JPWO2024143097A5 - - Google Patents

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Publication number
JPWO2024143097A5
JPWO2024143097A5 JP2024567675A JP2024567675A JPWO2024143097A5 JP WO2024143097 A5 JPWO2024143097 A5 JP WO2024143097A5 JP 2024567675 A JP2024567675 A JP 2024567675A JP 2024567675 A JP2024567675 A JP 2024567675A JP WO2024143097 A5 JPWO2024143097 A5 JP WO2024143097A5
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JP
Japan
Prior art keywords
treating
substrate
chemical solution
mass
elements
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Pending
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JP2024567675A
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English (en)
Japanese (ja)
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JPWO2024143097A1 (https=
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Priority claimed from PCT/JP2023/045646 external-priority patent/WO2024143097A1/ja
Publication of JPWO2024143097A1 publication Critical patent/JPWO2024143097A1/ja
Publication of JPWO2024143097A5 publication Critical patent/JPWO2024143097A5/ja
Pending legal-status Critical Current

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JP2024567675A 2022-12-28 2023-12-20 Pending JPWO2024143097A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022212245 2022-12-28
PCT/JP2023/045646 WO2024143097A1 (ja) 2022-12-28 2023-12-20 基材の処理方法および基材の製造方法

Publications (2)

Publication Number Publication Date
JPWO2024143097A1 JPWO2024143097A1 (https=) 2024-07-04
JPWO2024143097A5 true JPWO2024143097A5 (https=) 2025-09-10

Family

ID=91717413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024567675A Pending JPWO2024143097A1 (https=) 2022-12-28 2023-12-20

Country Status (4)

Country Link
JP (1) JPWO2024143097A1 (https=)
KR (1) KR20250132506A (https=)
TW (1) TW202432868A (https=)
WO (1) WO2024143097A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5898549B2 (ja) * 2012-03-29 2016-04-06 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
JP7194525B2 (ja) * 2017-12-28 2022-12-22 東京応化工業株式会社 表面処理方法、表面処理剤、及び基板上に領域選択的に製膜する方法
SG11202009171XA (en) * 2018-04-05 2020-10-29 Central Glass Co Ltd Surface treatment method of wafer and composition used for said method
KR20230015958A (ko) * 2020-05-21 2023-01-31 샌트랄 글래스 컴퍼니 리미티드 반도체 기판의 표면 처리 방법, 및 표면처리제 조성물
KR20240131340A (ko) * 2021-12-28 2024-08-30 샌트랄 글래스 컴퍼니 리미티드 막 형성용 조성물, 및 기판의 제조 방법

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