JPWO2022202098A5 - - Google Patents
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- Publication number
- JPWO2022202098A5 JPWO2022202098A5 JP2023508841A JP2023508841A JPWO2022202098A5 JP WO2022202098 A5 JPWO2022202098 A5 JP WO2022202098A5 JP 2023508841 A JP2023508841 A JP 2023508841A JP 2023508841 A JP2023508841 A JP 2023508841A JP WO2022202098 A5 JPWO2022202098 A5 JP WO2022202098A5
- Authority
- JP
- Japan
- Prior art keywords
- bond
- photosensitive resin
- formula
- resin composition
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 claims 13
- 239000010408 film Substances 0.000 claims 9
- 125000000962 organic group Chemical group 0.000 claims 8
- 125000004432 carbon atom Chemical group C* 0.000 claims 7
- 239000011347 resin Substances 0.000 claims 6
- 229920005989 resin Polymers 0.000 claims 6
- 125000003118 aryl group Chemical group 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- 239000004202 carbamide Substances 0.000 claims 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 4
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 3
- 229920005575 poly(amic acid) Polymers 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000004642 Polyimide Substances 0.000 claims 2
- -1 aromatic diamine compound Chemical class 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229920001721 polyimide Polymers 0.000 claims 2
- 125000000217 alkyl group Chemical group 0.000 claims 1
- 125000002947 alkylene group Chemical group 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000013039 cover film Substances 0.000 claims 1
- 238000004132 cross linking Methods 0.000 claims 1
- 125000005843 halogen group Chemical group 0.000 claims 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- 239000003505 polymerization initiator Substances 0.000 claims 1
- 239000000047 product Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 125000005156 substituted alkylene group Chemical group 0.000 claims 1
- 125000005649 substituted arylene group Chemical group 0.000 claims 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021046929 | 2021-03-22 | ||
| PCT/JP2022/007899 WO2022202098A1 (ja) | 2021-03-22 | 2022-02-25 | 感光性樹脂組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022202098A1 JPWO2022202098A1 (enrdf_load_stackoverflow) | 2022-09-29 |
| JPWO2022202098A5 true JPWO2022202098A5 (enrdf_load_stackoverflow) | 2024-11-08 |
Family
ID=83395591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023508841A Pending JPWO2022202098A1 (enrdf_load_stackoverflow) | 2021-03-22 | 2022-02-25 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2022202098A1 (enrdf_load_stackoverflow) |
| KR (1) | KR20230160249A (enrdf_load_stackoverflow) |
| CN (1) | CN116982003A (enrdf_load_stackoverflow) |
| TW (1) | TW202244131A (enrdf_load_stackoverflow) |
| WO (1) | WO2022202098A1 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI804086B (zh) * | 2021-03-26 | 2023-06-01 | 財團法人工業技術研究院 | 聚醯亞胺、薄膜組合物及其所形成之薄膜 |
| CN115626989B (zh) * | 2022-10-28 | 2023-06-13 | 嘉兴瑞华泰薄膜技术有限公司 | 光敏聚酰亚胺、光敏聚酰亚胺薄膜及其制备方法和应用 |
| WO2024185652A1 (ja) * | 2023-03-08 | 2024-09-12 | 富士フイルム株式会社 | 樹脂組成物、硬化物、積層体、硬化物の製造方法、積層体の製造方法、半導体デバイスの製造方法、及び、半導体デバイス |
| WO2025142645A1 (ja) * | 2023-12-26 | 2025-07-03 | 住友ベークライト株式会社 | 感光性樹脂組成物、硬化物および半導体装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01113748A (ja) * | 1987-10-27 | 1989-05-02 | Hitachi Chem Co Ltd | 感光性樹脂組成物 |
| JPH01118514A (ja) * | 1987-11-02 | 1989-05-11 | Hitachi Chem Co Ltd | 感光性樹脂組成物 |
| US6303742B1 (en) * | 1998-04-01 | 2001-10-16 | Kanekafuchi Kagaku Kogyo Kabushiki Kaisha | Polyimide compositions |
| JP2000347404A (ja) | 1999-06-02 | 2000-12-15 | Hitachi Chemical Dupont Microsystems Ltd | 感光性重合体組成物並びにこれを用いた電子部品及びその製造法 |
| TWI853124B (zh) * | 2019-11-27 | 2024-08-21 | 日商富士軟片股份有限公司 | 硬化性樹脂組成物、硬化膜、積層體、硬化膜的製造方法及半導體器件 |
-
2022
- 2022-02-25 CN CN202280019418.XA patent/CN116982003A/zh active Pending
- 2022-02-25 WO PCT/JP2022/007899 patent/WO2022202098A1/ja active Application Filing
- 2022-02-25 KR KR1020237030944A patent/KR20230160249A/ko active Pending
- 2022-02-25 JP JP2023508841A patent/JPWO2022202098A1/ja active Pending
- 2022-03-04 TW TW111107866A patent/TW202244131A/zh unknown
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