会社日立製作所 半導体製造装置の制御方法
JP4768333B2 (ja) * 2005-06-29 2011-09-07 日本特殊陶業株式会社 静電チャック
JP4942471B2 (ja) * 2005-12-22 2012-05-30 京セラ株式会社 サセプタおよびこれを用いたウェハの処理方法
JP5103049B2 (ja) * 2007-04-04 2012-12-19 株式会社日立ハイテクノロジーズ ウエハ載置用電極
US10622239B2 (en) 2015-03-31 2020-04-14 Sumitomo Osaka Cement Co., Ltd. Electrostatic chuck device

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