JPWO2023145839A5 - - Google Patents

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Publication number
JPWO2023145839A5
JPWO2023145839A5 JP2023576991A JP2023576991A JPWO2023145839A5 JP WO2023145839 A5 JPWO2023145839 A5 JP WO2023145839A5 JP 2023576991 A JP2023576991 A JP 2023576991A JP 2023576991 A JP2023576991 A JP 2023576991A JP WO2023145839 A5 JPWO2023145839 A5 JP WO2023145839A5
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JP
Japan
Prior art keywords
conductive layer
substrate according
flat portion
end surface
protruding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023576991A
Other languages
English (en)
Japanese (ja)
Other versions
JP7844511B2 (ja
JPWO2023145839A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/002509 external-priority patent/WO2023145839A1/ja
Publication of JPWO2023145839A1 publication Critical patent/JPWO2023145839A1/ja
Publication of JPWO2023145839A5 publication Critical patent/JPWO2023145839A5/ja
Application granted granted Critical
Publication of JP7844511B2 publication Critical patent/JP7844511B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023576991A 2022-01-28 2023-01-26 吸着基板 Active JP7844511B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022012408 2022-01-28
JP2022012408 2022-01-28
PCT/JP2023/002509 WO2023145839A1 (ja) 2022-01-28 2023-01-26 吸着基板

Publications (3)

Publication Number Publication Date
JPWO2023145839A1 JPWO2023145839A1 (https=) 2023-08-03
JPWO2023145839A5 true JPWO2023145839A5 (https=) 2024-10-04
JP7844511B2 JP7844511B2 (ja) 2026-04-13

Family

ID=87471566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023576991A Active JP7844511B2 (ja) 2022-01-28 2023-01-26 吸着基板

Country Status (2)

Country Link
JP (1) JP7844511B2 (https=)
WO (1) WO2023145839A1 (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4184829B2 (ja) * 2003-02-25 2008-11-19 京セラ株式会社 静電チャックの製造方法
JP5348439B2 (ja) * 2011-09-30 2013-11-20 Ｔｏｔｏ株式会社 静電チャック

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