JPWO2024075462A5 - - Google Patents

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Publication number
JPWO2024075462A5
JPWO2024075462A5 JP2024555674A JP2024555674A JPWO2024075462A5 JP WO2024075462 A5 JPWO2024075462 A5 JP WO2024075462A5 JP 2024555674 A JP2024555674 A JP 2024555674A JP 2024555674 A JP2024555674 A JP 2024555674A JP WO2024075462 A5 JPWO2024075462 A5 JP WO2024075462A5
Authority
JP
Japan
Prior art keywords
pressure sensor
lid
sensor according
plan
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024555674A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024075462A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/032460 external-priority patent/WO2024075462A1/ja
Publication of JPWO2024075462A1 publication Critical patent/JPWO2024075462A1/ja
Publication of JPWO2024075462A5 publication Critical patent/JPWO2024075462A5/ja
Pending legal-status Critical Current

Links

JP2024555674A 2022-10-03 2023-09-06 Pending JPWO2024075462A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022159577 2022-10-03
PCT/JP2023/032460 WO2024075462A1 (ja) 2022-10-03 2023-09-06 圧力センサ

Publications (2)

Publication Number Publication Date
JPWO2024075462A1 JPWO2024075462A1 (https=) 2024-04-11
JPWO2024075462A5 true JPWO2024075462A5 (https=) 2025-06-18

Family

ID=90607800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024555674A Pending JPWO2024075462A1 (https=) 2022-10-03 2023-09-06

Country Status (2)

Country Link
JP (1) JPWO2024075462A1 (https=)
WO (1) WO2024075462A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119595174A (zh) * 2024-12-13 2025-03-11 深圳瑞德感知科技有限公司 新型无隔离膜片的mems压力传感器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6401545B1 (en) * 2000-01-25 2002-06-11 Motorola, Inc. Micro electro-mechanical system sensor with selective encapsulation and method therefor
US8258799B2 (en) * 2008-11-07 2012-09-04 The Charles Stark Draper Laboratory, Inc. MEMS dosimeter
JP5756181B2 (ja) * 2011-11-04 2015-07-29 アルプス電気株式会社 圧力センサ装置
ITTO20120753A1 (it) * 2012-08-30 2014-03-01 St Microelectronics Srl Dispositivo incapsulato esposto all'aria ambiente e a liquidi e relativo processo di fabbricazione

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