JPWO2023127942A5 - - Google Patents
Info
- Publication number
- JPWO2023127942A5 JPWO2023127942A5 JP2023571095A JP2023571095A JPWO2023127942A5 JP WO2023127942 A5 JPWO2023127942 A5 JP WO2023127942A5 JP 2023571095 A JP2023571095 A JP 2023571095A JP 2023571095 A JP2023571095 A JP 2023571095A JP WO2023127942 A5 JPWO2023127942 A5 JP WO2023127942A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming composition
- mass
- trifluoroacetate
- trifluoromethanesulfonate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021213908 | 2021-12-28 | ||
| PCT/JP2022/048486 WO2023127942A1 (ja) | 2021-12-28 | 2022-12-28 | 膜形成用組成物、および基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023127942A1 JPWO2023127942A1 (https=) | 2023-07-06 |
| JPWO2023127942A5 true JPWO2023127942A5 (https=) | 2025-10-22 |
Family
ID=86999214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023571095A Pending JPWO2023127942A1 (https=) | 2021-12-28 | 2022-12-28 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20250066621A1 (https=) |
| EP (1) | EP4459666A4 (https=) |
| JP (1) | JPWO2023127942A1 (https=) |
| KR (1) | KR20240131340A (https=) |
| CN (1) | CN118451534A (https=) |
| TW (1) | TW202330895A (https=) |
| WO (1) | WO2023127942A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024143097A1 (ja) * | 2022-12-28 | 2024-07-04 | セントラル硝子株式会社 | 基材の処理方法および基材の製造方法 |
| WO2025158917A1 (ja) * | 2024-01-26 | 2025-07-31 | セントラル硝子株式会社 | 撥水性膜形成用薬液、薬液入り容器、保管方法、および撥水性膜形成用薬液の製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6681795B2 (ja) | 2015-09-24 | 2020-04-15 | 東京応化工業株式会社 | 表面処理剤及び表面処理方法 |
| WO2019124264A1 (ja) * | 2017-12-22 | 2019-06-27 | セントラル硝子株式会社 | 表面処理剤及び表面処理体の製造方法 |
| JP7189427B2 (ja) * | 2017-12-22 | 2022-12-14 | セントラル硝子株式会社 | 表面処理剤及び表面処理体の製造方法 |
| US11282709B2 (en) * | 2018-01-15 | 2022-03-22 | Central Glass Company, Limited | Chemical agent for forming water repellent protective film and surface treatment method for wafers |
| US12098319B2 (en) * | 2018-02-13 | 2024-09-24 | Central Glass Company, Limited | Liquid chemical for forming water-repellent protective film, method for preparing same, and method for manufacturing surface-treated body |
| JP2021027304A (ja) * | 2019-08-09 | 2021-02-22 | セントラル硝子株式会社 | 撥水性保護膜形成用薬液及びウェハの表面処理方法 |
-
2022
- 2022-12-28 KR KR1020247021004A patent/KR20240131340A/ko active Pending
- 2022-12-28 JP JP2023571095A patent/JPWO2023127942A1/ja active Pending
- 2022-12-28 EP EP22916164.1A patent/EP4459666A4/en active Pending
- 2022-12-28 TW TW111150325A patent/TW202330895A/zh unknown
- 2022-12-28 WO PCT/JP2022/048486 patent/WO2023127942A1/ja not_active Ceased
- 2022-12-28 US US18/724,487 patent/US20250066621A1/en active Pending
- 2022-12-28 CN CN202280086237.9A patent/CN118451534A/zh active Pending
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