JPWO2022137769A5 - - Google Patents
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- Publication number
- JPWO2022137769A5 JPWO2022137769A5 JP2022513236A JP2022513236A JPWO2022137769A5 JP WO2022137769 A5 JPWO2022137769 A5 JP WO2022137769A5 JP 2022513236 A JP2022513236 A JP 2022513236A JP 2022513236 A JP2022513236 A JP 2022513236A JP WO2022137769 A5 JPWO2022137769 A5 JP WO2022137769A5
- Authority
- JP
- Japan
- Prior art keywords
- heating device
- plate
- heating
- recesses
- heaters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 43
- 125000006850 spacer group Chemical group 0.000 claims 6
- 239000000919 ceramic Substances 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022079098A JP7799553B2 (ja) | 2020-12-25 | 2022-05-12 | 加熱装置 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020218024 | 2020-12-25 | ||
| JP2020218024 | 2020-12-25 | ||
| JP2021126008 | 2021-07-30 | ||
| JP2021126008 | 2021-07-30 | ||
| PCT/JP2021/039094 WO2022137769A1 (ja) | 2020-12-25 | 2021-10-22 | 加熱装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022079098A Division JP7799553B2 (ja) | 2020-12-25 | 2022-05-12 | 加熱装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7074946B1 JP7074946B1 (ja) | 2022-05-24 |
| JPWO2022137769A1 JPWO2022137769A1 (https=) | 2022-06-30 |
| JPWO2022137769A5 true JPWO2022137769A5 (https=) | 2022-12-05 |
Family
ID=81731730
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022513236A Active JP7074946B1 (ja) | 2020-12-25 | 2021-10-22 | 加熱装置 |
| JP2022079098A Active JP7799553B2 (ja) | 2020-12-25 | 2022-05-12 | 加熱装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022079098A Active JP7799553B2 (ja) | 2020-12-25 | 2022-05-12 | 加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP7074946B1 (https=) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0646076Y2 (ja) * | 1989-10-12 | 1994-11-24 | 坂口電熱株式会社 | 加熱ヒータ |
| JPH088556Y2 (ja) * | 1991-09-18 | 1996-03-06 | 株式会社八光電機製作所 | カートリッジヒータ群 |
| JP2001332525A (ja) | 2000-05-25 | 2001-11-30 | Sumitomo Osaka Cement Co Ltd | セラミックスヒータ |
| EP1463097A1 (en) | 2000-06-02 | 2004-09-29 | Ibiden Co., Ltd. | Hot plate unit |
| JP2005166368A (ja) | 2003-12-01 | 2005-06-23 | Ngk Insulators Ltd | 加熱装置 |
| JP5562086B2 (ja) | 2010-03-25 | 2014-07-30 | 京セラ株式会社 | 加熱用部材およびこれを用いた加熱装置 |
| JP5541068B2 (ja) | 2010-10-14 | 2014-07-09 | 豊田合成株式会社 | Ｃｖｄ装置用加熱ユニット、加熱ユニットを備えたｃｖｄ装置及び半導体素子の製造方法 |
| JP6555922B2 (ja) * | 2015-04-28 | 2019-08-07 | 日本特殊陶業株式会社 | 加熱装置 |
| JP7149786B2 (ja) | 2018-09-20 | 2022-10-07 | 東京エレクトロン株式会社 | 載置ユニット及び処理装置 |
| CN210381340U (zh) * | 2019-06-28 | 2020-04-21 | 郑州祥泰电子科技有限公司 | 一种模具用陶瓷加热片 |
-
2021
- 2021-10-22 JP JP2022513236A patent/JP7074946B1/ja active Active
-
2022
- 2022-05-12 JP JP2022079098A patent/JP7799553B2/ja active Active
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