JPWO2024062560A5 - - Google Patents
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- Publication number
- JPWO2024062560A5 JPWO2024062560A5 JP2024547997A JP2024547997A JPWO2024062560A5 JP WO2024062560 A5 JPWO2024062560 A5 JP WO2024062560A5 JP 2024547997 A JP2024547997 A JP 2024547997A JP 2024547997 A JP2024547997 A JP 2024547997A JP WO2024062560 A5 JPWO2024062560 A5 JP WO2024062560A5
- Authority
- JP
- Japan
- Prior art keywords
- probe
- stress dispersion
- resistance portion
- probe card
- low resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 47
- 239000006185 dispersion Substances 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/035189 WO2024062560A1 (ja) | 2022-09-21 | 2022-09-21 | プローブカード用プローブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024062560A1 JPWO2024062560A1 (https=) | 2024-03-28 |
| JPWO2024062560A5 true JPWO2024062560A5 (https=) | 2025-04-30 |
Family
ID=90454009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024547997A Pending JPWO2024062560A1 (https=) | 2022-09-21 | 2022-09-21 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20260050010A1 (https=) |
| JP (1) | JPWO2024062560A1 (https=) |
| KR (1) | KR20250048368A (https=) |
| CN (1) | CN119923567A (https=) |
| TW (1) | TWI866465B (https=) |
| WO (1) | WO2024062560A1 (https=) |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3768305B2 (ja) * | 1996-10-22 | 2006-04-19 | 株式会社日本マイクロニクス | 平板状被検査体検査用プローブユニット |
| EP1610131A1 (en) * | 2004-06-21 | 2005-12-28 | Capres A/S | Flexible probe |
| JP2006284292A (ja) * | 2005-03-31 | 2006-10-19 | Kanai Hiroaki | コンタクトプローブ構造体 |
| JP4823617B2 (ja) * | 2005-09-09 | 2011-11-24 | 日本発條株式会社 | 導電性接触子および導電性接触子の製造方法 |
| US7384277B1 (en) * | 2006-12-17 | 2008-06-10 | Formfactor, Inc. | Reinforced contact elements |
| TWI369498B (en) * | 2008-06-18 | 2012-08-01 | Star Techn Inc | Probe and probe card for integrated circiut devices using the same |
| US9702904B2 (en) * | 2011-03-21 | 2017-07-11 | Formfactor, Inc. | Non-linear vertical leaf spring |
| JP2014013184A (ja) * | 2012-07-04 | 2014-01-23 | Micronics Japan Co Ltd | カンチレバー型プローブ集合体とそれを備えるプローブカード又はプローブユニット |
| EP3019879A4 (en) * | 2013-07-11 | 2017-08-16 | JohnsTech International Corporation | Testing apparatus and method for microcircuit and wafer level ic testing |
| JP6728219B2 (ja) * | 2015-03-31 | 2020-07-22 | テクノプローベ エス．ピー．エー． | 高周波適用のためのバーチカル接触プローブ、及びバーチカル接触プローブをもつ試験ヘッド |
| KR101962644B1 (ko) * | 2017-08-23 | 2019-03-28 | 리노공업주식회사 | 검사프로브 및 이를 사용한 검사장치 |
| IT202000030194A1 (it) * | 2020-12-09 | 2022-06-09 | Technoprobe Spa | Sonda di contatto per teste di misura di dispositivi elettronici e relativa testa di misura |
| WO2022196399A1 (ja) * | 2021-03-16 | 2022-09-22 | 日本電子材料株式会社 | プローブカード用プローブおよびその製造方法 |
| JP7847658B2 (ja) * | 2022-09-21 | 2026-04-17 | 日本電子材料株式会社 | プローブカード用プローブ |
-
2022
- 2022-09-21 KR KR1020257008795A patent/KR20250048368A/ko active Pending
- 2022-09-21 WO PCT/JP2022/035189 patent/WO2024062560A1/ja not_active Ceased
- 2022-09-21 JP JP2024547997A patent/JPWO2024062560A1/ja active Pending
- 2022-09-21 CN CN202280100280.6A patent/CN119923567A/zh active Pending
- 2022-09-21 US US19/102,033 patent/US20260050010A1/en active Pending
-
2023
- 2023-09-13 TW TW112134919A patent/TWI866465B/zh active
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