JPWO2022215442A5 - - Google Patents
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- Publication number
- JPWO2022215442A5 JPWO2022215442A5 JP2023512884A JP2023512884A JPWO2022215442A5 JP WO2022215442 A5 JPWO2022215442 A5 JP WO2022215442A5 JP 2023512884 A JP2023512884 A JP 2023512884A JP 2023512884 A JP2023512884 A JP 2023512884A JP WO2022215442 A5 JPWO2022215442 A5 JP WO2022215442A5
- Authority
- JP
- Japan
- Prior art keywords
- peripheral
- imaging device
- transistor
- substrate
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 58
- 239000000758 substrate Substances 0.000 claims 39
- 238000003384 imaging method Methods 0.000 claims 26
- 230000003321 amplification Effects 0.000 claims 16
- 238000003199 nucleic acid amplification method Methods 0.000 claims 16
- 239000012535 impurity Substances 0.000 claims 10
- 238000009792 diffusion process Methods 0.000 claims 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 5
- 229910052799 carbon Inorganic materials 0.000 claims 5
- 238000006243 chemical reaction Methods 0.000 claims 3
- 230000007547 defect Effects 0.000 claims 3
- 238000005204 segregation Methods 0.000 claims 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000001052 transient effect Effects 0.000 claims 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009825 accumulation Methods 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021064237 | 2021-04-05 | ||
| PCT/JP2022/011257 WO2022215442A1 (ja) | 2021-04-05 | 2022-03-14 | 撮像装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022215442A1 JPWO2022215442A1 (https=) | 2022-10-13 |
| JPWO2022215442A5 true JPWO2022215442A5 (https=) | 2024-01-17 |
Family
ID=83546344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023512884A Pending JPWO2022215442A1 (https=) | 2021-04-05 | 2022-03-14 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20230422535A1 (https=) |
| JP (1) | JPWO2022215442A1 (https=) |
| CN (1) | CN117043952A (https=) |
| WO (1) | WO2022215442A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025047329A1 (ja) * | 2023-08-31 | 2025-03-06 | パナソニックＩｐマネジメント株式会社 | 撮像装置 |
| WO2025197635A1 (ja) * | 2024-03-22 | 2025-09-25 | パナソニックＩｐマネジメント株式会社 | 撮像装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006237462A (ja) * | 2005-02-28 | 2006-09-07 | Matsushita Electric Ind Co Ltd | 固体撮像装置 |
| JP5235486B2 (ja) * | 2008-05-07 | 2013-07-10 | パナソニック株式会社 | 半導体装置 |
| US8115154B2 (en) * | 2008-08-01 | 2012-02-14 | Sony Corporation | Solid-state imaging device, method of producing the same, and imaging device |
| JP6650719B2 (ja) * | 2015-09-30 | 2020-02-19 | キヤノン株式会社 | 撮像装置、撮像システムおよび半導体装置の製造方法 |
| DE112017001519T5 (de) * | 2016-03-24 | 2018-12-06 | Sony Corporation | Bildaufnahmevorrichtung und elektronische Einrichtung |
| JP2019024075A (ja) * | 2017-07-24 | 2019-02-14 | パナソニックＩｐマネジメント株式会社 | 撮像装置 |
-
2022
- 2022-03-14 WO PCT/JP2022/011257 patent/WO2022215442A1/ja not_active Ceased
- 2022-03-14 CN CN202280022197.1A patent/CN117043952A/zh active Pending
- 2022-03-14 JP JP2023512884A patent/JPWO2022215442A1/ja active Pending
-
2023
- 2023-09-08 US US18/463,332 patent/US20230422535A1/en active Pending
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