JP2022106994A5 - - Google Patents

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Publication number
JP2022106994A5
JP2022106994A5 JP2022079098A JP2022079098A JP2022106994A5 JP 2022106994 A5 JP2022106994 A5 JP 2022106994A5 JP 2022079098 A JP2022079098 A JP 2022079098A JP 2022079098 A JP2022079098 A JP 2022079098A JP 2022106994 A5 JP2022106994 A5 JP 2022106994A5
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JP
Japan
Prior art keywords
plate
heating device
heating
recesses
heaters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022079098A
Other languages
English (en)
Japanese (ja)
Other versions
JP7799553B2 (ja
JP2022106994A (ja
Filing date
Publication date
Priority claimed from JP2022513236A external-priority patent/JP7074946B1/ja
Priority claimed from PCT/JP2021/039094 external-priority patent/WO2022137769A1/ja
Application filed filed Critical
Publication of JP2022106994A publication Critical patent/JP2022106994A/ja
Publication of JP2022106994A5 publication Critical patent/JP2022106994A5/ja
Application granted granted Critical
Publication of JP7799553B2 publication Critical patent/JP7799553B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022079098A 2020-12-25 2022-05-12 加熱装置 Active JP7799553B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2020218024 2020-12-25
JP2020218024 2020-12-25
JP2021126008 2021-07-30
JP2021126008 2021-07-30
JP2022513236A JP7074946B1 (ja) 2020-12-25 2021-10-22 加熱装置
PCT/JP2021/039094 WO2022137769A1 (ja) 2020-12-25 2021-10-22 加熱装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2022513236A Division JP7074946B1 (ja) 2020-12-25 2021-10-22 加熱装置

Publications (3)

Publication Number Publication Date
JP2022106994A JP2022106994A (ja) 2022-07-20
JP2022106994A5 true JP2022106994A5 (https=) 2024-10-21
JP7799553B2 JP7799553B2 (ja) 2026-01-15

Family

ID=81731730

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022513236A Active JP7074946B1 (ja) 2020-12-25 2021-10-22 加熱装置
JP2022079098A Active JP7799553B2 (ja) 2020-12-25 2022-05-12 加熱装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022513236A Active JP7074946B1 (ja) 2020-12-25 2021-10-22 加熱装置

Country Status (1)

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JP (2) JP7074946B1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0646076Y2 (ja) * 1989-10-12 1994-11-24 坂口電熱株式会社 加熱ヒータ
JPH088556Y2 (ja) * 1991-09-18 1996-03-06 株式会社八光電機製作所 カートリッジヒータ群
JP2001332525A (ja) 2000-05-25 2001-11-30 Sumitomo Osaka Cement Co Ltd セラミックスヒータ
EP1463097A1 (en) 2000-06-02 2004-09-29 Ibiden Co., Ltd. Hot plate unit
JP2005166368A (ja) 2003-12-01 2005-06-23 Ngk Insulators Ltd 加熱装置
JP5562086B2 (ja) 2010-03-25 2014-07-30 京セラ株式会社 加熱用部材およびこれを用いた加熱装置
JP5541068B2 (ja) 2010-10-14 2014-07-09 豊田合成株式会社 Ｃｖｄ装置用加熱ユニット、加熱ユニットを備えたｃｖｄ装置及び半導体素子の製造方法
JP6555922B2 (ja) * 2015-04-28 2019-08-07 日本特殊陶業株式会社 加熱装置
JP7149786B2 (ja) 2018-09-20 2022-10-07 東京エレクトロン株式会社 載置ユニット及び処理装置
CN210381340U (zh) * 2019-06-28 2020-04-21 郑州祥泰电子科技有限公司 一种模具用陶瓷加热片

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