JPWO2024075462A1 - - Google Patents

Info

Publication number
JPWO2024075462A1
JPWO2024075462A1 JP2024555674A JP2024555674A JPWO2024075462A1 JP WO2024075462 A1 JPWO2024075462 A1 JP WO2024075462A1 JP 2024555674 A JP2024555674 A JP 2024555674A JP 2024555674 A JP2024555674 A JP 2024555674A JP WO2024075462 A1 JPWO2024075462 A1 JP WO2024075462A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024555674A
Other languages
Japanese (ja)
Other versions
JPWO2024075462A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024075462A1 publication Critical patent/JPWO2024075462A1/ja
Publication of JPWO2024075462A5 publication Critical patent/JPWO2024075462A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP2024555674A 2022-10-03 2023-09-06 Pending JPWO2024075462A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022159577 2022-10-03
PCT/JP2023/032460 WO2024075462A1 (ja) 2022-10-03 2023-09-06 圧力センサ

Publications (2)

Publication Number Publication Date
JPWO2024075462A1 true JPWO2024075462A1 (https=) 2024-04-11
JPWO2024075462A5 JPWO2024075462A5 (https=) 2025-06-18

Family

ID=90607800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024555674A Pending JPWO2024075462A1 (https=) 2022-10-03 2023-09-06

Country Status (2)

Country Link
JP (1) JPWO2024075462A1 (https=)
WO (1) WO2024075462A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119595174A (zh) * 2024-12-13 2025-03-11 深圳瑞德感知科技有限公司 新型无隔离膜片的mems压力传感器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6401545B1 (en) * 2000-01-25 2002-06-11 Motorola, Inc. Micro electro-mechanical system sensor with selective encapsulation and method therefor
US8258799B2 (en) * 2008-11-07 2012-09-04 The Charles Stark Draper Laboratory, Inc. MEMS dosimeter
JP5756181B2 (ja) * 2011-11-04 2015-07-29 アルプス電気株式会社 圧力センサ装置
ITTO20120753A1 (it) * 2012-08-30 2014-03-01 St Microelectronics Srl Dispositivo incapsulato esposto all'aria ambiente e a liquidi e relativo processo di fabbricazione

Also Published As

Publication number Publication date
WO2024075462A1 (ja) 2024-04-11

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250225