JPWO2023126741A5 - - Google Patents

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Publication number
JPWO2023126741A5
JPWO2023126741A5 JP2023570483A JP2023570483A JPWO2023126741A5 JP WO2023126741 A5 JPWO2023126741 A5 JP WO2023126741A5 JP 2023570483 A JP2023570483 A JP 2023570483A JP 2023570483 A JP2023570483 A JP 2023570483A JP WO2023126741 A5 JPWO2023126741 A5 JP WO2023126741A5
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JP
Japan
Prior art keywords
insulator
conductor
opening
oxide
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023570483A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023126741A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/IB2022/062263 external-priority patent/WO2023126741A1/ja
Publication of JPWO2023126741A1 publication Critical patent/JPWO2023126741A1/ja
Publication of JPWO2023126741A5 publication Critical patent/JPWO2023126741A5/ja
Pending legal-status Critical Current

Links

JP2023570483A 2021-12-29 2022-12-15 Pending JPWO2023126741A1 (https=)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021215429 2021-12-29
JP2021215431 2021-12-29
PCT/IB2022/062263 WO2023126741A1 (ja) 2021-12-29 2022-12-15 半導体装置、記憶装置、及び半導体装置の作製方法

Publications (2)

Publication Number Publication Date
JPWO2023126741A1 JPWO2023126741A1 (https=) 2023-07-06
JPWO2023126741A5 true JPWO2023126741A5 (https=) 2025-11-12

Family

ID=86998283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023570483A Pending JPWO2023126741A1 (https=) 2021-12-29 2022-12-15

Country Status (5)

Country Link
US (1) US20250056786A1 (https=)
JP (1) JPWO2023126741A1 (https=)
KR (1) KR20240129192A (https=)
TW (1) TW202335184A (https=)
WO (1) WO2023126741A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250098187A1 (en) * 2023-09-18 2025-03-20 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor memory cell structure including a hydrogen absorption layer
WO2025078928A1 (ja) * 2023-10-13 2025-04-17 株式会社半導体エネルギー研究所 半導体装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101870119B1 (ko) 2009-12-25 2018-06-25 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN107947763B (zh) 2010-08-06 2021-12-28 株式会社半导体能源研究所 半导体集成电路
JP6607681B2 (ja) * 2014-03-07 2019-11-20 株式会社半導体エネルギー研究所 半導体装置
JP2019047020A (ja) * 2017-09-05 2019-03-22 株式会社半導体エネルギー研究所 半導体装置、および半導体装置の作製方法
CN117912516A (zh) * 2017-09-06 2024-04-19 株式会社半导体能源研究所 半导体装置
WO2019197946A1 (ja) * 2018-04-12 2019-10-17 株式会社半導体エネルギー研究所 半導体装置、および半導体装置の作製方法
US11997846B2 (en) * 2018-07-06 2024-05-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device

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