JPWO2024004830A5 - - Google Patents

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Publication number
JPWO2024004830A5
JPWO2024004830A5 JP2024515426A JP2024515426A JPWO2024004830A5 JP WO2024004830 A5 JPWO2024004830 A5 JP WO2024004830A5 JP 2024515426 A JP2024515426 A JP 2024515426A JP 2024515426 A JP2024515426 A JP 2024515426A JP WO2024004830 A5 JPWO2024004830 A5 JP WO2024004830A5
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JP
Japan
Prior art keywords
degassing
bottom plate
housing
discharge device
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024515426A
Other languages
English (en)
Japanese (ja)
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JPWO2024004830A1 (https=
JP7803408B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/023205 external-priority patent/WO2024004830A1/ja
Publication of JPWO2024004830A1 publication Critical patent/JPWO2024004830A1/ja
Publication of JPWO2024004830A5 publication Critical patent/JPWO2024004830A5/ja
Application granted granted Critical
Publication of JP7803408B2 publication Critical patent/JP7803408B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024515426A 2022-06-27 2023-06-22 脱気装置 Active JP7803408B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022102626 2022-06-27
JP2022102626 2022-06-27
PCT/JP2023/023205 WO2024004830A1 (ja) 2022-06-27 2023-06-22 脱気装置

Publications (3)

Publication Number Publication Date
JPWO2024004830A1 JPWO2024004830A1 (https=) 2024-01-04
JPWO2024004830A5 true JPWO2024004830A5 (https=) 2024-06-04
JP7803408B2 JP7803408B2 (ja) 2026-01-21

Family

ID=89382936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024515426A Active JP7803408B2 (ja) 2022-06-27 2023-06-22 脱気装置

Country Status (5)

Country Link
US (1) US20250387733A1 (https=)
EP (1) EP4545162A1 (https=)
JP (1) JP7803408B2 (https=)
CN (1) CN119403607A (https=)
WO (1) WO2024004830A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4539822A (en) * 1984-02-27 1985-09-10 National Electrostatics Corporation Vibration isolator for cryopump
JPS60255120A (ja) * 1984-06-01 1985-12-16 Showa Denko Kk 脱気用装置
JP4587428B2 (ja) * 2001-07-02 2010-11-24 三菱レイヨン株式会社 脱気装置
JP4483160B2 (ja) * 2002-07-18 2010-06-16 栗田工業株式会社 超純水供給設備
JP4857545B2 (ja) * 2004-11-02 2012-01-18 パナソニック株式会社 酸素富化機
JP2007291896A (ja) * 2006-04-24 2007-11-08 Erc:Kk 真空系における減圧吸引システム
WO2008035714A1 (en) * 2006-09-22 2008-03-27 Nitto Denko Corporation Gas removal device
JP6646499B2 (ja) * 2016-03-28 2020-02-14 積水メディカル株式会社 脱気装置

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