JPWO2022163214A5 - - Google Patents

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Publication number
JPWO2022163214A5
JPWO2022163214A5 JP2022578150A JP2022578150A JPWO2022163214A5 JP WO2022163214 A5 JPWO2022163214 A5 JP WO2022163214A5 JP 2022578150 A JP2022578150 A JP 2022578150A JP 2022578150 A JP2022578150 A JP 2022578150A JP WO2022163214 A5 JPWO2022163214 A5 JP WO2022163214A5
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JP
Japan
Prior art keywords
temperature
heating element
power
control signal
control device
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JP2022578150A
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English (en)
Japanese (ja)
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JP7494946B2 (ja
JPWO2022163214A1 (https=
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Priority claimed from PCT/JP2021/047141 external-priority patent/WO2022163214A1/ja
Publication of JPWO2022163214A1 publication Critical patent/JPWO2022163214A1/ja
Publication of JPWO2022163214A5 publication Critical patent/JPWO2022163214A5/ja
Application granted granted Critical
Publication of JP7494946B2 publication Critical patent/JP7494946B2/ja
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JP2022578150A 2021-01-29 2021-12-20 ヒータ制御装置 Active JP7494946B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021012977 2021-01-29
JP2021012977 2021-01-29
PCT/JP2021/047141 WO2022163214A1 (ja) 2021-01-29 2021-12-20 ヒータ制御装置

Publications (3)

Publication Number Publication Date
JPWO2022163214A1 JPWO2022163214A1 (https=) 2022-08-04
JPWO2022163214A5 true JPWO2022163214A5 (https=) 2023-09-21
JP7494946B2 JP7494946B2 (ja) 2024-06-04

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ID=82654454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022578150A Active JP7494946B2 (ja) 2021-01-29 2021-12-20 ヒータ制御装置

Country Status (3)

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JP (1) JP7494946B2 (https=)
KR (1) KR102900018B1 (https=)
WO (1) WO2022163214A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102844318B1 (ko) * 2023-12-19 2025-08-08 주식회사 에스지에스코리아 멀티 존 히터의 제어 장치 및 제어 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000235886A (ja) * 1998-12-14 2000-08-29 Tokyo Electron Ltd 加熱手段の温度制御装置および温度制御方法
JP5141155B2 (ja) * 2007-09-21 2013-02-13 東京エレクトロン株式会社 成膜装置
WO2012165174A1 (ja) 2011-06-01 2012-12-06 シャープ株式会社 抵抗加熱ヒータの劣化検出装置および方法
JP2012253222A (ja) * 2011-06-03 2012-12-20 Hitachi Kokusai Electric Inc 抵抗加熱式ヒータの寿命予測方法及び熱処理装置
US10509425B2 (en) * 2017-01-20 2019-12-17 Lam Research Corporation Virtual metrology method for ESC temperature estimation using thermal control elements
US10633742B2 (en) * 2018-05-07 2020-04-28 Lam Research Foundation Use of voltage and current measurements to control dual zone ceramic pedestals

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