JPWO2023032656A5 - - Google Patents

Info

Publication number

JPWO2023032656A5

JPWO2023032656A5 JP2023545419A JP2023545419A JPWO2023032656A5 JP WO2023032656 A5 JPWO2023032656 A5 JP WO2023032656A5 JP 2023545419 A JP2023545419 A JP 2023545419A JP 2023545419 A JP2023545419 A JP 2023545419A JP WO2023032656 A5 JPWO2023032656 A5 JP WO2023032656A5

Authority

JP

Japan

Prior art keywords

compound

pattern

photosensitive composition

photosensitive

photosensitive layer

Prior art date

2022-08-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 150000001875 compounds Chemical class 0.000 claims 24
• 229940126062 Compound A Drugs 0.000 claims 13
• NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 claims 13
• 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims 10
• 239000000758 substrate Substances 0.000 claims 10
• 238000010521 absorption reaction Methods 0.000 claims 4
• 239000011248 coating agent Substances 0.000 claims 4
• 238000000576 coating method Methods 0.000 claims 4
• 238000000034 method Methods 0.000 claims 4
• 238000007747 plating Methods 0.000 claims 4
• 230000015572 biosynthetic process Effects 0.000 claims 3
• 229920000642 polymer Polymers 0.000 claims 3
• LVTJOONKWUXEFR-FZRMHRINSA-N protoneodioscin Natural products O(C[C@@H](CC[C@]1(O)[C@H](C)[C@@H]2[C@]3(C)[C@H]([C@H]4[C@@H]([C@]5(C)C(=CC4)C[C@@H](O[C@@H]4[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@@H](O)[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@H](CO)O4)CC5)CC3)C[C@@H]2O1)C)[C@H]1[C@H](O)[C@H](O)[C@H](O)[C@@H](CO)O1 LVTJOONKWUXEFR-FZRMHRINSA-N 0.000 claims 3
• CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims 2
• 238000001035 drying Methods 0.000 claims 2
• 238000005530 etching Methods 0.000 claims 2
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 2
• 229910052753 mercury Inorganic materials 0.000 claims 2
• -1 polycyclic aromatic ring compound Chemical group 0.000 claims 2
• 230000001681 protective effect Effects 0.000 claims 2
• 230000007261 regionalization Effects 0.000 claims 2
• 239000007787 solid Substances 0.000 claims 2
• 125000001424 substituent group Chemical group 0.000 claims 2
• SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims 1
• NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
• CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims 1
• 125000000641 acridinyl group Chemical group C1(=CC=CC2=NC3=CC=CC=C3C=C12)* 0.000 claims 1
• 150000001491 aromatic compounds Chemical group 0.000 claims 1
• 230000001186 cumulative effect Effects 0.000 claims 1
• 239000007788 liquid Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 claims 1
• 230000005855 radiation Effects 0.000 claims 1
• 229910000029 sodium carbonate Inorganic materials 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1