JPWO2023199375A1 - - Google Patents

Info

Publication number
JPWO2023199375A1
JPWO2023199375A1 JP2022547771A JP2022547771A JPWO2023199375A1 JP WO2023199375 A1 JPWO2023199375 A1 JP WO2023199375A1 JP 2022547771 A JP2022547771 A JP 2022547771A JP 2022547771 A JP2022547771 A JP 2022547771A JP WO2023199375 A1 JPWO2023199375 A1 JP WO2023199375A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022547771A
Other languages
Japanese (ja)
Other versions
JP7231118B1 (ja
JPWO2023199375A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of JP7231118B1 publication Critical patent/JP7231118B1/ja
Publication of JPWO2023199375A1 publication Critical patent/JPWO2023199375A1/ja
Publication of JPWO2023199375A5 publication Critical patent/JPWO2023199375A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/10Containers or parts thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/331Shapes of die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/341Dispositions of die-attach connectors, e.g. layouts
    • H10W72/344Dispositions of die-attach connectors, e.g. layouts relative to underlying supporting features, e.g. bond pads, RDLs or vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/351Materials of die-attach connectors
    • H10W72/352Materials of die-attach connectors comprising metals or metalloids, e.g. solders
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Micromachines (AREA)
JP2022547771A 2022-04-11 2022-04-11 中空パッケージ Active JP7231118B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/017500 WO2023199375A1 (ja) 2022-04-11 2022-04-11 中空パッケージ

Publications (3)

Publication Number Publication Date
JP7231118B1 JP7231118B1 (ja) 2023-03-01
JPWO2023199375A1 true JPWO2023199375A1 (https=) 2023-10-19
JPWO2023199375A5 JPWO2023199375A5 (https=) 2024-03-21

Family

ID=85380665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022547771A Active JP7231118B1 (ja) 2022-04-11 2022-04-11 中空パッケージ

Country Status (4)

Country Link
US (1) US12550755B2 (https=)
JP (1) JP7231118B1 (https=)
CN (1) CN118900818A (https=)
WO (1) WO2023199375A1 (https=)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3878897B2 (ja) 2002-08-30 2007-02-07 京セラ株式会社 半導体素子収納用パッケージおよび半導体装置
JP2006173557A (ja) * 2004-11-22 2006-06-29 Toshiba Corp 中空型半導体装置とその製造方法
JP2008192700A (ja) * 2007-02-01 2008-08-21 Alps Electric Co Ltd 電子部品
JP2008218811A (ja) 2007-03-06 2008-09-18 Hitachi Metals Ltd 機能素子パッケージ
JP2010161271A (ja) * 2009-01-09 2010-07-22 Panasonic Corp 半導体パッケージ
TWI429570B (zh) * 2012-03-23 2014-03-11 Gudeng Prec Ind Co Ltd 具有扣合結構之光罩盒
NO2944700T3 (https=) * 2013-07-11 2018-03-17
JP2015170685A (ja) 2014-03-06 2015-09-28 三菱電機株式会社 基板装置
US10314171B1 (en) * 2017-12-29 2019-06-04 Intel Corporation Package assembly with hermetic cavity
JP2019153849A (ja) * 2018-02-28 2019-09-12 セイコーエプソン株式会社 発振器、電子機器および移動体
JP7056853B2 (ja) * 2018-03-15 2022-04-19 日清紡マイクロデバイス株式会社 Mems素子の実装構造
WO2020069089A1 (en) * 2018-09-26 2020-04-02 Ignite, Inc. A mems package
TWI687760B (zh) * 2019-04-16 2020-03-11 家登精密工業股份有限公司 具有擾流結構的光罩盒
CN110155934A (zh) * 2019-04-22 2019-08-23 武汉衍熙微器件有限公司 一种mems器件及其制作方法
JP7074147B2 (ja) * 2020-01-15 2022-05-24 セイコーエプソン株式会社 電子デバイス、電子機器、および移動体

Also Published As

Publication number Publication date
US12550755B2 (en) 2026-02-10
JP7231118B1 (ja) 2023-03-01
US20250046746A1 (en) 2025-02-06
CN118900818A (zh) 2024-11-05
WO2023199375A1 (ja) 2023-10-19

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