JPWO2023145839A1 - - Google Patents
Info
- Publication number
- JPWO2023145839A1 JPWO2023145839A1 JP2023576991A JP2023576991A JPWO2023145839A1 JP WO2023145839 A1 JPWO2023145839 A1 JP WO2023145839A1 JP 2023576991 A JP2023576991 A JP 2023576991A JP 2023576991 A JP2023576991 A JP 2023576991A JP WO2023145839 A1 JPWO2023145839 A1 JP WO2023145839A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022012408 | 2022-01-28 | ||
| JP2022012408 | 2022-01-28 | ||
| PCT/JP2023/002509 WO2023145839A1 (ja) | 2022-01-28 | 2023-01-26 | 吸着基板 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023145839A1 true JPWO2023145839A1 (https=) | 2023-08-03 |
| JPWO2023145839A5 JPWO2023145839A5 (https=) | 2024-10-04 |
| JP7844511B2 JP7844511B2 (ja) | 2026-04-13 |
Family
ID=87471566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023576991A Active JP7844511B2 (ja) | 2022-01-28 | 2023-01-26 | 吸着基板 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7844511B2 (https=) |
| WO (1) | WO2023145839A1 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004259805A (ja) * | 2003-02-25 | 2004-09-16 | Kyocera Corp | 静電チャック |
| JP2013084938A (ja) * | 2011-09-30 | 2013-05-09 | Toto Ltd | 静電チャック |
-
2023
- 2023-01-26 WO PCT/JP2023/002509 patent/WO2023145839A1/ja not_active Ceased
- 2023-01-26 JP JP2023576991A patent/JP7844511B2/ja active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004259805A (ja) * | 2003-02-25 | 2004-09-16 | Kyocera Corp | 静電チャック |
| JP2013084938A (ja) * | 2011-09-30 | 2013-05-09 | Toto Ltd | 静電チャック |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7844511B2 (ja) | 2026-04-13 |
| WO2023145839A1 (ja) | 2023-08-03 |
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